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1. 发明授权

US06609553B2 Sample processing apparatus and method 失效
公开(公告)号：US06609553B2
公开(公告)日：2003-08-26
申请号：US10175004
申请日：2002-06-20
申请人： Kazutaka Yanagita , Takao Yonehara , Kazuaki Omi , Kiyofumi Sakaguchi
发明人： Kazutaka Yanagita , Takao Yonehara , Kazuaki Omi , Kiyofumi Sakaguchi
IPC分类号： B32B3500
CPC分类号： H01L21/67092 , Y10S156/942 , Y10T29/49821 , Y10T83/364 , Y10T156/1121 , Y10T156/1126 , Y10T156/1374 , Y10T156/1922 , Y10T156/1939 , Y10T156/1978
摘要： This invention prevents defects generated when a bonded substrate stack having a separation layer is separated. A bonded substrate stack (101) having a porous layer (101b) is separated in two steps of the first and second processes. In the first process, a jet is ejected to the porous layer (101b) while rotating the bonded substrate stack (101) to partially separate the bonded substrate stack (101) while leaving the central portion of the porous layer (101b) as an unseparated region. In the second process, the jet is ejected to the porous layer (101b) while rotation of the bonded substrate stack (101) is stopped. A force is applied to the unseparated region from a predetermined direction to completely separate the bonded substrate stack (101). Also, the first region (peripheral portion) and second region (central portion) of the bonded substrate stack (101) having the porous layer (101b) are separated using a jet and ultrasonic wave, respectively. More specifically, the first region is separated by a jet ejected from a nozzle (102) while rotating the bonded substrate stack (101). On the other hand, the second region is separated by an ultrasonic wave generated by an ultrasonic vibrator (1203).

2. 发明授权

US06418999B1 Sample separating apparatus and method, and substrate manufacturing method 失效
公开(公告)号：US06418999B1
公开(公告)日：2002-07-16
申请号：US09211757
申请日：1998-12-15
申请人： Kazutaka Yanagita , Takao Yonehara , Kazuaki Omi , Kiyofumi Sakaguchi
发明人： Kazutaka Yanagita , Takao Yonehara , Kazuaki Omi , Kiyofumi Sakaguchi
IPC分类号： B32B3500
CPC分类号： H01L21/6835 , B26F3/004 , H01L21/67092 , H01L2221/68363 , H01L2924/30105 , Y10S156/941 , Y10T29/49821 , Y10T83/364 , Y10T156/11 , Y10T156/1126 , Y10T156/1137 , Y10T156/19 , Y10T156/1928 , Y10T156/1933 , Y10T156/1939
摘要： This invention is to provide an apparatus for separating a substrate having a porous layer at the porous layer. A bonded substrate stack (101) having a porous layer (101b) is supported by substrate holding portions (120, 150) while being rotated. High-speed, high-pressure water (jet) is ejected from a nozzle (102), so the jet is injected into the bonded substrate stack (101). The substrate holding portions (120, 150) hold the bonded substrate stack (101) such that the bonded substrate stack (101) can expand at its central portion due to the pressure of the injected water. This efficiently applies a force (separation force) that acts outward from the inside of the bonded substrate stack (101).

3. 发明授权

US06860963B2 Sample separating apparatus and method, and substrate manufacturing method 失效
标题翻译：样品分离装置和方法，以及基板制造方法
公开(公告)号：US06860963B2
公开(公告)日：2005-03-01
申请号：US10318231
申请日：2002-12-12
申请人： Kazutaka Yanagita , Takao Yonehara , Kazuaki Omi , Kiyofumi Sakaguchi
发明人： Kazutaka Yanagita , Takao Yonehara , Kazuaki Omi , Kiyofumi Sakaguchi
IPC分类号： B26D3/28 , B26D7/04 , B26F3/00 , H01L21/00 , H01L21/301 , H01L21/304 , H01L21/68 , H01L21/76 , B32B35/00
CPC分类号： H01L21/6835 , B26F3/004 , H01L21/67092 , H01L2221/68363 , H01L2924/30105 , Y10S156/941 , Y10T29/49821 , Y10T83/364 , Y10T156/11 , Y10T156/1126 , Y10T156/1137 , Y10T156/19 , Y10T156/1928 , Y10T156/1933 , Y10T156/1939
摘要： This invention is to provide an apparatus for separating a substrate having a porous layer at the porous layer. A bonded substrate stack (101) having a porous layer (101b) is supported by substrate holding portions (120, 150) while being rotated. High-speed, high-pressure water (jet) is ejected from a nozzle (102), so the jet is injected into the bonded substrate stack (101). The substrate holding portions (120, 150) hold the bonded substrate stack (101) such that the bonded substrate stack (101) can expand at its central portion due to the pressure of the injected water. This efficiently applies a force (separation force) that acts outward from the inside of the bonded substrate stack (101).
摘要翻译：本发明提供一种用于在多孔层处分离具有多孔层的基板的装置。具有多孔层（101b）的键合衬底叠层（101）在旋转的同时由衬底保持部（120,150）支撑。从喷嘴（102）喷出高速，高压的水（射流），将射流喷射到键合衬底叠层（101）中。衬底保持部分（120,150）保持键合衬底叠层（101），使得键合衬底叠层（101）可以由于注入的水的压力而在其中心部分膨胀。这有效地施加从键合衬底叠层（101）的内部向外作用的力（分离力）。

4. 发明授权

US06773534B2 Sample processing apparatus and method 失效
标题翻译：样品处理设备和方法
公开(公告)号：US06773534B2
公开(公告)日：2004-08-10
申请号：US10175201
申请日：2002-06-20
申请人： Kazutaka Yanagita , Takao Yonehara , Kazuaki Omi , Kiyofumi Sakaguchi
发明人： Kazutaka Yanagita , Takao Yonehara , Kazuaki Omi , Kiyofumi Sakaguchi
IPC分类号： B32B3500
CPC分类号： H01L21/67092 , Y10S156/942 , Y10T29/49821 , Y10T83/364 , Y10T156/1121 , Y10T156/1126 , Y10T156/1374 , Y10T156/1922 , Y10T156/1939 , Y10T156/1978
摘要： This invention prevents defects generated when a bonded substrate stack having a separation layer is separated. A bonded substrate stack (101) having a porous layer (101b) is separated in two steps of the first and second processes. In the first process, a jet is ejected to the porous layer (101b) while rotating the bonded substrate stack (101) to partially separate the bonded substrate stack (101) while leaving the central portion of the porous layer (101b) as an unseparated region. In the second process, the jet is ejected to the porous layer (101b) while rotation of the bonded substrate stack (101) is stopped. A force is applied to the unseparated region from a predetermined direction to completely separate the bonded substrate stack (101). Also, the first region (peripheral portion) and second region (central portion) of the bonded substrate stack (101) having the porous layer (101b) are separated using a jet and ultrasonic wave, respectively. More specifically, the first region is separated by a jet ejected from a nozzle (102) while rotating the bonded substrate stack (101). On the other hand, the second region is separated by an ultrasonic wave generated by an ultrasonic vibrator (1203).
摘要翻译：本发明可以防止当具有分离层的键合衬底叠层分离时产生的缺陷。具有多孔层（101b）的键合衬底叠层（101）在第一和第二工艺的两个步骤中分离。在第一种方法中，一边旋转键合衬底叠层（101），一边将多孔层（101b）的中央部分离开而分离出键合衬底叠层（101），一边喷射到多孔层（101b）地区。在第二过程中，当停止键合衬底叠层（101）的旋转时，射流被喷射到多孔层（101b）。从预定方向向未分离区域施加力，以完全分离键合衬底叠层（101）。此外，分别使用喷射和超声波分离具有多孔层（101b）的键合衬底叠层（101）的第一区域（周边部分）和第二区域（中心部分）。更具体地，在旋转键合衬底叠层（101）的同时，通过从喷嘴（102）喷出的射流来分离第一区域。另一方面，第二区域由超声波振子（1203）产生的超声波分离。

5. 发明授权

US06540861B2 Member separating apparatus and processing apparatus 失效
标题翻译：会员分离装置及处理装置
公开(公告)号：US06540861B2
公开(公告)日：2003-04-01
申请号：US09275305
申请日：1999-03-24
申请人： Kiyofumi Sakaguchi , Takao Yonehara , Kazuaki Omi , Kazutaka Yanagita , Toshikazu Miyakogawa
发明人： Kiyofumi Sakaguchi , Takao Yonehara , Kazuaki Omi , Kazutaka Yanagita , Toshikazu Miyakogawa
IPC分类号： B32B3100
CPC分类号： H01L21/67092 , H01L21/76259 , Y10T83/364 , Y10T156/1374 , Y10T156/17 , Y10T156/1922 , Y10T156/1928
摘要： This invention is to prevent a substrate from dropping when it is transferred/received to/from a separating apparatus. The support surfaces of substrate holding portions (22, 23) are made horizontal, and a substrate (21) to be separated is mounted on one substrate holding portion (22) in a horizontal state (2A). The substrate holding portions (22, 23) are pivoted about rotary shafts (26, 27), respectively, to make the support surfaces of the substrate holding portions (22, 23) vertical so that the substrate (21) is sandwiched by the substrate holding portions (22, 23) (2B). The substrate holding portions (22, 23) are rotated about rotary shafts (24, 25), respectively, and simultaneously, high-pressure, high-speed water is ejected from an ejection nozzle (28) to separate the substrate (21) into two substrates (21a, 21c). The substrate holding portions (22, 23) are pivoted about the rotary shafts (26, 27), respectively, to make the support surfaces horizontal (2C). With this arrangement, the substrate can be supported from the lower side and transferred in the horizontal state.
摘要翻译：本发明是为了防止当基板从分离装置传送/接收时掉落。衬底保持部分（22,23）的支撑表面是水平的，并且待分离的衬底（21）以水平状态（2A）安装在一个衬底保持部分（22）上。基板保持部（22,23）分别围绕旋转轴（26,27）枢转，使基板保持部（22,23）的支撑面垂直，使基板（21）夹在基板保持部（22,23）（2B）。基板保持部分（22,23）分别围绕旋转轴（24,25）旋转，并且同时从喷嘴（28）喷出高压高速水以将基板（21）分离成两个基板（21a，21c）。基板保持部分（22,23）分别围绕旋转轴（26,27）枢转以使支撑表面水平（2C）。通过这种布置，基板可以从下侧被支撑并且以水平状态传送。

6. 发明授权

US06436226B1 Object separating apparatus and method, and method of manufacturing semiconductor substrate 有权
标题翻译：物体分离装置和方法以及制造半导体衬底的方法
公开(公告)号：US06436226B1
公开(公告)日：2002-08-20
申请号：US09211876
申请日：1998-12-15
申请人： Kazuaki Omi , Takao Yonehara , Kiyofumi Sakaguchi , Kazutaka Yanagita
发明人： Kazuaki Omi , Takao Yonehara , Kiyofumi Sakaguchi , Kazutaka Yanagita
IPC分类号： B32B3500
CPC分类号： H01L21/6835 , B26F3/004 , H01L21/67092 , H01L2924/30105 , Y10S156/941 , Y10T29/49821 , Y10T83/364 , Y10T156/11 , Y10T156/1126 , Y10T156/1374 , Y10T156/19
摘要： An apparatus for separating a substrate having a porous layer at the porous layer is provided. A bonded substrate stack (101) having a porous layer (101b) is supported by substrate holding portions (108, 109) while being rotated. High-speed, high-pressure water (jet) is ejected from a nozzle (112) and injected against the bonded substrate stack (101), thereby physically separating the bonded substrate stack (101) into two substrates. The jet pressure is appropriately changed in accordance with progress of separation processing.
摘要翻译：提供了一种用于在多孔层处分离具有多孔层的基板的装置。具有多孔层（101b）的键合衬底叠层（101）在旋转的同时由衬底保持部（108,109）支撑。从喷嘴（112）喷出高速，高压水（射流）并喷射到键合衬底叠层（101）上，从而将键合衬底叠层（101）物理分离成两个衬底。喷射压力根据分离处理的进行适当地改变。

7. 发明授权

US06427747B1 Apparatus and method of separating sample and substrate fabrication method 失效
标题翻译：分离样品和底物制备方法的装置和方法
公开(公告)号：US06427747B1
公开(公告)日：2002-08-06
申请号：US09096285
申请日：1998-06-11
申请人： Kazuaki Omi , Takao Yonehara , Kiyofumi Sakaguchi , Kazutaka Yanagita
发明人： Kazuaki Omi , Takao Yonehara , Kiyofumi Sakaguchi , Kazutaka Yanagita
IPC分类号： H01L2100
CPC分类号： H01L21/67092 , Y10S134/902 , Y10T156/1939
摘要： An apparatus for separating a substrate having a porous layer from the porous layer is provided. A bonded substrate stack having a porous layer is supported by substrate holders while being rotated. A jet nozzle ejects a high-speed, high-pressure liquid or water. The jet thrusts into the bonded substrate through a guide unit. The position in the x-axis direction of this guide unit is adjusted by a motor such that the jet is concentrated into the bonding interface of the bonded substrate stack.
摘要翻译：提供了一种用于从多孔层分离具有多孔层的基板的装置。具有多孔层的键合衬底叠层在旋转的同时由衬底保持器支承。喷嘴喷出高速高压液体或水。射流通过引导单元推入粘合基片。该引导单元的x轴方向的位置由马达进行调节，使得射流集中到键合衬底叠层的接合界面。

8. 发明授权

US06521078B2 Sample separating apparatus and method, and substrate manufacturing method 失效
标题翻译：样品分离装置和方法，以及基板制造方法
公开(公告)号：US06521078B2
公开(公告)日：2003-02-18
申请号：US10151527
申请日：2002-05-20
申请人： Kazutaka Yanagita , Takao Yonehara , Kazuaki Omi , Kiyofumi Sakaguchi
发明人： Kazutaka Yanagita , Takao Yonehara , Kazuaki Omi , Kiyofumi Sakaguchi
IPC分类号： B32B3500
CPC分类号： H01L21/6835 , B26F3/004 , H01L21/67092 , H01L2221/68363 , H01L2924/30105 , Y10S156/941 , Y10T29/49821 , Y10T83/364 , Y10T156/11 , Y10T156/1126 , Y10T156/1137 , Y10T156/19 , Y10T156/1928 , Y10T156/1933 , Y10T156/1939
摘要： This invention is to provide an apparatus for separating a substrate having a porous layer at the porous layer. A bonded substrate stack (101) having a porous layer (10b) is supported by substrate holding portions (120, 150) while being rotated. High-speed, high-pressure water (jet) is ejected from a nozzle (102), so the jet is injected into the bonded substrate stack (101). The substrate holding portions (120, 150) hold the bonded substrate stack (101) such that the bonded substrate stack (101) can expand at its central portion due to the pressure of the injected water. This efficiently applies a force (separation force) that acts outward from the inside of the bonded substrate stack (101).
摘要翻译：本发明提供一种用于在多孔层处分离具有多孔层的基板的装置。具有多孔层（10b）的键合衬底叠层（101）在旋转的同时由衬底保持部分（120,150）支撑。从喷嘴（102）喷出高速，高压的水（射流），将射流喷射到键合衬底叠层（101）中。衬底保持部分（120,150）保持键合衬底叠层（101），使得键合衬底叠层（101）可以由于注入的水的压力而在其中心部分膨胀。这有效地施加从键合衬底叠层（101）的内部向外作用的力（分离力）。

9. 发明授权

US06427748B1 Sample processing apparatus and method 有权
公开(公告)号：US06427748B1
公开(公告)日：2002-08-06
申请号：US09359575
申请日：1999-07-22
申请人： Kazutaka Yanagita , Takao Yonehara , Kazuaki Omi , Kiyofumi Sakaguchi
发明人： Kazutaka Yanagita , Takao Yonehara , Kazuaki Omi , Kiyofumi Sakaguchi
IPC分类号： B32B3500
CPC分类号： H01L21/67092 , Y10S156/942 , Y10T29/49821 , Y10T83/364 , Y10T156/1121 , Y10T156/1126 , Y10T156/1374 , Y10T156/1922 , Y10T156/1939 , Y10T156/1978
摘要： This invention prevents defects generated when a bonded substrate stack having a separation layer is separated. A bonded substrate stack (101) having a porous layer (101b) is separated in two steps of the first and second processes. In the first process, a jet is ejected to the porous layer (101b) while rotating the bonded substrate stack (101) to partially separate the bonded substrate stack (101) while leaving the central portion of the porous layer (101b) as an unseparated region. In the second process, the jet is ejected to the porous layer (101b) while rotation of the bonded substrate stack (101) is stopped. A force is applied to the unseparated region from a predetermined direction to completely separate the bonded substrate stack (101). Also, the first region (peripheral portion) and second region (central portion) of the bonded substrate stack (101) having the porous layer (101b) are separated using a jet and ultrasonic wave, respectively. More specifically, the first region is separated by a jet ejected from a nozzle (102) while rotating the bonded substrate stack (101). On the other hand, the second region is separated by an ultrasonic wave generated by an ultrasonic vibrator (1203).

10. 发明授权

US06746559B2 Method and apparatus for separating composite member using fluid 有权
公开(公告)号：US06746559B2
公开(公告)日：2004-06-08
申请号：US10202022
申请日：2002-07-25
申请人： Kazuaki Ohmi , Takao Yonehara , Kiyofumi Sakaguchi , Kazutaka Yanagita
发明人： Kazuaki Ohmi , Takao Yonehara , Kiyofumi Sakaguchi , Kazutaka Yanagita
IPC分类号： B32B3500
CPC分类号： H01L21/67092 , H01L21/6838 , Y10T29/49821 , Y10T83/364 , Y10T156/1137 , Y10T156/1374 , Y10T156/1922 , Y10T156/1933 , Y10T156/1939
摘要： To separate a composite member consisting of a plurality of bonded members without destructing or damaging it, a fluid is jetted against the composite member from a nozzle to separate it into a plurality of members at a position different from a bonding position.

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