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    • 73. 发明授权
    • Pattern inspection equipment, pattern inspection method, and storage medium storing pattern inspection program
    • 图案检验设备,图案检验方法和存储介质存储图案检验程序
    • US06400838B2
    • 2002-06-04
    • US09122779
    • 1998-07-27
    • Toshiyuki Watanabe
    • Toshiyuki Watanabe
    • G06K942
    • G06T7/0006G06T2207/30121G06T2207/30148
    • Pattern inspection equipment has at least a measured data generation unit for generating measured data from patterns that have been delineated on a sample according to design data, a reference data generation unit for generating reference data used to inspect the patterns from gradational data expressed in multiple gradation levels, and a fault decision circuit for comparing the measured data with the reference data. The reference data generation unit has a multi-valued pattern development circuit for developing the design data into the gradational data and a fine adjustment circuit for finely shifting the positions or adjusting the curvatures of pattern edges in the pattern constructed with the gradational data. The fine adjustment of the pattern edges is necessary to cope with slightly displaced edges and rounded corners of the actual patterns on the sample. These slightly displaced edges and rounded corners are caused through mask manufacturing processes and are frequently smaller than the size of a sensor pixel. To adjust the reference data to the displaced edges, a size modification circuit detects a maximum value in a specified area in the gradational data and modifies the size of the pattern constructed with the gradational data. To adjust the reference data to match with the actual rounded corners, a corner rounding circuit rounds corners in the pattern constructed with the gradational data. Also provided is a pattern inspection method for developing the design data into the gradational data, adjusting the gradational data to displaced edges and rounded corners of the actual patterns and preparing the reference data, and testing the patterns for faults. Further provided is a storage medium for storing a pattern inspection program for realizing the pattern inspection method.
    • 模式检查设备至少具有测量数据生成单元,用于根据设计数据从已经在样本上划定的模式生成测量数据;参考数据生成单元,用于生成用于根据以多个等级表示的分级数据检查模式的参考数据 电平,以及用于将测量数据与参考数据进行比较的故障判定电路。 参考数据生成单元具有用于将设计数据发展成渐变数据的多值图案开发电路和用于精细移位位置或调整由渐变数据构成的图案中的图案边缘的曲率的微调电路。 图案边缘的精细调整是必要的,以应对样品上实际图案的稍微偏移的边缘和圆角。 这些略微偏移的边缘和圆角是通过掩模制造工艺引起的,并且通常小于传感器像素的尺寸。 为了将参考数据调整到移位边缘,尺寸修改电路检测渐变数据中指定区域中的最大值,并修改由渐变数据构成的图案的大小。 为了调整参考数据以与实际的圆角匹配,一个圆角圆形回转线使用渐变数据构造的图案中的角落圆。 还提供了一种用于将设计数据开发到等级数据的模式检查方法,将等级数据调整到实际模式的偏移边缘和圆角,并准备参考数据,并测试故障模式。 还提供了一种用于存储用于实现图案检查方法的图案检查程序的存储介质。
    • 80. 发明授权
    • Apparatus for assembling tire and rim and filling inner pressure
    • 装配轮胎和轮辋和填充内部压力的装置
    • US5339880A
    • 1994-08-23
    • US32106
    • 1993-03-17
    • Hiroshi KawabeToshiyuki WatanabeNaotaka Tomita
    • Hiroshi KawabeToshiyuki WatanabeNaotaka Tomita
    • B60C25/12B60C25/132B60C25/14B60C25/06
    • B60C25/12B60C25/132B60C25/14B60C25/145
    • A method and an apparatus for fitting bead portions of the tire onto a wheel substantially uniformly and at the same time for filling inner pressure into the tire. A wheel cap-shaped jig in the form of a disc is arranged on the side surface of the wheel. The periphery of the wheel cap-shaped jig progressively reduces outwardly in the rotating axial direction of the wheel. The tire is then obliquely arranged on the wheel through the wheel cap-shaped jig, and the bead portions are radially outwardly expanded along their circumferences so as to assemble onto the rim. An outer cylindrical member having an inclined annular end surface and an inner cylindrical member telescopically arranged in the outer cylindrical member are brought into air-tight contact with the rim and a side surface of the tire, respectively. While inner pressure is filled into the tire through the clearance between the wheel and the bead portion of the tire, the outer cylindrical member is lowered relative to the inner cylindrical member to bring the bead portions into close contact with the rim.
    • 一种用于将轮胎的胎圈部分基本上均匀地配合到车轮上并同时用于将内部压力填充到轮胎中的方法和装置。 在轮的侧面上布置有盘形轮毂形夹具。 车轮盖形夹具的周边在车轮的旋转轴向方向上逐渐减小。 然后将轮胎通过车轮盖形夹具倾斜地布置在车轮上,并且胎圈部分沿其周边径向向外扩展,以便组装到轮辋上。 具有倾斜环形端面的外圆柱形构件和可伸缩地布置在外圆柱形构件中的内圆筒构件分别与轮辋的轮辋和侧表面气密性地接触。 当通过车轮和轮胎的胎圈部分之间的间隙将内部压力填充到轮胎中时,外部圆柱形构件相对于内部圆柱形构件降低以使胎圈部分与轮辋紧密接触。