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    • 83. 发明授权
    • Objective lens drive device with support system
    • 物镜驱动装置带支撑系统
    • US5446721A
    • 1995-08-29
    • US138014
    • 1993-10-19
    • Yoshihiro SekimotoToshiharu InuiYasuo NakataNobuo OgataHideaki Sato
    • Yoshihiro SekimotoToshiharu InuiYasuo NakataNobuo OgataHideaki Sato
    • G11B7/09G02B7/02G11B7/00
    • G11B7/0932
    • In an objective lens driving apparatus used in an optical information recording and reproducing apparatus or the like, a vibration is suppressed and a resonance peak on transfer function is suppressed when movable portions are moved in focusing and tracking directions and when these portions are turned around focusing and tracking directions. An elastic body which supports the movable portions movably in two directions, i.e., focusing direction and tracking direction to a fixed portion includes a bent portion in an intermediate portion between the side of movable portion and the side of fixed portion. A damper member is adhered to bridge a gap between a branched arm portion branching from a linear portion extending from the side of movable portion, and a fixed portion. The bent portion couples two linear portions and which are not on the same line.
    • 在用于光信息记录和再现装置等的物镜驱动装置中,当可移动部分在聚焦和跟踪方向上移动时,并且当这些部分转向聚焦时,抑制振动并抑制传递函数上的共振峰值 和跟踪方向。 支撑可移动部分的弹性体在朝向固定部分的聚焦方向和跟踪方向的两个方向上可移动地包括在可动部分的侧面和固定部分侧之间的中间部分中的弯曲部分。 阻尼构件被粘接以桥接从从可动部分的侧面延伸的直线部分分支的分支臂部分与固定部分之间的间隙。 弯曲部分连接两个线性部分,并且不在同一条线上。
    • 84. 发明授权
    • Optical head
    • 光头
    • US5283772A
    • 1994-02-01
    • US65458
    • 1993-05-20
    • Takahiro MiyakeYoshio YoshidaYukio KurataHideaki Sato
    • Takahiro MiyakeYoshio YoshidaYukio KurataHideaki Sato
    • G11B7/13G11B7/135G11B7/09
    • G11B7/1353G11B7/131G11B7/1356G11B7/1398
    • An optical head comprising a diffracting element having two tracking diffracting regions separated by a division line extending in a direction corresponding to a track direction of a recording medium, and one focusing diffracting region separated from the tracking diffracting regions by a division line extending in a direction corresponding to a radial direction of the recording medium. The optical head further comprises a light receiving element having two tracking light receiving regions for receiving diffracted lights produced in the tracking diffracting regions, and two adjoining focusing light receiving regions for receiving a diffracted light produced in the focusing diffracting region. The diffracted light produced in the focusing diffracting region always has a substantially constant light intensity, even when a tracking error occurs. As a result, an offset can be prevented from occurring in a focus error signal by finely adjusting the diffracting element.
    • 一种光学头,包括具有两个跟踪衍射区域的衍射元件,所述跟踪衍射区域被沿着与记录介质的轨道方向对应的方向延伸的分割线分隔开,并且一个聚焦衍射区域与跟踪衍射区域分开, 对应于记录介质的径向。 光头还包括具有两个跟踪光接收区域的光接收元件,用于接收在跟踪衍射区域中产生的衍射光,以及两个相邻的聚焦光接收区域,用于接收在聚焦衍射区域中产生的衍射光。 即使发生跟踪误差,在聚焦衍射区域中产生的衍射光总是具有基本恒定的光强度。 结果,可以通过精细调节衍射元件来防止在聚焦误差信号中发生偏移。
    • 89. 发明授权
    • Substrate processing apparatus, substrate processing method and computer-readable medium storing program
    • 基板处理装置,基板处理方法和计算机可读介质存储程序
    • US08746259B2
    • 2014-06-10
    • US12795071
    • 2010-06-07
    • Hideaki Sato
    • Hideaki Sato
    • B08B3/00
    • H01L21/02052H01L21/67057
    • Disclosed is a substrate processing apparatus, a substrate processing method and a computer-readable medium capable of recovering an extended amount of discharged solution from a processing unit thereby reducing the amount of deionized water for the processing and the cost. The substrate processing apparatus includes, inter alia, a first and second discharge solution lines each connected to a downstream side of a discharge unit, and the discharged solution from each of the first and second discharge solution lines is independently delivered to the processing solution supply unit as a recovered solution. Also, the substrate processing apparatus includes a converting unit that converts flow of the discharged solution from the discharge unit either to the first discharge solution line or to the second discharge solution line. The processing solution supply unit selectively delivers the recovered solution from the first and second discharge solution lines to the processing unit.
    • 公开了一种基板处理装置,基板处理方法和计算机可读介质,其能够从处理单元回收扩展量的排出溶液,从而减少用于处理的去离子水量和成本。 基板处理装置尤其包括连接到排出单元的下游侧的第一和第二排出液管线,并且来自第一和第二排出液管线中的每一个的排出溶液被独立地输送到处理液供给单元 作为回收溶液。 此外,基板处理装置还具有转换单元,其将排出溶液的流动从排出单元转换到第一排出液管线或第二排出液管路。 处理溶液供应单元将回收的溶液从第一和第二排出液管线选择性地输送到处理单元。