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81. 发明申请

US20090142878A1 PLASMA TREATMENT BETWEEN DEPOSITION PROCESSES 失效
标题翻译：沉积过程之间的等离子体处理
公开(公告)号：US20090142878A1
公开(公告)日：2009-06-04
申请号：US12263253
申请日：2008-10-31
申请人： Soo Young Choi , Yong-Kee Chae , Shuran Sheng , Liwei Li
发明人： Soo Young Choi , Yong-Kee Chae , Shuran Sheng , Liwei Li
IPC分类号： H01L21/02 , H01L31/18
CPC分类号： H01L21/0262 , H01L21/02532 , H01L21/02576 , H01L21/02595 , H01L21/02667 , H01L31/0236 , H01L31/02366 , H01L31/075 , H01L31/076 , H01L31/186 , H01L31/202 , Y02E10/548 , Y02P70/521
摘要： Embodiments of the present invention include an improved method of forming a thin film solar cell device using a plasma processing treatment between two or more deposition steps. Embodiments of the invention also generally provide a method and apparatus for forming the same. The present invention may be used to advantage to form other single junction, tandem junction, or multi-junction solar cell devices.
摘要翻译：本发明的实施例包括使用在两个或更多个沉积步骤之间的等离子体处理处理来形成薄膜太阳能电池器件的改进方法。本发明的实施例还通常提供用于形成该方法和装置的方法和装置。本发明可用于形成其它单结，串联结或多结太阳能电池器件。

82. 发明申请

US20090071403A1 PECVD PROCESS CHAMBER WITH COOLED BACKING PLATE 审中-公开
标题翻译：带冷却背板的PECVD工艺室
公开(公告)号：US20090071403A1
公开(公告)日：2009-03-19
申请号：US12233443
申请日：2008-09-18
申请人： Soo Young Choi , Robin L. Tiner , John M. White
发明人： Soo Young Choi , Robin L. Tiner , John M. White
IPC分类号： C23C16/513
CPC分类号： C23C16/24 , C23C16/45565 , C23C16/5096 , H01J37/3244 , H01J37/32522
摘要： The invention generally relates to a plasma enhanced chemical vapor deposition chamber for depositing amorphous or microcrystalline silicon on a glass substrate to fabricate solar voltaic cells. The chamber includes a backing plate having at least one fluid receiving conduit to receive cooling fluid to remove heat generated within the chamber by the plasma, thereby stabilizing and cooling the backing plate to assure the uniformity of deposition of materials on the surface of the substrate.
摘要翻译：本发明一般涉及用于在玻璃基板上沉积非晶或微晶硅以制造太阳能电池的等离子体增强化学气相沉积室。该腔室包括具有至少一个流体接收导管以便接收冷却流体以利用等离子体去除室内产生的热量的背板，从而稳定和冷却背板，以确保材料在衬底表面上的沉积的均匀性。

83. 发明申请

US20080245414A1 METHODS FOR FORMING A PHOTOVOLTAIC DEVICE WITH LOW CONTACT RESISTANCE 审中-公开
标题翻译：用于形成具有低接触电阻的光伏器件的方法
公开(公告)号：US20080245414A1
公开(公告)日：2008-10-09
申请号：US11733184
申请日：2007-04-09
申请人： Shuran Sheng , Yong Kee Chae , Tae Kyung Won , Liwei Li , Soo Young Choi , Yanping Li , Joe Griffith Cruz
发明人： Shuran Sheng , Yong Kee Chae , Tae Kyung Won , Liwei Li , Soo Young Choi , Yanping Li , Joe Griffith Cruz
IPC分类号： H01L31/00
CPC分类号： H01L31/022425 , H01L31/0745 , H01L31/076 , H01L31/077 , H01L31/1824 , H01L31/202 , Y02E10/545 , Y02E10/548 , Y02P70/521
摘要： An improved PV solar cell structure and methods for manufacturing the same are provided. In one embodiment, a photovoltaic device includes a first photoelectric conversion unit, a first transparent conductive oxide layer and a first microcrystalline silicon layer disposed between and in contact with the photoelectric conversion unit and the transparent conductive oxide layer. In another embodiment, a method of forming a photovoltaic solar cell includes providing a substrate having a first transparent conductive oxide layer disposed thereon, depositing a first microcrystalline silicon layer on the transparent conductive oxide layer, and forming a first photoelectric conversion unit on the microcrystalline silicon layer.
摘要翻译：提供了一种改进的PV太阳能电池结构及其制造方法。在一个实施例中，光伏器件包括第一光电转换单元，第一透明导电氧化物层和设置在光电转换单元和透明导电氧化物层之间并与之接触的第一微晶硅层。在另一实施例中，形成光伏太阳能电池的方法包括提供一个其上设置有第一透明导电氧化物层的衬底，在透明导电氧化物层上沉积第一微晶硅层，以及在微晶硅上形成第一光电转换单元层。

84. 发明申请

US20080190886A1 DIFFERENTIAL ETCH RATE CONTROL OF LAYERS DEPOSITED BY CHEMICAL VAPOR DEPOSITION 有权
标题翻译：通过化学蒸气沉积沉积的层的差异蚀刻速率控制
公开(公告)号：US20080190886A1
公开(公告)日：2008-08-14
申请号：US12027964
申请日：2008-02-07
申请人： Soo Young Choi , Gaku Furuta
发明人： Soo Young Choi , Gaku Furuta
IPC分类号： C23F1/00
CPC分类号： H01L21/31116 , C03C17/34 , C03C2218/33 , C23C16/308 , C23C16/345 , C23C16/401 , H01L21/31111
摘要： A method and apparatus is provided for controlling the etch profile of a multilayer layer stack by depositing a first and second material layer with differential etch rates in the same or different processing chamber. In one embodiment of the invention, a process for etching substrate material is provided including depositing a first silicon-containing material layer having a first etch rate on the substrate surface from a nitrogen-containing precursor at a first flow rate and a silicon-containing precursor, depositing a second silicon-containing material layer having a second etch rate different than the first etch rate on the first silicon-containing material layer from the nitrogen-containing precursor at a second flow rate different than the first flow rate and the silicon-containing precursor, etching the first silicon-containing material layer and the second silicon-containing material layer, and forming a taper etch profile in the first silicon-containing material layer and the second silicon-containing material layer.
摘要翻译：提供了一种方法和装置，用于通过在相同或不同的处理室中沉积差分蚀刻速率的第一和第二材料层来控制多层堆叠的蚀刻轮廓。在本发明的一个实施例中，提供了一种用于蚀刻衬底材料的方法，包括：以第一流速从含氮前体沉积具有第一蚀刻速率的第一含硅材料层，并在第一流速下沉积含硅前体在第一含硅材料层上以不同于第一流速的第二流量从含氮前体沉积具有与第一蚀刻速率不同的第二蚀刻速率的第二含硅材料层，蚀刻第一含硅材料层和第二含硅材料层，并在第一含硅材料层和第二含硅材料层中形成锥形蚀刻轮廓。

85. 发明申请

US20070298590A1 METHODS AND APPARATUS FOR DEPOSITING A MICROCRYSTALLINE SILICON FILM FOR PHOTOVOLTAIC DEVICE 失效
标题翻译：用于光伏器件沉积微晶硅膜的方法和装置
公开(公告)号：US20070298590A1
公开(公告)日：2007-12-27
申请号：US11426127
申请日：2006-06-23
申请人： Soo Young Choi , Takako Takehara , John M. White , Yong Kee Chae
发明人： Soo Young Choi , Takako Takehara , John M. White , Yong Kee Chae
IPC分类号： H01L31/00 , H05H1/24 , H01L21/20 , H01L21/36
CPC分类号： H01L21/02579 , C23C16/24 , C30B25/105 , C30B29/06 , H01J37/32082 , H01J37/32449 , H01J37/32495 , H01L21/0237 , H01L21/02532 , H01L21/02576 , H01L21/0262 , H01L31/1824 , Y02E10/545 , Y02P70/521
摘要： Methods for depositing a microcrystalline silicon film layer with improved deposition rate and film quality are provided in the present invention. Also, photovoltaic (PV) cell having a microcrystalline silicon film is provided. In one embodiment, the method produces a microcrystalline silicon film on a substrate at a deposition rate greater than about 20 nm per minute, wherein the microcrystalline silicon film has a crystallized volume between about 20 percent to about 80 percent.
摘要翻译：在本发明中提供了具有改进的沉积速率和膜质量的沉积微晶硅膜层的方法。此外，提供具有微晶硅膜的光伏（PV）电池。在一个实施例中，该方法以大于约20nm /分钟的沉积速率在衬底上产生微晶硅膜，其中微晶硅膜的结晶体积在约20％至约80％之间。

86. 发明授权

US06942753B2 Gas distribution plate assembly for large area plasma enhanced chemical vapor deposition 有权
标题翻译：用于大面积等离子体增强化学气相沉积的气体分配板组件
公开(公告)号：US06942753B2
公开(公告)日：2005-09-13
申请号：US10417592
申请日：2003-04-16
申请人： Soo Young Choi , Quanyuan Shang , Robert I. Greene , Li Hou
发明人： Soo Young Choi , Quanyuan Shang , Robert I. Greene , Li Hou
IPC分类号： C23C16/44 , C23C16/455 , C23C16/509 , C23C16/00 , C23C16/452 , C23F1/00 , H01L21/00
CPC分类号： C23C16/45565 , C23C16/5096
摘要： Embodiments of a gas distribution plate for distributing gas in a processing chamber are provided. In one embodiment, a gas distribution plate includes a diffuser plate having a plurality of gas passages passing between an upstream side and a downstream side of the diffuser plate. At least one of the gas passages includes a first hole and a second hole coupled by an orifice hole. The first hole extends from the upstream side of the diffuser plate while the second hole extends from the downstream side. The orifice hole has a diameter less than the respective diameters of the first and second holes.
摘要翻译：提供了用于在处理室中分配气体的气体分配板的实施例。在一个实施例中，气体分配板包括具有通过扩散板的上游侧和下游侧之间的多个气体通道的扩散板。至少一个气体通道包括第一孔和通过孔口联接的第二孔。第一孔从扩散板的上游侧延伸，而第二孔从下游侧延伸。孔口的直径小于第一孔和第二孔的直径。

87. 发明授权

US06909476B2 Color polymer dispersed liquid crystal display and method for manufacture thereof 有权
标题翻译：彩色聚合物分散液晶显示器及其制造方法
公开(公告)号：US06909476B2
公开(公告)日：2005-06-21
申请号：US10621541
申请日：2003-07-17
申请人： Soo Young Choi , Sang Un Choi , Hoan Su Shim , Sung Woon Kim
发明人： Soo Young Choi , Sang Un Choi , Hoan Su Shim , Sung Woon Kim
IPC分类号： G02B5/20 , G02F1/1333 , G02F1/1334 , G02F1/1335
CPC分类号： G02F1/133514 , G02F1/1334
摘要： A color polymer dispersed liquid crystal display includes a lower substrate, an upper substrate, color liquid crystal-polymer films, and two transparent liquid crystal driving electrodes, among others. The color liquid crystal-polymer films are formed by foaming polymer films mixed with red, green and blue pigments to form porous films of red, green, and blue colors and then dropping and injecting liquid crystal into droplets of the porous films under vacuum condition. One of the two transparent liquid crystal driving electrodes is disposed between the lower substrate and the PDLC films, and the other is disposed between the PDLC films and the upper substrate. The changes in properties of the PDLC films, which may be caused by unstable phase separation in a conventional phase separation process, are reduced, and the colors are improved.
摘要翻译：彩色聚合物分散液晶显示器包括下基板，上基板，彩色液晶聚合物膜和两个透明液晶驱动电极等。彩色液晶聚合物膜是通过与红色，绿色和蓝色颜料混合的聚合物膜发泡形成的，以形成红色，绿色和蓝色的多孔膜，然后在真空条件下滴加和注入多孔膜的液滴。两个透明液晶驱动电极之一设置在下基板和PDLC膜之间，另一个设置在PDLC膜和上基板之间。在常规相分离过程中可能由不稳定的相分离引起的PDLC膜的性能变化减小，颜色得到改善。

88. 发明授权

US09382621B2 Ground return for plasma processes 有权
标题翻译：等离子体工艺的接地回路
公开(公告)号：US09382621B2
公开(公告)日：2016-07-05
申请号：US12700484
申请日：2010-02-04
申请人： Soo Young Choi , Robin L. Tiner , Shinichi Kurita , John M. White , Carl A. Sorensen , Jeffrey A. Kho , Suhail Anwar , Makoto Inagawa , Gaku Furuta
发明人： Soo Young Choi , Robin L. Tiner , Shinichi Kurita , John M. White , Carl A. Sorensen , Jeffrey A. Kho , Suhail Anwar , Makoto Inagawa , Gaku Furuta
IPC分类号： C23C16/509 , C23C16/458 , H01J37/32 , H01L21/67
CPC分类号： C23C16/5096 , C23C16/4585 , H01J37/32091 , H01J37/32174 , H01J37/32568 , H01L21/67069
摘要： A method and apparatus for providing an electrically symmetrical ground or return path for electrical current between two electrodes is described. The apparatus includes at least on radio frequency (RF) device coupled to one of the electrodes and between a sidewall and/or a bottom of a processing chamber. The method includes moving one electrode relative to another and realizing a ground return path based on the position of the displaced electrode using one or both of a RF device coupled to a sidewall and the electrode, a RF device coupled to a bottom of the chamber and the electrode, or a combination thereof.
摘要翻译：描述了一种用于提供用于两个电极之间的电流的电对称接地或返回路径的方法和装置。该装置至少包括耦合到电极之一和处理室的侧壁和/或底部之间的射频（RF）装置。该方法包括相对于另一个电极移动一个电极，并且基于使用耦合到侧壁和电极的RF器件中的一个或两个的位移电极实现接地返回路径，耦合到腔室的底部的RF器件和电极或其组合。

89. 发明授权

US08772066B2 Method for hybrid encapsulation of an organic light emitting diode 有权
标题翻译：有机发光二极管的混合封装方法
公开(公告)号：US08772066B2
公开(公告)日：2014-07-08
申请号：US13361637
申请日：2012-01-30
申请人： Jrjyan Jerry Chen , Soo Young Choi
发明人： Jrjyan Jerry Chen , Soo Young Choi
IPC分类号： H01L21/00
CPC分类号： H01L51/56 , H01L51/0001 , H01L51/5237 , H01L51/5253 , H01L51/5256
摘要： Methods and apparatus for encapsulating organic light emitting diode (OLED) structures disposed on a substrate using a hybrid layer of material are provided. The processing parameters used during deposition of the hybrid layer of material allow control of the characteristics of the deposited hybrid layer. The hybrid layer may be deposited such that the layer has characteristics of an inorganic material in some sublayers of the hybrid layer and characteristics of an organic material in other sublayers of the hybrid layer. Use of the hybrid material allows OLED encapsulation using a single hard mask for the complete encapsulating process with low cost and without alignment issues present in conventional processes.
摘要翻译：提供了使用混合材料层封装置于衬底上的有机发光二极管（OLED）结构的方法和装置。在沉积材料的混合层期间使用的处理参数允许控制沉积的混合层的特性。混合层可以沉积成使得该层具有混合层的一些子层中的无机材料的特性和混合层的其它子层中的有机材料的特性。混合材料的使用允许使用单个硬掩模的OLED封装用于完整的封装工艺，其具有低成本且在常规工艺中不存在对准问题。

90. 发明授权

US08724064B2 Fringe field switching mode liquid crystal display device and method of fabricating the same 有权
标题翻译：边缘场开关模式液晶显示装置及其制造方法
公开(公告)号：US08724064B2
公开(公告)日：2014-05-13
申请号：US12831793
申请日：2010-07-07
申请人： Ock Soo Son , Won Hee Lee , Soo Young Choi , Dong Hae Suh
发明人： Ock Soo Son , Won Hee Lee , Soo Young Choi , Dong Hae Suh
IPC分类号： G02F1/1335 , G02F1/1343
CPC分类号： G02F1/136209 , G02F1/133707 , G02F2001/134372 , G02F2203/02
摘要： Provided is a liquid crystal display including a transparent pixel electrode and a transparent common electrode in a pixel region to drive liquid crystals. The transparent common electrode includes a plurality of slits and is configured to open at least a portion of a switching device to connect unit pixels, the slits have an angle of 5 to 10° with respect to a gate line, and a rubbing direction of a liquid crystal layer is substantially parallel to a gate direction. Therefore, it is possible to provide the liquid crystal display capable of removing factors decreasing an aperture ratio, preventing light from leaking, and further improving internal reflection.
摘要翻译：提供一种在像素区域中包括透明像素电极和透明公共电极以驱动液晶的液晶显示器。透明公共电极包括多个狭缝，并且被配置为打开开关装置的至少一部分以连接单位像素，所述狭缝相对于栅极线具有5至10°的角度，并且液晶层基本上平行于栅极方向。因此，可以提供能够去除降低开口率的因素的液晶显示器，防止光泄漏，并进一步改善内部反射。

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