专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

US20120251272A1 APPARATUS FOR MOVING AND SECURING A SUBSTRATE 失效
标题翻译：移动和安全基板的装置
公开(公告)号：US20120251272A1
公开(公告)日：2012-10-04
申请号：US13180295
申请日：2011-07-11
申请人： Scott Snodgrass , Gregory M. Gibson
发明人： Scott Snodgrass , Gregory M. Gibson
IPC分类号： B65G49/00
CPC分类号： H01L21/6838 , B65G49/061 , B65G49/065 , B65G49/067 , B65G2249/02 , B65G2249/04
摘要： An apparatus for transferring and securing a substrate is shown. A pressure source is provided that is adapted to provide positive and negative pressure. A vacuum chuck is provided having a top side with a plurality of vacuum chuck portals formed therein. Each vacuum chuck portal is in fluid communication with the pressure source. The substrate is secured to the top side of the vacuum chuck when the pressure source provides negative pressure to the vacuum chuck portals. An intermediate member that selectively cooperates with the vacuum chuck to support and transfer the substrate between the vacuum chuck and the intermediate member is provided. The intermediate member has a plurality of receiving spaces and a plurality of transfer members. The receiving spaces and transfer members are adjacent to one another in an alternating pattern, and each transfer member has a top side with a plurality of transfer member portals formed therein. Each transfer member portal is in fluid communication with the pressure source. A carriage extending along at least a portion of the periphery of the vacuum chuck and along at least a portion of the periphery of the intermediate member is provided. The carriage engages at least a portion of the substrate when the pressure source provides positive pressure to the vacuum chuck portals and transfer member portals to transfer the substrate between the intermediate member and the vacuum chuck.
摘要翻译：示出了用于传送和固定基板的装置。提供了适于提供正压和负压的压力源。提供一种真空吸盘，其具有在其中形成有多个真空吸盘入口的顶侧。每个真空吸盘入口与压力源流体连通。当压力源向真空吸盘入口提供负压时，衬底被固定到真空吸盘的顶侧。提供了选择性地与真空吸盘配合以支撑和传送基板在真空吸盘和中间构件之间的中间构件。中间构件具有多个容纳空间和多个转印构件。接收空间和传送构件以交替图案彼此相邻，并且每个传送构件具有形成在其中的多个传送构件入口的顶侧。每个转移构件入口与压力源流体连通。提供沿着真空吸盘的周边的至少一部分并且沿着中间构件的周边的至少一部分延伸的托架。当压力源向真空吸盘入口和转移构件入口提供正压力以在中间构件和真空吸盘之间转移衬底时，托架接合衬底的至少一部分。

2. 发明授权

US06488041B1 System and method for clean and priming extrusion head 失效
标题翻译：清洁和起动挤压头的系统和方法
公开(公告)号：US06488041B1
公开(公告)日：2002-12-03
申请号：US09227381
申请日：1999-01-08
申请人： Gregory M. Gibson , John E. Hawes , Samer Mahmoud Kabbani , Ocie T. Snodgrass
发明人： Gregory M. Gibson , John E. Hawes , Samer Mahmoud Kabbani , Ocie T. Snodgrass
IPC分类号： B08B902
CPC分类号： B05C5/0254
摘要： The present invention relates to a system and method suitable for automatic cleaning of a coating or extrusion head of a coating apparatus. The invention includes a scrubbing station wherein a combination of physical contact and strong solvent solution combine to remove coating fluid from the exterior of an extrusion head. A second cleaning station, preferably a rinsing station then further cleans the head of coating fluid and removes solvent used at a first cleaning station. The solvent used at the rinsing station is preferably self-drying thereby obviating the need for any further cleaning action. The invention also provides for the ability to prime the coating bead at the extrusion head so as to have a fully formed bead ready before the head begins coating a substrate, thereby providing an even coating across said substrate. The priming operation preferably comprises holding the head steady over a rotating priming roller while extruding fluid preferably at a constant volumetric flow rate. The extrusion head is removed from the priming station when the coating bead is properly formed, and the extruded coating material is dissolved in a solvent bath at the priming station. The priming operation may also be performed at either of the cleaning stations.
摘要翻译：本发明涉及一种适用于自动清洁涂布装置的涂布或挤压头的系统和方法。本发明包括洗涤站，其中物理接触和强溶剂溶液的组合组合以从挤出头的外部除去涂布液。第二清洁站，优选漂洗站，然后进一步清洁涂布液的头部并除去在第一清洁站使用的溶剂。在漂洗站使用的溶剂优选是自干燥的，从而避免需要进一步的清洁作用。本发明还提供了在挤出头处填充涂布珠的能力，以便在头开始涂覆基底之前具有准备好的完全成形的珠，从而在所述基底上提供均匀的涂层。起动操作优选地包括将头部稳定地保持在旋转启动辊上，同时优选以恒定的体积流速挤出流体。当涂覆珠被适当地形成时，挤出头从灌注站移除，并且将挤出的涂覆材料溶解在起动站的溶剂浴中。启动操作也可以在任一个清洁站进行。

3. 发明授权

US06419841B1 Fluid dispensing system 有权
标题翻译：流体分配系统
公开(公告)号：US06419841B1
公开(公告)日：2002-07-16
申请号：US09891728
申请日：2001-06-25
申请人： Ocie T. Snodgrass , Michael K. Farney , Gregory M. Gibson
发明人： Ocie T. Snodgrass , Michael K. Farney , Gregory M. Gibson
IPC分类号： B02D3700
CPC分类号： F04B43/067 , B01D29/15 , B01D29/46 , B01D35/26 , F04B7/0076 , F04B9/02 , F04B9/1095 , F04B15/02 , Y10S210/90 , Y10T428/1234
摘要： A fluid dispensing system is provided which has a first diaphragm pump, a filter connected to receive the discharge of said first pump, and an accumulator/second diaphragm pump connected to receive the discharge of said filter. Hydraulic fluids pumped by cylinder/piston/stepper assemblies independently actuate each of the diaphragm pumps, providing accurate, controllable and repeatable dispense of the subject fluid. There is also structure operable to suck back fluid from downstream of the second pump.
摘要翻译：提供一种流体分配系统，其具有第一隔膜泵，连接以接收所述第一泵的排出口的过滤器，以及连接以接收所述过滤器的排放的蓄能器/第二隔膜泵。由气缸/活塞/步进组件泵送的液压流体独立地致动每个隔膜泵，从而提供目标流体的准确，可控和可重复的分配。还有可操作以从第二泵的下游吸回流体的结构。

4. 发明授权

US06319323B1 System and method for adjusting a working distance to correspond with the work surface 失效
标题翻译：用于调整与工作面对应的工作距离的系统和方法
公开(公告)号：US06319323B1
公开(公告)日：2001-11-20
申请号：US09227459
申请日：1999-01-08
申请人： Gregory M. Gibson , Altaf A. Poonawala , John E. Hawes , Darwin R. Frerking , Zi-Qin Wang
发明人： Gregory M. Gibson , Altaf A. Poonawala , John E. Hawes , Darwin R. Frerking , Zi-Qin Wang
IPC分类号： B05C1100
CPC分类号： B05C5/0216 , B05C11/02
摘要： The inventive mechanism adjusts a working distance between a tool and a work surface. The provision for automatically setting and adjusting the working distance between two parts of an apparatus, possibly a coating apparatus, permits the mechanism to adjust in real time for unknown and possibly random variations in the dimensions of the work surface, the apparatus supporting the work surface, and imperfect leveling of the tool or the work surface. In a preferred embodiment, the inventive mechanism is used to accurately set and maintain the working distance of a dispenser above a substrate so as to provide that a consistent coating thickness is applied across the substrate. The mechanism preferably employs direct precision distance sensing means independent of the motor of drive means to continuously measure the working distance in real time with a high degree of resolution and accuracy. When the sensor reports that the working distance has deviated from the ideal setting, a control system employs a standard P.I.D. control scheme to precisely restore the ideal working distance. The mechanism may perform the working distance control function using the main or host software, or, more preferably delegate this function to a dedicated processor for the duration of the process during which working distance is being precisely adjusted. The host preferably resumes control of the drive means in the direction of the working distance once the precision adjustment scheme is concluded, and may then perform larger scale motion of the tool using feedback from the position reporting means integral to the motor or drive means.
摘要翻译：本发明的机构调节工具和工作表面之间的工作距离。用于自动设定和调节设备的两个部件（可能是涂覆设备）之间的工作距离的设置允许机构实时地调整工作表面的尺寸的未知和可能的随机变化，支撑工作表面的设备，以及工具或工作台面的不均匀调平。在优选实施例中，使用本发明的机构来精确地设置和维持分配器在基板上方的工作距离，以便提供在基板上施加一致的涂层厚度。该机构优选采用独立于驱动装置的电动机的直接精密距离感测装置，以高分辨率和精确度实时地连续测量工作距离。当传感器报告工作距离偏离理想设置时，控制系统采用标准P.I.D. 控制方案精确恢复理想的工作距离。该机构可以使用主机或主机软件执行工作距离控制功能，或者更优选地，在工作距离被精确调整的过程的持续时间内将该功能委托给专用处理器。一旦精密调整方案结束，主机就优选地在工作距离方向上恢复驱动装置的控制，然后使用来自位于电动机或驱动装置的积分的位置报告装置的反馈来执行工具的大规模运动。

5. 发明申请

US20090194021A1 DISPENSER FOR A COATING APPARATUS HAVING REDUCED SAG 审中-公开
标题翻译：用于具有减少SAG的涂布装置的分配器
公开(公告)号：US20090194021A1
公开(公告)日：2009-08-06
申请号：US12024547
申请日：2008-02-01
申请人： Scott Snodgrass , Gregory M. Gibson
发明人： Scott Snodgrass , Gregory M. Gibson
IPC分类号： B05C5/00
CPC分类号： H01L21/6715
摘要： To date, it has been difficult to extrude precision films onto large substrates efficiently, thus, limiting the size of the substrate. One reason for the difficulty is natural sag or deflection in an extrusion head applying the film to the substrate. To counteract this deflection or sag, a crossbar has been designed that provides a substantially rigid platform to mount an extrusion head, which counteracts the deflection or sag, thus allowing for efficient extrusion of precision films over exceedingly large substrates.
摘要翻译：到目前为止，难以有效地将精密膜挤出到大基板上，因此限制了基板的尺寸。困难的一个原因是在将膜施加到基底上的挤出头中是自然下垂或偏转。为了抵消这种偏转或下垂，已经设计了横梁，其提供了基本上刚性的平台来安装挤压头，其抵消偏转或下垂，从而允许在超过大的基板上有效地挤出精密膜。

6. 发明授权

US07169229B2 Moving head, coating apparatus 失效
标题翻译：摇头，涂装机
公开(公告)号：US07169229B2
公开(公告)日：2007-01-30
申请号：US10364537
申请日：2003-02-11
申请人： Gregory M. Gibson , Carl W. Newquist , John E. Hawes , Rene Soliz , Samer Mahmoud Kabbani , Scott A. Snodgrass , Altaf A. Poonawala , Darwin R. Frerking , Zi-Qin Wang , Ocie T. Snodgrass , Eric E. Anderson
发明人： Gregory M. Gibson , Carl W. Newquist , John E. Hawes , Rene Soliz , Samer Mahmoud Kabbani , Scott A. Snodgrass , Altaf A. Poonawala , Darwin R. Frerking , Zi-Qin Wang , Ocie T. Snodgrass , Eric E. Anderson
IPC分类号： B05C3/02
CPC分类号： B05C13/00 , B05C5/0245 , B05C5/0254 , B05C11/1013 , B05C11/1015
摘要： The invention pertains to a coating apparatus and method in which most of the relative movement between a dispensing head and the substrate to be coated is provided by the coating head. The moving head configuration reduces the system footprint and diminishes leveling problems. A powered shuttle mechanism carries a dispensing head above a substrate to be coated while riding on a bearing located underneath the chuck holding the substrate thereby providing rigidity and reducing the system footprint. Chuck support is designed to accommodate anticipated vertical sag in the dispensing head by supporting the chuck at points along its periphery thereby permitting the chuck to sag in conjunction with the dispensing head. The shuttle mechanism is equipped with means for automatically adjusting the height of the dispensing head with respect to substrate to compensate for substrate placement error, substrate dimensional variation, and mechanical drift in the mechanical machine parts. Coating consistency is enhanced using such height adjustment. A part of the apparatus containing the fluid delivery equipment and in communication with the dispensing head may be placed on a cart and removably attached to the rest of the apparatus. There is a utility station comprising equipment for cleaning and priming the dispensing head which may be located on the removable cart. A pump in addition to main remote pumping means may be integrally mounted on the dispensing head to more precisely control fluid flow to the dispensing head. The chuck may be configured to be micro deformable so as to maintain the surface of a substrate upon it at a constant height. Fluid may be dispensed along openings of selected lengths along the length of the dispensing head using die lips attached to the dispensing head or by cutting a plurality of slots in a single dispensing head.
摘要翻译：本发明涉及一种涂布装置和方法，其中分配头与要涂覆的基底之间的大部分相对运动由涂覆头提供。移动头配置减少了系统占用空间并减少了调平问题。动力穿梭机构在被涂覆的基底上方运送分配头，同时骑在位于夹持基底的卡盘下方的轴承上，从而提供刚性并减少系统占地面积。卡盘支撑件设计成通过在其周边的点处支撑卡盘来适应分配头部中的预期垂直松弛，从而允许卡盘与分配头一起下垂。穿梭机构配备有用于自动调节分配头相对于基底的高度以补偿机械机器部件中的基板放置误差，基板尺寸变化和机械漂移的装置。使用这种高度调节可提高涂层的一致性。包含流体输送设备并与分配头连通的装置的一部分可以放置在推车上并且可移除地附接到装置的其余部分上。有一个实用工作站，包括用于清洁和启动分配头的设备，该分配头可以位于可移动的推车上。除了主远程泵送装置之外的泵可以一体地安装在分配头上，以更精确地控制流到分配头的流体。卡盘可以被配置为可微变形的，以便将基板的表面保持在恒定的高度。可以使用附接到分配头的模唇或通过在单个分配头中切割多个狭槽沿着分配头的长度沿着选定长度的开口分配流体。

7. 发明授权

US06387184B1 System and method for interchangeably interfacing wet components with a coating apparatus 失效
标题翻译：用于将湿组分与涂覆装置互换地接合的系统和方法
公开(公告)号：US06387184B1
公开(公告)日：2002-05-14
申请号：US09226983
申请日：1999-01-08
申请人： Gregory M. Gibson , Carl W. Newquist , John E. Hawes , Altaf A. Poonawala , Scott A. Snodgrass , Samer Mahmoud Kabbani
发明人： Gregory M. Gibson , Carl W. Newquist , John E. Hawes , Altaf A. Poonawala , Scott A. Snodgrass , Samer Mahmoud Kabbani
IPC分类号： B05B300
CPC分类号： B05C13/00 , B05C5/0245 , B05C5/0254 , B05C11/10 , B05C11/1013
摘要： A system and method for modularly interfacing wet components of a coating apparatus to the remainder of the coating apparatus comprising a station whereupon a substrate is located. A fluid cart houses the wet components of the apparatus which comprise a dispensing head in fluid connection to the fluid cart. The fluid cart can be connected to a station and a variety of different types of coating operations subsequently performed. The fluid can be readily disconnected from the station after the coating operation is complete, permitting a different fluid cart to be attached to the same station. The first fluid cart can then receive required servicing without idling the station to which it had been attached. Various embodiments of the means for coating the substrate and powering and controlling equipment of the coating apparatus are disclosed.
摘要翻译：一种用于将涂覆装置的湿部件与涂覆装置的其余部分模块化地接合的系统和方法，包括基板所在的台。流体车容纳设备的湿部件，其包括与流体车流体连接的分配头。流体推车可以连接到工位，随后执行各种不同类型的涂层操作。在涂装操作完成之后，流体可以容易地与工位断开，从而允许不同的流体推车连接到同一站。然后，第一流体推车可以接收所需的维修，而不空转它所附接的车站。公开了用于涂覆基板的装置和驱动和控制涂布装置的设备的各种实施例。

8. 发明授权

US06319316B1 System and method for performing low contamination extrusion for microelectronics applications 失效
标题翻译：用于微电子应用的低污染挤出的系统和方法
公开(公告)号：US06319316B1
公开(公告)日：2001-11-20
申请号：US09251646
申请日：1999-02-17
申请人： Gregory M. Gibson , Rene Soliz , C. Matthew Ramon
发明人： Gregory M. Gibson , Rene Soliz , C. Matthew Ramon
IPC分类号： B05C500
CPC分类号： H01L21/6715 , B05C5/0254 , G03F7/16 , G03F7/30
摘要： This invention relates to a system and method for performing accurate coating operations while minimizing contamination of the coating fluid arising from contact between the fluid and the extrusion head. In one embodiment, the extrusion head is composed entirely of non-metallic material, possibly ceramic, thereby minimizing any material removal by the fluid, and any ionic or chemical reaction between the extrusion head material and the fluid. In another embodiment, a shim separating metal parts of an extrusion head is composed of a non-metallic substance to prevent galvanic potential induced corrosion between the shim and the extrusion head material and the resulting release of the products of such corrosion into the coating fluid.
摘要翻译：本发明涉及一种用于执行精确涂覆操作同时最小化由流体和挤压头之间的接触引起的涂覆液体的污染的系统和方法。在一个实施例中，挤出头部完全由非金属材料构成，可能是陶瓷，从而最小化流体的任何材料去除以及挤压头材料和流体之间的任何离子或化学反应。在另一个实施例中，分离挤出头的金属部件的垫片由非金属物质组成，以防止垫片和挤出头材料之间的电偶电位引起的腐蚀，并导致这种腐蚀产物的释放到涂覆液中。

9. 发明授权

US6092937A Linear developer 失效
标题翻译：线性显影剂
公开(公告)号：US6092937A
公开(公告)日：2000-07-25
申请号：US227362
申请日：1999-01-08
申请人： Ocie T. Snodgrass , Gregory M. Gibson , Carl W. Newquist
发明人： Ocie T. Snodgrass , Gregory M. Gibson , Carl W. Newquist
IPC分类号： G03D5/04 , G03F7/30 , B65D3/00
CPC分类号： G03D5/04 , G03F7/3042 , Y10S134/902
摘要： The inventive dispenser mechanism uniformly develops a photosensitive layer on a substrate. The mechanism uses a developer head that moves in a substantially linear relative motion with respect to the substrate and dispenses a developer at a controlled rate. Contact of the developer material with the photosensitive layer commences a chemical reaction of developing. The mechanism also uses a rinse head that has the same motion as the developer head and travels at the same velocity. The rinse head dispenses a rinse material at a controlled rate. Contact of the rinse material with the developer material on the photosensitive layer retards the chemical reaction of developing. The rinse head waits for a predetermined dwell period after the developer head has dispensed the developer material before dispensing the rinse material. The mechanism may also use a suction head that has the same motion and velocity and removes loose material on a surface of the substrate.
摘要翻译：本发明的分配机构在基板上均匀地形成感光层。该机构使用显影头，其相对于基底以基本线性的相对运动移动，并以受控的速率分配显影剂。显影剂材料与感光层的接触开始发生化学反应。该机构还使用具有与显影头相同的运动并以相同速度行进的冲洗头。冲洗头以受控的速率分配冲洗材料。冲洗材料与感光层上的显影剂材料的接触阻碍了显影的化学反应。在分配冲洗材料之前，在显影剂头分配显影剂材料之后，冲洗头等待预定的停留时间。该机构还可以使用具有相同运动和速度的吸头，并去除衬底表面上的松散材料。

10. 发明授权

US5772899A Fluid dispensing system having independently operated pumps 失效
标题翻译：具有独立操作的泵的流体分配系统
公开(公告)号：US5772899A
公开(公告)日：1998-06-30
申请号：US605878
申请日：1996-02-23
申请人： Ocie T. Snodgrass , Michael K. Farney , Gregory M. Gibson
发明人： Ocie T. Snodgrass , Michael K. Farney , Gregory M. Gibson
IPC分类号： B01D29/15 , B01D35/26 , F04B7/00 , F04B9/02 , F04B9/109 , F04B15/02 , F04B43/067 , B01D24/38 , F04B23/06
CPC分类号： F04B43/067 , B01D29/15 , B01D35/26 , F04B15/02 , F04B7/0076 , F04B9/02 , F04B9/1095 , Y10S210/90 , Y10T428/1234
摘要： A fluid dispensing system is provided which has first diaphragm pump means, a filter connected to receive the discharge of said first pump, and accumulator/second diaphragm pump means connected to receive the discharge of said filter. Hydraulic fluids pumped by cylinder/piston/stepper assemblies independently actuate each of the diaphragm pumps, providing accurate, controllable and repeatable dispense of the subject fluid.
摘要翻译：提供一种流体分配系统，其具有第一隔膜泵装置，被连接以接收所述第一泵的排放物的过滤器和连接以接收所述过滤器的排放的蓄能器/第二隔膜泵装置。由气缸/活塞/步进组件泵送的液压流体独立地致动每个隔膜泵，从而提供目标流体的准确，可控和可重复的分配。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式