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    • 3. 发明授权
    • Edge grinding
    • 边磨
    • US06881130B1
    • 2005-04-19
    • US10018767
    • 2000-04-20
    • Mark Andrew Stocker
    • Mark Andrew Stocker
    • B24B53/00B23H1/04B23H9/00B24B1/00B24B9/00B24B9/06B24B47/22B24B49/04B24B53/065B25J9/16H01L21/304
    • B24B1/00B23H1/04B23H9/00B24B9/065B24B47/22B24B49/04B24B53/065B25J9/1602H01L21/304
    • A method of positioning a grooved grinding wheel relative to a disc-like circular workpiece for edge grinding the workpiece using the groove in the wheel includes the steps of mounting the workpiece for rotation about a first axis, mounting the grinding wheel for rotation about a second parallel axis, effecting relative movement between the workpiece and the wheel to engage the rim of the wheel within the groove and performing a preliminary grind. The position of the wheel is axially adjusted in accordance with the measurements made on the profile of the rim produced by the preliminary grind, and the rim is ground again with a second preliminary grind with the grinding wheel located at the axially shifted position. The steps of grinding and measuring the periphery of the workpiece are repeated until the rim profile possesses the desired accuracy. The final position of the grooved grinding wheel is then utilized for grinding future wafers.
    • 相对于盘状圆形工件定位带槽砂轮的方法,用于使用车轮中的槽边缘研磨工件的步骤包括以下步骤:将工件安装在第一轴线周围,将砂轮安装在第二轴上 平行的轴线,影响工件和车轮之间的相对运动,以使车轮轮缘在槽内啮合并进行预磨。 轮的位置根据由预研磨产生的轮辋轮廓上的测量值进行轴向调节,并且轮辋再次用第二初步磨削研磨,砂轮位于轴向位移位置。 重复磨削和测量工件的周边的步骤,直到轮辋轮廓具有期望的精度。 然后利用开槽砂轮的最终位置研磨未来的晶圆。