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    • 65. 发明申请
    • Multi-channel optical switch and method for manufacturing the same
    • 多通道光开关及其制造方法
    • US20040264849A1
    • 2004-12-30
    • US10689632
    • 2003-10-22
    • Suk Kee HongYeong Gyu Lee
    • G02B006/26
    • G02B6/3514G02B6/3548G02B6/3564
    • Disclosed are a multi-channel optical switch and a method for manufacturing the same. The multi-channel optical switch includes a supporter; an input terminal optical fiber fixed to the supporter for inputting an optical signal to be switched therethrough; multiple output terminal optical fibers fixed to the supporter for outputting the optical signal inputted through the input terminal optical fiber therethrough; multiple micro mirrors for reflecting the optical signal inputted through the input terminal optical fiber and then for directing the optical signal to a designated output terminal optical fiber among the multiple output terminal optical fibers; and multiple actuators respectively connected to the micro mirrors for adjusting the positions of the micro mirrors so that the optical signal is reflected by the micro mirrors.
    • 公开了一种多通道光开关及其制造方法。 多通道光开关包括支架; 一个输入端子光纤,固定在支架上,用于输入要切换的光信号; 多个输出端子光纤固定到支撑件,用于输出通过输入端子光纤输入的光信号; 多个微反射镜,用于反射通过输入端子光纤输入的光信号,然后用于将光信号引导到多输出端光纤之间的指定输出端光纤; 以及分别连接到微镜的多个致动器,用于调整微反射镜的位置,使得光信号被微镜反射。
    • 67. 发明申请
    • USE OF APPLIED FORCE TO IMPROVE MEMS SWITCH PERFORMANCE
    • 应用力的应用提高MEMS开关性能
    • US20040247237A1
    • 2004-12-09
    • US09932433
    • 2001-08-18
    • Murali ChaparalaMichael J. Daneman
    • G02B006/26G02B006/42
    • G02B26/0841B81B3/0008B81B2201/045B81B2203/0181B81B2203/058B81C1/00214G02B6/32G02B6/3514G02B6/3518G02B6/3548G02B6/357G02B6/358G02B6/3584G02B2006/12104
    • A method is disclosed for operating a MEMS device having a flap that is movable with respect to a base. The method includes applying a force to the flap to move the flap at least partially out of contact with an underlying base. Means for applying such a biasing force may be incorporated into a microelectromechanical (MEMS) apparatus having a base and a flap with a portion coupled to the base so that the flap may move out of the plane of the base between first and second position. The base may have a cavity with largely vertical sidewalls that contact a portion of the flap when the flap is in the second position Electrodes may be placed on the vertical sidewalls and electrically isolated from the base to provide electrostatic clamping of the flap to the sidewall. The base may be made from a substrate portion of a silicon-on-insulator (SOI) wafer and the flap defined from a device layer of the SOI wafer. The flap may be connected to the base by one or more flexures such as torsional beams. An array of one or more of such structures may be used to form an optical switch.
    • 公开了一种用于操作具有相对于基座可移动的翼片的MEMS装置的方法。 所述方法包括向所述翼片施加力以使所述翼片至少部分地与下面的基座接触。 用于施加这种偏压力的装置可以结合到具有基部和翼片的微机电(MEMS)装置中,该翼片具有联接到基部的部分,使得翼片可以在第一和第二位置之间移动离开基部的平面。 底座可以具有一个具有很大垂直侧壁的空腔,当翼片处于第二位置时,电极可以被放置在垂直侧壁上并与基座电隔离以提供瓣片向侧壁的静电夹持。 基底可以由绝缘体上硅(SOI)晶片的衬底部分和从SOI晶片的器件层限定的瓣形成。 翼片可以通过一个或多个挠曲件(例如扭转梁)连接到基座。 可以使用一个或多个这样的结构的阵列来形成光学开关。