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1. 发明授权

US09240339B2 Substrate holder, substrate holder unit, substrate transport apparatus, and substrate bonding apparatus 有权
公开(公告)号：US09240339B2
公开(公告)日：2016-01-19
申请号：US14050697
申请日：2013-10-10
申请人： Hidehiro Maeda , Masahiro Yoshihashi
发明人： Hidehiro Maeda , Masahiro Yoshihashi
IPC分类号： H01L21/683 , H01L21/687 , H01L21/677
CPC分类号： H01L21/6831 , H01L21/67742 , H01L21/67766 , H01L21/68771
摘要： A substrate holder is reliably transported in a state of holding a substrate. There is provided a substrate holder for holding a substrate by means of electrostatic force generated by power supplied from an external source. The substrate holder is to be transported in a state of holding the substrate. The substrate holder includes a holder body that is to have the substrate placed thereon, and a connector terminal that is externally exposed through the holder body, where the connector terminal is attachable to and detachable from an external power supply terminal. There is also provided a substrate transport apparatus for transporting a substrate holder holding a substrate by means of electrostatic force generated by power supplied from an external source. The substrate transport apparatus includes a placement section that has a placement surface on which the substrate holder is placed, where the placement section holds the substrate holder, and a power supply terminal that supplies power to the substrate holder placed on the placement surface.

2. 发明申请

US20120330459A1 Transport Method and Transport Apparatus 有权
标题翻译：运输方式和运输设备
公开(公告)号：US20120330459A1
公开(公告)日：2012-12-27
申请号：US13548287
申请日：2012-07-13
申请人： Hidehiro MAEDA , Kazuya OKAMOTO , Yasuaki TANAKA
发明人： Hidehiro MAEDA , Kazuya OKAMOTO , Yasuaki TANAKA
IPC分类号： G06F7/00
CPC分类号： H01L21/677 , H01L21/67092 , H01L21/67259 , H01L21/68 , H01L24/34 , H01L2924/00014 , Y10T156/10 , H01L2224/37099 , H01L2224/84
摘要： Provided is a transport method comprising judging whether there is a possibility that misalignment greater than or equal to a threshold value occurs between substrates to be layered that are held by a pair of substrate holders aligned and stacked by an aligning section, the misalignment occurring when the pair of substrate holders is transported from the aligning section to a pressure applying section; and if the judgment indicates that there is the possibility of misalignment, transporting the pair of substrate holders to a region other than the pressure applying section. Whether there is the possibility of misalignment may be judged based on at least one of an acceleration of the substrate holders, an acceleration of a transporting section that transports the substrate holders, relative positions of the substrate holders, or relative positions of the transporting section and one of the pair of substrate holders.
摘要翻译：提供了一种传送方法，包括判断是否存在由被对准部对准和堆叠的一对基板保持器保持的要分层的基板之间的大于或等于阈值的偏移的可能性，一对基板支架从对准部分输送到压力施加部分; 并且如果判断表示存在不对准的可能性，则将一对基板保持器传送到除压力施加部以外的区域。是否存在未对准的可能性可以基于基板保持器的加速度，输送基板保持器的输送部分的加速度，基板保持器的相对位置或输送部分的相对位置和一对基板支架之一。

3. 发明申请

US20120214290A1 SUBSTRATE HOLDER, PAIR OF SUBSTRATE HOLDERS, SUBSTRATE BONDING APPARATUS AND METHOD FOR MANUFACTURING DEVICES 审中-公开
标题翻译：基板支架，基板支架对，基板接合装置及制造装置的方法
公开(公告)号：US20120214290A1
公开(公告)日：2012-08-23
申请号：US13355247
申请日：2012-01-20
申请人： Isao Sugaya , Junichi Chonan , Hidehiro Maeda , Keiichi Tanaka , Tomoyuki Yasuda
发明人： Isao Sugaya , Junichi Chonan , Hidehiro Maeda , Keiichi Tanaka , Tomoyuki Yasuda
IPC分类号： H01L21/02 , H01L21/683
CPC分类号： H01L21/67092
摘要： Provided is a substrate holder pair comprising a first substrate holder that has a first holding portion holding a first substrate; a second substrate holder that has a second holding portion holding a second substrate to be bonded with the first substrate and that, together with the first substrate holder, sandwiches the first substrate and the second substrate; an engaging member that causes the first substrate holder to engage with the second substrate holder; and a dust inhibiting section inhibits dust generated by the engaging of the engaging member from entering between the first holding portion and the second holding portion.
摘要翻译：提供了一种衬底保持器对，其包括具有保持第一衬底的第一保持部分的第一衬底保持器; 第二基板保持器，具有保持与第一基板接合的第二基板的第二保持部，并且与第一基板保持件一起夹着第一基板和第二基板; 接合构件，其使所述第一基板保持件与所述第二基板保持器接合; 并且防尘部防止由接合构件的接合而产生的灰尘进入第一保持部和第二保持部之间。

4. 发明申请

US20120205024A1 SUBSTRATE HOLDER SYSTEM, SUBSTRATE HOLDER, FASTENING MECHANISM, SUBSTRATE BONDING APPARATUS AND METHOD FOR MANUFACTURING DEVICES 有权
标题翻译：基板支架系统，基板支架，紧固机构，基板接合装置及其制造方法
公开(公告)号：US20120205024A1
公开(公告)日：2012-08-16
申请号：US13354570
申请日：2012-01-20
申请人： Isao SUGAYA , Junichi CHONAN , Hidehiro MAEDA
发明人： Isao SUGAYA , Junichi CHONAN , Hidehiro MAEDA
IPC分类号： B29C65/78
CPC分类号： H01L21/67092 , H01L21/187 , H01L21/6831 , H01L21/6833 , Y10T156/10 , Y10T156/1744
摘要： Provided is a substrate holder system comprising a first substrate holder that holds a first substrate; an engaging member provided on the first substrate holder; a second substrate holder that holds a second substrate and can, together with the first substrate holder, sandwich the first substrate and the second substrate; an engagement receiving member that is provided on the second substrate holder and engages with the engaging member; and a dust restricting means for restricting generation of dust caused by the engagement of the engaging member and the engagement receiving member.
摘要翻译：提供了一种衬底保持器系统，其包括保持第一衬底的第一衬底保持器; 设置在所述第一基板保持器上的接合构件; 第二基板保持器，其保持第二基板，并且可以与第一基板保持器一起夹着第一基板和第二基板; 接合接收构件，其设置在所述第二基板保持器上并与所述接合构件接合; 以及用于限制由接合构件和接合接收构件的接合引起的灰尘产生的灰尘限制装置。

5. 发明授权

US08244399B2 Transport method and transport apparatus 有权
标题翻译：运输方式和运输设备
公开(公告)号：US08244399B2
公开(公告)日：2012-08-14
申请号：US12644615
申请日：2009-12-22
申请人： Hidehiro Maeda , Kazuya Okamoto , Yasuaki Tanaka
发明人： Hidehiro Maeda , Kazuya Okamoto , Yasuaki Tanaka
IPC分类号： G06F7/00 , G06F19/00 , H01L21/68 , H01L23/544 , B29C65/00 , G01B11/00
CPC分类号： H01L21/677 , H01L21/67092 , H01L21/67259 , H01L21/68 , H01L24/34 , H01L2924/00014 , Y10T156/10 , H01L2224/37099 , H01L2224/84
摘要： Provided is a transport method comprising judging whether there is a possibility that misalignment greater than or equal to a threshold value occurs between substrates to be layered that are held by a pair of substrate holders aligned and stacked by an aligning section, the misalignment occurring when the pair of substrate holders is transported from the aligning section to a pressure applying section; and if the judgment indicates that there is the possibility of misalignment, transporting the pair of substrate holders to a region other than the pressure applying section. Whether there is the possibility of misalignment may be judged based on acceleration of the substrate holders. Whether there is the possibility of misalignment may be judged based on acceleration of a transporting section that transports the substrate holders. Whether there is the possibility of misalignment may be judged based on relative positions of the substrate holders. Whether there is the possibility of misalignment may be judged based on relative positions of (i) a transporting section that transports the pair of substrate holders and (ii) one of the pair of substrate holders.
摘要翻译：提供了一种传送方法，包括判断是否存在由被对准部对准和堆叠的一对基板保持器保持的要分层的基板之间的大于或等于阈值的偏移的可能性，一对基板支架从对准部分输送到压力施加部分; 并且如果判断表示存在不对准的可能性，则将一对基板保持器传送到除压力施加部以外的区域。可以基于基板保持器的加速度判断是否存在未对准的可能性。可以基于输送基板保持器的输送部的加速度判断是否存在未对准的可能性。可以基于基板保持器的相对位置来判断是否存在未对准的可能性。可以基于（i）输送一对基板保持器的输送部和（ii）一对基板保持件中的一个的相对位置来判断是否存在未对准的可能性。

6. 发明申请

US20100168908A1 TRANSPORT METHOD AND TRANSPORT APPARATUS 有权
标题翻译：运输方式和运输工具
公开(公告)号：US20100168908A1
公开(公告)日：2010-07-01
申请号：US12644615
申请日：2009-12-22
申请人： Hidehiro MAEDA , Kazuya Okamoto , Yasuaki Tanaka
发明人： Hidehiro MAEDA , Kazuya Okamoto , Yasuaki Tanaka
IPC分类号： H01L21/677 , G06F7/00
CPC分类号： H01L21/677 , H01L21/67092 , H01L21/67259 , H01L21/68 , H01L24/34 , H01L2924/00014 , Y10T156/10 , H01L2224/37099 , H01L2224/84
摘要： Provided is a transport method comprising judging whether there is a possibility that misalignment greater than or equal to a threshold value occurs between substrates to be layered that are held by a pair of substrate holders aligned and stacked by an aligning section, the misalignment occurring when the pair of substrate holders is transported from the aligning section to a pressure applying section; and if the judgment indicates that there is the possibility of misalignment, transporting the pair of substrate holders to a region other than the pressure applying section. Whether there is the possibility of misalignment may be judged based on acceleration of the substrate holders. Whether there is the possibility of misalignment may be judged based on acceleration of a transporting section that transports the substrate holders. Whether there is the possibility of misalignment may be judged based on relative positions of the substrate holders. Whether there is the possibility of misalignment may be judged based on relative positions of (i) a transporting section that transports the pair of substrate holders and (ii) one of the pair of substrate holders.
摘要翻译：提供了一种传送方法，包括判断是否存在由被对准部对准和堆叠的一对基板保持器保持的要分层的基板之间的大于或等于阈值的偏移的可能性，一对基板支架从对准部分输送到压力施加部分; 并且如果判断表示存在不对准的可能性，则将一对基板保持器传送到除压力施加部以外的区域。可以基于基板保持器的加速度判断是否存在未对准的可能性。可以基于输送基板保持器的输送部的加速度判断是否存在未对准的可能性。可以基于基板保持器的相对位置来判断是否存在未对准的可能性。可以基于（i）输送一对基板保持器的输送部和（ii）一对基板保持件中的一个的相对位置来判断是否存在未对准的可能性。

7. 发明授权

US09015930B2 Substrate bonding apparatus 有权
标题翻译：基板接合装置
公开(公告)号：US09015930B2
公开(公告)日：2015-04-28
申请号：US12769218
申请日：2010-04-28
申请人： Hidehiro Maeda , Satoshi Katagiri
发明人： Hidehiro Maeda , Satoshi Katagiri
IPC分类号： B23P19/00 , H01L21/30 , H01L21/67
CPC分类号： H01L21/30 , B32B7/12 , B32B37/10 , B32B38/1833 , H01L21/2007 , H01L21/67092 , H01L21/683 , H01L21/6831 , H01L2924/00 , H01L2924/0002 , H05K3/0061 , H05K3/0067 , H05K3/321 , H05K3/325 , H05K3/386 , H05K3/4611 , H05K3/4638 , H05K13/0015 , Y10T29/49126 , Y10T29/4913 , Y10T29/5313 , Y10T29/53196 , Y10T156/10
摘要： Provided is a substrate holding unit that holds a pair of substrates that are aligned and layered, comprising a first holding member that holds one of the substrates; a plurality of members to be joined that are connected to the first holding member; a second holding member that holds the other of the substrates to face the one of the substrates; a plurality of joining members that exert an adhesion force on the members to be joined and are connected to the second holding member at positions corresponding to positions of the members to be joined; and an adhesion restricting section that restricts the adhesion force until the substrates are aligned.
摘要翻译：提供一种基板保持单元，其保持对准且分层的一对基板，包括保持基板之一的第一保持构件; 多个待接合的构件，其连接到第一保持构件; 第二保持构件，其保持另一个基板面对所述一个所述基板; 多个连接构件，其对要接合的构件施加粘合力，并且在对应于待接合构件的位置的位置处连接到第二保持构件; 以及限制直到基板对准的粘合力的粘合限制部。

8. 发明申请

US20140036403A1 SUBSTRATE HOLDER, SUBSTRATE HOLDER UNIT, SUBSTRATE TRANSPORT APPARATUS, AND SUBSTRATE BONDING APPARATUS 审中-公开
标题翻译：基板支架，基板支架单元，基板运输装置和基板接合装置
公开(公告)号：US20140036403A1
公开(公告)日：2014-02-06
申请号：US14050697
申请日：2013-10-10
申请人： Masahiro Yoshihashi , Hidehiro Maeda
发明人： Hidehiro Maeda , Masahiro Yoshihashi
IPC分类号： H01L21/683
CPC分类号： H01L21/6831 , H01L21/67742 , H01L21/67766 , H01L21/68771
摘要： A substrate holder is reliably transported in a state of holding a substrate. There is provided a substrate holder for holding a substrate by means of electrostatic force generated by power supplied from an external source. The substrate holder is to be transported in a state of holding the substrate. The substrate holder includes a holder body that is to have the substrate placed thereon, and a connector terminal that is externally exposed through the holder body, where the connector terminal is attachable to and detachable from an external power supply terminal. There is also provided a substrate transport apparatus for transporting a substrate holder holding a substrate by means of electrostatic force generated by power supplied from an external source. The substrate transport apparatus includes a placement section that has a placement surface on which the substrate holder is placed, where the placement section holds the substrate holder, and a power supply terminal that supplies power to the substrate holder placed on the placement surface.
摘要翻译：在保持基板的状态下，可靠地输送基板保持架。提供了一种用于通过由外部源提供的电力产生的静电力来保持基板的基板保持器。在保持基板的状态下输送基板支架。衬底保持器包括：具有放置在其上的衬底的保持器主体和通过保持器主体外部暴露的连接器端子，其中连接器端子可附接到外部电源端子并可从其拆卸。还提供了一种用于通过由从外部源供给的电力产生的静电力来运送保持基板的基板保持架的基板输送装置。基板输送装置包括：放置部，其具有放置基板保持件的放置面，放置部保持基板保持件;电源端子，其向放置面放置的基板保持器供电。

9. 发明授权

US09054140B2 Substrate holder system, substrate holder, fastening mechanism, substrate bonding apparatus and method for manufacturing devices 有权
标题翻译：基板固定器系统，基板支架，紧固机构，基板接合装置及其制造方法
公开(公告)号：US09054140B2
公开(公告)日：2015-06-09
申请号：US13354570
申请日：2012-01-20
申请人： Isao Sugaya , Junichi Chonan , Hidehiro Maeda
发明人： Isao Sugaya , Junichi Chonan , Hidehiro Maeda
IPC分类号： B29C65/78 , H01L21/67 , H01L21/18 , H01L21/683
CPC分类号： H01L21/67092 , H01L21/187 , H01L21/6831 , H01L21/6833 , Y10T156/10 , Y10T156/1744
摘要： Provided is a substrate holder system comprising a first substrate holder that holds a first substrate; an engaging member provided on the first substrate holder; a second substrate holder that holds a second substrate and can, together with the first substrate holder, sandwich the first substrate and the second substrate; an engagement receiving member that is provided on the second substrate holder and engages with the engaging member; and a dust restricting means for restricting generation of dust caused by the engagement of the engaging member and the engagement receiving member.
摘要翻译：提供了一种衬底保持器系统，其包括保持第一衬底的第一衬底保持器; 设置在所述第一基板保持器上的接合构件; 第二基板保持器，其保持第二基板，并且可以与第一基板保持器一起夹着第一基板和第二基板; 接合接收构件，其设置在所述第二基板保持器上并与所述接合构件接合; 以及用于限制由接合构件和接合接收构件的接合引起的灰尘产生的灰尘限制装置。

10. 发明申请

US20130157438A1 SUBSTRATE HOLDING UNIT, SUBSTRATE BONDING APPARATUS, MULTI-LAYERED SUBSTRATE MANUFACTURING APPARATUS, SUBSTRATE BONDING METHOD, MULTI-LAYER SUBSTRATE MANUFACTURING METHOD, AND MULTI-LAYERED SEMICONDUCTOR APPARATUS MANUFACTURING METHOD 审中-公开
标题翻译：基板保持单元，基板接合装置，多层基板制造装置，基板接合方法，多层基板制造方法和多层半导体装置制造方法
公开(公告)号：US20130157438A1
公开(公告)日：2013-06-20
申请号：US13761348
申请日：2013-02-07
申请人： Hidehiro MAEDA , Satoshi Katagiri
发明人： Hidehiro MAEDA , Satoshi Katagiri
IPC分类号： H01L21/30
摘要： Provided is a substrate holding unit that holds a pair of substrates that are aligned and layered, comprising a first holding member that holds one of the substrates; a plurality of members to be joined that are connected to the first holding member; a second holding member that holds the other of the substrates to face the one of the substrates; a plurality of joining members that exert an adhesion force on the members to be joined and are connected to the second holding member at positions corresponding to positions of the members to be joined; and an adhesion restricting section that restricts the adhesion force until the substrates are aligned.
摘要翻译：提供一种基板保持单元，其保持对准且分层的一对基板，包括保持基板之一的第一保持构件; 多个待接合的构件，其连接到第一保持构件; 第二保持构件，其保持另一个基板面对所述一个所述基板; 多个连接构件，其对要接合的构件施加粘合力，并且在对应于待接合构件的位置的位置处连接到第二保持构件; 以及限制直到基板对准的粘合力的粘合限制部。

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