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81. 发明申请

US20160247662A1 SAMPLE PROCESSING EVALUATION APPARATUS 有权
标题翻译：样品加工评估装置
公开(公告)号：US20160247662A1
公开(公告)日：2016-08-25
申请号：US15048073
申请日：2016-02-19
申请人： HITACHI HIGH-TECH SCIENCE CORPORATION
发明人： Toshiaki FUJII , Hiroyuki SUZUKI
IPC分类号： H01J37/22 , H01J37/285 , H01J37/305
CPC分类号： H01J37/222 , H01J37/20 , H01J37/28 , H01J37/285 , H01J37/305 , H01J2237/2001 , H01J2237/20207 , H01J2237/2062 , H01J2237/221 , H01J2237/2611 , H01J2237/31749
摘要： A sample processing evaluation apparatus includes a charged particle beam column that irradiates a sample with charged particle beam, a sample holder that holds both ends of the sample, and a sample stage on which the sample holder is placed, in which the sample holder is configured to rotate the sample about a rotation axis between the sample stage and the charged particle beam column.
摘要翻译：样品处理评价装置包括：带有带电粒子束照射样品的带电粒子束柱，保持样品两端的样品保持器和放置有样品架的样品台，其中样品架配置以使样品围绕样品台和带电粒子束柱之间的旋转轴线旋转。

82. 发明申请

US20160181060A1 FIDUCIAL-BASED CORRELATIVE MICROSCOPY 有权
标题翻译：基于FIDUCIC的相关显微镜
公开(公告)号：US20160181060A1
公开(公告)日：2016-06-23
申请号：US14579056
申请日：2014-12-22
申请人： FEI Company
发明人： Steven Randolph , James Miyasaki , Marcus Straw
IPC分类号： H01J37/22 , H01J37/26 , G01N21/64
CPC分类号： H01J37/222 , G01N21/6428 , G01N21/6456 , G01N21/6458 , G01N21/6486 , G01N2021/6439 , G02B21/0032 , G02B21/0076 , G02B21/008 , G02B21/16 , G02B21/365 , H01J37/26 , H01J2237/221 , H01J2237/24578 , H01J2237/2611
摘要： A method is provided for preparing a sample for correlative optical and electron imaging and correcting aberrations in the imaging process due to sample deformation. Dye-coated fiducial markers are distributed throughout the sample volume. The fiducial markers are preferably in the form of polystyrene nanospheres that are functionalized on their surface and subsequently treated with a fluorescent dye. The dye does not penetrate the sphere but only binds to the surface. By limiting the dye to the surface of the nanospheres, the shape of the spheres can be determined in iPALM and in charged particle images aiding in tracking of physical changes that may occur to the sample volume.
摘要翻译：提供了一种用于制备由于样品变形而在成像过程中进行相关光学和电子成像和校正像差的样品的方法。染料涂层的基准标记物分布在整个样品体积中。基准标记物优选为在其表面上官能化并随后用荧光染料处理的聚苯乙烯纳米球的形式。染料不会渗透到球体中，而只能与表面结合。通过将染料限制在纳米球的表面，可以在iPALM和带电粒子图像中确定球体的形状，帮助跟踪样品体积可能发生的物理变化。

83. 发明申请

US20150262788A1 CROSS-SECTION PROCESSING AND OBSERVATION METHOD AND CROSS-SECTION PROCESSING AND OBSERVATION APPARATUS 审中-公开
标题翻译：交叉处理和观察方法及交叉处理和观察装置
公开(公告)号：US20150262788A1
公开(公告)日：2015-09-17
申请号：US14728004
申请日：2015-06-02
申请人： HITACHI HIGH-TECH SCIENCE CORPORATION
发明人： Atsushi UEMOTO , Xin MAN , Tatsuya ASAHATA
IPC分类号： H01J37/26 , G01N23/04 , H01J37/28 , H01J37/304 , H01J37/30 , G01N23/225 , G01T1/36
CPC分类号： H01J37/265 , G01N1/32 , G01N23/04 , G01N23/2208 , G01N23/225 , G01N23/2251 , G01N23/2255 , G01T1/36 , H01J37/28 , H01J37/3005 , H01J37/304 , H01J37/3045 , H01J2237/2611 , H01J2237/28 , H01J2237/2807 , H01J2237/2812 , H01J2237/30472 , H01J2237/30483 , H01J2237/31745 , H01J2237/31749
摘要： A cross-section processing and observation method performed by a cross-section processing and observation apparatus comprises a cross-section processing step of forming a cross-section by irradiating a sample with an ion beam; a cross-section observation step of obtaining an observation image of the cross-section by irradiating the cross-section with an electron beam; and repeating the cross-section processing step and the cross-section observation step so as to obtain observation images of a plurality of cross-sections. In a case where Energy Dispersive X-ray Spectrometry (EDS) measurement of the cross-section is performed and an X-ray of a specified material or of a non-specified material that is different from a pre-specified material is detected, an irradiation condition of the ion beam is changed so as to obtain observation images of a plurality of cross-sections of the specified material, and the cross-section processing and observation of the specified material is performed.
摘要翻译：由横截面加工和观察装置执行的横截面加工和观察方法包括：用离子束照射样品形成横截面的横截面处理步骤; 横截面观察步骤，通过用电子束照射横截面来获得横截面的观察图像; 并且重复横截面处理步骤和横截面观察步骤，以获得多个横截面的观察图像。在执行横截面的能量分散X射线光谱法（EDS）测量并且检测到与预定材料不同的指定材料或非指定材料的X射线的情况下，改变离子束的照射条件以获得指定材料的多个横截面的观察图像，并且执行指定材料的横截面处理和观察。

84. 发明授权

US09080945B2 Cross-section processing and observation method and cross-section processing and observation apparatus 有权
标题翻译：截面加工观察方法及横截面加工观察装置
公开(公告)号：US09080945B2
公开(公告)日：2015-07-14
申请号：US14078852
申请日：2013-11-13
申请人： HITACHI HIGH-TECH SCIENCE CORPORATION
发明人： Atsushi Uemoto , Xin Man , Tatsuya Asahata
IPC分类号： H01J37/26 , H01J37/304 , H01J37/305 , G01N23/225 , H01J37/30 , G01N23/22 , G01N1/32
CPC分类号： H01J37/265 , G01N1/32 , G01N23/04 , G01N23/2208 , G01N23/225 , G01N23/2251 , G01N23/2255 , G01T1/36 , H01J37/28 , H01J37/3005 , H01J37/304 , H01J37/3045 , H01J2237/2611 , H01J2237/28 , H01J2237/2807 , H01J2237/2812 , H01J2237/30472 , H01J2237/30483 , H01J2237/31745 , H01J2237/31749
摘要： A cross-section processing and observation method performed by a cross-section processing and observation apparatus, the method comprising: a cross-section processing step of forming a cross-section by irradiating a sample with an ion beam; a cross-section observation step of obtaining an observation image of the cross-section by irradiating the cross-section with an electron beam; and repeating the cross-section processing step and the cross-section observation step so as to obtain observation images of a plurality of cross-sections, wherein, in a case where Energy Dispersive X-ray Spectrometry (EDS) measurement of the cross-section is performed and an X-ray of a specified material is detected, an irradiation condition of the ion beam is changed so as to obtain observation images of a plurality of cross-sections of the specified material, and the cross-section processing and observation of the specified material is performed.
摘要翻译：一种横截面加工和观察装置的横截面处理和观察方法，该方法包括：横截面处理步骤，用离子束照射样品形成横截面; 横截面观察步骤，通过用电子束照射横截面来获得横截面的观察图像; 并且重复横截面处理步骤和横截面观察步骤以获得多个横截面的观察图像，其中，在横截面的能量分散X射线光谱（EDS）测量的情况下并且检测到特定材料的X射线，改变离子束的照射条件以获得指定材料的多个横截面的观察图像，并且对横截面加工和观察执行指定的材料。

85. 发明授权

US09012842B2 Charged particle beam device and inclined observation image display method 有权
标题翻译：带电粒子束装置和倾斜观察图像显示方法
公开(公告)号：US09012842B2
公开(公告)日：2015-04-21
申请号：US14370736
申请日：2012-12-20
申请人： Hitachi High-Technologies Corporation
发明人： Wataru Kotake , Shigeru Kawamata , Sukehiro Ito
IPC分类号： H01J37/00 , H01J37/24 , H01J37/26 , H01J37/28
CPC分类号： H01J37/24 , H01J37/1478 , H01J37/21 , H01J37/261 , H01J37/28 , H01J2237/2611
摘要： A control device (50) for a charged particle beam device (100) tilts the irradiation axis of a primary electron beam (4) to the left, straight, or to the right via tilting coils (11, 12) each time the primary electron beam (4) scans the surface of a sample (15) over a single scanning line. When the irradiation axis is changed, the focal point of the primary electron beam (4) is adjusted by a focal point-adjusting coil (14) based on the tilt of the irradiation axis in order to take a left-tilted observation image, a non-tilted observation image or a right-tilted observation image of the surface of a sample (15) for each scanning line. The left-tilted observation images, non-tilted observation images and right-tilted observation images for the scanning lines obtained up to this point are simultaneously displayed on the same display device (31). In this way, focused non-tilted observation images and focused tilted observation images can be taken and displayed nearly simultaneously.
摘要翻译：用于带电粒子束装置（100）的控制装置（50）每次通过倾斜线圈（11,12）将一次电子束（4）的照射轴向左，向右或向右倾斜，光束（4）通过单个扫描线扫描样品（15）的表面。当照射轴改变时，基于照射轴的倾斜度，通过焦点调节线圈（14）调节一次电子束（4）的焦点，以便进行左倾斜的观察图像，每个扫描线的样品（15）的表面的非倾斜观察图像或右倾斜观察图像。在同一显示装置（31）上同时显示直到此为止的扫描线的左倾斜观察图像，非倾斜观察图像和右倾斜观察图像。以这种方式，可以同时拍摄和显示聚焦的非倾斜观察图像和聚焦的倾斜观察图像。

86. 发明授权

US08841613B2 Method and system for 4D tomography and ultrafast scanning electron microscopy 有权
标题翻译： 4D断层扫描和超快扫描电子显微镜的方法和系统
公开(公告)号：US08841613B2
公开(公告)日：2014-09-23
申请号：US12884001
申请日：2010-09-16
申请人： Ahmed H. Zewail , Oh-Hoon Kwon , Omar Farghaly Mohammed Abdelsaboor , Ding-Shyue Yang
发明人： Ahmed H. Zewail , Oh-Hoon Kwon , Omar Farghaly Mohammed Abdelsaboor , Ding-Shyue Yang
IPC分类号： H01J37/28 , H01J37/285 , H01J37/22
CPC分类号： H01J37/28 , H01J37/228 , H01J37/285 , H01J2237/0432 , H01J2237/2004 , H01J2237/20207 , H01J2237/2065 , H01J2237/2611 , H01J2237/2803
摘要： A 4D electron tomography system includes a stage having one or more degrees of freedom, an electron source, and electron optics operable to direct electron pulses to impinge on a sample supported on the stage. A pulse of the electron pulses impinges on the sample at a first time. The system also includes a laser system and optics operable to direct optical pulses to impinge on the sample. A pulse of the optical pulses impinges on the sample at a second time. The system further includes a detector operable to receive the electron pulses passing through the sample, a controller operable to independently modify an orientation of the stage and at least one of the first time or the second time, a memory operable to store sets of images, and a processor operable to form a 4D tomographic image set from the sets of images.
摘要翻译： 4D电子断层摄影系统包括具有一个或多个自由度的阶段，电子源和可操作以将电子脉冲引导到支撑在舞台上的样本上的电子光学器件。电子脉冲的脉冲在第一次撞击样品。该系统还包括激光系统和光学器件，其可操作以引导光脉冲撞击样品。光脉冲的脉冲在第二次撞击样品。该系统还包括可操作以接收通过样品的电子脉冲的检测器，可操作以独立地修改载物台的取向和第一时间或第二时间中的至少一个的控制器，可操作地存储图像集合的存储器，以及可操作以从所述图像集合形成4D断层图像集的处理器。

87. 发明授权

US08816303B2 Method of processing of an object 有权
标题翻译：处理对象的方法
公开(公告)号：US08816303B2
公开(公告)日：2014-08-26
申请号：US13164122
申请日：2011-06-20
申请人： Josef Biberger , Ralph Pulwey , Jaroslaw Paluszynski , Dietmar Doenitz , Hans Mathèe , Michael Steigerwald
发明人： Josef Biberger , Ralph Pulwey , Jaroslaw Paluszynski , Dietmar Doenitz , Hans Mathèe , Michael Steigerwald
IPC分类号： H01J37/30 , H01J37/305 , H01J37/317 , H01J37/304
CPC分类号： H01J37/3056 , G01B15/04 , H01J37/30 , H01J37/3005 , H01J37/3007 , H01J37/304 , H01J37/3174 , H01J2237/2611 , H01J2237/30455 , H01J2237/30494 , H01J2237/31722 , H01J2237/31749
摘要： A method of processing of an object comprises scanning a particle beam across a surface of the object and detecting electrons emerging from the object due to the scanning; determining a height difference between the surface of the object and a predetermined surface for each of plural of locations on the surface of the object based on the detected electrons; determining a processing intensity for each of the plural locations on the surface of the object based on the determined height differences; and directing a particle beam to the plural locations based on the determined processing intensities, in order to remove material from or deposit material on the object at the plural locations.
摘要翻译：一种处理物体的方法包括：扫描物体表面上的粒子束，并检测由于扫描而从物体出射的电子; 基于检测到的电子，确定物体表面与物体表面上的多个位置中的每一个的预定表面之间的高度差; 基于所确定的高度差来确定所述物体表面上的所述多个位置中的每一个的处理强度; 并且基于所确定的处理强度将粒子束引导到多个位置，以便从多个位置处去除材料或在物体上沉积材料。

88. 发明授权

US08759802B2 Automated slice milling for viewing a feature 有权
标题翻译：自动切片铣削以查看特征
公开(公告)号：US08759802B2
公开(公告)日：2014-06-24
申请号：US13735714
申请日：2013-01-07
申请人： FEI Company
发明人： Ryan Tanner
IPC分类号： H01J37/14 , H01J37/28
CPC分类号： H01J37/3005 , G01N1/286 , H01J37/26 , H01J37/265 , H01J37/28 , H01J37/30 , H01J37/3045 , H01J37/3056 , H01J2237/2611 , H01J2237/28 , H01J2237/2803 , H01J2237/2814 , H01J2237/30472 , H01J2237/3174 , H01J2237/31745 , H01J2237/31749
摘要： A method and apparatus for performing a slice and view technique with a dual beam system. The feature of interest in an image of a sample is located by machine vision, and the area to be milled and imaged in a subsequent slice and view iteration is determined through analysis of data gathered by the machine vision at least in part. A determined milling area may be represented as a bounding box around a feature, which dimensions can be changed in accordance with the analysis step. The FIB is then adjusted accordingly to slice and mill a new face in the subsequent slice and view iteration, and the SEM images the new face. Because the present invention accurately locates the feature and determines an appropriate size of area to mill and image, efficiency is increased by preventing the unnecessary milling of substrate that does not contain the feature of interest.
摘要翻译：一种使用双光束系统执行切片和观看技术的方法和装置。通过机器视觉来定位样本图像中的兴趣特征，并且通过至少部分地通过机器视觉收集的数据的分析来确定要在后续切片和观看迭代中被研磨和成像的区域。确定的铣削区域可以表示为围绕特征的边界框，该尺寸可以根据分析步骤而改变。然后，相应地调整FIB以在随后的切片中切割并研磨新的面并查看迭代，并且SEM对新的面进行成像。因为本发明精确地定位了特征并且确定了适当的面积尺寸以进行研磨和图像，因此通过防止不需要研磨不含有感兴趣特征的基底来提高效率。

89. 发明授权

US08698078B2 Charged-particle microscopy with occlusion detection 有权
标题翻译：具有闭塞检测的带电粒子显微镜
公开(公告)号：US08698078B2
公开(公告)日：2014-04-15
申请号：US13472183
申请日：2012-05-15
申请人： Daniel Woodrow Phifer, Jr. , Faysal Boughorbel
发明人： Daniel Woodrow Phifer, Jr. , Faysal Boughorbel
IPC分类号： H01J37/26
CPC分类号： H01J37/28 , H01J37/222 , H01J37/244 , H01J2237/2442 , H01J2237/2445 , H01J2237/24475 , H01J2237/2448 , H01J2237/2611 , H01J2237/2807 , H01J2237/2817
摘要： This invention relates to a method of examining a sample using a charged-particle microscope. This invention solves the problem of occlusion effects, whereby a given line-of-sight behind a particular region on a sample and a given detector is blocked by a topographical feature on the sample, thus hampering detection of the emitted radiation emanating from the occluded region. This problem is solved by using at least a first and second detector configuration to detect each portion of the emitted radiation and to produce at least a first and second corresponding image based thereupon; and using computer processing apparatus to automatically compare different members of the set of corresponding images and mathematically identify on the sample at least one occlusion region with an occluded line-of-sight relative to at least one of the detector configurations.
摘要翻译：本发明涉及使用带电粒子显微镜检查样品的方法。本发明解决了遮挡效应的问题，由此样品和给定检测器上的特定区域后面的给定视线被样品上的形貌特征阻挡，从而妨碍了从封闭区域发出的辐射的检测。通过使用至少第一和第二检测器配置来检测所发射的辐射的每个部分并且基于此产生至少第一和第二对应的图像来解决该问题; 并且使用计算机处理设备自动比较所述对应图像集合中的不同成员，并且相对于所述检测器配置中的至少一个在所述至少一个具有闭塞视线的遮挡区域上数学地识别所述样本。

90. 发明申请

US20140070095A1 Method of Performing Tomographic Imaging of a Sample in a Charged-Particle Microscope 审中-公开
标题翻译：在带电粒子显微镜中进行样品的层析成像的方法
公开(公告)号：US20140070095A1
公开(公告)日：2014-03-13
申请号：US14021886
申请日：2013-09-09
申请人： FEI Company
发明人： Remco Schoenmakers , David Foord
IPC分类号： G01N23/04 , G01N23/225
CPC分类号： G01N23/046 , G01N23/2251 , G01N2223/419 , G06T11/005 , H01J37/244 , H01J37/28 , H01J2237/226 , H01J2237/24485 , H01J2237/24585 , H01J2237/2611 , H01J2237/2802 , H01J2237/2807
摘要： The invention relates to a method of performing tomographic imaging involving repeatedly directing a charged particle beam through a sample for a series of sample tilts to acquire a corresponding set of images and mathematically combining the images to construct a composite image. The latter of which consists of, at each of a second series of sample tilts, using a spectral detector to accrue a spectral map of said sample, thus acquiring a collection of spectral maps; analyzing said spectral maps to derive compositional data of the sample; and employing said compositional data in constructing said composite image.
摘要翻译：本发明涉及一种执行断层图像成像的方法，其涉及重复地引导带电粒子束通过用于一系列样本倾斜的样本，以获取对应的一组图像，并在数学上组合图像以构建合成图像。后者包括在第二系列样品倾斜中的每一个处，使用光谱检测器产生所述样品的光谱图，从而获得光谱图的集合; 分析所述光谱图以得出样品的成分数据; 以及在构建所述合成图像时采用所述组成数据。

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