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    • 75. 发明授权
    • Method of manufacturing a semiconductor device
    • 制造半导体器件的方法
    • US5106782A
    • 1992-04-21
    • US378627
    • 1989-07-12
    • Tadashi MatsunoHideki ShibataKazuhiko HashimotoHisayo Momose
    • Tadashi MatsunoHideki ShibataKazuhiko HashimotoHisayo Momose
    • H01L21/8238H01L21/225H01L21/28H01L21/768H01L27/092
    • H01L21/2257H01L21/76801Y10S148/02Y10S148/026Y10S148/102
    • A method of manufacturing a semiconductor device having a semiconductor substrate of a first conductivity type, an N-type diffusion layer formed in the substrate, and a P-type diffusion layer formed in the substrate. Two contact holes are formed in separate steps, thus exposing the N-type diffusion layer and the P-type diffusion layer, respectively. Hence, when one of the diffusion layers is again doped with an impurity, or again heat-treated, the other diffusion layer is already protected by inter-layer insulation film. Therefore, the impurity cannot diffuse into the contact formed in the contact hole made in the other diffusion layer. As a result of this, SAC technique can be successfully achieved, without deteriorating the characteristic of the contact. In addition, since two contact holes are made in a polysilicon wiring strip and the diffusion layer to which the SAC technique is applied, in separate steps, the SAC technique can be successfully accomplished, without deteriorating the characteristic of the MOSFET formed in the semiconductor device.
    • 一种制造半导体器件的方法,该半导体器件具有第一导电类型的半导体衬底,形成在衬底中的N型扩散层,以及形成在衬底中的P型扩散层。 在分开的步骤中形成两个接触孔,从而分别露出N型扩散层和P型扩散层。 因此,当扩散层中的一个再次掺杂杂质或再次热处理时,另一个扩散层已经被层间绝缘膜保护。 因此,杂质不能扩散到在另一扩散层中形成的接触孔中形成的接触中。 作为其结果,可以成功地实现SAC技术,而不会使接触的特性恶化。 此外,由于在多晶硅布线条中形成两个接触孔,并且在单独的步骤中制成SAC技术所用的扩散层,所以可以成功地实现SAC技术,而不会降低在半导体器件中形成的MOSFET的特性 。
    • 77. 发明授权
    • Substrate treating system
    • 底物处理系统
    • US09176496B2
    • 2015-11-03
    • US13596984
    • 2012-08-28
    • Hideki Shibata
    • Hideki Shibata
    • G05B19/18G05B19/418H01L21/67
    • G05B19/41825G05B2219/31216G05B2219/32265G05B2219/45031H01L21/67276Y02P90/04Y02P90/087Y02P90/20Y02P90/285
    • A substrate treating apparatus having a substrate treating unit, a load port for receiving pods for storing the substrates, and transferring the pods to and from the substrate treating unit, and a buffer between the substrate treating unit and the load port for transferring the substrates to and from the substrate treating unit and the load port, and temporarily storing the pods; a carrier transport system for transferring the pods to and from the load port; and a host computer for transporting the pods in response to conditions. A transport-related control unit, when the load port is being used by one of the pods and a vehicle of the carrier transport system approaches to transfer another of the pods to the load port, to suspends a notice of transfer disapproval until completion of the use by the one of the pods.
    • 一种基板处理装置,具有基板处理单元,用于容纳用于存储基板的容器的负载端口,以及将基座处理单元和从基板处理单元传送到基板处理单元和从基板处理单元和负载端口之间的缓冲器,用于将基板传送到 并且从基板处理单元和装载端口,并临时存储荚; 用于将货舱传送到和从装载口传送的载体传送系统; 以及用于响应于条件传送荚的主计算机。 与运输相关的控制单元,当装载端口被其中一个吊舱使用并且载体运输系统的车辆接近将另一个吊舱转移到装载端口时,暂停转移通知不被通知,直到完成 由一个pod使用。
    • 79. 发明授权
    • Speed change gear device
    • 变速装置
    • US08545356B2
    • 2013-10-01
    • US13810806
    • 2011-07-22
    • Tsune KobayashiTohru OnozakiHideki Shibata
    • Tsune KobayashiTohru OnozakiHideki Shibata
    • F16H1/32
    • F16H3/70F16H1/32F16H2001/325
    • A speed change gear device is provided with a housing, a first member supported rotatably about a predetermined rotational axis, a shaft member formed with an external gear, an annular member formed with an internal gear meshing with the external gear, and a transmission mechanism for transmitting a rotational component only of the annular member to the shaft member or a disc member arranged to be rotatable relative to the housing. The external gear differs from the internal gear in the number of teeth. Further, the first member is formed with a receiving hole that receives the annular member at a position where the center of the annular member is at a predetermined distance from the rotational axis. Then, the annular member is received in the receiving hole rotatably relative to the first member.
    • 一种变速齿轮装置,具有壳体,围绕预定旋转轴线可旋转地支撑的第一构件,形成有外齿轮的轴构件,形成有与外齿轮啮合的内齿轮的环形构件,以及用于 仅将所述环形构件的旋转部件传递到所述轴构件或者相对于所述壳体布置成可旋转的盘构件。 外齿轮与内齿轮的齿数不同。 此外,第一构件形成有容纳孔,该容纳孔在环形构件的中心距离旋转轴线预定距离的位置处容纳环形构件。 然后,环状构件相对于第一构件可旋转地容纳在容纳孔中。
    • 80. 发明申请
    • SPEED CHANGE GEAR DEVICE
    • 变速齿轮装置
    • US20130203544A1
    • 2013-08-08
    • US13810806
    • 2011-07-22
    • Tsune KobayashiTohru OnozakiHideki Shibata
    • Tsune KobayashiTohru OnozakiHideki Shibata
    • F16H3/70
    • F16H3/70F16H1/32F16H2001/325
    • A speed change gear device is provided with a housing, a first member supported rotatably about a predetermined rotational axis, a shaft member formed with an external gear, an annular member formed with an internal gear meshing with the external gear, and a transmission mechanism for transmitting a rotational component only of the annular member to the shaft member or a disc member arranged to be rotatable relative to the housing. The external gear differs from the internal gear in the number of teeth. Further, the first member is formed with a receiving hole that receives the annular member at a position where the center of the annular member is at a predetermined distance from the rotational axis. Then, the annular member is received in the receiving hole rotatably relative to the first member.
    • 一种变速齿轮装置,具有壳体,围绕预定旋转轴线可旋转地支撑的第一构件,形成有外齿轮的轴构件,形成有与外齿轮啮合的内齿轮的环形构件,以及用于 仅将所述环形构件的旋转部件传递到所述轴构件或者相对于所述壳体布置成可旋转的盘构件。 外齿轮与内齿轮的齿数不同。 此外,第一构件形成有容纳孔,该容纳孔在环形构件的中心距离旋转轴线预定距离的位置处容纳环形构件。 然后,环状构件相对于第一构件可旋转地容纳在容纳孔中。