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    • 10. 发明授权
    • Planar heater
    • 平面加热器
    • US08071920B2
    • 2011-12-06
    • US12270094
    • 2008-11-13
    • Kazuhiko ShimanukiDaisuke Hayashi
    • Kazuhiko ShimanukiDaisuke Hayashi
    • H05B3/68H05B3/08
    • H01L21/67103H05B3/143
    • A planar heater 1 in which a power supply terminal unit 108 which supplies an electric power is arranged on a central portion on a lower surface of a silica glass plate-like member 102. The power supply terminal unit includes small-diameter silica glass tubes 105a and 106a, which contain a connection line which supplies an electric power to a carbon heat generator and a large-diameter silica glass tube 2 which contains the small-diameter silica glass tubes 105a and 106a. A flange portion 2a is formed on a lower end of the large-diameter silica glass tube 2, and a bent portion 2b having different diameters is formed between an upper end of the large-diameter silica glass and the flange portion 2a, and the first heat shielding plates 19, 20 and 21 configured by metal plates or opaque silica glass plates are contained in the large-diameter silica glass tube below the bent portion.
    • 在石英玻璃板状构件102的下表面的中央部配置有供电端子单元108供给电力的平面加热器1.电源端子单元包括小直径石英玻璃管105a 和106a,其包含向碳发生器供给电力的连接线和包含小直径石英玻璃管105a和106a的大直径石英玻璃管2。 在大直径石英玻璃管2的下端形成有凸缘部2a,在大直径石英玻璃的上端和凸缘部2a之间形成具有不同直径的弯曲部2b, 由金属板或不透明石英玻璃板构成的隔热板19,20和21包含在弯曲部分下方的大直径石英玻璃管中。