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    • 1. 发明授权
    • Planar heater
    • 平面加热器
    • US08071920B2
    • 2011-12-06
    • US12270094
    • 2008-11-13
    • Kazuhiko ShimanukiDaisuke Hayashi
    • Kazuhiko ShimanukiDaisuke Hayashi
    • H05B3/68H05B3/08
    • H01L21/67103H05B3/143
    • A planar heater 1 in which a power supply terminal unit 108 which supplies an electric power is arranged on a central portion on a lower surface of a silica glass plate-like member 102. The power supply terminal unit includes small-diameter silica glass tubes 105a and 106a, which contain a connection line which supplies an electric power to a carbon heat generator and a large-diameter silica glass tube 2 which contains the small-diameter silica glass tubes 105a and 106a. A flange portion 2a is formed on a lower end of the large-diameter silica glass tube 2, and a bent portion 2b having different diameters is formed between an upper end of the large-diameter silica glass and the flange portion 2a, and the first heat shielding plates 19, 20 and 21 configured by metal plates or opaque silica glass plates are contained in the large-diameter silica glass tube below the bent portion.
    • 在石英玻璃板状构件102的下表面的中央部配置有供电端子单元108供给电力的平面加热器1.电源端子单元包括小直径石英玻璃管105a 和106a,其包含向碳发生器供给电力的连接线和包含小直径石英玻璃管105a和106a的大直径石英玻璃管2。 在大直径石英玻璃管2的下端形成有凸缘部2a,在大直径石英玻璃的上端和凸缘部2a之间形成具有不同直径的弯曲部2b, 由金属板或不透明石英玻璃板构成的隔热板19,20和21包含在弯曲部分下方的大直径石英玻璃管中。
    • 5. 发明授权
    • Gas flow path structure and substrate processing apparatus
    • 气体流路结构和基板处理装置
    • US08623172B2
    • 2014-01-07
    • US12749642
    • 2010-03-30
    • Daisuke Hayashi
    • Daisuke Hayashi
    • C23C16/00C23F1/00H01L21/306C23C16/455C23C16/50C23C16/503
    • H01J37/32568
    • A substrate processing apparatus includes: a depressurizable processing chamber 11; a shaft 26 supporting a facing electrode 24 provided within the processing chamber 11 while allowing the facing electrode 24 to be movable with respect to a mounting electrode 12; a first ring-shaped bellows 31 concentrically installed at an outer peripheral portion of the shaft 26; and a second bellows 32 concentrically installed at an outer peripheral portion of the first bellows 31. The first bellows 31 absorbs a displacement of the facing electrode 24 with respect to a wall surface 13 at a penetration portion where the shaft 26 penetrates the wall surface 13 of the processing chamber 11, and seals the inside of the processing chamber 11 against the ambient atmosphere around the shaft 26. A ring-shaped gas flow path 35 is formed by the first bellows 31 and the second bellows 32.
    • 基板处理装置包括:可减压处理室11; 轴26,其支撑设置在处理室11内的面对电极24,同时允许面对电极24能够相对于安装电极12移动; 同心地安装在轴26的外周部分的第一环形波纹管31; 以及同心地安装在第一波纹管31的外周部分的第二波纹管32.第一波纹管31在轴26穿透壁表面13的穿透部分吸收面对电极24相对于壁表面13的位移 并且密封处理室11的内部抵靠围绕轴26的环境大气。环形气体流路35由第一波纹管31和第二波纹管32形成。
    • 7. 发明授权
    • Projector that operates in a brightness priority mode and in a contrast priority mode
    • 在亮度优先模式和对比度优先模式下运行的投影机
    • US08398248B2
    • 2013-03-19
    • US12699449
    • 2010-02-03
    • Masakazu KawamuraDaisuke Hayashi
    • Masakazu KawamuraDaisuke Hayashi
    • G03B21/14
    • G03B21/2053
    • A projector includes: an illuminating device including a light source device, a first lens array that comprises first regions located at four corners in the first lens array when viewed along a system optical axis and second regions located between the two first regions, and a second lens array; a light modulating device; a projection optical system; a light control device; and a mode selection device. The light control device blocks part of the plural partial light beams by causing first and second light shields to integrally operate, when the brightness priority mode is selected. The light control device always blocks part of the partial light beams with the first light shields and blocks part of the partial light beams by causing the second light shields to operate independently from the first light shields.
    • 投影仪包括:照明装置,包括光源装置,第一透镜阵列,其包括当沿着系统光轴观察时位于第一透镜阵列中的四个角处的第一区域和位于两个第一区域之间的第二区域;以及第二透镜阵列 镜头阵列 光调制装置; 投影光学系统; 光控装置; 和模式选择装置。 当选择亮度优先模式时,光控制装置通过使第一和第二光屏蔽一体地操作来阻挡多个部分光束的一部分。 光控制装置总是通过使第二光屏独立于第一遮光罩来操作,通过第一遮光罩来阻挡部分光束并阻挡部分光束的一部分。
    • 8. 发明授权
    • Cooling block forming electrode
    • 冷却块形成电极
    • US08319141B2
    • 2012-11-27
    • US12876597
    • 2010-09-07
    • Toshifumi IshidaDaisuke Hayashi
    • Toshifumi IshidaDaisuke Hayashi
    • B23K9/00F02M3/10F28F7/00
    • H05H1/46H01J37/32009H01J37/32724
    • The present invention is a cooling block that forms an electrode for generating a plasma for use in a plasma process, and includes a channel for a cooling liquid, the cooling block comprising: a first base material and a second base material respectively made of aluminum, at least one of the first and second base materials having a recess for forming a channel for a cooling liquid; and a diffusion bonding layer, in which zinc is diffused in aluminum, and an anti-corrosion layer of a zinc oxide film, the layers being formed by interposing zinc between the first and second base materials, and by bonding the first and second base materials with zinc interposed therebetween in a heating atmosphere containing oxygen.
    • 本发明是一种冷却块,其形成用于产生用于等离子体处理的等离子体的电极,并且包括用于冷却液体的通道,所述冷却块包括:分别由铝制成的第一基材和第二基材, 所述第一和第二基底材料中的至少一个具有用于形成用于冷却液体的通道的凹部; 以及锌在铝中扩散的扩散接合层和氧化锌膜的防腐蚀层,所述层通过在第一和第二基底材料之间插入锌而形成,并且通过将第一和第二基底材料 在含有氧的加热气氛中夹有锌。
    • 9. 发明申请
    • SPECTROPHOTOMETER AND METHOD FOR CALIBRATING THE SAME
    • 分光光度计及其校准方法
    • US20120250014A1
    • 2012-10-04
    • US13431718
    • 2012-03-27
    • Daisuke HayashiKatsumi Nishimura
    • Daisuke HayashiKatsumi Nishimura
    • G01J3/40
    • G01J3/42G01J3/28G01N21/274G01N21/276G01N21/3504
    • The disclosure provides a spectrophotometer, including a light source for irradiating light into a sample gas, a photodetector for detecting light transmitted through the sample gas, an optical filter, and an operation device for calculating a concentration of an actual gas to be measured, contained in the sample gas based on a detection signal value obtained from the photodetector. The operation device calculates the concentration of the actual gas based on function a for associating a concentration of a substitute gas with the actual gas obtained from a reference instrument, function β for associating a relation between a light absorption of the actual gas and the substitute gas in the reference instrument, with a relation between a light absorption of the actual gas the substitute gas in a calibration instrument, and a function indicating a relation between the concentration of the substitute gas and the detection signal value.
    • 本发明提供了一种分光光度计,包括用于将光照射到样气中的光源,用于检测透过样气的光检测器,滤光器和用于计算待测实际气体浓度的操作装置, 基于从光电检测器获得的检测信号值在样品气体中。 操作装置基于将替代气体的浓度与从参考仪器获得的实际气体相关联的函数a来计算实际气体的浓度,函数&bgr; 用于将实际气体的光吸收与参考仪器中的替代气体之间的关系与校准仪器中的替代气体的实际气体的吸光率和表示浓度之间的关系的函数相关联 替代气体和检测信号值。