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    • 1. 发明授权
    • Semi-sacrificial mold for diamond structures
    • 用于金刚石结构的半牺牲模具
    • US07598107B1
    • 2009-10-06
    • US11234066
    • 2005-09-23
    • Hongbing LiuVictor B. Kley
    • Hongbing LiuVictor B. Kley
    • H01L21/00
    • B81C99/0085B81B2201/12G01Q60/38G01Q70/14
    • A patterned structure forms a portion of the mold for a diamond molded structure but is separable from the mold by the same processes that release the diamond part. The mold portion may itself be a component in a MEMS or NEMS structure or device or the precursor to such a structure or device. The mold portion may be made from sapphire or silicon carbide. The mold portion may be coated and polished to obtain an optically smooth surface over the diamond mold inside pit. The coating may be formed from one or more of silicon carbide, PTFE, silicon nitride, silicon dioxide, sapphire, a metal, a plastic, and an epoxy.
    • 图案化结构形成用于金刚石模制结构的模具的一部分,但是通过与释放金刚石部件相同的工艺可与模具分离。 模具部分本身可以是MEMS或NEMS结构或装置中的组件或这种结构或装置的前体。 模具部分可以由蓝宝石或碳化硅制成。 模具部分可以被涂覆和抛光以在凹坑内的金刚石模具上获得光学平滑的表面。 涂层可以由碳化硅,PTFE,氮化硅,二氧化硅,蓝宝石,金属,塑料和环氧树脂中的一种或多种形成。
    • 4. 发明授权
    • Methods of manufacturing diamond capsules
    • 制造金刚石胶囊的方法
    • US07309446B1
    • 2007-12-18
    • US11067600
    • 2005-02-25
    • Victor B. Kley
    • Victor B. Kley
    • B44C1/22
    • G01Q20/02G01Q30/02G01Q30/10G01Q70/14G01Q80/00G21B1/19Y02E30/16Y10S977/858Y10S977/871Y10S977/879
    • Capsules and similar objects are made from materials having diamond (sp3) lattice structures, including diamond materials in synthetic crystalline, polycrystalline (ordered or disordered), nanocrystalline and amorphous forms. The capsules generally include a hollow shell made of a diamond material that defines an interior region that may be empty or that may contain a fluid or solid material. Some of the capsules include access ports that can be used to fill the capsule with a fluid. Capsules and similar structures can be manufactured by growing diamond on suitably shaped substrates. In some of these methods, diamond shell sections are grown on substrates, then joined together. In other methods, a nearly complete diamond shell is grown around a form substrate, and the substrate can be removed through a relatively small opening in the shell.
    • 胶囊和类似物体由具有金刚石(sp 3+)晶格结构的材料制成,包括合成晶体,多晶(有序或无序),纳米晶体和无定形形式的金刚石材料。 胶囊通常包括由金刚石材料制成的中空壳,其限定可以是空的内部区域,或者可以包含流体或固体材料的内部区域。 一些胶囊包括可用于用流体填充胶囊的进入口。 胶囊和类似结构可以通过在合适形状的基底上生长金刚石来制造。 在这些方法中的一些方法中,金刚石壳部分在基底上生长,然后连接在一起。 在其他方法中,几乎完全的金刚石外壳生长在成形基板周围,并且基板可以通过外壳中较小的开口被移除。