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    • 3. 发明申请
    • Structure of wires for a semiconductor device
    • 半导体器件的电线结构
    • US20020030281A1
    • 2002-03-14
    • US09946366
    • 2001-09-06
    • LG Semicon Co., Ltd.
    • Hyuck-Chai Jung
    • H01L023/48
    • H01L21/76843H01L21/76802H01L21/76877
    • Disclosed are a method for forming a structure of wires for a semiconductor device in which pads are formed for contact in cell regions as well as core regions and periphery regions where cell aspect ratios are very high, and a structure of wires so formed. The semiconductor device includes a semiconductor substrate arranged into cell regions and periphery and/or core regions, the periphery and/or core regions having a well formed in the semiconductor substrate, the semiconductor substrate being arranged into active regions and field regions, the semiconductor device also having field insulating layers in the field regions, plural gate structures on portions of the semiconductor substrate in the active regions, and impurity regions in the semiconductor substrate between the gate structures. The method includes the steps of: forming an interlayer insulating structure on the semiconductor device; forming contact holes through the interlayer insulating structure to expose the impurity regions; lining contact-hole-portions of the interlayer insulating layer with portions of a barrier layer, respectively, such that the portions of the barrier layer contact the impurity regions; forming conductive pads on the portions of the barrier layer such that remainders of the contact holes are filled; and forming a wire layer on each one of the conductive pads.
    • 公开了一种用于形成用于半导体器件的布线结构的方法,其中形成用于在单元区域中接触的焊盘以及单元宽高比非常高的芯区域和外围区域以及如此形成的导线的结构。 半导体器件包括布置在单元区域和外围和/或芯区域中的半导体衬底,其中外围和/或芯区域在半导体衬底中形成良好,半导体衬底被布置成有源区域和场区域,半导体器件 在场区域中也具有场绝缘层,在有源区域中的半导体衬底的部分上的多个栅极结构以及栅极结构之间的半导体衬底中的杂质区域。 该方法包括以下步骤:在半导体器件上形成层间绝缘结构; 通过所述层间绝缘结构形成接触孔以暴露所述杂质区域; 分别将层间绝缘层的接触孔部分与阻挡层的部分层叠,使得阻挡层的部分与杂质区接触; 在所述阻挡层的所述部分上形成导电焊盘,使得所述接触孔的剩余部分被填充; 以及在每个导电焊盘上形成导线层。
    • 6. 发明授权
    • MOS device and fabrication method
    • MOS器件及制造方法
    • US6137141A
    • 2000-10-24
    • US69867
    • 1998-04-30
    • Jeong Hwan SonKi Jae Huh
    • Jeong Hwan SonKi Jae Huh
    • H01L21/265H01L21/266H01L21/28H01L21/336H01L29/10H01L29/423H01L29/78H01L29/76
    • H01L29/66583H01L21/2652H01L21/266H01L21/28114H01L29/1083H01L29/42376H01L29/66537H01L29/7833H01L29/66545
    • A metal-oxide-semiconductor (MOS) device in which the nonuniform dopant concentration in the channel region is obtained by means of ion implantation through a polysilicon gate electrode of nonuniform cross section, which is itself obtained by oxidizing the polysilicon using a semirecessed LOCOS process. The present invention is directed most generally to a semiconductor device which includes: a semiconductor substrate of a first conductivity type; a gate insulator on the substrate, the gate insulator sharing an interface with the substrate; a gate electrode on the gate insulator, the gate electrode having a first side, a second side, and a middle region between the first and second sides; a source doped region of a second conductivity type within the substrate to the first side of the gate electrode and a drain doped region of the second conductivity type within the substrate to the second side of the gate electrode, the source and drain doped regions self-aligned to the gate electrode; and a channel doped region of the first conductivity type within the substrate below the gate electrode, the channel doped region having a peak dopant concentration profile such that the peak dopant concentration under the middle region of the gate electrode occurs further below the gate insulator-substrate interface than does either the peak dopant concentration under the first side of the gate electrode or the peak dopant concentration under the second side of the gate electrode.
    • 通过离子注入通过非均匀截面的多晶硅栅电极获得沟道区中的不均匀掺杂剂浓度的金属氧化物半导体(MOS)器件,其本身是通过使用半加工的LOCOS工艺氧化多晶硅而获得的 。 本发明最为普遍地涉及一种半导体器件,它包括:第一导电类型的半导体衬底; 基板上的栅极绝缘体,栅极绝缘体与衬底共用界面; 所述栅电极在所述栅绝缘体上具有第一侧和第二侧之间的第一侧,第二侧和中间区; 在栅极电极的第一侧的衬底内的第二导电类型的源极掺杂区域和衬底内的第二导电类型的漏极掺杂区域到栅电极的第二侧, 与栅电极对准; 以及在栅电极下方的衬底内的第一导电类型的沟道掺杂区域,沟道掺杂区域具有峰值掺杂浓度分布,使得栅极电极的中间区域附近的峰值掺杂剂浓度进一步低于栅绝缘体衬底 界面比在栅电极的第一侧下的峰值掺杂浓度或栅电极的第二侧下的峰值掺杂剂浓度。
    • 9. 发明授权
    • Signal compressing apparatus
    • 信号压缩装置
    • US6121834A
    • 2000-09-19
    • US286435
    • 1999-04-06
    • Seong Ryeol Kim
    • Seong Ryeol Kim
    • H03M7/30H03F1/30H03G1/04H03G7/08H03G3/20
    • H03G7/08H03F1/30H03G1/04
    • A signal compressing apparatus is disclosed, which controls output signal in case of exceeding input signal to increase transmission efficiency and obtains stable output due to temperature compensation. The signal compressing apparatus includes an amplifier for amplifying an input signal applied through an input resistor connected to an input terminal at a constant gain, and a gain controller for rectifying only a specific band signal of output signals of the amplifier between the input terminal of the amplifier and an output terminal thereof, compensating temperature of the rectified signal, and outputting a control signal to allow the gain of the amplifier to be constant.
    • 公开了一种信号压缩装置,其在超过输入信号的情况下控制输出信号以增加传输效率并且由于温度补偿而获得稳定的输出。 信号压缩装置包括:放大器,用于放大以恒定增益连接到输入端子的输入电阻器施加的输入信号;以及增益控制器,用于仅在所述输入端子的输入端之间整流放大器的输出信号的特定频带信号 放大器及其输出端子,补偿整流信号的温度,并输出控制信号以允许放大器的增益恒定。
    • 10. 发明授权
    • Method of fabricating nonvolatile memory device
    • 制造非易失性存储器件的方法
    • US6121072A
    • 2000-09-19
    • US35128
    • 1998-03-05
    • Woong-Lim ChoiKyeong-Man Ra
    • Woong-Lim ChoiKyeong-Man Ra
    • H01L27/112H01L21/8247H01L27/115H01L29/788H01L29/792
    • H01L27/11517H01L27/115
    • A method of fabricating a nonvolatile memory device having a substrate, includes the steps of forming a plurality of bit lines in the substrate, forming a plurality of field oxide layers on the substrate perpendicular to the bit lines, forming a gate insulating layer on an entire surface of the substrate including the bit lines and the field oxide layers, forming a plurality of floating lines on the gate insulating layer between the bit lines, forming a dielectric layer on the entire surface of the semiconductor substrate including the floating line's and the gate insulating layer, forming a plurality of word lines between the field oxide layer perpendicular to the bit lines, forming sidewall spacer at both sides of the word lines, selectively removing the dielectric layer and the floating lines using the word lines and the sidewall spacer as masks to form a plurality of floating gates, forming a tunneling layer at both sides of the floating gates, and forming a plurality of program lines between the bit lines.
    • 一种制造具有衬底的非易失性存储器件的方法,包括在衬底中形成多个位线的步骤,在垂直于位线的衬底上形成多个场氧化物层,在整个衬底上形成栅极绝缘层 包括位线和场氧化物层的衬底的表面,在位线之间的栅极绝缘层上形成多条浮动线,在包括浮动线的半导体衬底和栅极绝缘层的整个表面上形成介电层 层,在垂直于位线的场氧化层之间形成多个字线,在字线的两侧形成侧壁间隔物,使用字线和侧壁间隔件作为掩模选择性地去除电介质层和浮动线, 形成多个浮动栅极,在浮动栅极的两侧形成隧道层,并形成多个程序 在位线之间。