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1. 发明授权

US06881130B1 Edge grinding 失效
标题翻译：边磨
公开(公告)号：US06881130B1
公开(公告)日：2005-04-19
申请号：US10018767
申请日：2000-04-20
申请人： Mark Andrew Stocker
发明人： Mark Andrew Stocker
IPC分类号： B24B53/00 , B23H1/04 , B23H9/00 , B24B1/00 , B24B9/00 , B24B9/06 , B24B47/22 , B24B49/04 , B24B53/065 , B25J9/16 , H01L21/304
CPC分类号： B24B1/00 , B23H1/04 , B23H9/00 , B24B9/065 , B24B47/22 , B24B49/04 , B24B53/065 , B25J9/1602 , H01L21/304
摘要： A method of positioning a grooved grinding wheel relative to a disc-like circular workpiece for edge grinding the workpiece using the groove in the wheel includes the steps of mounting the workpiece for rotation about a first axis, mounting the grinding wheel for rotation about a second parallel axis, effecting relative movement between the workpiece and the wheel to engage the rim of the wheel within the groove and performing a preliminary grind. The position of the wheel is axially adjusted in accordance with the measurements made on the profile of the rim produced by the preliminary grind, and the rim is ground again with a second preliminary grind with the grinding wheel located at the axially shifted position. The steps of grinding and measuring the periphery of the workpiece are repeated until the rim profile possesses the desired accuracy. The final position of the grooved grinding wheel is then utilized for grinding future wafers.
摘要翻译：相对于盘状圆形工件定位带槽砂轮的方法，用于使用车轮中的槽边缘研磨工件的步骤包括以下步骤：将工件安装在第一轴线周围，将砂轮安装在第二轴上平行的轴线，影响工件和车轮之间的相对运动，以使车轮轮缘在槽内啮合并进行预磨。轮的位置根据由预研磨产生的轮辋轮廓上的测量值进行轴向调节，并且轮辋再次用第二初步磨削研磨，砂轮位于轴向位移位置。重复磨削和测量工件的周边的步骤，直到轮辋轮廓具有期望的精度。然后利用开槽砂轮的最终位置研磨未来的晶圆。

2. 发明授权

US5996431A Twist action friction drive 失效
标题翻译：扭动摩擦驱动
公开(公告)号：US5996431A
公开(公告)日：1999-12-07
申请号：US51248
申请日：1998-04-02
申请人： Michael George Pierse
发明人： Michael George Pierse
IPC分类号： F16H19/02 , F16H21/16
CPC分类号： F16H19/025 , Y10T74/18056 , Y10T74/18568
摘要： A twist action roller friction drive comprises a rotating drive bar which drives in rotation a roller the axis of rotation of which is inclined relative to the axis of a rotationally fixed driven member with which the roller engages. The inclined roller comprises a single annular roller urged from the inside into driving contact with the driven member by one or more hydrostatic pads. The driven member is a tube and the skewed annular roller is in frictional engagement with the bore of the tube. In a typical use, the tube is fixed to the carriage of a machine tool and is aligned with the machine axis. Oil for the hydrostatic pad(s) acting on the roller is supplied through the drive bar along the axis thereof At its trailing end, the drive bar rotationally drives a skewed roller assembly in which the annular roller is incorporated, the remote forward end of the drive bar being driven in rotation, as by an electric motor Axial movement of the driven member is principally determined by the angle of skew of the roller so that if this angle is made very small, similarly small precise axial movements of the driven member of as little as 1 nm (nanometre) or less can be readily achieved, per revolution of the drive bar. This permits a high speed drive motor and in turn velocity feed back control.
摘要翻译： PCT No.PCT / GB97 / 01174 Sec。 371日期：1998年4月2日 102（e）日期1998年4月2日PCT 1997年4月30日PCT PCT。公开号WO98 / 10206 PCT 日期1998年5月12日，扭力摩擦驱动器包括旋转的驱动杆，该驱动杆驱动旋转辊，其旋转轴线相对于与辊接合的旋转固定的从动构件的轴线倾斜。倾斜辊包括从内部推动的单个环形辊，通过一个或多个静液压垫与被驱动构件的驱动接触。从动构件是管，并且偏斜的环形辊与管的孔摩擦接合。在典型的用途中，管被固定到机床的托架上并且与机器轴线对齐。作用在辊上的静液压油的油沿其轴线通过驱动杆供给。在其尾端处，驱动杆旋转地驱动其中结合有环形辊的偏斜辊组件，其中远端的驱动杆被旋转驱动，如通过电动机从动构件的轴向运动主要由辊的歪斜角确定，使得如果该角度非常小，则同样地，从动构件的小的精确的轴向运动作为在驱动杆的每转可以容易地实现小至1nm（纳米）或更小。这允许高速驱动电机，反过来又是速度反馈控制。

3. 发明授权

US6038489A Machine tools 失效
标题翻译：机械工具
公开(公告)号：US6038489A
公开(公告)日：2000-03-14
申请号：US952923
申请日：1997-11-24
申请人： John David Pickles , Selwyn Jonathan Griffiths
发明人： John David Pickles , Selwyn Jonathan Griffiths
IPC分类号： G05B19/18 , G06F19/00 , G06G7/78
CPC分类号： G05B19/184 , G05B2219/35116 , G05B2219/37575 , G05B2219/37576 , G05B2219/37577 , G05B2219/50057 , G05B2219/50071 , Y10T29/49286 , Y10T82/19 , Y10T82/2502 , Y10T82/2533
摘要： In a machine tool, a component such as a grinding wheel acts on a workpiece to form the latter into a circularly asymmetric shape, for example, a crankpin. Movement of the grinding wheel is controlled by a control signal which is derived from theoretical relative positions and positional velocities of the grinding wheel relative to the workpiece. In the course of at least one revolution of the workpiece, the respective positions of the grinding wheel relative to the workpiece are measured for each of a succession of angular positions of the workpiece. The measured positions are compared with corresponding theoretical positions and data indicative of any differences are stored, and then used to modify the control signal during a subsequent revolution of the workpiece so as to compensate for any of said differences and thereby reduce the magnitude of any error which would have resulted from the measured positional differences.
摘要翻译： PCT No.PCT / GB96 / 01646 Sec。 371日期：1997年11月24日 102（e）1997年11月24日PCT PCT 1996年7月10日PCT公布。出版物WO97 / 03391 日期1997年1月30日在机床中，诸如砂轮的部件作用在工件上以将其形成为圆形不对称的形状，例如曲柄销。砂轮的移动由通过砂轮相对于工件的理论相对位置和位置速度导出的控制信号来控制。在工件的至少一圈的过程中，对于工件的一系列角位置中的每一个测量砂轮相对于工件的相应位置。将测量的位置与对应的理论位置进行比较，并且存储指示任何差异的数据，然后用于在随后的工件旋转期间修改控制信号，以补偿任何所述差异，从而减小任何误差的大小这将由测量的位置差异导致。

4. 发明授权

US6095897A Grinding and polishing machines 失效
标题翻译：研磨抛光机
公开(公告)号：US6095897A
公开(公告)日：2000-08-01
申请号：US273060
申请日：1999-03-19
申请人： Mark Andrew Stocker , Dermot Robert Falkner , Paul Martin Howard Morantz , Michael George Pierse
发明人： Mark Andrew Stocker , Dermot Robert Falkner , Paul Martin Howard Morantz , Michael George Pierse
IPC分类号： B24B41/06 , B23Q1/36 , B23Q3/18 , B23Q17/24 , B24B1/00 , B24B5/04 , B24B5/06 , B24B9/00 , B24B9/06 , B24B17/04 , B24B17/06 , B24B19/02 , B24B41/00 , B24B41/02 , B24B41/04 , B24B47/12 , B24B49/00 , B24B49/02 , B24B49/12 , B24B53/00 , B24B53/07 , B24B55/02 , H01L21/00 , H01L21/304 , H01L21/306 , H01L21/66
CPC分类号： B24B53/07 , B23Q17/24 , B23Q3/186 , B24B17/04 , B24B17/06 , B24B41/02 , B24B41/04 , B24B49/02 , B24B49/12 , B24B5/04 , B24B5/06 , B24B5/065 , B24B9/065 , H01L21/02013 , H01L21/02021 , H01L21/67242 , H01L22/12 , H01L2924/0002
摘要： A grinding machine for grinding the edge of a disc or wafer comprises a grooved grinding wheel 308, means for transporting the wafers before or after grinding, and a housing 332 in which wafers 340 are parked on a vacuum chuck 336 awaiting inspection. A jet 338 protrudes into the housing and directs water or air towards the face and edge of the wafer on the chuck. The transport means then transfers wafers to an inspection station.
摘要翻译：用于研磨盘或晶片的边缘的研磨机包括带槽的砂轮308，用于在研磨之前或之后输送晶片的装置，以及壳体332，其中晶片340停放在真空吸盘336上等待检查。喷射器338突出到壳体中并且引导水或空气朝向卡盘上的晶片的表面和边缘。运输工具然后将晶片转移到检查站。

5. 发明授权

US5891255A Swarf removal 失效
标题翻译：清除切屑
公开(公告)号：US5891255A
公开(公告)日：1999-04-06
申请号：US875474
申请日：1997-07-09
申请人： Jeffrey Crick
发明人： Jeffrey Crick
IPC分类号： B08B7/02 , B23Q11/00 , B08B1/02 , B08B3/12
CPC分类号： B08B7/02 , B23Q11/0042 , Y02P70/171
摘要： Methods and apparatus for removing swarf from machined components are described, in which a component is mounted on support means and the latter is vibrated in a manner to cause the component to be accelerated alternately in one direction and then the other, for a period of time. The acceleration is such as to cause the component to momentarily lift off the support means during at least part of each of the vibrations so as to bounce repetitively on the support means. The latter includes fingers adapted to engage non-critical regions of the components to reduce damage to machined surfaces or distortion of the machined component during vibration. A fluid flushing may precede and/or follow the vibration step. Apparatus for performing the method comprises a table with vibratory drive means fingers upstanding from the table to engage the underside (or apertures in the underside of) a machined component, transfer means for moving a machined component onto the fingers and for moving the component from the fingers after the vibration step, and control means for controlling the operation of the vibratory drive. The apparatus may be in addition to, or form part of, a process line along which machined components progress.
摘要翻译： PCT No.PCT / GB96 / 00291 Sec。 371日期1997年7月9日第 102（e）日期1997年7月9日PCT提交1996年2月8日PCT公布。出版物WO96 / 24462 日本1996年8月15日描述了用于从机加工部件去除切屑的方法和装置，其中部件安装在支撑装置上并且后者以使得部件沿一个方向交替加速的方式振动，一段时间。加速度是使得部件在每个振动的至少一部分期间瞬间抬起支撑装置，以便在支撑装置上重复地弹起。后者包括适于接合部件的非临界区域的手指，以减少加工表面的损坏或在振动期间机加工部件的变形。流体冲洗可能在振动步骤之前和/或之后。用于执行该方法的装置包括具有振动驱动装置的工作台，其具有从工作台直立的手指，以接合加工部件的下侧（或下侧的孔），用于将加工部件移动到手指上并用于将部件从在振动步骤之后的手指，以及用于控制振动驱动器的操作的控制装置。该设备可以是加工组件沿着其加工或加工成一部分。

6. 发明授权

US6113087A Work holding apparatus 失效
标题翻译：工作装置
公开(公告)号：US6113087A
公开(公告)日：2000-09-05
申请号：US308107
申请日：1999-05-04
申请人： John Jeremy Taylor
发明人： John Jeremy Taylor
IPC分类号： B25B5/02 , B23K37/04 , B25B5/00 , B62D65/02 , B62D65/18 , B23Q3/08
CPC分类号： B62D65/02 , B23K37/0435 , B25B5/006
摘要： A workpiece clamp comprising an upstanding pillar (30, 32) having two relatively movable workpiece engaging jaws (34, 36, 42, 44) extending from, and carried by the upper end of the pillar. A drive (74) for effecting the movement of the jaws is located remote from the pillar and thrust transmitting means (54, 56, 62, 66) extends between the drive and one or both of the jaws, to effect relative movement between it and the other. The drive transmitting means may comprise a rigid thrust transmitting member such as a rod or lever, or a flexible sheathed cable, a sheathed rod or an exposed rod, a chain or a set of levers operatively connected one to the other, or any combination thereof.
摘要翻译： PCT No.PCT / GB97 / 03459 371日期1999年5月4日 102（e）1999年5月4日PCT 1997年12月22日PCT公布。公开号WO98 / 32646 日期1998年7月30日一种工件夹具，其包括具有两个相对移动的工件接合爪（34,36,42,44）的直立柱（30,32），该两个相对移动的工件接合爪（34,36,42,44）从柱的上端延伸并承载。用于实现钳口运动的驱动器（74）位于远离支柱的位置，并且推力传递装置（54,56,62,66）在驱动装置和一个或两个钳口之间延伸，以实现它与其之间的相对运动另一个。驱动传递装置可以包括刚性推力传递构件，例如杆或杆，或柔性护套电缆，护套杆或暴露的杆，链或一组可操作地彼此连接的杆，或其任何组合。

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