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    • 2. 发明申请
    • Method and apparatus for ceramizing the starting glass of glass-ceramics
    • 陶瓷起始玻璃陶瓷的方法和设备
    • US20050103056A1
    • 2005-05-19
    • US10935380
    • 2004-11-26
    • Ulrich FotheringhamHauke EsemannBernd HoppeRudiger SprengardMichael KlugeFalk Gabel
    • Ulrich FotheringhamHauke EsemannBernd HoppeRudiger SprengardMichael KlugeFalk Gabel
    • C03B29/02C03B32/02C03C10/12C03C10/00
    • C03C10/00C03B29/025C03B32/02
    • The invention relates to a method for ceramizing starting glass of glass-ceramics into glass-ceramics, comprising at least the following steps: 1.1 the starting glass is heated from an initial temperature T1 to a temperature T2 which is disposed above the glass transformation temperature TG at which crystallization nuclei are precipitated; 1.2 the glass is held at the temperature T2 for a period t2 for the precipitation of crystallization nuclei; 1.3 the glass is further heated to a temperature T3 at which a crystal phase grows on the nuclei formed following step 1.1 and 1.2; 1.4 the glass is held for period t3 at a temperature T3 or heated during this period to a higher temperature T4 until the predetermined properties of the glass-ceramics have been reached; 1.5 the control of the temperature curve is performed with the help of a control loop comprising at least one temperature sensor for sensing the temperature and a heating unit as an actuator. The invention is characterized in that 1.6 the heating unit comprises IR radiators for heating the glass to be relaxed with a thermal dead time of less than 10 secs., especially
    • 本发明涉及将玻璃陶瓷的起始玻璃陶瓷化成玻璃陶瓷的方法,该方法至少包括以下步骤:1.1将起始玻璃从初始温度T 1加热至温度T < 其设置在结晶细胞核沉淀的玻璃化转变温度T N G以上; 1.2玻璃在温度T 2℃下保持晶体沉淀的时间t2℃; 1.3玻璃被进一步加热到晶相在步骤1.1和1.2之后形成的核上生长的温度T 3 3; 1.4玻璃在温度T 3 3保持期间t 3 3或在此期间加热到较高温度T 4,直到预定的性质 的玻璃陶瓷已经达到; 借助于包括用于感测温度的至少一个温度传感器和作为致动器的加热单元的控制回路来执行温度曲线的控制。 本发明的特征在于,加热单元包括用于加热玻璃以放热的红外辐射器,其热死时间小于10秒,特别是<5秒。
    • 4. 发明申请
    • Liquid And Method For Liquid Immersionlithography
    • 液体和液体浸没法的方法
    • US20080145794A1
    • 2008-06-19
    • US12035152
    • 2008-02-21
    • Martin LetzKonrad KnappHauke EsemannAndreas Voitsch
    • Martin LetzKonrad KnappHauke EsemannAndreas Voitsch
    • G03F7/26G03F7/20
    • G03F7/2041G03F7/70341G03F7/70566
    • The present invention relates to a new class of compound useful as liquid for immersion lithography, said liquid comprising molecules so that said liquid is substantially transparent at a wavelength used for said liquid immersion lithography, wherein a degree of polarization of light, which is incident on a sample of said liquid in a forward direction and which is scattered in a direction perpendicular to said forward direction within a plane of scattering defined by said forward direction and said direction perpendicular to said forward direction, is larger than 0.9. Suited liquids are, for example, such comprising molecules transparent to UV radiation, wherein said molecules are high-symmetric molecules. Suited compounds are defined by A(R)4 wherein A is defined to be a 4-valent element and R is selected from —(C)n— and —(Si)n—, with n=1 to 10, wherein the remaining valences of the carbon or silica are saturated by one (or more) selected from hydrogen and a halogen.The invention farther relates to a method for exposing a photoresist layer on a semiconductor substrate for producing microelectronic circuits or micro-electromechanical systems (MEMS). The method uses a step of liquid immersion lithography using a liquid according to the invention.
    • 本发明涉及可用作浸没式光刻液体的新类化合物,所述液体包含分子,使得所述液体在用于所述液浸光刻的波长处基本上是透明的,其中入射到 所述液体在向前方向上的样品在垂直于所述正向方向的垂直方向和垂直于所述正向的方向的散射面内沿垂直于所述正向的方向散射,大于0.9。 合适的液体例如是包含对UV辐射透明的分子,其中所述分子是高对称分子。 适用的化合物由<?in-line-formula description =“In-line Formulas”end =“lead”?> A(R)<4> <?in-line-formula description =“In 其中A定义为4价元素,并且R选自 - (C)n - 和 - (Si)n < 其中n = 1至10,其中碳或二氧化硅的剩余价数由选自氢和卤素的一个(或多个)饱和。 本发明还涉及用于在用于制造微电子电路或微机电系统(MEMS)的半导体衬底上曝光光致抗蚀剂层的方法。 该方法使用根据本发明的液体的液浸光刻步骤。
    • 8. 发明授权
    • Insulating glass element
    • 绝缘玻璃元件
    • US08104237B2
    • 2012-01-31
    • US12454710
    • 2009-05-21
    • Hauke EsemannWolfgang SchmidbauerTorsten GabelmannClaudia Stolz
    • Hauke EsemannWolfgang SchmidbauerTorsten GabelmannClaudia Stolz
    • F23M7/00
    • F24B1/192F24C15/04
    • An insulating glass element for the at least partial delimitation of a combustion chamber, having at least two viewing panes, which have at least some areas a transparent glass or ceramic-glass material and are arranged spaced apart from each other while leaving an air chamber, and wherein a viewing area is created at least in parts of the air chamber. The two viewing panes are connected with each other by a temperature-resistant adhesive, and the adhesive encloses a viewing area of the viewing panes all around, or a spacing element, which runs around them at least partially, is connected with the two viewing panes in a material-to-material manner, preferably by a glued connection.
    • 一种绝缘玻璃元件,用于至少部分界定燃烧室,具有至少两个观察窗,所述至少两个观察窗玻璃至少有一些区域为透明玻璃或陶瓷玻璃材料,并且在离开空气室时彼此隔开布置, 并且其中至少在所述空气室的一部分中产生观察区域。 两个观察窗通过耐温粘合剂彼此连接,并且粘合剂围绕着观察窗四周的观察区域或者至少部分地围绕它们延伸的间隔元件与两个观察窗板连接 以材料到材料的方式,优选地通过胶合连接。