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1. 发明授权

US07354692B2 Photoresists for visible light imaging 有权
标题翻译：用于可见光成像的光致抗蚀剂
公开(公告)号：US07354692B2
公开(公告)日：2008-04-08
申请号：US11125971
申请日：2005-05-09
申请人： Gregory Breyta , Daniel Joseph Dawson , Carl E. Larson , Gregory Michael Wallraff
发明人： Gregory Breyta , Daniel Joseph Dawson , Carl E. Larson , Gregory Michael Wallraff
IPC分类号： G03F7/031 , G03F7/038 , G03F7/039
CPC分类号： G03F7/0392 , G03F7/001 , G03F7/031 , G03F7/2004 , Y10S430/115 , Y10S430/127
摘要： A class of lithographic photoresist combinations is disclosed which is suitable for use with visible light and does not require a post-exposure bake step. The disclosed photoresists are preferably chemical amplification photoresists and contain a photosensitizer having the structure of formula (I): where Ar1 and Ar2 are independently selected from monocyclic aryl and monocyclic heteroaryl, R1 and R2 may be the same or different, and have the structure —X—R3 where X is O or S and R3 is C1-C6 hydrocarbyl or heteroatom-containing C1-C6 hydrocarbyl, and R4 and R5 are independently selected from the group consisting of hydrogen and —X—R3, or, if ortho to each other, may be taken together to form a five- or six-membered aromatic ring, with the proviso that any heteroatom contained within Ar1, Ar2, or R3 is O or S. The use of the disclosed photoresists, particularly for the manufacture of holographic diffraction gratings, is also disclosed.
摘要翻译：公开了一类光刻抗蚀剂组合物，其适用于可见光并且不需要曝光后烘烤步骤。所公开的光致抗蚀剂优选是化学放大光致抗蚀剂，并含有具有式（I）结构的光敏剂：其中Ar 1和Ar 2独立地选自单环芳基和单环杂芳基 R 1和R 2可以相同或不同，并且具有结构-XR 3，其中X是O或S，R“ SUP> 3是C 1 -C 6烃基或含杂原子的C 1 -C 6 N >烃基，R 4和R 5独立地选自氢和-XR 3 O 3，或者如果各自的邻位另一个可以一起形成五元或六元芳环，条件是含有Ar 1，Ar 2或R 0的任何杂原子 > 3 是O或S.还公开了所公开的光致抗蚀剂的使用，特别是用于制造全息衍射光栅。

2. 发明授权

US07288362B2 Immersion topcoat materials with improved performance 有权
标题翻译：浸渍面漆材料具有改进的性能
公开(公告)号：US07288362B2
公开(公告)日：2007-10-30
申请号：US11063940
申请日：2005-02-23
申请人： Robert David Allen , Phillip Joe Brock , Dario Gil , William Dinan Hinsberg , Carl Eric Larson , Linda Karin Sundberg , Gregory Michael Wallraff
发明人： Robert David Allen , Phillip Joe Brock , Dario Gil , William Dinan Hinsberg , Carl Eric Larson , Linda Karin Sundberg , Gregory Michael Wallraff
IPC分类号： G03C1/73 , G03C1/825 , G03F7/20 , G03F7/30 , G03F7/36
CPC分类号： G03F7/11 , G03F7/0046 , G03F7/2041 , Y10S430/108 , Y10S430/111
摘要： A topcoat material for applying on top of a photoresist material is disclosed. The topcoat material comprises at least one solvent and a polymer which has a dissolution rate of at least 3000 Å/second in aqueous alkaline developer. The polymer contains a hexafluoroalcohol monomer unit comprising one of the following two structures: wherein n is an integer. The topcoat material may be used in lithography processes, wherein the topcoat material is applied on a photoresist layer. The topcoat material is preferably insoluble in water, and is therefore particularly useful in immersion lithography techniques using water as the imaging medium.
摘要翻译：公开了一种用于施加在光致抗蚀剂材料上的面漆材料。面漆材料包含至少一种溶剂和在含水碱性显影剂中具有至少3000 /秒的溶解速率的聚合物。聚合物含有包含以下两种结构之一的六氟醇单体单元：其中n是整数。面漆材料可以用于光刻工艺中，其中将顶涂层材料施加在光致抗蚀剂层上。面漆材料优选不溶于水，因此特别适用于使用水作为成像介质的浸渍光刻技术。

3. 发明授权

US06180317B2 Composition for photoimaging 失效
标题翻译：光成像用组合物
公开(公告)号：US06180317B2
公开(公告)日：2001-01-30
申请号：US07793889
申请日：1991-11-18
申请人： Robert David Allen , Richard Allen Day , Donald Herman Glatzel , William Dinan Hinsberg , John Richard Mertz , David John Russell , Gregory Michael Wallraff
发明人： Robert David Allen , Richard Allen Day , Donald Herman Glatzel , William Dinan Hinsberg , John Richard Mertz , David John Russell , Gregory Michael Wallraff
IPC分类号： G03C1725
CPC分类号： G03F7/038
摘要： An improved photoimagable cationically polymerizable epoxy based coating material is provided, that is suitable for use on a variety of substrates including epoxy-glass laminate boards cured with dicyandiamide. The material includes an epoxy resin system consisting essentially of between about 10% and about 80% by weight of a polyol resin which is a condensation product of epichlorohydrin and bisphenol A having a molecular weight of between about 40,000 and 130,000; and between about 35% and 72% by weight of an epoxidized glycidyl ether of a brominated bisphenol A having a softening point of between about 60° C. and about 110° C. and a molecular weight of between about 600 and 2,500. Optionally, a third resin may be added to the resin system. To this resin system is added about 0.1 to about 15 parts by weight per 100 parts of resin of a cationic photoinitiator capable of initiating polymerization of said epoxidized resin system upon exposure to actinic radiation; the system being further characterized by having an absorbance of light in the 330 to 700 nm region of less than 0.1 for a 2.0 mil thick film. Optionally a photosensitizer such as perylene and its derivatives or anthracene and its derivatives may be added.
摘要翻译：提供了一种改进的可光成像的可阳离子聚合的环氧基涂料，适用于各种基材，包括用双氰胺固化的环氧玻璃层压板。该材料包括基本上由约10重量％至约80重量％的多元醇树脂组成的环氧树脂体系，多元醇树脂是分子量为约40,000至130,000的表氯醇和双酚A的缩合产物; 和约35重量％至72重量％的软化点在约60℃至约110℃之间且分子量为约600至2,500之间的溴化双酚A的环氧化缩水甘油醚。任选地，可以向树脂体系中加入第三树脂。向该树脂体系中添加约0.1〜约15重量份/ 100份阳离子光引发剂的树脂，其能够在暴露于光化辐射下引发所述环氧化树脂体系的聚合; 该系统的特征还在于，对于2.0密耳厚的膜，在330至700nm区域中的光的吸光度小于0.1。任选地，可加入光敏剂如苝及其衍生物或蒽及其衍生物。

4. 发明授权

US5786131A Process for use of photoresist composition with deep ultraviolet radiation 失效
标题翻译：使用具有深紫外线辐射的光刻胶组合物的方法
公开(公告)号：US5786131A
公开(公告)日：1998-07-28
申请号：US678868
申请日：1996-07-12
申请人： Robert David Allen , Richard Anthony DiPietro , Gregory Michael Wallraff
发明人： Robert David Allen , Richard Anthony DiPietro , Gregory Michael Wallraff
IPC分类号： G03F7/039 , G03F7/004 , H01L21/027 , G03C5/00 , G03C1/492
CPC分类号： G03F7/0045 , Y10S430/111
摘要： The present invention relates to a process for generating a resist image on a substrate utilizing a resist composition comprising (a) a radiation-sensitive acid generator, (b) a substituted androstane, and (c) a copolymer acrylate binder. The resist image is made using deep ultraviolet radiation.
摘要翻译：本发明涉及一种使用抗蚀剂组合物在基材上生成抗蚀剂图像的方法，该抗蚀剂组合物包含（a）辐射敏感酸产生剂，（b）取代的雄甾烷和（c）共聚物丙烯酸酯粘合剂。抗蚀剂图像是使用深紫外线辐射制成的。

5. 发明授权

US5747223A Composition for photoimaging 失效
标题翻译：光成像用组合物
公开(公告)号：US5747223A
公开(公告)日：1998-05-05
申请号：US677230
申请日：1996-07-09
申请人： Robert D. Allen , Richard Allen Day , Donald Herman Glatzel , William Dinan Hinsberg , John Richard Mertz , David John Russell , Gregory Michael Wallraff
发明人： Robert D. Allen , Richard Allen Day , Donald Herman Glatzel , William Dinan Hinsberg , John Richard Mertz , David John Russell , Gregory Michael Wallraff
IPC分类号： G03C5/00 , G03F7/038 , H05K3/28
CPC分类号： G03F7/038 , H05K3/287
摘要： An improved photoimagable cationically polymerizable epoxy based coating material is provided, that is suitable for use on a variety of substrates including epoxy-glass laminate boards cured with dicyandiamide. The material includes an epoxy resin system consisting essentially of between about 10% and about 80% by weight of a polyol resin which is a condensation product of epichlorohydrin and bisphenol A having a molecular weight of between about 40,000 and 130,000; and between about 35% and 72% by weight of an epoxidized glycidyl ether of a brominated bisphenol A having a softening point of between about 60.degree. C. and about 110.degree. C. and a molecular weight of between about 600 and 2,500. Optionally, a third resin may be added to the resin system. To this resin system is added about 0.1 to about 15 parts by weight per 100 parts of resin of a cationic photoinitiator capable of initiating polymerization of said epoxidized resin system upon exposure to actinic radiation; the system being further characterized by having an absorbance of light in the 330 to 700 nm region of less than 0.1 for a 2.0 mil thick film. Optionally a photosensitizer such as perylene and its derivatives or anthracene and its derivatives may be added.
摘要翻译：提供了一种改进的可光成像的可阳离子聚合的环氧基涂料，适用于各种基材，包括用双氰胺固化的环氧玻璃层压板。该材料包括基本上由约10重量％至约80重量％的多元醇树脂组成的环氧树脂体系，多元醇树脂是分子量为约40,000至130,000的表氯醇和双酚A的缩合产物; 和约35重量％至72重量％的软化点为约60℃至约110℃，分子量为约600至2,500的溴化双酚A的环氧化缩水甘油醚。任选地，可以向树脂体系中加入第三树脂。向该树脂体系中添加约0.1〜约15重量份/ 100份阳离子光引发剂的树脂，其能够在暴露于光化辐射下引发所述环氧化树脂体系的聚合; 该系统的特征还在于，对于2.0密耳厚的膜，在330至700nm区域中的光的吸光度小于0.1。任选地，可加入光敏剂如苝及其衍生物或蒽及其衍生物。

6. 发明申请

US20130224652A1 METAL PEROXO COMPOUNDS WITH ORGANIC CO-LIGANDS FOR ELECTRON BEAM, DEEP UV AND EXTREME UV PHOTORESIST APPLICATIONS 有权
标题翻译：具有电子束有机配体的金属过氧化合物，深紫外线和超紫外线光刻胶应用
公开(公告)号：US20130224652A1
公开(公告)日：2013-08-29
申请号：US13405587
申请日：2012-02-27
申请人： John David Bass , Ho-Cheol Kim , Robert Dennis Miller , Qing Song , Linda Karin Sundberg , Gregory Michael Wallraff
发明人： John David Bass , Ho-Cheol Kim , Robert Dennis Miller , Qing Song , Linda Karin Sundberg , Gregory Michael Wallraff
IPC分类号： G03F7/20 , C07F9/00 , C07F7/28 , G03F7/004
CPC分类号： G03F7/0042
摘要： Compositions are disclosed having the formula (3): [C′]k[Ta(O2)x(L′)y] (3), wherein x is an integer of 1 to 4, y is an integer of 1 to 4, Ta(O2)x(L′)y has a charge of 0 to −3, C′ is a counterion having a charge of +1 to +3, k is an integer of 0 to 3, L′ is an oxidatively stable organic ligand having a charge of 0 to −4, and L′ comprises an electron donating functional group selected from the group consisting of carboxylates, alkoxides, amines, amine oxides, phosphines, phosphine oxides, arsine oxides, and combinations thereof. The compositions have utility as high resolution photoresists.
摘要翻译：公开了具有式（3）的组合物：[C'] k [Ta（O 2）x（L'）y]（3）其中x是1至4的整数，y是1至4的整数， Ta（O 2）x（L'）y具有0至-3的电荷，C'是具有+1至+3的电荷的抗衡离子，k是0至3的整数，L'是氧化稳定的有机物具有0至-4电荷的配体，L'包括选自羧酸盐，醇盐，胺，氧化胺，膦，氧化膦，胂氧化物及其组合的给电子官能团。该组合物具有作为高分辨率光致抗蚀剂的作用。

7. 发明申请

US20110104900A1 Alkaline Rinse Agents For Use In Lithographic Patterning 有权
标题翻译：用于平版印刷图案的碱性漂洗剂
公开(公告)号：US20110104900A1
公开(公告)日：2011-05-05
申请号：US12611043
申请日：2009-11-02
申请人： William D. Hinsberg , Gregory Michael Wallraff
发明人： William D. Hinsberg , Gregory Michael Wallraff
IPC分类号： H01L21/311
CPC分类号： H01L21/31144 , H01L21/28123 , H01L29/517
摘要： Lithographic patterning methods involve the formation of a (one or more) metal oxide capping layer, which is rinsed with an aqueous alkaline solution as part of the method. The rinse solution does not damage the capping layer, but rather allows for lithographic processing without thinning the capping layer or introducing defects into it. Ammoniated water is a preferred rinse solution, which advantageously leaves behind no nonvolatile residue.
摘要翻译：平版印刷图案方法包括形成（一种或多种）金属氧化物覆盖层，其作为该方法的一部分用碱性水溶液冲洗。冲洗溶液不会损坏盖层，而是允许光刻处理，而不会使封盖层变薄或引入缺陷。氨水是优选的漂洗溶液，其有利地不留下非挥发性残余物。

8. 发明授权

US07585609B2 Bilayer film including an underlayer having vertical acid transport properties 失效
标题翻译：双层膜包括具有垂直酸运输性质的底层
公开(公告)号：US07585609B2
公开(公告)日：2009-09-08
申请号：US11492276
申请日：2006-07-25
申请人： Carl Eric Larson , Gregory Michael Wallraff
发明人： Carl Eric Larson , Gregory Michael Wallraff
IPC分类号： G03F7/11 , G03F7/09 , G03F7/095
CPC分类号： G03F7/095 , G03F7/0382 , G03F7/0392 , G03F7/094
摘要： The present invention provides methods for forming images in positive- or negative-tone chemically amplified photoresists. The methods of the present invention rely on the vertical up-diffusion of photoacid generated by patternwise imaging of an underlayer disposed on a substrate and overcoated with a polymer containing acid labile functionality. In accordance with the present invention, the vertical up-diffusion can be the sole mechanism for imaging formation or the methods of the present invention can be used in conjunction with conventional imaging processes.
摘要翻译：本发明提供了在正或负色调化学放大的光致抗蚀剂中形成图像的方法。本发明的方法依赖于通过对设置在基底上的底层的图案成像产生的光酸的垂直向上扩散，并且用含有酸不稳定性功能的聚合物涂覆。根据本发明，垂直向上扩散可以是用于成像成像的唯一机构，或者本发明的方法可以与传统的成像过程结合使用。

9. 发明授权

US06730452B2 Lithographic photoresist composition and process for its use 有权
标题翻译：平版光刻胶组合物及其使用方法
公开(公告)号：US06730452B2
公开(公告)日：2004-05-04
申请号：US09771261
申请日：2001-01-26
申请人： Phillip Joe Brock , Daniel Joseph Dawson , Hiroshi Ito , Gregory Michael Wallraff
发明人： Phillip Joe Brock , Daniel Joseph Dawson , Hiroshi Ito , Gregory Michael Wallraff
IPC分类号： G03F7039
CPC分类号： G03F7/0392 , G03F7/0046 , G03F7/0382 , G03F7/0397 , Y10S430/108
摘要： A lithographic photoresist composition is provided that can be used as a chemical amplification photoresist. In a preferred embodiment, the composition is substantially transparent to deep ultraviolet radiation, i.e., radiation of a wavelength less than 250 nm, including 157 nm, 193 nm and 248 nm radiation, and has improved sensitivity and resolution. The composition comprises a fluorinated vinylic polymer, particularly a fluorinated methacrylate, a fluorinated methacrylonitrile, or a fluorinated methacrylic acid, and a photoacid generator. The polymer may be a homopolymer or a copolymer. A process for using the composition to generate resist images on a substrate is also provided, i.e., in the manufacture of integrated circuits or the like.
摘要翻译：提供可用作化学扩增光致抗蚀剂的平版光刻胶组合物。在优选的实施方案中，组合物对深紫外辐射即波长小于250nm（包括157nm，193nm和248nm辐射）的辐射基本上是透明的，并具有改进的灵敏度和分辨率。组合物包含氟化乙烯基聚合物，特别是氟化甲基丙烯酸酯，氟化甲基丙烯腈或氟化甲基丙烯酸，以及光酸产生剂。聚合物可以是均聚物或共聚物。还提供了使用该组合物在衬底上产生抗蚀剂图像的方法，即在集成电路等的制造中。

10. 发明授权

US5866306A Process for use of photosensitive polysilanes as photoresist 失效
标题翻译：使用感光性聚硅烷作为光致抗蚀剂的方法
公开(公告)号：US5866306A
公开(公告)日：1999-02-02
申请号：US78808
申请日：1993-06-17
申请人： Robert Dennis Miller , Gregory Michael Wallraff , Mark Edwin Baier
发明人： Robert Dennis Miller , Gregory Michael Wallraff , Mark Edwin Baier
IPC分类号： G03F7/039 , C08G77/60 , G03F7/075 , H01L21/027
CPC分类号： C08G77/60 , G03F7/0754
摘要： The present invention relates to the use of certain polyalkylphenyl silanes in photoresists to generate positive tone resist images. The polyalkylphenyl silanes have the formula: ##STR1## where R is C2-C12 alkyl and n is about 150 to 7000.
摘要翻译：本发明涉及在光致抗蚀剂中使用某些聚烷基苯基硅烷来生成正性抗蚀剂图像。聚烷基苯基硅烷具有下式：其中R为C 2 -C 12烷基，n为约150至7000。

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