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    • 5. 发明授权
    • Method of fabricating nano SOI wafer and nano SOI wafer fabricated by the same
    • 制造纳米SOI晶片和纳米SOI晶片的方法
    • US07338882B2
    • 2008-03-04
    • US11084033
    • 2005-03-21
    • Jea-Gun ParkGon-Sub LeeSang-Hee Lee
    • Jea-Gun ParkGon-Sub LeeSang-Hee Lee
    • H01L21/46H01L21/302
    • H01L21/76254Y10S438/959
    • A method of fabricating a nano silicon on insulator (SOI) wafer having an excellent thickness evenness without performing a chemical mechanical polishing (CMP) and a wafer fabricated by the same are provided. The provided method includes preparing a bond wafer and a base wafer, and forming a dielectric on at least on surface of the bond wafer. Thereafter, an impurity ion implantation unit is formed by implanting impurity ions into the bond wafer to a predetermined depth from the surface of the bond wafer at a low voltage. The dielectric of the bond wafer and the base wafer contact each other in order to be bonded. Next, a thermal process of low temperature is performed to cleave the impurity ion implantation unit of the bond wafer. In addition, the cleaved surface of the bond wafer bonded to the base wafer is etched to form a nano scale device region. Here, the cleaved surface may be etched by performing a hydrogen surface process and a wet etching.
    • 提供了不进行化学机械抛光(CMP)和由其制造的晶片的制造具有优异的厚度均匀性的纳米绝缘体(SOI)晶片的方法。 所提供的方法包括制备接合晶片和基底晶片,并且在接合晶片的至少一个表面上形成电介质。 此后,通过以低电压将杂质离子注入接合晶片到接合晶片的表面至预定深度来形成杂质离子注入单元。 接合晶片和基底晶片的电介质彼此接触以便结合。 接下来,进行低温的热处理,以切割接合晶片的杂质离子注入单元。 此外,蚀刻结合到基底晶片的接合晶片的切割表面以形成纳米级器件区域。 这里,可以通过进行氢表面处理和湿蚀刻来蚀刻裂开的表面。
    • 6. 发明申请
    • Method of fabricating nano SOI wafer and nano SOI wafer fabricated by the same
    • 制造纳米SOI晶片和纳米SOI晶片的方法
    • US20050164435A1
    • 2005-07-28
    • US11084033
    • 2005-03-21
    • Jea-Gun ParkGon-Sub LeeSang-Hee Lee
    • Jea-Gun ParkGon-Sub LeeSang-Hee Lee
    • H01L21/20H01L21/02H01L21/265H01L21/762H01L27/12H01L21/00H01L21/30H01L21/46H01L21/84
    • H01L21/76254Y10S438/959
    • A method of fabricating a nano silicon on insulator (SOI) wafer having an excellent thickness evenness without performing a chemical mechanical polishing (CMP) and a wafer fabricated by the same are provided. The provided method includes preparing a bond wafer and a base wafer, and forming a dielectric on at least on surface of the bond wafer. Thereafter, an impurity ion implantation unit is formed by implanting impurity ions into the bond wafer to a predetermined depth from the surface of the bond wafer at a low voltage. The dielectric of the bond wafer and the base wafer contact each other in order to be bonded. Next, a thermal process of low temperature is performed to cleave the impurity ion implantation unit of the bond wafer. In addition, the cleaved surface of the bond wafer bonded to the base wafer is etched to form a nano scale device region. Here, the cleaved surface may be etched by performing a hydrogen surface process and a wet etching.
    • 提供了不进行化学机械抛光(CMP)和由其制造的晶片的制造具有优异的厚度均匀性的纳米绝缘体(SOI)晶片的方法。 所提供的方法包括制备接合晶片和基底晶片,并且在接合晶片的至少一个表面上形成电介质。 此后,通过以低电压将杂质离子注入接合晶片到接合晶片的表面至预定深度来形成杂质离子注入单元。 接合晶片和基底晶片的电介质彼此接触以便结合。 接下来,进行低温的热处理,以切割接合晶片的杂质离子注入单元。 此外,蚀刻结合到基底晶片的接合晶片的切割表面以形成纳米级器件区域。 这里,可以通过进行氢表面处理和湿蚀刻来蚀刻裂开的表面。