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    • 61. 发明授权
    • Process for the production of a charge shift arrangement by a two-phase technique
    • 用于通过两相技术制造电荷位移布置的方法
    • US3914857A
    • 1975-10-28
    • US49470874
    • 1974-08-05
    • SIEMENS AG
    • GOSER KARLSTEIN KARL-ULRICH
    • H01L29/762H01L21/00H01L21/339H01L29/10H01L29/768B01J17/00
    • H01L29/76875H01L21/00H01L29/1062Y10S148/025Y10S148/106Y10S148/143
    • A two-phase ion implantation process to form a charge coupled device comprising forming an electrically insulating layer on a semiconductor substrate, forming a metal layer on said insulating layer, forming a photo-resist layer on said metal layer, selectively etching areas of the photo-resist layer and the metal layer therebelow to provide spaced electrodes, subjecting the gaps between the electrodes to an ion implantation beam directed at one corner of each gap at a relatively small angle to the plane of the substrate to cause ions to be implanted below one edge region of each electrode, subjecting the gaps to a second ion implantation beam directed at an oblique angle to the substrate which is larger than the angle of said first ion beam to cause ions to be implanted in the substrate beneath each gap but spaced from the edge of the gap which lies opposite to the said one edge, removing the photo-resist layer, forming a second electric insulating layer over the said electrodes and over the bottom and sides of the gaps, forming a second group of electrodes on the second insulating layer over each gap between adjacent electrodes. The ions of the first ion beam are of the same type as are contained in the substrate. The ions of the second beam are of the opposite type to those contained in the substrate. In a preferred embodiment, the ions of the first beam are phosphorus ions, the ions of the second beam are boron ions, and the semiconductor substrate is silicon.
    • 一种用于形成电荷耦合器件的两相离子注入工艺,包括在半导体衬底上形成电绝缘层,在所述绝缘层上形成金属层,在所述金属层上形成光致抗蚀剂层,选择性地蚀刻照片的区域 并且其下面的金属层提供间隔开的电极,使电极之间的间隙以指向每个间隙的一个角的离子注入束以相对于衬底的平面相对较小的角度进行离子注入,以使离子注入低于一个 每个电极的边缘区域,使间隙经受与衬底倾斜的角度的第二离子注入束,所述第二离子注入束大于所述第一离子束的角度,以使离子注入到每个间隙下方的衬底中,但与 与所述一个边缘相对的间隙的边缘,去除光致抗蚀剂层,在所述电极和ov上形成第二电绝缘层 在间隙的底部和侧面上,在相邻电极之间的每个间隙上的第二绝缘层上形成第二组电极。 第一离子束的离子与衬底中包含的离子类型相同。 第二光束的离子与衬底中包含的离子相反。 在优选实施例中,第一光束的离子是磷离子,第二光束的离子是硼离子,半导体衬底是硅。
    • 63. 发明授权
    • Semiconductor device having at least two transistors and method of manufacturing same
    • 具有最小二极管的半导体器件及其制造方法
    • US3868722A
    • 1975-02-25
    • US29446572
    • 1972-10-02
    • PHILIPS CORP
    • LE CAN CLAUDE JAN PRINCIPE FRESTEINMAIER WALTER
    • H01L27/07H01L27/082H01L27/02H01L27/04H01L29/72
    • H01L27/0755H01L27/0825Y10S148/025Y10S148/085Y10S148/098
    • A monolithic integrated semiconductor device according to the invention comprises a group of bipolar transistors of the same type (n-p-n or p-n-p) of which only a first sub-group is provided in insulated islands, said islands being surrounded by cup-shaped insulation zones, the transistors of a second sub-group having a common collector zone and the semiconductor body of the device comprising a low-ohmic substrate on which a high-ohmic epitaxial layer of the same conductivity type as that of the substrate is provided, said substrate belonging to the low-ohmic part of the common collector zone. The first sub-group comprises at least one transistor. Preferably this first transistor is a self-insulating transistor which is provided in or at least adjoins the commen collector zone of the second subgroup, a cup-shaped insulation zone being used which forms part of the base zone of the first transistor and, with the collector zone of the second sub-group forms a p-n junction surrounding the first transistor.
    • 根据本发明的单片集成半导体器件包括一组相同类型(npn或pnp)的双极晶体管,其中只有第一子组被设置在绝缘岛中,所述岛被杯形绝缘区包围, 具有公共集电极区的第二子组的晶体管,并且该器件的半导体本体包括低欧姆衬底,在其上提供与衬底相同导电类型的高欧姆外延层,所述衬底属于 公共采集区的低欧姆部分。