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    • 3. 发明授权
    • Low noise, high frequency solid state diode
    • 低噪声,高频固态二极管
    • US06303975B1
    • 2001-10-16
    • US09436166
    • 1999-11-09
    • Robert A. GrovesDominique Nguyen-NgocDale K. JadusKeith M. Walter
    • Robert A. GrovesDominique Nguyen-NgocDale K. JadusKeith M. Walter
    • H01L2710
    • H01L27/1021H01L29/861Y10S257/91
    • A low noise, high frequency solid state diode is provided from a plurality of unit diode cells which are interconnected in parallel. Each of the unit diode cells forms an element of an array having rows and columns of unit diode cells. The diode cells include a base region of polysilicon, forming an anode, and an active cathode region which forms a diode junction with the anode. A plurality of overlapping subcollector regions interconnect the cathode regions, to provide a single, continuous collector for the diode arrays. The base region has a minimum perimeter to area ratio which reduces the resistance of each active diode region. A plurality of cathode contacts are connected to the subcollector through a respective reach region of highly doped semiconductor material. One or more metalization layers connect the cathode regions together, and the anodes of the base regions together. By controlling the size and shape of the base region of polysilicon, the series resistance of the resulting diode is minimized.
    • 从并联的多个单位二极管单元提供低噪声,高频固态二极管。 每个单位二极管单元形成具有单位二极管单元的行和列的阵列的元件。 二极管单元包括形成阳极的多晶硅的基极区域和与阳极形成二极管结的活性阴极区域。 多个重叠子集电极区域互连阴极区域,为二极管阵列提供单一的连续集电极。 基极区域具有最小的周边面积比,其减小了每个有源二极管区域的电阻。 多个阴极触点通过高掺杂半导体材料的相应到达区域连接到子集电极。 一个或多个金属化层将阴极区域连接在一起,并将基极区域的阳极连接在一起。 通过控制多晶硅的基极区域的尺寸和形状,所得二极管的串联电阻最小化。