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1. 发明授权

US08760624B2 System and method for estimating field curvature 有权
标题翻译：用于估计场曲率的系统和方法
公开(公告)号：US08760624B2
公开(公告)日：2014-06-24
申请号：US12837941
申请日：2010-07-16
申请人： J. Casey Donaher
发明人： J. Casey Donaher
IPC分类号： G03B27/32 , G03B27/42 , G03B27/52 , G03B27/54 , G03B27/74 , G03F7/20 , G03F9/00
CPC分类号： G03F7/70641 , G03F7/70258 , G03F7/70666 , G03F9/7026
摘要： Projection systems and methods with mechanically decoupled metrology plates according to embodiments of the present invention can be used to characterize and compensate for misalignment and aberration in production images due to thermal and mechanical effects. Sensors on the metrology plate measure the position of the metrology plate relative to the image and to the substrate during exposure of the substrate to the production image. Data from the sensors are used to adjust the projection optics and/or substrate dynamically to correct or compensate for alignment errors and aberration-induced errors. Compared to prior art systems and methods, the projection systems and methods described herein offer greater design flexibility and relaxed constraints on mechanical stability and thermally induced expansion. In addition, decoupled metrology plates can be used to align two or more objectives simultaneously and independently.
摘要翻译：根据本发明的实施例的具有机械去耦计量板的投影系统和方法可以用于表征和补偿由于热和机械效应而导致的生产图像中的未对准和像差。计量板上的传感器在将基材暴露于生产图像期间测量计量板相对于图像和基底的位置。来自传感器的数据用于动态调整投影光学元件和/或基板，以校正或补偿对准误差和像差引起的误差。与现有技术的系统和方法相比，这里描述的投影系统和方法提供了更大的设计灵活性和对机械稳定性和热诱导膨胀的放宽约束。此外，分离的测量板可用于同时和独立地对准两个或多个目标。

2. 发明申请

US20120015461A1 System Metrology Core 有权
标题翻译：系统计量核心
公开(公告)号：US20120015461A1
公开(公告)日：2012-01-19
申请号：US12837950
申请日：2010-07-16
申请人： J. Casey Donaher , Craig R. Simpson , Roger McCleary
发明人： J. Casey Donaher , Craig R. Simpson , Roger McCleary
IPC分类号： H01L21/66 , G01B11/14
CPC分类号： G03F7/70891 , G03F7/706 , G03F7/70833 , G03F7/7085
摘要： Projection systems and methods with mechanically decoupled metrology plates according to embodiments of the present invention can be used to characterize and compensate for misalignment and aberration in production images due to thermal and mechanical effects. Sensors on the metrology plate measure the position of the metrology plate relative to the image and to the substrate during exposure of the substrate to the production image. Data from the sensors are used to adjust the projection optics and/or substrate dynamically to correct or compensate for alignment errors and aberration-induced errors. Compared to prior art systems and methods, the projection systems and methods described herein offer greater design flexibility and relaxed constraints on mechanical stability and thermally induced expansion. In addition, decoupled metrology plates can be used to align two or more objectives simultaneously and independently.
摘要翻译：根据本发明的实施例的具有机械去耦计量板的投影系统和方法可以用于表征和补偿由于热和机械效应而导致的生产图像中的未对准和像差。计量板上的传感器在将基材暴露于生产图像期间测量计量板相对于图像和基底的位置。来自传感器的数据用于动态调整投影光学元件和/或基板，以校正或补偿对准误差和像差引起的误差。与现有技术的系统和方法相比，这里描述的投影系统和方法提供了更大的设计灵活性和对机械稳定性和热诱导膨胀的放宽约束。此外，分离的测量板可用于同时和独立地对准两个或多个目标。

3. 发明授权

US5483345A Alignment system for use in lithography utilizing a spherical reflector having a centered etched-on projection object 失效
标题翻译：使用具有中心蚀刻投影物体的球面反射器的光刻中使用的对准系统
公开(公告)号：US5483345A
公开(公告)日：1996-01-09
申请号：US300649
申请日：1994-09-06
申请人： J. Casey Donaher , David S. Holbrook , Shepard D. Johnson , James A. Sozanski
发明人： J. Casey Donaher , David S. Holbrook , Shepard D. Johnson , James A. Sozanski
IPC分类号： G03F9/00 , G01B11/00
CPC分类号： G03F9/70
摘要： A system for aligning substrates when preparing flat panel displays by lithography. A spherical reflector (imaging mirror) is used to focus a small geometric object, such as a cross, etched at the center of the reflector. The cross is projected toward a beam splitter and is then reflected onto the mirror which, in turn, images it on the surface of the substrate being used in the lithographic process. This optical system, which has a numerical aperture of about 0.05 radians, provides maximum depth of field with essentially no aberrations, and produces a relatively large probe image on a large alignment mark.The surface of the substrate carries a grid of stepped patterns as an alignment mark. The steps diffract the light received, and the diffracted light passes through a lens system to a sensor associated with the lens system. The amount of light diffracted is dependent upon where the image strikes the steps in the grid. Thus, a correlation between position and the amount of light received by the sensor exists, and, so, the substrate can be precisely aligned.
摘要翻译：用于通过光刻制备平板显示器时用于对准衬底的系统。球形反射镜（成像镜）用于聚焦在反射体中心蚀刻的诸如十字的小几何物体。十字架朝向分束器投影，然后被反射到反射镜上，反射镜又将其图像在用于光刻工艺的基板的表面上。该光学系统具有大约0.05弧度的数值孔径，基本上没有像差提供最大景深，并且在大对准标记上产生相对较大的探测图像。基板的表面带有阶梯图案格栅作为对准标记。这些步骤衍射所接收的光，并且衍射光通过透镜系统到与透镜系统相关联的传感器。衍射的光量取决于图像撞击网格中的台阶。因此，存在位置与传感器接收的光量之间的相关性，因此可以精确地对准衬底。

4. 发明授权

US08395783B2 System metrology core 有权
标题翻译：系统计量核心
公开(公告)号：US08395783B2
公开(公告)日：2013-03-12
申请号：US12837950
申请日：2010-07-16
申请人： J. Casey Donaher , Craig R. Simpson , Roger McCleary
发明人： J. Casey Donaher , Craig R. Simpson , Roger McCleary
IPC分类号： G01B11/14
CPC分类号： G03F7/70891 , G03F7/706 , G03F7/70833 , G03F7/7085
摘要： Projection systems and methods with mechanically decoupled metrology plates according to embodiments of the present invention can be used to characterize and compensate for misalignment and aberration in production images due to thermal and mechanical effects. Sensors on the metrology plate measure the position of the metrology plate relative to the image and to the substrate during exposure of the substrate to the production image. Data from the sensors are used to adjust the projection optics and/or substrate dynamically to correct or compensate for alignment errors and aberration-induced errors. Compared to prior art systems and methods, the projection systems and methods described herein offer greater design flexibility and relaxed constraints on mechanical stability and thermally induced expansion. In addition, decoupled metrology plates can be used to align two or more objectives simultaneously and independently.
摘要翻译：根据本发明的实施例的具有机械去耦计量板的投影系统和方法可以用于表征和补偿由于热和机械效应而导致的生产图像中的未对准和像差。计量板上的传感器在将基材暴露于生产图像期间测量计量板相对于图像和基底的位置。来自传感器的数据用于动态调整投影光学元件和/或基板，以校正或补偿对准误差和像差引起的误差。与现有技术的系统和方法相比，这里描述的投影系统和方法提供了更大的设计灵活性和对机械稳定性和热诱导膨胀的放宽约束。此外，分离的测量板可用于同时和独立地对准两个或多个目标。

5. 发明申请

US20060163223A1 Methods and apparatus for truncating an image formed with coherent radiation 有权
标题翻译：用于截断用相干辐射形成的图像的方法和装置
公开(公告)号：US20060163223A1
公开(公告)日：2006-07-27
申请号：US11040739
申请日：2005-01-21
申请人： Shiyu Zhang , Igor Landau , Arnold Lungershausen , David Markle , Casey Donaher
发明人： Shiyu Zhang , Igor Landau , Arnold Lungershausen , David Markle , Casey Donaher
IPC分类号： B23K26/06
CPC分类号： B23K26/0738 , B23K26/066 , B23K26/082 , B23K2101/40
摘要： Methods and apparatus for truncating an image formed with coherent radiation. The optical relay system is adapted to form a line image at the image plane. The image is truncated by a variable aperture at or near the aperture plane conjugate to the image plane, to block progressively increasing portions of an incident coherent radiation beam used to form the line image. An apodizing pupil filter having a maximum transmission or reflection in the center and a transmission or reflection profile that varies with direction corresponding to long direction of the line image is provided in the pupil plane. The apodization is designed to prevent hot-spots from forming in the truncated image and ensures a relatively smooth, flat intensity profile. Thus, one end or another of a coherent line image scanned over a substrate can be truncated during scanning without substantially changing the image intensity extending into the product area.
摘要翻译：用于截断用相干辐射形成的图像的方法和装置。光学继电器系统适于在图像平面处形成线图像。图像被与图像平面共轭的孔径平面处或附近的可变孔截断，以阻止逐渐增加用于形成线图像的入射相干辐射束的部分。在瞳孔平面中设置有在中心具有最大透射或反射的变迹瞳孔滤光器以及与线图像的长方向相对应的方向变化的透射或反射图。该变迹被设计成防止在截断图像中形成热点并确保相对光滑，平坦的强度分布。因此，在扫描期间扫描的相干线图像的一端或另一端可以在扫描期间被截断，而基本上不改变延伸到产品区域中的图像强度。

6. 发明申请

US20120015460A1 System and Method for Estimating Field Curvature 有权
标题翻译：用于估计场曲率的系统和方法
公开(公告)号：US20120015460A1
公开(公告)日：2012-01-19
申请号：US12837941
申请日：2010-07-16
申请人： J. Casey Donaher
发明人： J. Casey Donaher
IPC分类号： H01L21/66 , G06T7/00 , H04N7/18
CPC分类号： G03F7/70641 , G03F7/70258 , G03F7/70666 , G03F9/7026
摘要： Projection systems and methods with mechanically decoupled metrology plates according to embodiments of the present invention can be used to characterize and compensate for misalignment and aberration in production images due to thermal and mechanical effects. Sensors on the metrology plate measure the position of the metrology plate relative to the image and to the substrate during exposure of the substrate to the production image. Data from the sensors are used to adjust the projection optics and/or substrate dynamically to correct or compensate for alignment errors and aberration-induced errors. Compared to prior art systems and methods, the projection systems and methods described herein offer greater design flexibility and relaxed constraints on mechanical stability and thermally induced expansion. In addition, decoupled metrology plates can be used to align two or more objectives simultaneously and independently.
摘要翻译：根据本发明的实施例的具有机械去耦计量板的投影系统和方法可用于表征和补偿由于热和机械效应而导致的生产图像中的未对准和像差。计量板上的传感器在将基材暴露于生产图像期间测量计量板相对于图像和基底的位置。来自传感器的数据用于动态调整投影光学元件和/或基板，以校正或补偿对准误差和像差引起的误差。与现有技术的系统和方法相比，这里描述的投影系统和方法提供了更大的设计灵活性和对机械稳定性和热诱导膨胀的放宽约束。此外，分离的测量板可用于同时和独立地对准两个或多个目标。

7. 发明授权

US07253376B2 Methods and apparatus for truncating an image formed with coherent radiation 有权
标题翻译：用于截断用相干辐射形成的图像的方法和装置
公开(公告)号：US07253376B2
公开(公告)日：2007-08-07
申请号：US11040739
申请日：2005-01-21
申请人： Shiyu Zhang , Igor Landau , Arnold Lungershausen , David A. Markle , Casey Donaher
发明人： Shiyu Zhang , Igor Landau , Arnold Lungershausen , David A. Markle , Casey Donaher
IPC分类号： B23K26/06
CPC分类号： B23K26/0738 , B23K26/066 , B23K26/082 , B23K2101/40
摘要： Methods and apparatus for truncating an image formed with coherent radiation. The optical relay system is adapted to form a line image at the image plane. The image is truncated by a variable aperture at or near the aperture plane conjugate to the image plane, to block progressively increasing portions of an incident coherent radiation beam used to form the line image. An apodizing pupil filter having a maximum transmission or reflection in the center and a transmission or reflection profile that varies with direction corresponding to long direction of the line image is provided in the pupil plane. The apodization is designed to prevent hot-spots from forming in the truncated image and ensures a relatively smooth, flat intensity profile. Thus, one end or another of a coherent line image scanned over a substrate can be truncated during scanning without substantially changing the image intensity extending into the product area.
摘要翻译：用于截断用相干辐射形成的图像的方法和装置。光学继电器系统适于在图像平面处形成线图像。图像被与图像平面共轭的孔径平面处或附近的可变孔截断，以阻止逐渐增加用于形成线图像的入射相干辐射束的部分。在瞳孔平面中设置有在中心具有最大透射或反射的变迹瞳孔滤光器以及与线图像的长方向相对应的方向变化的透射或反射图。该变迹被设计成防止在截断图像中形成热点并确保相对光滑，平坦的强度分布。因此，在扫描期间扫描的相干线图像的一端或另一端可以在扫描期间被截断，而基本上不改变延伸到产品区域中的图像强度。

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