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71. 发明授权

US5654546A Variable temperature scanning probe microscope based on a peltier device 失效
标题翻译：基于peltier装置的可变温度扫描探针显微镜
公开(公告)号：US5654546A
公开(公告)日：1997-08-05
申请号：US551836
申请日：1995-11-07
申请人： Stuart M. Lindsay
发明人： Stuart M. Lindsay
IPC分类号： G01Q30/02 , G01Q30/10 , G01Q30/14 , G01Q30/20 , H01J37/20 , H01L35/00 , H01J37/26
CPC分类号： G01Q30/10 , B82Y35/00 , H01J2237/2001 , H01J2237/2818 , Y10S977/871
摘要： A compact Peltier Device is used to heat or cool a small sample stage of a scanning probe (AFM or STM) microscope. The entire heating/cooling system may fit onto a small platen which may be suspended below the scanning probe where it may be held in place against magnetic balls. Alternatively, the sample stage may be supported by a Peltier Device, itself supported by a scanner such as a Piezoelectric scanner with a scanning probe tip held fixedly above the sample stage. The side of the Peltier Device in contact with the platen is cooled (or heated) by a small flow of water through a heat exchanger. The reservoir of water is held at ambient temperature, minimizing the temperature gradient generated between the sample platen and the main body of the microscope. The small mass of the sample stage results in rapid heating or cooling so that an equilibrium is attained rapidly. Heat transfer through the scanning tip is negligible. Condensation and contamination of the sample is prevented by operating the entire sample chamber in an inert gas environment. The inert gas is also at ambient temperature. Water and other contaminants are first removed from the gas by passing it over cold baffles. It is then equilibrated back up to ambient temperature in a heat exchanger.
摘要翻译：使用紧凑型珀尔帖装置来加热或冷却扫描探针（AFM或STM）显微镜的小样品台。整个加热/冷却系统可以装配在可以悬挂在扫描探针下方的小压板上，在该压板上可以将其保持在适当的位置以防止磁珠。或者，样品台可以由珀尔帖装置支撑，珀尔帖装置本身由诸如压电扫描仪的扫描仪支撑，扫描探针尖端固定在样品台上方。与压板接触的珀耳帖装置的侧面通过热交换器被小量的水冷却（或加热）。水的储存器保持在环境温度，使样品台板和显微镜主体之间产生的温度梯度最小化。样品台的小质量导致快速加热或冷却，从而快速获得平衡。通过扫描尖端的热传递可以忽略不计。通过在惰性气体环境中操作整个样品室来防止样品的冷凝和污染。惰性气体也处于环境温度。首先将水和其他污染物通过冷气挡板从气体中排出。然后将其在热交换器中平衡回到环境温度。

72. 发明授权

US5559328A Small cavity analytical instruments 失效
标题翻译：小腔分析仪器
公开(公告)号：US5559328A
公开(公告)日：1996-09-24
申请号：US283007
申请日：1994-07-29
申请人： Paul S. Weiss , Lloyd A. Bumm , Barry G. Willis , Richard L. Baer
发明人： Paul S. Weiss , Lloyd A. Bumm , Barry G. Willis , Richard L. Baer
IPC分类号： G01Q30/02 , G01Q30/10 , G01Q30/14 , G01Q30/16 , G01Q60/12 , G01Q60/16 , G01Q60/18 , G01Q60/60 , G11B9/00 , G11B11/00 , G11B11/08 , H01J37/20
CPC分类号： G01Q60/16 , B82Y10/00 , B82Y20/00 , B82Y35/00 , B82Y40/00 , G01Q30/10 , G01Q30/16 , G01Q60/12 , G01Q60/22 , G01Q60/60 , G11B11/002 , G11B11/08 , G11B9/14 , G11B9/149 , H01J37/20 , H01J2237/204 , H01J2237/2065 , H01J2237/2538 , H01J2237/2583 , H01J2237/31738 , Y10S977/86
摘要： A sample and the tip portion of an alternating current scanning tunneling microscope are electrically enclosed within a cavity with electrically conductive walls. The dimensions of the cavity are smaller than the wavelength of a component of the AC signal applied by the probe to the sample so that the output signal detected by the probe from the sample will not be contaminated by resonant effects of the cavity.
摘要翻译：交流扫描隧道显微镜的样品和尖端部分电气封闭在具有导电壁的腔内。腔的尺寸小于由探针施加到样品的AC信号的分量的波长，使得来自样品的探针检测的输出信号不会被空腔的共振效应污染。

73. 发明授权

US5515719A Controlled force microscope for operation in liquids 失效
标题翻译：控制力显微镜在液体中操作
公开(公告)号：US5515719A
公开(公告)日：1996-05-14
申请号：US246035
申请日：1994-05-19
申请人： Stuart Lindsay
发明人： Stuart Lindsay
IPC分类号： B81B3/00 , G01B21/30 , G01Q10/06 , G01Q30/14 , G01Q60/24 , G01Q60/32 , G01B5/28
CPC分类号： G01Q30/14 , G01Q10/06 , G01Q60/38 , B82Y35/00 , Y10S977/863 , Y10S977/865
摘要： An atomic force microscope in which the deflection of the force sensing probe owing to surface forces is canceled by an opposing magnetic force applied to a small magnetic particle on a force sensing cantilever. A deflection of the force sensing cantilever is detected by reflecting a laser beam from the cantilever into a position sensitive detector. The voltage signal from the position sensitive detector is used to drive an integrating servo loop which drives a current in a solenoid placed close to the force sensing cantilever, and exerts a force opposing the atomic force of attraction between the force sensing cantilever and the sample surface via a small magnetic particle attached to the cantilever and having its magnetic moment aligned with the axis of the solenoid. In this way, deflection of the force sensing cantilever is prevented for any force within the range of the servo control system. The driving signal for the cantilever is a measure of the operating force of the microscope and can be used to drive a conventional atomic force microscope controller to generate topographical images of the surface. The system works submerged in water and other liquids and can be used for profiling soft surfaces while avoiding the problem of the force sensing cantilever being pulled into the sample surface by attractive interactions between the sample surface and the force sensing cantilever.
摘要翻译：原子力显微镜，其中由于表面力的力传感探针的偏转被施加到力感测悬臂上的小磁性颗粒的相反的磁力抵消。通过将来自悬臂的激光束反射到位置敏感检测器来检测力感测悬臂的偏转。来自位置敏感检测器的电压信号用于驱动积分伺服回路，其驱动靠近力感测悬臂的螺线管中的电流，并施加与力感测悬臂与样本表面之间的原子吸力相反的力通过附着在悬臂上的小磁性颗粒并使其磁矩与螺线管的轴线对齐。以这种方式，可以防止在伺服控制系统的范围内的力的力传感悬臂的偏转。悬臂的驱动信号是显微镜操作力的量度，可用于驱动常规的原子力显微镜控制器以产生表面的地形图像。该系统工作在淹没在水和其他液体中，可以用于表面软化表面，同时避免通过样品表面和力感测悬臂之间的有吸引力的相互作用将力感测悬臂拉入样品表面的问题。

74. 发明授权

US5340749A Method for collecting and preparing specimens for immune reactions 失效
标题翻译：收集和准备免疫反应标本的方法
公开(公告)号：US5340749A
公开(公告)日：1994-08-23
申请号：US991507
申请日：1992-12-17
申请人： Koichi Fujiwara , Hiromichi Mizutani, deceased
发明人： Koichi Fujiwara , Hiromichi Mizutani, deceased
IPC分类号： G01N33/543 , G01N35/00 , G01N35/10 , G01Q30/02 , G01Q30/14 , G01N1/28 , G01N27/00 , G01N33/553
CPC分类号： G01N33/54326 , G01N2035/00534 , G01N2035/1055 , G01N35/0098 , Y10S435/803 , Y10S435/96 , Y10S435/971 , Y10S436/806 , Y10S436/824
摘要： A method for collecting a specimen comprising (1) subjecting a specimen and a magnetic-labeled antibody comprising a magnetic micro-particle and an antibody fixed to the micro-particle to an immunoreaction to form a reacted immunocomplex, (2) concentrating the reacted immunocomplex locally at a selected region by applying an external magnetic field, preferably a gradient magnetic field, which is produced by an electromagnet and a permanent magnetic piece so as to concentrate the magnetic flux at the selected region, and (3) collecting the immunocomplex by direct magnetic adsorption toward the magnetic pole at the region of local concentration.
摘要翻译：一种收集试样的方法，其特征在于，包括：（1）使包含磁性微粒子和固定于所述微粒子的抗体的试样和磁性标记抗体进行免疫反应，形成反应性免疫复合物，（2）浓缩所述反应的免疫复合物通过施加由电磁体和永久磁片制成的外部磁场，优选梯度磁场，以将磁通集中在所选择的区域，并且（3）通过直接收集免疫复合物在局部选择区域在局部浓度区域对磁极进行磁吸附。

75. 发明授权

US5329236A Apparatus for estimating charged and polarized states of functional groups in a solution 失效
标题翻译：用于估计溶液中官能团的带电和极化状态的装置
公开(公告)号：US5329236A
公开(公告)日：1994-07-12
申请号：US922787
申请日：1992-07-31
申请人： Nobuhiro Gemma , Takashi Ishino
发明人： Nobuhiro Gemma , Takashi Ishino
IPC分类号： G01R29/12 , G01N27/24 , G01Q30/14 , G01Q60/24 , G01Q60/40 , G01Q60/42 , G05D3/00 , G01N27/60
CPC分类号： G01N27/24 , Y10S977/852
摘要： An apparatus for detecting an electrostatic force in a solution includes a sample and a cantilever. An end of the cantilever is conductive and has voltage applied to it. The apparatus detects electrostatic interaction caused by functional groups of target molecules in the solution.
摘要翻译：用于检测溶液中的静电力的装置包括样品和悬臂。悬臂的端部是导电的，并且施加有电压。该装置检测溶液中靶分子的官能团引起的静电相互作用。

76. 发明授权

US5291775A Scanning force microscope with integrated optics and cantilever mount 失效
标题翻译：具有集成光学和悬臂安装的扫描力显微镜
公开(公告)号：US5291775A
公开(公告)日：1994-03-08
申请号：US845919
申请日：1992-03-04
申请人： Ronald C. Gamble , Paul G. West
发明人： Ronald C. Gamble , Paul G. West
IPC分类号： G01B11/30 , B01L7/00 , G01B7/34 , G01B21/30 , G01N37/00 , G01Q10/00 , G01Q20/02 , G01Q30/14 , G01Q60/24 , G01Q70/02 , H01J37/28 , G01B5/28 , G01N23/00
CPC分类号： G01Q30/14 , B82Y35/00 , G01Q20/02 , G01Q60/38 , G01Q70/02 , Y10S977/87
摘要： The scanning force microscope includes integrated optics for viewing the optical lever arm, probe and sample to be examined. The scanning force microscope includes an improved mount for the probe, which is magnetically secured to the body of the scanning force microscope, to improve ease of handling and mounting the probe assembly. In one preferred embodiment the scanning force microscope, also includes a base portion with a fluid cell for receiving a sample in a sealed gas or liquid environment.
摘要翻译：扫描力显微镜包括用于观察光学杠杆臂，探针和待检测样品的集成光学器件。扫描力显微镜包括用于探针的改进的安装件，其被磁性地固定到扫描力显微镜的主体，以提高操纵和安装探针组件的容易性。在一个优选实施例中，扫描力显微镜还包括具有用于在密封气体或液体环境中接收样品的流体池的基部。

77. 再颁专利

USRE34489E Atomic force microscope with optional replaceable fluid cell 失效
标题翻译：原子力显微镜与可选的可更换流体池
公开(公告)号：USRE34489E
公开(公告)日：1993-12-28
申请号：US895984
申请日：1992-06-04
申请人： Paul K. Hansma , Barney Drake
发明人： Paul K. Hansma , Barney Drake
IPC分类号： G01B7/34 , B01L7/00 , G01B11/24 , G01B21/30 , G01L5/00 , G01N21/88 , G01N37/00 , G01Q30/02 , G01Q30/14 , G01Q60/00 , G01Q60/24 , G01Q60/38 , G01Q70/02 , G01Q70/04 , H01J37/20 , G01N21/86
CPC分类号： G01Q60/38 , B82Y35/00 , G01Q30/025 , G01Q30/14 , G01Q70/02 , G01Q70/04 , Y10S977/863 , Y10S977/87
摘要： An atomic force microscope which is readily useable for researchers for its intended use without extensive lost time for setup and repair. The probe used therein is a cantilevered optical lever which imparts surface information in a gentle and reliable manner by reflecting an incident laser beam. The probe is carried by a replaceable probe-carrying module which is factory set up and merely inserted and fine tuned by the user. The probe-carrying module also includes the provision for forming a fluid cell around the probe. Fluid can be inserted into and/or be circulated through the fluid cell through incorporated tubes in the porbe-carrying module. Electrodes are also provided in the fluid cell for various uses including real-time studies of electro-chemical operations taking place in the fluid cell. The piezoelectric scan tube employed includes a voltage shield to prevent scanning voltages to the tube from affecting data readings. Samples are easily mounted, replaced, and horizontally adjusted using a sample stage which is magnetically attached to the top of the scan tube. Calibration tools are provided to make initial set up and fine tuning of the microscope a simple and straightforward operation requiring little or no technical talent.

78. 发明授权

US5233191A Method and apparatus of inspecting foreign matters during mass production start-up and mass production line in semiconductor production process 失效
标题翻译：在半导体生产过程中批量生产启动和批量生产线中检查异物的方法和装置
公开(公告)号：US5233191A
公开(公告)日：1993-08-03
申请号：US679317
申请日：1991-04-02
申请人： Minori Noguchi , Yukio Kembo , Hiroshi Morioka , Hiroshi Yamaguchi , Makiko Kohno , Yoshimasa Ohshima
发明人： Minori Noguchi , Yukio Kembo , Hiroshi Morioka , Hiroshi Yamaguchi , Makiko Kohno , Yoshimasa Ohshima
IPC分类号： G01N21/94 , G01N21/956 , G01Q10/00 , G01Q30/02 , G01Q30/04 , G01Q30/14 , G01Q60/10 , G01R31/311 , H01J37/256 , H01L21/00 , H01L21/66
CPC分类号： H01L21/67253 , G01R31/311 , H01J37/256 , H01L21/67276 , H01L21/67288 , H01L22/20 , B82Y35/00 , G01N2021/8822 , G01N21/94 , G01N21/95623
摘要： Method and apparatus of detecting, analyzing and evaluating the content of foreign matters such as dusts and impurities contained in various materials, units, processes and environment standing for constituting components of a mass production line during mass production start-up and during mass production, in order to manage a semiconductor production process. A mass production off-line system including an apparatus for detecting, analyzing and evaluating the content of foreign matters during the mass production start-up is separated from the production line and installed independently thereof. Monitors for detection of foreign matters are provided at necessary locations in the production line and monitor data is evaluated through various units to manage the content of foreign matters in the production line, permitting efficient and economical mass production start-up and mass production. The kind of element of a foreign matter on sampling wafer detected in the mass production line is analyzed by means of STM/STS and the results are compared with a data base to effect identification. A foreign matter or a contaminant is detected by detecting a scatttered beam, of a light spot which scans the surface of a substrate. The detection of the scattered beam is carried out under the condition that Rayleigh scattering of the light spot on the light spot irradiation and reflection paths and Rayleigh scattering of the scattered beam on the scattered beam detection path are suppressed to a minimum. For the suppression of Rayleigh scattering, a low-pressure or low-temperature atmosphere may be used.
摘要翻译：检测，分析和评估大规模生产启动期间和批量生产期间大规模生产线组成部件的各种材料，单位，工艺和环境中所含的灰尘和杂质等杂质的含量，为了管理半导体生产过程。包括用于在批量生产启动期间检测，分析和评估异物含量的装置的批量生产离线系统与生产线分离并独立安装。在生产线必需的位置提供检测异物的监测器，通过各种单位对监测数据进行评估，对生产线内的异物含量进行管理，实现高效，经济的批量生产启动和批量生产。通过STM / STS分析在大规模生产线上检测到的采样晶圆上的异物元素的种类，并将结果与数据库进行比较以进行识别。通过检测扫描基板表面的光斑的光斑光束来检测异物或污染物。在光点照射和反射路径上的光斑的瑞利散射和散射光束检测路径上的散射光束的瑞利散射被抑制到最小的条件下进行散射光束的检测。为了抑制瑞利散射，可以使用低压或低温气氛。

79. 发明授权

US5156976A Evanescent wave sensor shell and apparatus 失效
标题翻译： EVANESCENT波传感器外壳和设备
公开(公告)号：US5156976A
公开(公告)日：1992-10-20
申请号：US712003
申请日：1991-06-07
申请人： Rudolf E. Slovacek , Walter F. Love
发明人： Rudolf E. Slovacek , Walter F. Love
IPC分类号： G01N21/03 , G01N21/27 , G01N21/55 , G01N21/64 , G01Q30/14 , G01Q60/00 , G01Q70/08 , G01Q70/10 , G01Q80/00
CPC分类号： G01N21/648 , G01N21/552 , G01N21/7703 , Y10S435/808 , Y10S436/805 , Y10S436/807
摘要： An evanescent wave sensor for use in analyzing a medium, the sensor including a shell having a radiation port at a first end and a base at a second end. The base has a dimension greater than that of the radiation port, and inner and outer wall surfaces of the shell extend between the radiation port and the base. The shell is formed of a material having an index of refraction greater than that of the medium. An apparatus and method for analyzing the medium using the sensor may include a receptacle which defines a chamber about a portion of the shell for contacting the medium to the shell for analysis, optical elements for guiding radiation from a radiation source to the radiation port, and optical elements for guiding fluorescent radiation from the shell to a detector of fluorescent radiation.

80. 发明授权

US4935634A Atomic force microscope with optional replaceable fluid cell 失效
标题翻译：原子力显微镜与可选的可更换流体池
公开(公告)号：US4935634A
公开(公告)日：1990-06-19
申请号：US322001
申请日：1989-03-13
申请人： Paul K. Hansma , Barney Drake
发明人： Paul K. Hansma , Barney Drake
IPC分类号： G01B7/34 , B01L7/00 , G01B11/24 , G01B21/30 , G01L5/00 , G01N21/88 , G01N37/00 , G01Q30/02 , G01Q30/14 , G01Q60/00 , G01Q60/24 , G01Q60/38 , G01Q70/02 , G01Q70/04 , H01J37/20
CPC分类号： G01Q60/38 , B82Y35/00 , G01Q30/025 , G01Q30/14 , G01Q70/02 , G01Q70/04 , Y10S977/863 , Y10S977/87
摘要： An atomic force microscope which is readily useable for researchers for its intended use without extensive lost time for setup and repair. The probe used therein is a cantilevered optical lever which imparts surface information in a gentle and reliable manner by reflecting an incident laser beam. The probe is carried by a replaceable probe-carrying module which is factory set up and merely inserted and fine tuned by the user. The probe-carrying module also includes the provision for forming a fluid cell around the probe. Fluid can be inserted into and/or be circulated through the fluid cell through incorporated tubes in the porbe-carrying module. Electrodes are also provided in the fluid cell for various uses including real-time studies of electro-chemical operations taking place in the fluid cell. The piezoelectric scan tube employed includes a voltage shield to prevent scanning voltages to the tube from affecting data readings. Samples are easily mounted, replaced, and horizontally adjusted using a sample stage which is magnetically attached to the top of the scan tube. Calibration tools are provided to make initial set up and fine tuning of the microscope a simple and straightforward operation requiring little or no technical talent.

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