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61. 发明授权

US5856617A Atomic force microscope system with cantilever having unbiased spin valve magnetoresistive strain gauge 失效
标题翻译：具有悬臂的原子力显微镜系统，具有无偏旋转阀磁阻应变仪
公开(公告)号：US5856617A
公开(公告)日：1999-01-05
申请号：US922210
申请日：1997-09-02
申请人： Bruce Alvin Gurney , Harry Jonathon Mamin , Daniel Rugar , Virgil Simon Speriosu
发明人： Bruce Alvin Gurney , Harry Jonathon Mamin , Daniel Rugar , Virgil Simon Speriosu
IPC分类号： G01B7/24 , G01B7/34 , G01Q20/00 , G01Q60/24 , G11B9/00 , G01R33/02
CPC分类号： G01Q20/04 , B82Y35/00 , G11B9/1409 , G11B9/1418 , Y10S977/849 , Y10S977/851 , Y10S977/863 , Y10S977/873
摘要： An atomic force microscope (AFM) uses a spin valve magnetoresistive strain gauge formed on the AFM cantilever to detect deflection of the cantilever. The spin valve strain gauge operates in the absence of an applied magnetic field. The spin valve strain gauge is formed on the AFM cantilever as a plurality of films, one of which is a free ferromagnetic layer that has nonzero magnetostriction and whose magnetic moment is free to rotate in the presence of an applied magnetic field. In the presence of an applied stress to the free ferromagnetic layer due to deflection of the cantilever, an angular displacement of the magnetic moment of the free ferromagnetic layer occurs, which results in a change in the electrical resistance of the spin valve strain gauge. Electrical resistance detection circuitry coupled to the spin valve strain gauge is used to determine cantilever deflection.
摘要翻译：原子力显微镜（AFM）使用形成在AFM悬臂上的自旋阀磁阻应变仪来检测悬臂的偏转。自旋阀应变计在没有施加磁场的情况下工作。自旋阀应变计形成在AFM悬臂上作为多个膜，其中之一是具有非零磁致伸缩的自由铁磁层，并且在施加的磁场的存在下其磁矩自由旋转。在由于悬臂的偏转而对自由铁磁层施加的应力的存在下，发生自由铁磁层的磁矩的角位移，这导致自旋阀应变计的电阻的变化。耦合到自旋阀应变仪的电阻检测电路用于确定悬臂偏转。

62. 发明授权

US5851902A Semiconductor layer structure and recording medium for a large capacity memory 失效
标题翻译：用于大容量存储器的半导体层结构和记录介质
公开(公告)号：US5851902A
公开(公告)日：1998-12-22
申请号：US598299
申请日：1996-02-08
申请人： Ikuo Sakai
发明人： Ikuo Sakai
IPC分类号： G01N37/00 , G01Q60/24 , G01Q70/06 , G01Q80/00 , G01Q90/00 , G11B9/00 , G11B9/14 , H01J37/28 , H01L21/02 , H01L21/822 , H01L27/04 , H01L21/46
CPC分类号： B82Y10/00 , G11B9/14 , G11B9/1418 , G11B9/1472 , Y10S438/928 , Y10S438/977
摘要： A layered structure for a semiconductor substrate has a planar surface, lighter weight, and increased flexural rigidity. By decreasing warping in a multilayered recording medium that arises when forming the recording layer, while suppressing an increase in the weight of the memory substrate, a recording medium for a compact, large capacity memory device can be manufactured. The recording medium is positioned opposite a read/write circuit substrate that is provided with a plurality of miniature probes. A recording layer is formed on a front surface of a memory substrate, a beam structure for reinforcing flexural rigidity is formed on a back surface of said memory substrate. A conductive layer may be formed between the memory substrate and the recording layer.
摘要翻译：用于半导体衬底的层状结构具有平坦的表面，更轻的重量和增加的抗弯刚度。通过减少在形成记录层时出现的多层记录介质中的翘曲，同时抑制存储器基板的重量的增加，可以制造用于小型，大容量存储器件的记录介质。记录介质与设置有多个微型探针的读/写电路基板相对。在记录基板的前表面上形成记录层，在所述存储基板的背面上形成用于增强挠曲刚度的梁结构。可以在存储器基板和记录层之间形成导电层。

63. 发明授权

US5834643A Capacitive auto-sensing micro-probe 失效
标题翻译：电容自动感应微探针
公开(公告)号：US5834643A
公开(公告)日：1998-11-10
申请号：US726715
申请日：1996-10-07
申请人： Shih-Tung Cheng
发明人： Shih-Tung Cheng
IPC分类号： G01B7/34 , G01B21/30 , G11B9/00 , G01B5/28
CPC分类号： G01Q20/04 , B82Y35/00 , G01B7/34 , B82Y10/00 , G11B9/1409 , G11B9/1418 , Y10S977/873
摘要： The present invention discloses a capacitive-type auto-sensing micro-probe used in high-sensitivity sensor elements. The micro-probe is constructed by semiconductor process technology using solid forming methods to comprise the elements of a probe, a probe cantilever, capacitors, an interface circuit and a signal processing circuit etc. and is fabricated in a micro chip so as to reduce the volume of the system, shorten the distance of signal transmission, and elevate signal sensitivity. By employing capacitive-type sensing principles, the micro-probe establishes capacitive plates on the top of the micro-probe to position at the corresponding capacitive plates located beneath an sensing substrate, and as the probe approaches the sample, the interaction of the sample reacts to the probe to generate deformation signals which, in sequence, are converted into capacitive variation signals. The signals are amplified to derive the surface characteristics of the sample.
摘要翻译：本发明公开了一种用于高灵敏度传感器元件的电容式自动感测微型探头。微探针是通过使用固体成形方法的半导体工艺技术构成的，包括探针，探针悬臂，电容器，接口电路和信号处理电路等元件，并制成微芯片，以便减少系统体积，缩短信号传输距离，提升信号灵敏度。通过采用电容式感测原理，微探针在微探头的顶部建立电容板，以位于位于感测衬底下方的相应电容板上，并且当探针接近样品时，样品的相互作用反应到探头以产生依次变换为电容变化信号的变形信号。信号被放大以得出样品的表面特性。

64. 发明授权

US5808302A Fine positioning apparatus with atomic resolution 失效
标题翻译：具有原子分辨率的精细定位装置
公开(公告)号：US5808302A
公开(公告)日：1998-09-15
申请号：US793481
申请日：1997-02-26
申请人： Gerd K. Binnig , Walter Haeberle , Heinrich Rohrer , Douglas P. E. Smith
发明人： Gerd K. Binnig , Walter Haeberle , Heinrich Rohrer , Douglas P. E. Smith
IPC分类号： G01B7/34 , G01B21/30 , G01Q10/04 , G05D3/00 , G11B5/55 , G11B9/00 , G11B21/02 , H02K33/18 , H02K41/035 , H01J37/00
CPC分类号： G01Q10/04 , B82Y35/00 , H02K41/035 , H02K41/0356 , B82Y10/00 , G11B21/02 , G11B5/5521 , G11B9/1418 , H02K2201/18 , Y10S977/872
摘要： A fine-positioning apparatus for a scanning probe microscope includes magnetic solenoid actuators for each of the x, y and z scanning axes of the microscope. The sample is mounted on the coil of one of the actuators for movement of the sample in the z direction while the tunnelling probe is attached to two other solenoid actuators for movement of the probe in the x and y directions.
摘要翻译： PCT No.PCT / EP94 / 02844 Sec。 371日期1997年2月26日 102（e）日期1997年2月26日PCT 1994年8月27日PCT PCT。出版物WO96 / 07074 日期1996年3月7日用于扫描探针显微镜的精细定位装置包括用于显微镜的x，y和z扫描轴中的每一个的磁性螺线管致动器。样品安装在一个致动器的线圈上，用于在z方向上移动样品，同时隧道探针连接到另外两个螺线管致动器，用于沿x和y方向移动探针。

65. 发明授权

US5805560A Recording/reproducing apparatus and recording/reproducing method using probe 失效
标题翻译：记录/再现装置和使用探针的记录/再现方法
公开(公告)号：US5805560A
公开(公告)日：1998-09-08
申请号：US720974
申请日：1996-10-16
申请人： Ryo Kuroda , Toshihiko Takeda , Shunichi Shido
发明人： Ryo Kuroda , Toshihiko Takeda , Shunichi Shido
IPC分类号： G01N37/00 , G01Q80/00 , G01Q90/00 , G11B9/00 , G11B9/14 , G11B20/10 , G11B20/18
CPC分类号： G11B9/14 , G11B20/10009 , B82Y10/00 , G11B20/18 , G11B9/1418 , G11B9/1445 , Y10S977/849 , Y10S977/861 , Y10S977/947
摘要： A recording/reproducing apparatus for performing recording/reproduction by running a probe relative to a recording bit string on a recording medium and detecting recording bits in the recording bit string, comprising a plural-recording-bit-detection device for letting the probe perform plural recording bit detections as taking positions thereof shifted relative to a same recording bit string on the recording medium; and a recording bit determining device for performing determination of true recording bit, based on the results of the plural recording bit detections.
摘要翻译：一种记录/再现装置，用于通过使探针相对于记录介质上的记录位串进行记录/再现，并且检测记录位串中的记录位，包括用于使探针执行复数的多记录位检测装置记录位检测作为取样位置相对于记录介质上相同的记录位串移动; 以及记录位确定装置，用于基于多个记录位检测的结果执行真实记录位的确定。

66. 发明授权

US5801472A Micro-fabricated device with integrated electrostatic actuator 失效
标题翻译：具有集成静电执行器的微型器件
公开(公告)号：US5801472A
公开(公告)日：1998-09-01
申请号：US696089
申请日：1996-08-13
申请人： Yasuo Wada , Munehisa Mitsuya , Tsuneo Ichiguchi , Tomihiro Hashizume , Seiji Heike , Mark Lutwyche , Satoshi Watanabe
发明人： Yasuo Wada , Munehisa Mitsuya , Tsuneo Ichiguchi , Tomihiro Hashizume , Seiji Heike , Mark Lutwyche , Satoshi Watanabe
IPC分类号： G01Q70/02 , G01Q70/08 , G11B9/00 , H02N1/00 , G01N23/00
CPC分类号： H02N1/008 , G01Q10/045 , G01Q60/16 , G11B9/14 , G11B9/1418 , G01Q70/06 , G11B9/1409 , Y10S977/872
摘要： A device according to the present invention is a miniaturized efficient device wherein electromechanical transduction is enabled and which is provided with at least an integrated electrostatic actuator provide with an actuator in which a fixed portion and a movable portion are opposite, a plurality of which are arranged and the relative amount of movement of which is controlled by controlling electrostatic force operating between both, the movable portion moved by the integrated electrostatic actuator and a portion connected to the movable portion which can be operated mechanically. The probe of a scanning probe microscope is provided to the movable portion of the above actuator. The above transducer is provided with the structure in which a large number of such actuators are arranged two- or one-dimensionally.
摘要翻译：根据本发明的装置是一种小型化的有效装置，其中机电转换是可以实现的，并且至少设置有一个集成的静电致动器，该静电致动器具有固定部分和可动部分相对的致动器，其中多个布置并且通过控制两者之间的静电力操作，由一体式静电致动器移动的可动部分和连接到可机械操作的可动部分的部分来控制其相对移动量。扫描探针显微镜的探针设置在上述致动器的可动部。上述传感器具有其中大量这样的致动器被二维或一维布置的结构。

67. 发明授权

US5717631A Microelectromechanical structure and process of making same 失效
标题翻译：微机电结构及其制作工艺
公开(公告)号：US5717631A
公开(公告)日：1998-02-10
申请号：US507676
申请日：1995-07-25
申请人： L. Richard Carley , Michael L. Reed , Gary K. Fedder , Suresh Santhanam
发明人： L. Richard Carley , Michael L. Reed , Gary K. Fedder , Suresh Santhanam
IPC分类号： G01B21/30 , B62D57/00 , B81B3/00 , B81B5/00 , B81B7/02 , B81C3/00 , G01N13/10 , G01N37/00 , G11B5/00 , G11B9/00 , G11B9/14 , H02N1/00 , H01L21/44
CPC分类号： H02N1/006 , B81C1/0015 , B82Y10/00 , G11B9/14 , G11B9/1409 , G11B9/1418 , G11B9/1445 , B81B2201/07 , B81B2201/12 , B81B2203/0361 , B81C2201/0109 , B81C2201/0132 , G11B2005/0002 , Y10S977/861 , Y10S977/881 , Y10S977/888 , Y10S977/89
摘要： A microelectromechanical device is comprised of a cantilevered beam positioned above, and free to move relative to, a substrate. The beam may carry a plurality of conductors which are insulated from one another. One or more tips is positioned on the beam with each tip being in electrical contact with one of the conductors. A memory device may be constructed by providing an array of such cantilevered beams proximate to a layer of media. Devices for positioning the beam in x and y directions perpendicular to each other and parallel to the layer of media and in a z direction perpendicular to the media are provided. A control circuit generates control signals input to the positioning devices for positioning the tips according to x, y, and z coordinates. A read/write circuit which is in electrical communication with the conductors of the beam, provide signals to the tips to cause the tips to write those signals to the layer of media in a write mode and to read previously written signals sensed by the tips in a read mode. A fabrication method is also disclosed.
摘要翻译：微机电装置包括位于上方并相对于衬底自由移动的悬臂梁。梁可以承载彼此绝缘的多个导体。一个或多个尖端位于梁上，每个尖端与导体之一电接触。可以通过提供靠近一层介质的这种悬臂梁的阵列来构造存储器件。提供了用于将光束定位在彼此垂直并且平行于介质层并且垂直于介质的z方向上的x和y方向上的装置。控制电路产生输入到定位装置的控制信号，用于根据x，y和z坐标定位尖端。与光束的导体电连通的读/写电路向尖端提供信号，以使尖端以写模式将这些信号写入介质层，并读取由尖端感测的先前写入的信号读取模式。还公开了一种制造方法。

68. 发明授权

US5598387A High-density optical data storage unit and method for writing and reading information 失效
标题翻译：高密度光学数据存储单元和信息读写方法
公开(公告)号：US5598387A
公开(公告)日：1997-01-28
申请号：US484245
申请日：1995-06-07
申请人： Wolfgang D. Pohl
发明人： Wolfgang D. Pohl
IPC分类号： G11B7/00 , G11B7/004 , G11B7/0055 , G11B7/12 , G11B7/14 , G11B9/00 , G11B11/03 , G11B11/08 , G11B11/18 , G11B13/06 , G11B7/135
CPC分类号： B82Y10/00 , G11B11/03 , G11B11/18 , G11B13/06 , G11B7/00 , G11B7/124 , G11B7/14 , G11B9/1418
摘要： This high-density optical data storage unit comprises a storage medium supported on a mechanically stable substrate, and a read/write arrangement employing a plurality of laser light sources and an interrogation light source. The laser light sources are designed as laser diodes attached to a substrate and optically aligned with an equal plurality of microlenses integrated in a first transparent layer. The read/write arrangement further comprises at least one second transparent layer, and an optional semitransparent conductive coating, said layer or said coating carrying a plurality of particulate protrusions which are also aligned with said diodes and said microlenses, said storage medium and said read/write arrangement being maintained in a mutually parallel alignment with a gap in between having a width of less than 100 nm. The protrusions in combination with the laser light sources produce dints in the medium which are representative of the data to be stored. The data is read by using the interrogation light source to produce light which is scattered by the dints and is then detected by the diodes.
摘要翻译：该高密度光学数据存储单元包括支撑在机械稳定的基板上的存储介质，以及采用多个激光光源和询问光源的读/写装置。激光源被设计为附接到衬底并与集成在第一透明层中的相等的多个微透镜光学对准的激光二极管。读/写布置还包括至少一个第二透明层和可选的半透明导电涂层，所述层或所述涂层承载多个微粒突起，其也与所述二极管和所述微透镜对准，所述存储介质和所述读/ 写入布置被保持在彼此平行的对准中，其间具有小于100nm的宽度的间隙。与激光光源组合的突起在介质中产生代表要存储的数据的色调。通过使用询问光源读取数据以产生被色调散射的光，然后由二极管检测。

69. 发明授权

US5592413A Microstructure array and activation system therefor 失效
标题翻译：微结构阵列及其激活系统
公开(公告)号：US5592413A
公开(公告)日：1997-01-07
申请号：US422336
申请日：1995-04-13
申请人： Richard Spitzer
发明人： Richard Spitzer
IPC分类号： G01R33/09 , G01Q60/16 , G01Q80/00 , G01R33/10 , G11B5/00 , G11B5/02 , G11B5/09 , G11B5/127 , G11B5/35 , G11B5/37 , G11B5/39 , G11B5/49 , G11B9/00 , G11B9/14 , G11B19/02 , G11B20/10 , G11B21/00 , G11C11/14 , G11C11/21 , G11C13/02 , G11C13/00 , G11C7/00
CPC分类号： G11B5/00 , B82Y10/00 , G11B19/02 , G11B20/10 , G11B21/00 , G11B21/003 , G11B5/09 , G11B5/35 , G11B5/4969 , G11B5/4992 , G11C11/14 , G11C13/02 , G01Q80/00 , G11B2005/0002 , G11B2005/0005 , G11B2005/0016 , G11B9/1418 , Y10S977/85 , Y10S977/852 , Y10S977/861 , Y10S977/872 , Y10S977/874 , Y10S977/947
摘要： An electronic transducer array and transfer device and method which provides for activation of selected transducers at selected times. In one application, the device performs data transfer by a combination of suitably interconnected submillimeter transducers (4) capable of sensing and/or actuating microscopic data-storage cells, and electronic switching (402, 602, 702) to activate selected individual transducers. One embodiment of the invention provides for magnetic transducers for reading (304) and writing (302) on a magnetic medium (8). Another embodiment of the invention provides tunneling electron transducers (10) arranged in an array.
摘要翻译：一种电子换能器阵列和传送装置和方法，其在选定的时间提供所选换能器的激活。在一个应用中，设备通过能够感测和/或致动微观数据存储单元的适当互连的亚毫米波换能器（4）和电子切换（402,602,702）的组合执行数据传输，以激活所选择的各个换能器。本发明的一个实施例提供了用于在磁介质（8）上读取（304）和写入（302）的磁换能器。本发明的另一实施例提供了排列成阵列的隧穿电子换能器（10）。

70. 发明授权

US5546375A Method of manufacturing a tip for scanning tunneling microscope using peeling layer 失效
标题翻译：使用剥离层制造用于扫描隧道显微镜的尖端的方法
公开(公告)号：US5546375A
公开(公告)日：1996-08-13
申请号：US555503
申请日：1995-11-08
申请人： Yasuhiro Shimada , Yoshimasa Okamura , Osamu Takamatsu , Masaru Nakayama , Yoshihiro Yanagisawa
发明人： Yasuhiro Shimada , Yoshimasa Okamura , Osamu Takamatsu , Masaru Nakayama , Yoshihiro Yanagisawa
IPC分类号： G01Q10/00 , G01Q60/16 , G01B7/34 , G01B21/30 , G01N37/00 , G01Q20/04 , G01Q60/10 , G01Q60/38 , G01Q70/06 , G01Q70/14 , G01Q80/00 , G11B9/00 , G11B9/14 , H01J9/02 , H01J37/28
CPC分类号： G01Q20/04 , B82Y35/00 , G01Q60/16 , G11B9/1409 , G11B9/1418 , B82Y10/00 , G01Q80/00 , Y10S977/861 , Y10S977/875 , Y10S977/888
摘要： After a recessed portion 2 is formed in a first substrate made of single crystal silicon by crystal axis anisotropic etching, a peeling layer and a material of a fine tip which may be a noble metal or a noble metal alloy are formed. A second substrate is joined to the fine tip, and peeling is performed on the peeling layer, whereby the fine tip is formed on the second substrate.
摘要翻译：在通过晶轴各向异性蚀刻在由单晶硅制成的第一衬底中形成凹陷部分2之后，形成剥离层和可以是贵金属或贵金属合金的细尖端材料。将第二基板接合到细尖端，并且在剥离层上进行剥离，由此在第二基板上形成细末端。

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