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    • 2. 发明申请
    • CMOS (COMPLEMENTARY METAL OXIDE SEMICONDUCTOR) DEVICES HAVING METAL GATE NFETS AND POLY-SILICON GATE PFETS
    • 具有金属栅极NFET和聚硅栅极的CMOS(补充金属氧化物半导体)器件
    • US20100258875A1
    • 2010-10-14
    • US12823225
    • 2010-06-25
    • Bruce Bennett DorisWilliam K. HensonRichard Stephen WiseHongwen Yan
    • Bruce Bennett DorisWilliam K. HensonRichard Stephen WiseHongwen Yan
    • H01L27/088
    • H01L21/823842
    • A semiconductor structure. The semiconductor structure includes: a first semiconductor region and a second semiconductor region; a first gate dielectric region on the first semiconductor region; a second gate dielectric region on the second semiconductor region, wherein the second semiconductor region includes a first top surface shared by the second semiconductor region and the second gate dielectric region, and wherein the first top surface defines a reference direction perpendicular to the first top surface and pointing from inside to outside of the second semiconductor region; an electrically conductive layer on the first gate dielectric region; a first poly-silicon region on the electrically conductive layer; a second poly-silicon region on the second gate dielectric region; a first hard mask region on the first poly-silicon region; and a second hard mask region on the second poly-silicon region.
    • 半导体结构。 半导体结构包括:第一半导体区域和第二半导体区域; 在所述第一半导体区域上的第一栅极电介质区域; 在所述第二半导体区域上的第二栅极电介质区域,其中所述第二半导体区域包括由所述第二半导体区域和所述第二栅极电介质区域共享的第一顶表面,并且其中所述第一顶表面限定垂直于所述第一顶表面的参考方向 并从第二半导体区域的内部指向外部; 在所述第一栅极电介质区域上的导电层; 导电层上的第一多晶硅区; 在所述第二栅极电介质区域上的第二多晶硅区域; 第一多晶硅区域上的第一硬掩模区域; 以及第二多晶硅区域上的第二硬掩模区域。
    • 6. 发明授权
    • CMOS (complementary metal oxide semiconductor) devices having metal gate NFETs and poly-silicon gate PFETs
    • 具有金属栅极NFET和多晶硅栅极PFET的CMOS(互补金属氧化物半导体)器件
    • US08018005B2
    • 2011-09-13
    • US12823225
    • 2010-06-25
    • Bruce Bennett DorisWilliam K. HensonRichard Stephen WiseHongwen Yan
    • Bruce Bennett DorisWilliam K. HensonRichard Stephen WiseHongwen Yan
    • H01L21/70
    • H01L21/823842
    • A semiconductor structure. The semiconductor structure includes: a first semiconductor region and a second semiconductor region; a first gate dielectric region on the first semiconductor region; a second gate dielectric region on the second semiconductor region, wherein the second semiconductor region includes a first top surface shared by the second semiconductor region and the second gate dielectric region, and wherein the first top surface defines a reference direction perpendicular to the first top surface and pointing from inside to outside of the second semiconductor region; an electrically conductive layer on the first gate dielectric region; a first poly-silicon region on the electrically conductive layer; a second poly-silicon region on the second gate dielectric region; a first hard mask region on the first poly-silicon region; and a second hard mask region on the second poly-silicon region.
    • 半导体结构。 半导体结构包括:第一半导体区域和第二半导体区域; 在所述第一半导体区域上的第一栅极电介质区域; 在所述第二半导体区域上的第二栅极电介质区域,其中所述第二半导体区域包括由所述第二半导体区域和所述第二栅极电介质区域共享的第一顶表面,并且其中所述第一顶表面限定垂直于所述第一顶表面的参考方向 并从第二半导体区域的内部指向外部; 在所述第一栅极电介质区域上的导电层; 导电层上的第一多晶硅区; 在所述第二栅极电介质区域上的第二多晶硅区域; 第一多晶硅区域上的第一硬掩模区域; 以及第二多晶硅区域上的第二硬掩模区域。
    • 7. 发明授权
    • CMOS (complementary metal oxide semiconductor) devices having metal gate NFETS and poly-silicon gate PFETS
    • 具有金属栅极NFETS和多晶硅栅极PFETS的CMOS(互补金属氧化物半导体)器件
    • US07749830B2
    • 2010-07-06
    • US12026793
    • 2008-02-06
    • Bruce Bennett DorisWilliam K. HensonRichard Stephen WiseHongwen Yan
    • Bruce Bennett DorisWilliam K. HensonRichard Stephen WiseHongwen Yan
    • H01L21/8238
    • H01L21/823842
    • A semiconductor structure fabrication method. The method includes providing a structure which includes (a) first and second semiconductor regions, (b) first and second gate dielectric regions on the first and second semiconductor regions, respectively, (c) a high-K dielectric region on the first gate dielectric region, K being greater than 4, (d) an electrically conductive layer on the high-K dielectric region, (e) a poly-silicon layer on the electrically conductive layer and the second gate dielectric region, and (f) a hard mask layer on the poly-silicon layer. The hard mask layer is patterned resulting in first and second hard mask regions. The poly-silicon layer is etched with the first and second hard mask regions as blocking masks resulting in first and second poly-silicon regions. The first and second poly-silicon regions are exposed to a surrounding ambient.
    • 半导体结构制造方法。 该方法包括提供一种结构,该结构包括(a)分别在第一和第二半导体区域上的第一和第二半导体区域,(b)第一和第二栅极电介质区域,(c)第一栅极电介质上的高K电介质区域 区域,K大于4,(d)高K电介质区域上的导电层,(e)导电层和第二栅极电介质区域上的多晶硅层,以及(f)硬掩模 层在多晶硅层上。 对硬掩模层进行图案化,形成第一和第二硬掩模区域。 用第一和第二硬掩模区域蚀刻多晶硅层作为阻挡掩模,产生第一和第二多晶硅区域。 第一和第二多晶硅区域暴露于周围环境。