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    • 81. 发明申请
    • Method of Producing 3-D Mold, Method of Producing Finely Processed Product, Method of Producing Fine-Pattern Molded Product, 3-D Mold, Finely Processed Product, Fine-Pattern Molded Product and Optical Component
    • 三维模具生产方法,精细加工产品生产方法,精细图案模制品生产方法,三维模具,精细加工产品,精细图案成型产品及光学元件
    • US20090026583A1
    • 2009-01-29
    • US11816773
    • 2006-02-21
    • Jun Taniguchi
    • Jun Taniguchi
    • H01L29/06G21G5/00H01L21/00
    • B29C33/3842B29C33/424B29K2083/00B81C99/0085B82Y10/00B82Y40/00G03F7/0002G03F7/0017H01J37/3174
    • To provide production methods for a 3-D mold, a finely processed product, and a fine pattern molded product in which the depth and the line width can be formed with high precision, a 3-D mold, a finely processed product, a fine-pattern molded product, and an optical element formed with high precision.A method of producing a 3-D mold that is configured to control depth within 10 nm and form a line width of 200 nm or less, wherein an irradiation step, which irradiates an electron beam to a resist layer of an object of processing that has the resist layer constituted with a polysiloxane-based material on or above a substrate, includes a step having irradiation conditions such that the acceleration voltage is from 1 kV to 3 kV without generation of the backscattering and the dosage is 400 μC/cm2, a method of producing finely processed product using the 3-D mold, a method of producing fine-pattern molded product using the 3-D mold or the finely processed product, and the 3-D mold, the finely processed product, the fine-pattern molded product, and an optical element formed with high precision with these production methods.
    • 为了提供三维模具,精细加工产品和精细图案模制产品的制造方法,其中可以高精度地形成深度和线宽度,三维模具,精细加工的产品,细微的 图案模制产品和高精度地形成的光学元件。 一种制造三维模具的方法,其被配置为控制10nm内的深度并形成200nm以下的线宽,其中照射步骤将电子束照射到具有 在基板上或上方由基于聚硅氧烷的材料构成的抗蚀剂层包括具有使得加速电压为1kV〜3kV而不产生后向散射且剂量为400μC/ cm 2的照射条件的工序, 使用3-D模具生产精细加工的产品,使用3-D模具或精细加工产品制造精细图案模制产品的方法,以及3-D模具,精加工产品,精细图案模制 产品和以这些制造方法高精度地形成的光学元件。
    • 82. 发明申请
    • Manufacturing Method for Micro Components
    • 微型零件制造方法
    • US20090025427A1
    • 2009-01-29
    • US11839690
    • 2007-08-16
    • Ching-Cherng SunShih-Hsin MaTsung-Xian Lee
    • Ching-Cherng SunShih-Hsin MaTsung-Xian Lee
    • C03B23/023
    • B81C99/0085B81B2201/047
    • A manufacturing method for micro components includes the steps of manufacturing a large component by molding and shaping a thermally contractible material; heating and cooling the large component, such that the size of the large component can be reduced by the contraction of the material to form a reduced component; duplicating the reduced component to obtain a mold; and manufacturing a further reduced component by the molding and shaping process of the mold. The manufacturing method simply requires the processes of duplicating the component, contracting the material with an equal contraction ratio, and preparing the mold, and thus the manufacturing method is simple, easy and fast. The method can overcome the shortcomings of the prior art, of which the precision and the freedom for the external design of the micro components cannot be controlled easily.
    • 微型部件的制造方法包括以下步骤:通过模制和成形热收缩材料来制造大部件; 加热和冷却大部件,使得可以通过材料的收缩来减小大部件的尺寸以形成减少的部件; 复制还原组分以获得模具; 并通过模具的成型和成型工艺制造进一步减少的部件。 制造方法简单地要求复制部件,以等收缩比收缩材料,制备模具的过程,因此制造方法简单,容易和快速。 该方法可以克服现有技术的缺点,其中微组件的外部设计的精度和自由度不能容易地被控制。
    • 86. 发明授权
    • Method for manufacturing metal microstructure
    • 制造金属微观结构的方法
    • US07338753B2
    • 2008-03-04
    • US11503303
    • 2006-08-14
    • Jun YoritaYoshihiro HirataTsuyoshi Haga
    • Jun YoritaYoshihiro HirataTsuyoshi Haga
    • G03F7/039
    • B81C99/0085B81C2201/032C25D1/003H01L21/4821H05K3/202H05K3/205
    • A method of manufacturing a metal microstructure (1) by using a resin mold (13). In order to provide a method in which a mild manufacturing condition which causes less damage to the resin mold (13) can be set and the high-precision metal microstructure (1) can be mass-produced by uniform electroforming, the method of manufacturing the metal microstructure (1) according to the present invention includes the steps of: fixing on a conductive substrate (11) the resin mold (13) having a vacant portion penetrating in the direction of thickness, by interposing a photosensitive polymer (12) having a chemical composition changed by an electron beam, ultraviolet radiation or visible radiation so as to form a layered structure (2) having the resin mold (13); exposing the layered structure (2) having the resin mold (13) to an electron beam, ultraviolet radiation or visible radiation; removing an exposed photosensitive polymer (12c) existing at the vacant portion of the resin mold (13); and filling with a metal (14) the vacant portion of the layered structure (2) having the resin mold (13) by electroforming.
    • 一种通过使用树脂模具(13)制造金属微结构(1)的方法。 为了提供可以设定对树脂模具(13)造成较小损害的温和制造条件并且可以通过均匀电铸来大量生产高精度金属微结构(1)的方法,制造 根据本发明的金属微结构(1)包括以下步骤:通过插入具有一个或多个金属微结构(1)的光敏聚合物(12)将具有穿过厚度方向的空白部分的树脂模具(13)固定在导电基板(11)上, 化学成分由电子束,紫外线辐射或可见光辐射而变化,形成具有树脂模具(13)的层状结构(2)。 将具有树脂模具(13)的层状结构(2)暴露于电子束,紫外线或可见光; 去除存在于树脂模具(13)的空缺部分的暴露的光敏聚合物(12c); 并通过电铸将金属(14)填充到具有树脂模具(13)的层状结构(2)的空位部分上。