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71. 发明授权

US4873792A Polishing apparatus 失效
标题翻译：抛光设备
公开(公告)号：US4873792A
公开(公告)日：1989-10-17
申请号：US200842
申请日：1988-06-01
申请人： Thomas A. Linke , Issa R. Dandan , Troy W. Livingston , Alan W. Wilkerson
发明人： Thomas A. Linke , Issa R. Dandan , Troy W. Livingston , Alan W. Wilkerson
IPC分类号： B24B7/04 , B24B37/005 , B24B49/04
CPC分类号： B24B37/005 , B24B49/04
摘要： Apparatus for polishing or grinding specimens in which the pressure between the sample and the platen against which it presses for grinding or polishing is controlled by a feedback system, which includes a strain gauge from which the sample-holding grinding shaft is suspended.
摘要翻译：用于抛光或研磨样品的装置，其中样品和压板之间的压力被挤压用于研磨或抛光的试样由反馈系统控制，反馈系统包括一个应变计，样品保持研磨轴从该应变仪悬挂起来。

72. 发明授权

US4680893A Apparatus for polishing semiconductor wafers 失效
标题翻译：用于抛光半导体晶片的装置
公开(公告)号：US4680893A
公开(公告)日：1987-07-21
申请号：US779339
申请日：1985-09-23
申请人： Paul W. Cronkhite , Bruce C. Bosley , James H. Jones , Asit G. Patel
发明人： Paul W. Cronkhite , Bruce C. Bosley , James H. Jones , Asit G. Patel
IPC分类号： B24B37/04 , B24B51/00 , H01L21/304 , B24B7/04
CPC分类号： B24B37/04
摘要： An apparatus for polishing semiconductor material is described in which a movable polishing arm is mounted to a cabinet. Connected to the polishing arm is a workpiece holder or sometimes referred to as a wafer chuck. Adjacent to the polishing arm is a load station which positions the wafer for pick-up by the polishing arm and attached wafer chuck. Mounted to the cabinet, next to a brush station, is a primary polish station which is used to remove the majority of the material. Alongside of the primary polish station is a final polish station used to provide a finished surface to the wafer. The polishing arm discharges the polished wafer into an unload station which is located next to the final polish station.
摘要翻译：描述了一种用于抛光半导体材料的装置，其中可移动的抛光臂安装在机柜上。连接到抛光臂的是工件保持器，有时也称为晶片卡盘。与抛光臂相邻的是加载站，其将晶片定位成由抛光臂和附接的晶片卡盘拾取。安装在机柜旁边的电刷站，是主要的抛光站，用于去除大部分材料。除了主要的抛光站之外，还有一个最终的抛光工位用于向晶片提供一个成品表面。抛光臂将抛光后的晶片排放到位于最终抛光站旁边的卸载站。

73. 发明授权

US4667445A Rotary grinding machine 失效
标题翻译：旋转磨床
公开(公告)号：US4667445A
公开(公告)日：1987-05-26
申请号：US756239
申请日：1985-07-18
申请人： Sosaku Kimura
发明人： Sosaku Kimura
IPC分类号： B24B7/04
CPC分类号： B24B7/04
摘要： A rotary grinding machine comprising a grinding wheel supported by a column on a bed, a work table rotatably supported on the bed and carrying thereon a workpiece to be ground, a fluid passage holder located in a circumferential groove formed in the work table and having fluid pressure pockets connected to a fluid pressure source. The work table is inclined with respect to the grinding wheel when the pressurized fluid is selectively fed to the pressure pockets in a predetermined direction. The control method of the grinding machine is also disclosed.
摘要翻译：一种旋转研磨机，包括由床上的柱支撑的砂轮，可旋转地支撑在床上并在其上承载待研磨的工件的工作台，位于工作台中形成的周向槽中的流体保持器，并具有流体连接到流体压力源的压力袋。当加压流体以预定方向选择性地供给到压力槽时，工作台相对于砂轮倾斜。还公开了研磨机的控制方法。

74. 发明授权

US4205489A Apparatus for finishing workpieces on surface-lapping machines 失效
标题翻译：用于在表面研磨机上完成工件的装置
公开(公告)号：US4205489A
公开(公告)日：1980-06-03
申请号：US858896
申请日：1977-12-08
申请人： Petr N. Orlov , Ivan A. Loginov , Vladimir E. Beiden , Boris S. Smolyaninov , Anatoly S. Balabanov , Vladimir V. Scherbakov , Anatoly V. Chamov , Konstantin F. Skvortsov , Alexandr S. Chizhov , Mukim M. Khasanov , Valery A. Peshkov
发明人： Petr N. Orlov , Ivan A. Loginov , Vladimir E. Beiden , Boris S. Smolyaninov , Anatoly S. Balabanov , Vladimir V. Scherbakov , Anatoly V. Chamov , Konstantin F. Skvortsov , Alexandr S. Chizhov , Mukim M. Khasanov , Valery A. Peshkov
IPC分类号： B24B37/08 , B24B7/04
CPC分类号： B24B37/08
摘要： Apparatus for changing the rotation speed of a workpiece holder axle relative to the axle of a drive shaft, the tangential acceleration of this movement, and the pressure between the surface of workpieces and lapping tools. These changes are set cyclically, directly in the apparatus for finishing. The machines for the realization of such control of the finishing process are equipped with units which are capable of regulating the value of the complex eccentricity of holder rotation and have independent drive systems for adjusting the kinematic factors in the course of finishing. This ensures uniform abrasion over the entire working surface of the lapping tools.
摘要翻译：用于改变工件保持器轴相对于驱动轴的轴的旋转速度，该运动的切向加速度以及工件表面与研磨工具之间的压力的装置。这些变化是循环设置的，直接在整理设备中。用于实现整理过程的这种控制的机器配备有能够调节保持器旋转的复杂偏心的值的单元，并且具有用于在精加工过程中调节运动因子的独立的驱动系统。这可以确保研磨工具的整个工作表面均匀磨损。

75. 发明授权

US3731435A Polishing machine load plate 失效
标题翻译：抛光机装载板
公开(公告)号：US3731435A
公开(公告)日：1973-05-08
申请号：US3731435D
申请日：1971-02-09
申请人： SPEEDFAM CORP
发明人： BOETTCHER S , CESNA J , DUMENTAT R
IPC分类号： B24B37/10 , B24B7/04
CPC分类号： B24B37/102
摘要： A load plate having depending pedestals with vacuum passage means communicating with the lower surfaces of the pedestals, and valve means for effecting a negative pressure on work pieces mounted on the pedestals for retaining the work pieces thereon during finishing. A mask plate establishes work piece receiving pockets with the pedestals, and sealing means maintain the negative pressure mounting and prevent leakage between the work pieces and the pedestal mounting surfaces.
摘要翻译：具有具有与底座的下表面连通的真空通道装置的悬置底座的装载板和用于对安装在基座上的工件施加负压的阀装置，用于在精加工期间将工件保持在其上。掩模板与基座一起形成接收袋的工件，并且密封装置保持负压安装，并防止工件与基座安装表面之间的泄漏。

76. 发明授权

US3668813A Lapping machine 失效
标题翻译：拉皮机
公开(公告)号：US3668813A
公开(公告)日：1972-06-13
申请号：US3668813D
申请日：1971-03-23
申请人： R A STOKVIS & FILS
发明人： BARRAGAN JACQUES
IPC分类号： B24B37/34 , B24B5/34 , B24B7/04
CPC分类号： B24B37/345
摘要： In a surface lapping machine in which workpieces to be lapped are confined in rings placed on the rotatable bed of the machine, the workpiece or workpieces in each ring being loaded by a cover and the rings being retained on the bed by arms provided with rollers, the arms being disposed in star formation and forming a rotary assembly which is movable stepwise around a vertical or substantially vertical shaft disposed coaxially or substantially coaxially with the bed, while at the periphery of the bed adjacent to the stopping positions of the rings there is disposed a plane, smooth table permitting the feeding of the rings to, and the withdrawal of rings from, the bed by sliding, there is provided an articulated arm with vertical pivoting axes which is pivotally mounted on said shaft, this articulated arm carrying a vertically guided raising means engageable with said cover.
摘要翻译：在要研磨的工件被限制在放置在机器的旋转床上的环中的表面研磨机中，每个环中的工件或工件被盖子加载，并且环被设置有辊的臂保持在床上，臂设置成星形并形成旋转组件，该旋转组件可围绕垂直或基本垂直的轴逐步移动，垂直轴或基本垂直的轴与床同轴地或基本上同轴地设置，同时在邻近环的停止位置的床的周边设置一个平面，平滑的桌子允许环进给，并且通过滑动从床上撤回环，提供一个铰接臂，其具有可枢转地安装在所述轴上的垂直枢转轴，该铰接臂承载垂直导向提升装置可与所述盖接合。

77. 发明授权

US3521408A Tire sidewall grinding method and apparatus 失效
标题翻译：轮胎平面研磨方法和装置
公开(公告)号：US3521408A
公开(公告)日：1970-07-21
申请号：US3521408D
申请日：1968-01-17
申请人： UNIROYAL INC
发明人： NEUGEBAUER ALFRED H
IPC分类号： B24B5/36 , B24B5/44 , B24B7/04
CPC分类号： B24B5/366

78. 发明授权

US2859564A Machine tool 失效
公开(公告)号：US2859564A
公开(公告)日：1958-11-11
申请号：US49589255
申请日：1955-03-22
申请人： REID BROTHERS COMPANY INC
发明人： FARMER JAMES W , FERGNANI WALTER P , SCRIVEN JR ALBERT K
IPC分类号： B24B7/04 , B24B47/04
CPC分类号： B24B7/04 , B24B47/04

79. 发明授权

US1955081A Stone surfacing machine 失效
标题翻译：石材铺面机
公开(公告)号：US1955081A
公开(公告)日：1934-04-17
申请号：US62137332
申请日：1932-07-08
申请人： MCCLYMONT MARBLE COMPANY
发明人： MCCLYMONT JAMES J
IPC分类号： B24B7/04
CPC分类号： B24B7/04

80. 发明授权

US1938439A Machine for circular grinding 失效
标题翻译：圆磨机
公开(公告)号：US1938439A
公开(公告)日：1933-12-05
申请号：US54115231
申请日：1931-06-01
申请人： SIMONDS SAW & STEEL CO
发明人： REMINGTON ALFRED M
IPC分类号： B24B7/04
CPC分类号： B24B7/04

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