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61. 发明授权

US08443863B2 High temperature sheet handling system and methods 失效
标题翻译：高温片处理系统及方法
公开(公告)号：US08443863B2
公开(公告)日：2013-05-21
申请号：US12256865
申请日：2008-10-23
申请人： Michael Yoshiya Nishimoto , William Edward Lock
发明人： Michael Yoshiya Nishimoto , William Edward Lock
IPC分类号： B32B38/10
CPC分类号： H01L21/6838 , H01L21/67092 , H01L21/67109 , Y10T156/1132 , Y10T156/1137 , Y10T156/1928 , Y10T156/1939 , Y10T156/1944
摘要： Methods and apparatus provide for imparting a controlled supply of gas to at least one Bernoulli chuck to provide a balanced draw and repellant gas flow to a material sheet; and at least one of: elevating a temperature of the supply of gas to the at least one Bernoulli chuck such that the gas flow to the material sheet is provided at the elevated temperature providing a stream of gas to an insulator substrate to promote separation of an exfoliation layer from a donor semiconductor wafer, and providing a stream of gas to a junction of the insulator substrate and any support structure to promote separation of the insulator substrate and the supporting structure.
摘要翻译：方法和装置提供了向至少一个伯努利卡盘提供受控的气体供应以提供平衡的抽吸和排斥气体流到材料片材; 以及至少一个：将气体供应温度提升到至少一个伯努利卡盘，使得在升高的温度下提供到材料片材的气流，从而为绝缘体基底提供气流以促进分离从供体半导体晶片剥离层，并且向绝缘体基板和任何支撑结构的接合部提供气流，以促进绝缘体基板和支撑结构的分离。

62. 发明申请

US20120247686A1 Systems and Methods For Ultrasonically Cleaving A Bonded Wafer Pair 审中-公开
标题翻译：用于超声波切割粘合晶片对的系统和方法
公开(公告)号：US20120247686A1
公开(公告)日：2012-10-04
申请号：US13432326
申请日：2012-03-28
申请人： Anca Stefanescu
发明人： Anca Stefanescu
IPC分类号： B32B38/10
CPC分类号： H01L21/84 , B32B43/006 , B32B2310/028 , B32B2457/14 , H01L21/67057 , H01L21/67092 , H01L21/76254 , Y10T156/1126 , Y10T156/1928
摘要： Systems and methods for the ultrasonic cleaving of bonded wafer pairs are described. The system includes a tank for containing a volume of liquid, a wafer boat having a recess formed therein for receiving the bonded wafer pair. The recess has a pair of opposing, spaced-apart sidewalls disposed at an angle from a vertical axis. An ultrasonic agitator is configured to ultrasonically agitate the volume of liquid. The ultrasonic agitation of the volume of liquid results in the cleaving of the bonded wafer pair.
摘要翻译：描述了键合晶片对超声波切割的系统和方法。该系统包括用于容纳一定体积的液体的容器，具有形成在其中的用于接收接合晶片对的凹部的晶片舟皿。该凹部具有一对相对的间隔开的侧壁，该侧壁与垂直轴成一角度设置。超声波搅拌器被配置为超声搅动液体的体积。液体体积的超声波搅拌导致接合晶片对的裂开。

63. 发明申请

US20110247659A1 FILM REMOVING DEVICE AND FILM REMOVING METHOD 有权
标题翻译：电影去除装置和电影删除方法
公开(公告)号：US20110247659A1
公开(公告)日：2011-10-13
申请号：US13163276
申请日：2011-06-17
申请人： Shigenori KAMEI , Kotaro OOISHI , Masahito HAMADA
发明人： Shigenori KAMEI , Kotaro OOISHI , Masahito HAMADA
IPC分类号： B08B5/04
CPC分类号： G03F7/168 , G03F7/162 , H01L21/6708 , Y10S134/902 , Y10T156/1111 , Y10T156/1928
摘要： A film removing device includes an approach stage having a flat approach part having a surface substantially flush with the surface of a substrate supported on a support member. The flat approach part faces a first side surface of the substrate at a corner of the substrate where the first side surface and a second side surface of the substrate join. A film removing nozzle spouts a solvent toward a peripheral part of the substrate and sucks a solution while being moved along the second side surface and the approach stage. A gas is spouted into a gap between the flat approach part and the corner of the substrate so that the gas flows through the gap toward the second side surface.
摘要翻译：膜移除装置包括具有平坦接近部分的接近台，该平面接近部分具有与支撑在支撑构件上的基板的表面基本齐平的表面。平面接近部分面对衬底的第一侧表面，其位于衬底的第一侧表面和第二侧表面接合的拐角处。膜移除喷嘴向溶液的周边部喷射溶剂，并在沿着第二侧面和接近台移动的同时吸取溶液。气体被喷射到平坦的接近部分和基底的角部之间的间隙中，使得气体朝向第二侧表面流过间隙。

64. 发明授权

US07934532B2 Tape for mass-sealing bottles and similar containers, and apparati for its application and removal 有权
标题翻译：用于密封瓶和类似容器的胶带，并适用于其应用和拆卸
公开(公告)号：US07934532B2
公开(公告)日：2011-05-03
申请号：US12383570
申请日：2009-03-25
申请人： Leon Antoine Ribi
发明人： Leon Antoine Ribi
IPC分类号： B32B38/10
CPC分类号： B67B7/00 , B65B7/165 , B67B3/00 , B67B7/24 , Y10S428/906 , Y10T156/1343 , Y10T156/17 , Y10T156/1702 , Y10T156/1705 , Y10T156/1734 , Y10T156/1744 , Y10T156/1928 , Y10T156/1967 , Y10T428/24273 , Y10T428/24331 , Y10T428/24372
摘要： A composite laminar tape (1) for mass-sealing bottles (15) or similar containers consists, according to the invention, of at least one extensible laminar tape (16), made of an extensible plastomeric film, which is possibly provided with closed lines for a predetermined separation of areas being meant to act as sealing membranes.The invention also relates to an apparatus for mass-sealing containers with said tape, and to an apparatus for mass-unsealing the containers sealed with said tape.
摘要翻译：根据本发明，用于质量密封瓶（15）或类似容器的复合层状带（1）由至少一个由可伸缩的塑性膜制成的可延展的薄片带（16）组成，其可能设置有闭合线预定的区域意图用作密封膜。本发明还涉及一种用于使用所述带对容器进行大容量密封的装置，以及用于大规模开封由所述带密封的容器的装置。

65. 发明授权

US07730600B2 Method, system, and apparatus for detaching and collecting an IC tag from a paper sheet to which it is attached 失效
标题翻译：用于从其附着的纸张上分离和收集IC标签的方法，系统和装置
公开(公告)号：US07730600B2
公开(公告)日：2010-06-08
申请号：US10533581
申请日：2004-01-21
申请人： Nobukatsu Nishida , Hiroshi Iwata , Toshihiko Kawanami , Toshimi Tajima
发明人： Nobukatsu Nishida , Hiroshi Iwata , Toshihiko Kawanami , Toshimi Tajima
IPC分类号： B29C63/00 , B23P19/00 , B23P19/02
CPC分类号： B08B3/04 , B08B3/08 , B09B5/00 , Y10T29/49821 , Y10T29/49822 , Y10T156/1111 , Y10T156/1168 , Y10T156/1928
摘要： In order to efficiently detach and collect an IC tag (1) from a paper sheet (2) to which the IC tag (1) is attached, the IC tag (1) is detached from the paper sheet (2) by applying external force to the adhesive surface between the paper sheet (2) and the IC tag (1) (detachment step). Next, the detached IC tag (1) is fractionated from other substances (fractionation step).
摘要翻译：为了从安装有IC标签（1）的纸张（2）有效地分离并收集IC标签（1），IC标签（1）通过施加外力而从纸张（2）分离到纸张（2）和IC标签（1）之间的粘合表面（脱离步骤）。接下来，将分离的IC标签（1）从其他物质（分馏步骤）分馏。

66. 发明授权

US07510756B2 Tape for mass sealing bottles and similar containers, and apparati for its application and removal 有权
标题翻译：用于大量密封瓶和类似容器的胶带，并适用于其应用和拆卸
公开(公告)号：US07510756B2
公开(公告)日：2009-03-31
申请号：US10440269
申请日：2003-05-19
申请人： Leon Antoine Ribi
发明人： Leon Antoine Ribi
IPC分类号： B65B7/28 , B32B3/24
CPC分类号： B67B7/00 , B65B7/165 , B67B3/00 , B67B7/24 , Y10S428/906 , Y10T156/1343 , Y10T156/17 , Y10T156/1702 , Y10T156/1705 , Y10T156/1734 , Y10T156/1744 , Y10T156/1928 , Y10T156/1967 , Y10T428/24273 , Y10T428/24331 , Y10T428/24372
摘要： A composite laminar tape (1) for mass-sealing bottles (15) or similar containers consists, according to the invention, of at least one extensible laminar tape (16), made of an extensible plastomeric film, which is possibly provided with closed lines for a predetermined separation of areas being meant to act as sealing membranes.The invention also relates to an apparatus for mass-sealing containers with said tape, and to an apparatus for mass-unsealing the containers sealed with said tape.
摘要翻译：根据本发明，用于质量密封瓶（15）或类似容器的复合层状带（1）由至少一个由可伸缩的塑性膜制成的可延展的薄片带（16）组成，其可能设置有闭合线预定的区域意图用作密封膜。本发明还涉及一种用于使用所述带对容器进行大容量密封的装置，以及用于大规模开封由所述带密封的容器的装置。

67. 发明申请

US20090032187A1 Stripping Liquid for Use in Separating Paper From Plaster/Paper Laminate 失效
标题翻译：剥离液用于从纸浆/纸层压板分离纸张
公开(公告)号：US20090032187A1
公开(公告)日：2009-02-05
申请号：US12223461
申请日：2007-02-05
申请人： Shingo Hiranaka , Genji Taga
发明人： Shingo Hiranaka , Genji Taga
IPC分类号： B32B43/00
CPC分类号： B32B43/006 , B32B2315/18 , B32B2317/12 , C11D7/10 , C11D7/265 , Y10T156/1111 , Y10T156/1174 , Y10T156/1184 , Y10T156/1928
摘要： A stripping liquid of the present invention is used for separating the paper from a plaster/paper laminate such as waste plasterboard, and comprises an aqueous solution of an alkali metal salt or an ammonium salt of carboxylic acid. The stripping liquid is fed onto the surface (paper surface) of the plaster/paper laminate so as to infiltrate into the bonding surface between the plaster and the paper, so that the carboxylate is made present on the bonding surface. Upon stripping off the paper in the presence of the carboxylate, it is allowed to entirely separate the paper from the plaster. Upon mixing the stripping liquid and a nonionic surfactant or a water-soluble organic solvent together, further, the stripping liquid can be quickly and reliably infiltrated into the bonding surface between the plaster and the paper.
摘要翻译：本发明的剥离液用于从诸如废石膏板的石膏/纸层压材料中分离纸，并且包含碱金属盐或羧酸铵盐的水溶液。将剥离液供给到石膏/纸层压板的表面（纸面）上，以便渗透到石膏和纸之间的粘合表面中，使得羧酸盐存在于粘合表面上。在羧酸盐存在下剥离纸时，允许纸与石膏完全分离。在将剥离液与非离子表面活性剂或水溶性有机溶剂混合在一起的同时，剥离液可以快速可靠地渗透到石膏和纸之间的粘合表面中。

68. 发明授权

US06997226B2 Method of transferring a substantially disc-shaped workpiece, and device for carrying out this method 有权
标题翻译：传送大致圆盘形工件的方法，以及用于执行该方法的装置
公开(公告)号：US06997226B2
公开(公告)日：2006-02-14
申请号：US10480732
申请日：2002-06-13
申请人： Joachim Anker
发明人： Joachim Anker
IPC分类号： B32B35/00
CPC分类号： H01L21/6835 , H01L21/67092 , H01L21/67132 , H01L21/6836 , H01L2221/68318 , H01L2221/68327 , Y10S414/135 , Y10T156/1126 , Y10T156/1132 , Y10T156/1705 , Y10T156/19 , Y10T156/1928 , Y10T156/1944 , Y10T156/1978
摘要： Consistent with an embodiment of the present invention, there is a device for transferring a substantially disc-shaped workpiece from a workpiece carier. The workpiece is fastened along a first one of its main surfaces with a double-sided adhesive foil onto a carrier foil. The workpiece is fastened onto the carrier foil along a first one of its main surfaces with of a double-sided adhesive foil onto a carrier foil on whose surface the workpiece is to be provided and fastened along the first main surface in an at least substantially planar manner. The first double-sided adhesive foil is adhesively connected by a first adhesive layer provided on its first surface to a first surface of the workpiece carrier and by a second adhesive layer provided on its second surface to the workpiece along the first main surface thereof.
摘要翻译：与本发明的实施例一致，存在用于从工件卡盘传送大致圆盘状的工件的装置。将工件沿其主表面的第一侧用双面粘合箔紧固到载体箔上。将工件沿着其主表面的第一个主表面上用双面粘合箔紧固到载体箔上，该载体箔在工件被提供并且沿第一主表面以至少基本上平面方式。第一双面粘合箔通过设置在其第一表面上的第一粘合剂层与工件载体的第一表面和沿其第一主表面设置在其第二表面上的第二粘合剂层粘附到工件上。

69. 发明授权

US06860963B2 Sample separating apparatus and method, and substrate manufacturing method 失效
标题翻译：样品分离装置和方法，以及基板制造方法
公开(公告)号：US06860963B2
公开(公告)日：2005-03-01
申请号：US10318231
申请日：2002-12-12
申请人： Kazutaka Yanagita , Takao Yonehara , Kazuaki Omi , Kiyofumi Sakaguchi
发明人： Kazutaka Yanagita , Takao Yonehara , Kazuaki Omi , Kiyofumi Sakaguchi
IPC分类号： B26D3/28 , B26D7/04 , B26F3/00 , H01L21/00 , H01L21/301 , H01L21/304 , H01L21/68 , H01L21/76 , B32B35/00
CPC分类号： H01L21/6835 , B26F3/004 , H01L21/67092 , H01L2221/68363 , H01L2924/30105 , Y10S156/941 , Y10T29/49821 , Y10T83/364 , Y10T156/11 , Y10T156/1126 , Y10T156/1137 , Y10T156/19 , Y10T156/1928 , Y10T156/1933 , Y10T156/1939
摘要： This invention is to provide an apparatus for separating a substrate having a porous layer at the porous layer. A bonded substrate stack (101) having a porous layer (101b) is supported by substrate holding portions (120, 150) while being rotated. High-speed, high-pressure water (jet) is ejected from a nozzle (102), so the jet is injected into the bonded substrate stack (101). The substrate holding portions (120, 150) hold the bonded substrate stack (101) such that the bonded substrate stack (101) can expand at its central portion due to the pressure of the injected water. This efficiently applies a force (separation force) that acts outward from the inside of the bonded substrate stack (101).
摘要翻译：本发明提供一种用于在多孔层处分离具有多孔层的基板的装置。具有多孔层（101b）的键合衬底叠层（101）在旋转的同时由衬底保持部（120,150）支撑。从喷嘴（102）喷出高速，高压的水（射流），将射流喷射到键合衬底叠层（101）中。衬底保持部分（120,150）保持键合衬底叠层（101），使得键合衬底叠层（101）可以由于注入的水的压力而在其中心部分膨胀。这有效地施加从键合衬底叠层（101）的内部向外作用的力（分离力）。

70. 发明申请

US20040226916A1 Thin film removing device and thin removing method 有权
标题翻译：薄膜去除装置和薄去除方法
公开(公告)号：US20040226916A1
公开(公告)日：2004-11-18
申请号：US10841548
申请日：2004-05-10
申请人： TOKYO ELECTRON LIMITED
发明人： Shinji Kobayashi , Norihisa Koga
IPC分类号： C23F001/00
CPC分类号： H01L21/6708 , Y10S134/902 , Y10T156/1111 , Y10T156/1928 , Y10T156/1989
摘要： A thin film removing device and a thin film removing method are capable of removing straight parts of a thin film formed on a square substrate from corners of the substrate, and of suppressing the formation of mists. An approach stage 20 having flat stage plates 23 capable of being disposed substantially flush with the surface of a substrate M mounted on a support table 22 is positioned close to the substrate M mounted on the support table 22. Removing nozzles 30 jet a solvent toward edge parts of the substrate M and suck a solution produced by dissolving part of the resist in the solvent while the removing nozzles 30 are moved along side edges of the substrate M and the approach stage 20 disposed close to the substrate M. Thus, the removing nozzles 30 jet the solvent uniformly over the edge parts and corners of the substrate M and suck the solution without changing modes of jetting the solvent and sucking the solution. Consequently, straight parts of a thin film formed on the square substrate M can be removed from the corners of the substrate M, and the formation of mists can be suppressed.
摘要翻译：薄膜去除装置和薄膜去除方法能够从基板的角部去除在正方形基板上形成的薄膜的直线部分，并且抑制雾的形成。具有能够与安装在支撑台22上的基板M的表面基本齐平的平台台23的接近台20靠近安装在支撑台22上的基板M定位。去除喷嘴30向边缘喷射溶剂将基板M的一部分吸附并且将去除喷嘴30沿着基板M和接近台20的侧边缘移动而将抗蚀剂的一部分溶解在溶剂中而产生的溶液。因此，除去喷嘴 30将溶剂均匀地喷射在基板M的边缘部分和拐角上，并吸取溶液，而不改变喷射溶剂并吸取溶液的模式。因此，可以从基板M的角部去除在正方形基板M上形成的薄膜的直线部分，并且可以抑制雾的形成。

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