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    • 75. 发明授权
    • Method of manufacturing flash memory
    • 闪存制造方法
    • US06887757B2
    • 2005-05-03
    • US10249867
    • 2003-05-14
    • Kuang-Chao ChenHsueh-Hao ShihLing-Wuu Yang
    • Kuang-Chao ChenHsueh-Hao ShihLing-Wuu Yang
    • H01L21/336H01L21/8246H01L27/105
    • H01L27/11568H01L27/105H01L27/11573
    • A method of fabricating a flash memory device is provided. First, a substrate partitioned into a memory cell region and a peripheral circuit region is provided. A tunnel dielectric layer is formed over the memory cell region and a liner layer is formed over the peripheral circuit region. Thereafter, a patterned gate conductive layer is formed over the substrate. An inter-gate dielectric layer and a passivation layer are sequentially formed over the substrate. The passivation layer, the inter-gate dielectric layer, the gate conductive layer and the liner layer over the peripheral circuit region are removed. A gate dielectric layer is formed over the peripheral circuit region while the passivation layer over the memory cell region is converted into an oxide layer. Another conductive layer is formed over the substrate. The conductive layer, the oxide layer, the inter-gate dielectric layer and the gate conductive layer over the memory cell region are patterned to form a memory gate. The second conductive layer over the peripheral circuit region is similarly patterned to form a gate.
    • 提供一种制造闪速存储器件的方法。 首先,提供分割为存储单元区域和外围电路区域的基板。 在存储单元区域上形成隧道介电层,并在外围电路区域上形成衬垫层。 此后,在衬底上形成图案化的栅极导电层。 栅极间电介质层和钝化层依次形成在衬底上。 外围电路区域上的钝化层,栅极间电介质层,栅极导电层和衬垫层被去除。 在外围电路区域上形成栅极电介质层,同时将存储单元区域上的钝化层转换成氧化物层。 在衬底上形成另一导电层。 将存储单元区域上的导电层,氧化物层,栅极间电介质层和栅极导电层图案化以形成存储栅极。 外围电路区域上的第二导电层类似地构图形成栅极。
    • 77. 发明授权
    • Aluminum plug process
    • 铝塞过程
    • US5356836A
    • 1994-10-18
    • US108224
    • 1993-08-19
    • Kuang-Chao ChenShaw-Tzeng Hsia
    • Kuang-Chao ChenShaw-Tzeng Hsia
    • C23C14/34H01L21/285H01L21/3205H01L21/74H01L21/768H01L23/52H01L23/522H01L23/532H01L21/283
    • H01L21/76858H01L21/743H01L21/76843H01L21/76877H01L23/5226H01L23/53223H01L2924/0002
    • A new method of metallization of an integrated circuit is described. This method can be used for a first metallization to contact the semiconductor substrate regions or for a subsequent metallizations for interconnection within the integrated circuit. An insulating layer is provided over the surface of a semiconductor substrate or over a metallization layer. At least one contact opening is made through the insulating layer to the semiconductor substrate or to the metallization layer. A barrier metal layer is deposited over the surface of the substrate and within the contact opening wherein most of the barrier metal is deposited on the bottom of the contact opening rather than on the sides of the opening. A metal layer is cold sputtered over the barrier metal layer, then the metal is hot sputtered over the cold-sputtered metal layer wherein the cold and hot sputtering are continuous operations to complete the metallization of the integrated circuit.
    • 描述了集成电路的金属化的新方法。 该方法可以用于第一金属化以接触半导体衬底区域或用于随后的集成电路内的互连金属化。 绝缘层设置在半导体衬底的表面上或金属化层上。 至少一个接触开口穿过绝缘层到达半导体衬底或金属化层。 阻挡金属层沉积在衬底的表面上并且在接触开口内,其中大部分阻挡金属沉积在接触开口的底部而不是在开口的侧面上。 金属层在阻挡金属层上被冷溅射,然后将金属热溅射在冷溅射的金属层上,其中冷和热溅射是连续操作以完成集成电路的金属化。
    • 78. 发明申请
    • EXTERNAL ELECTRONIC EAR DEVICE AND COCHLEAR IMPLANT DEVICE
    • 外部电子耳设备和COCHLEAR IMPLANT DEVICE
    • US20160206878A1
    • 2016-07-21
    • US14996239
    • 2016-01-15
    • Kuang-Chao ChenSILICON MOTION, INC.
    • Kuang-Chao ChenKuo-Liang Yeh
    • A61N1/36A61N1/372A61N1/375A61N1/05
    • A61N1/36032A61N1/0541A61N1/36036A61N1/37229A61N1/375
    • An external electronic ear device includes a housing, an external magnet, a microphone, a processing circuit and a wireless signal transmitter circuit. The external magnet is disposed in the housing and attracts a receiver magnet disposed under a scalp of a user. The microphone is disposed in the housing and receives an external sound and generates a sound signal corresponding to the external sound. The processing circuit is disposed in the housing and converts the sound signal into an electrode driving signal. The wireless signal transmitter circuit is disposed in the housing and transmits the electrode driving signal to a cochlear implant device in the cochlear system. The cochlear implant device converts the electrode driving signal into a plurality of electrode currents, and a plurality of electrical pulses are generated in a cochlear nerve of the user through a plurality of electrodes according to the electrode currents.
    • 外部电子耳机包括壳体,外部磁体,麦克风,处理电路和无线信号发射器电路。 外部磁体设置在壳体中并吸引设置在使用者头皮下方的接收器磁体。 麦克风设置在外壳中并接收外部声音,并产生对应于外部声音的声音信号。 处理电路设置在壳体中并将声音信号转换成电极驱动信号。 无线信号发射器电路设置在外壳中,并将电极驱动信号传输到耳蜗系统中的人工耳蜗植入装置。 耳蜗植入装置将电极驱动信号转换为多个电极电流,并且根据电极电流通过多个电极在用户的耳蜗神经中产生多个电脉冲。