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    • 1. 发明授权
    • Method for functionalising fluid lines contained in a micromechanical device, micromechanical device including functionalised lines, and method for manufacturing same
    • 包含在微机械装置中的流体线的功能化方法,包括功能化线的微机械装置及其制造方法
    • US08968673B2
    • 2015-03-03
    • US13805491
    • 2011-06-29
    • Vincent AgacheAntoine HoangFrançoise Vinet
    • Vincent AgacheAntoine HoangFrançoise Vinet
    • G01N33/00G03F7/24B81C1/00F04B19/00
    • G03F7/24B81B2201/0214B81B2201/058B81B2201/06B81C1/00206B81C2201/0154F04B19/006
    • The present invention relates to a method for functionalizing fluid lines (1b) in a micromechanical device, the walls of which include an opaque layer. For this purpose, the invention provides a method for functionalizing a micromechanical device provided with a fluid line including a peripheral wall (5) having a surface (2) outside the line and an inner surface (3) defining a space (1b) in which a fluid can circulate, the peripheral wall at least partially including a silicon layer (5a). The method includes the following steps: a) providing a device, the peripheral wall (5) of which at least partially includes a silicon layer (5a) having, at least locally, a thickness (e) of more than 100 nm and less than 200 nm, advantageously of 160 to 180 nm; c) silanizing at least the inner surface of the fluid line; d) the localized, selective photo-deprotection on at least the inner surface of the silanized device by exposing the peripheral wall (5) at the point at which said wall has a thickness (e) of more than 100 nm and less than 200 nm, advantageously of 160 to 180 nm.
    • 本发明涉及一种在微机械装置中功能化流体管线(1b)的方法,该方法的壁包括不透明层。 为此,本发明提供了一种功能化微机械装置的方法,该微机械装置具有流体管线,该流体管线包括在管线外部具有表面(2)的周壁(5)和限定空间(1b)的内表面(3) 流体可以循环,周壁至少部分地包括硅层(5a)。 该方法包括以下步骤:a)提供一种器件,其外围壁(5)至少部分地包括硅层(5a),该硅层至少局部地具有大于100nm的厚度(e)并且小于 200nm,有利地为160〜180nm; c)至少使流体管线的内表面硅烷化; d)通过在所述壁的厚度(e)大于100nm且小于200nm的点处暴露外围壁(5),至少在硅烷化装置的内表面上进行局部选择性光 - 去保护 ,有利地为160至180nm。
    • 8. 发明申请
    • Method for Functionalising Fluid Lines Contained in a Micromechanical Device, Micromechanical Device Including Functionalised Lines, and Method for Manufacturing Same
    • 包含在机械装置中的流体线的功能化方法,包括功能化线的微机械装置及其制造方法
    • US20130149196A1
    • 2013-06-13
    • US13805491
    • 2011-06-29
    • Vincent AgacheAntoine HoangFrancoise Vinet
    • Vincent AgacheAntoine HoangFrancoise Vinet
    • G03F7/24
    • G03F7/24B81B2201/0214B81B2201/058B81B2201/06B81C1/00206B81C2201/0154F04B19/006
    • The present invention relates to a method for functionalising fluid lines (1b) in a micromechanical device, the walls of which include an opaque layer. For this purpose, the invention provides a method for functionalising a micromechanical device provided with a fluid line including a peripheral wall (5) having a surface (2) outside the line and an inner surface (3) defining a space (1b) in which a fluid can circulate, the peripheral wall at least partially including a silicon layer (5a). The method includes the following steps: a) providing a device, the peripheral wall (5) of which at least partially includes a silicon layer (5a) having, at least locally, a thickness (e) of more than 100 nm and less than 200 nm, advantageously of 160 to 180 nm; c) silanising at least the inner surface of the fluid line; d) the localised, selective photo-deprotection on at least the inner surface of the silanised device by exposing the peripheral wall (5) at the point at which said wall has a thickness (e) of more than 100 nm and less than 200 nm, advantageously of 160 to 180 nm.
    • 本发明涉及一种在微机械装置中功能化流体管线(1b)的方法,其中壁部包括不透明层。 为此,本发明提供了一种功能化微机械装置的方法,该微机械装置具有流体管线,该流体管线包括具有在管线外部的表面(2)的周壁(5)和限定空间(1b)的内表面(3),其中 流体可以循环,周壁至少部分地包括硅层(5a)。 该方法包括以下步骤:a)提供一种器件,其外围壁(5)至少部分地包括硅层(5a),该硅层至少局部地具有大于100nm的厚度(e)并且小于 200nm,有利地为160〜180nm; c)至少对流体管线的内表面进行硅烷化; d)通过在所述壁的厚度(e)大于100nm且小于200nm的点处暴露周壁(5),至少在硅烷化装置的内表面上进行局部选择性光 - 去保护 ,有利地为160至180nm。