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1. 发明授权

US07924419B2 Illumination system for optical inspection 有权
标题翻译：光学检查照明系统
公开(公告)号：US07924419B2
公开(公告)日：2011-04-12
申请号：US12626592
申请日：2009-11-25
申请人： Ron Naftali , Avishay Guetta , Haim Feldman , Doron Shoham
发明人： Ron Naftali , Avishay Guetta , Haim Feldman , Doron Shoham
IPC分类号： G01N21/00
CPC分类号： G01N21/8806 , G01N21/47 , G01N21/4788 , G01N21/94 , G01N21/9501 , G01N21/95607 , G01N21/95623 , G01N2021/1772 , G01N2021/4711 , G01N2021/4735 , G01N2021/479 , G01N2021/4792 , G01N2021/8822 , G01N2021/8845 , G01N2201/0697
摘要： Apparatus for generating optical radiation includes a laser, which is configured to operate in multiple transverse modes simultaneously so as to generate an input beam, which is characterized by a first speckle contrast. The transverse modes of the input beam are optically mixed so as to generate an output beam have a second speckle contrast, which is substantially less than the first speckle contrast.
摘要翻译：用于产生光辐射的装置包括激光器，其被配置为同时以多个横向模式操作，以便产生以第一散斑对比为特征的输入光束。输入光束的横向模式被光学混合，以便产生输出光束具有基本上小于第一散斑对比度的第二散斑对比度。

2. 发明申请

US20110043806A1 INTRUSION WARNING SYSTEM 有权
标题翻译：入侵警告系统
公开(公告)号：US20110043806A1
公开(公告)日：2011-02-24
申请号：US12988321
申请日：2009-04-16
申请人： Avishay Guetta , Doron Korngut , Gil Blai
发明人： Avishay Guetta , Doron Korngut , Gil Blai
IPC分类号： G01N21/00
CPC分类号： G08B13/2491 , G01S17/026 , G08B13/181
摘要： A system for detecting intrusion across a surface, comprising a plurality of light sources projecting an array of illuminating beams along different optical paths in the surface and a detector array system directed such that it detects along a plurality of fields of view in the surface, illumination reflected from the illuminating beams. A signal processing system detects changes along the array of fields of view, in the reflected illumination level detected by the detector system. An increase greater than a predefined level in the reflected illumination level from any field of view provides an indication of an intrusion across the surveilled surface along that field of view, at the crossing point of the direction of that field of view with the optical path whose illuminating beam generated the increase in reflected illumination from that field of view.
摘要翻译：一种用于检测跨越表面的入侵的系统，包括多个光源，所述多个光源沿着所述表面中的不同光路投射照明光束的阵列;以及探测器阵列系统，其被指示为沿着所述表面中的多个视野检测照明从照明光束反射。信号处理系统在由检测器系统检测到的反射照明水平中检测沿视场阵列的变化。在任何视野的反射照明水平上大于预定水平的增加提供了沿着该视场在该视野方向的交叉点处与沿着该视野的观察点的入射表面的入射指示，照明光束从该视野产生反射照明的增加。

3. 发明授权

US07498557B2 Cascaded image intensifier 有权
标题翻译：级联图像增强器
公开(公告)号：US07498557B2
公开(公告)日：2009-03-03
申请号：US11516667
申请日：2006-09-07
申请人： Iddo Pinkas , Tal Kuzniz , Avishay Guetta , Helmut Banzhoff , Ron Naftali
发明人： Iddo Pinkas , Tal Kuzniz , Avishay Guetta , Helmut Banzhoff , Ron Naftali
IPC分类号： H01J40/14 , H01J43/00
CPC分类号： H01J31/508
摘要： A cascaded image intensifier device is presented. In one embodiment the device comprises: at least two sections in cascade, each of a first section and a last section out of the at least two sections including a photocathode unit adapted to convert photons to electrons and a screen unit adapted to convert electrons to photons; wherein the first section includes a reducing element adapted to: (i) reduce ion-caused degradation of a photocathode unit of the first section, and (ii) reduce a number of photons exiting from the first section from a first value to a second value; and wherein the last section outputs a number of photons that equals or exceeds the first value. Also disclosed are methods and systems using the disclosed cascaded image intensifier device.
摘要翻译：提出了一种级联图像增强器件。在一个实施例中，该装置包括：级联的至少两个部分，至少两个部分中的第一部分和最后部分中的每个部分，包括适于将光子转换成电子的光电阴极单元和适于将电子转换成光子的屏幕单元 ; 其中所述第一部分包括还原元件，所述还原元件适于：（i）减少所述第一部分的光电阴极单元的离子引起的退化，以及（ii）将从所述第一部分退出的光子数量从第一值减少到第二值 ; 并且其中最后部分输出等于或超过第一值的多个光子。还公开了使用所公开的级联图像增强器装置的方法和系统。

4. 发明申请

US20080054166A1 DETACHABLY COUPLED IMAGE INTENSIFIER AND IMAGE SENSOR 审中-公开
标题翻译：可拆卸耦合图像增强器和图像传感器
公开(公告)号：US20080054166A1
公开(公告)日：2008-03-06
申请号：US11929216
申请日：2007-10-30
申请人： Tal KUZNIZ , Avishay GUETTA
发明人： Tal KUZNIZ , Avishay GUETTA
IPC分类号： H01J31/50
CPC分类号： G01N21/8806 , G01N21/47 , G01N21/4788 , G01N21/94 , G01N21/9501 , G01N21/95607 , G01N21/95623 , G01N2021/1772 , G01N2021/4711 , G01N2021/4735 , G01N2021/479 , G01N2021/4792 , G01N2021/8822 , G01N2021/8845 , G01N2201/0697
摘要： A detachably coupled image intensifier and image sensor combination is disclosed along with systems and methods for using the detachably coupled image intensifier and image sensor combination. In one embodiment, there are at least two fiber optic plates aligned between the image intensifier and image sensor, and an oil or a gel is used to fill some or all of the gap(s) between pair(s) of adjacent fiber optic plates. In one embodiment, the detachably coupled image intensifier and image sensor combination is used for sample inspection.
摘要翻译：公开了一种可拆卸耦合的图像增强器和图像传感器组合以及用于使用可拆卸耦合的图像增强器和图像传感器组合的系统和方法。在一个实施例中，存在在图像增强器和图像传感器之间对准的至少两个光纤板，并且使用油或凝胶来填充相邻光纤板的对之间的一些或全部间隙。在一个实施例中，可拆卸地耦合的图像增强器和图像传感器组合用于样品检查。

5. 发明授权

US07265900B2 Inspection system with oblique viewing angle 有权
标题翻译：检视系统具有倾斜视角
公开(公告)号：US07265900B2
公开(公告)日：2007-09-04
申请号：US10511084
申请日：2003-09-08
申请人： Doron Korngut , Benjamin Cohen , Avishay Guetta
发明人： Doron Korngut , Benjamin Cohen , Avishay Guetta
IPC分类号： G02B21/06
CPC分类号： G01N21/8806 , G01N21/94 , G01N21/9501 , G01N21/95623 , G01N2021/479 , G02B27/0025 , G02B27/48
摘要： Apparatus for imaging an area of a surface along a viewing angle that is oblique to the surface includes an afocal optical relay, which is adapted to form a tilted initial image of the area by collecting optical radiation from the area along an optical axis oriented at the viewing angle. A tilt correction unit is coupled to correct a tilt of the initial image so as to form a substantially undistorted intermediate image. A magnification module is coupled to focus the intermediate image onto an image detector.
摘要翻译：用于沿着与表面倾斜的视角成像表面区域的设备包括无焦光学继电器，其适于通过沿着沿着所述光学轴线的光轴收集来自所述区域的光辐射来形成所述区域的倾斜初始图像可视角度。耦合倾斜校正单元以校正初始图像的倾斜度，以便形成基本上未变形的中间图像。耦合放大模块以将中间图像聚焦到图像检测器上。

6. 发明申请

US20060066843A1 Optical inspection with alternating configurations 有权
标题翻译：具有交替配置的光学检查
公开(公告)号：US20060066843A1
公开(公告)日：2006-03-30
申请号：US11234492
申请日：2005-09-22
申请人： Avishay Guetta , Doron Korngut , Doron Shoham , Iddo Pinkas , Ronen Eynat
发明人： Avishay Guetta , Doron Korngut , Doron Shoham , Iddo Pinkas , Ronen Eynat
IPC分类号： G01N21/88
CPC分类号： G01N21/9501 , G01N21/956 , G01N2021/479
摘要： An imaging system for inspection of a sample includes an illumination module, which irradiates a surface of the sample with pulsed optical radiation. A mechanical scanner translates at least one of the sample and part of the imaging system so as to scan an area irradiated by the pulsed optical radiation over the surface in order to irradiate successive, partially overlapping frames on the surface by respective successive pulses of the pulsed radiation. A collection module collects the optical radiation scattered from the surface so as to capture a sequence of images of the irradiated frames. A system controller varies a configuration of the imaging system in alternation between at least first and second different optical configurations in synchronization with the pulsed optical radiation.
摘要翻译：用于检查样品的成像系统包括照射模块，其照射具有脉冲光辐射的样品表面。机械扫描器将成像系统的样本和部分中的至少一个平移以扫描由表面上的脉冲光辐射照射的区域，以便通过相应的连续的脉冲脉冲来照射表面上的连续的部分重叠的帧辐射。收集模块收集从表面散射的光辐射，以捕获被照射的帧的图像序列。系统控制器与脉冲光辐射同步地在至少第一和第二不同光学配置之间交替地改变成像系统的配置。

7. 发明授权

US06861660B2 Process and assembly for non-destructive surface inspection 有权
标题翻译：非破坏性表面检查的加工和组装
公开(公告)号：US06861660B2
公开(公告)日：2005-03-01
申请号：US10208113
申请日：2002-07-29
申请人： Gilad Almogy , Ron Naftali , Avishay Guetta , Doron Shoham
发明人： Gilad Almogy , Ron Naftali , Avishay Guetta , Doron Shoham
IPC分类号： G01N21/95 , G01N21/88
CPC分类号： G01N21/956 , G01N21/9501
摘要： An optical system for detecting defects on a wafer that includes a device for producing a beam and directing the beam onto the wafer surface, producing an illuminated spot on the wafer's surface. The system further includes a detector detecting light, and a mirrored assembly having together with the detector an axis of symmetry about a line perpendicular to the wafer surface. The assembly is configured to receive scattered light from the surface, where the scattered light including a first scattered light part being scattered from the pattern. The assembly is further configured to reflect and focus rotationally symmetrically about the axis of symmetry the scattered light to the detector. The system further includes a device operating with the detector for facilitating detection of a scattered light other than the specified scattered light due to pattern.
摘要翻译：一种用于检测晶片上的缺陷的光学系统，其包括用于产生光束并将光束引导到晶片表面上的装置，在晶片的表面上产生照明光斑。该系统还包括检测光的检测器和与检测器一起围绕垂直于晶片表面的线的对称轴的镜像组件。所述组件被配置为从所述表面接收散射光，其中所述散射光包括从所述图案散射的第一散射光部分。组件还被配置为将散射光的对称轴围绕旋转对称地反射并聚焦到检测器。该系统还包括利用检测器操作的装置，用于便于检测由于图案而导致的特定散射光之外的散射光。

8. 发明授权

US06710868B2 Optical inspection system with dual detection heads 失效
标题翻译：具有双检测头的光学检测系统
公开(公告)号：US06710868B2
公开(公告)日：2004-03-23
申请号：US10155487
申请日：2002-05-22
申请人： Avishay Guetta
发明人： Avishay Guetta
IPC分类号： G01N2100
CPC分类号： G01N21/9503 , G01N21/94 , G01N21/9501
摘要： Apparatus for inspection of a sample includes an optical assembly made up of first and second optical heads with respective first and second levels of spatial resolution, such that the second level of spatial resolution is substantially higher than the first level. A positioning device imparts motion to at least one of the optical assembly and the sample, so as to cause the optical assembly to scan over the surface of the sample. An inspection controller processes the signal output by the first optical head to identify spots on the surface that should be inspected at the second level of spatial resolution, and then controls the second optical head so as to inspect the identified spots.
摘要翻译：用于检查样品的装置包括由具有相应的第一和第二水平的空间分辨率的第一和第二光学头组成的光学组件，使得第二水平的空间分辨率基本上高于第一水平。定位装置向光学组件和样品中的至少一个施加运动，以使光学组件在样品的表面上扫描。检查控制器处理由第一光学头输出的信号，以在第二水平的空间分辨率上识别应检查的表面上的斑点，然后控制第二光学头以检查所识别的斑点。

9. 发明授权

US08982333B2 Aerial observation system 有权
标题翻译：空中观测系统
公开(公告)号：US08982333B2
公开(公告)日：2015-03-17
申请号：US13119968
申请日：2009-09-21
申请人： Avishay Guetta , Yuval Guetta , Rafael Ambar
发明人： Avishay Guetta , Yuval Guetta , Rafael Ambar
IPC分类号： G01C3/08 , B64B1/50
CPC分类号： B64B1/50
摘要： An aerial platform comprising a kite providing a level of directional stability when elevated by the wind, and an inflated balloon attached above the kite with a cord. The payload is attached to the kite. The physical separation of the balloon from the kite isolates the payload from shocks generated by the balloon. Additional isolation is provided by use of an elastic attachment cord. Electric power is supplied to the aerial platform by means of an optical fiber receiving optical power from a ground-based source, and conversion of the optical power to electrical power on board the platform. In order to provide a strong tether line, the optical fiber is plaited with a jacket braided from high tensile strength fibers. An aerial laser transmitter is described using a ground based laser source transmitting laser power through an optical fiber to an aerial platform for transmission from the platform.
摘要翻译：一种包括风筝的空中平台，当风起升时提供一定程度的方向稳定性，以及用绳索附着在风筝上方的充气气球。有效载荷附着在风筝上。气球与风筝的物理分离将有效载荷与气球产生的冲击隔离。通过使用弹性连接线提供额外的隔离。通过接收来自地面源的光功率的光纤向平台提供电力，并将光功率转换为平台上的电力。为了提供一个强力的系绳，光纤被编织有高抗拉强度纤维的护套。使用基于地面的激光源来描述空中激光发射器，该激光源通过光纤将激光功率传输到用于从平台传输的空中平台。

10. 发明申请

US20130087684A1 LASER DAYLIGHT DESIGNATION AND POINTING 有权
标题翻译：激光指示和指示
公开(公告)号：US20130087684A1
公开(公告)日：2013-04-11
申请号：US13515863
申请日：2010-12-14
申请人： Avishay Guetta , Michael Yagudaev , Doron Korngut
发明人： Avishay Guetta , Michael Yagudaev , Doron Korngut
IPC分类号： H01L27/146 , H01L27/148
CPC分类号： F41G7/2293 , F41G3/02 , F41G3/145 , F41G7/2246 , F41G7/226 , G01S7/4914 , G01S17/32 , G01S17/89 , H01L27/146 , H01L27/14643 , H01L27/148
摘要： A laser designator system using modulated CW laser diodes and a conventional high pixel count image sensor array, such as CCD or CMOS array. These two technologies, diode lasers and imaging sensor arrays are reliable, widely used and inexpensive technologies, as compared with prior art pulsed laser systems. These systems are distinguished from the prior art systems in that they filter the laser signal spatially, by collecting light over a comparatively long period of time from a very few pixels out of the entire field of view of the image sensor array. This is in contrast to the prior art systems where the laser signal is filtered temporarily, over a very short time span, but over a large fraction of the field of view. By spatially filtering the signal outputs of the individual pixels, it becomes possible to subtract the background illumination from the illuminated laser spot.
摘要翻译：一种使用调制CW激光二极管和常规高像素数像素传感器阵列（如CCD或CMOS阵列）的激光指示系统。与现有技术的脉冲激光系统相比，这两种技术，二极管激光器和成像传感器阵列是可靠的，广泛使用的和便宜的技术。这些系统与现有技术的系统不同，它们通过从图像传感器阵列的整个视野内的极少数像素中收集较长时间的光，从而在空间上对激光信号进行滤波。这与现有技术的系统不同，其中激光信号在非常短的时间跨度上临时滤波，但是在视场的很大一部分上。通过对各个像素的信号输出进行空间滤波，可以从照明的激光光斑中减去背景照明。

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