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1. 发明授权

US08148790B2 Thin-film lid MEMS devices and methods 有权
标题翻译：薄膜盖MEMS器件及方法
公开(公告)号：US08148790B2
公开(公告)日：2012-04-03
申请号：US12499703
申请日：2009-07-08
申请人： Arthur S. Morris, III , Li Sun , Norlito Baytan
发明人： Arthur S. Morris, III , Li Sun , Norlito Baytan
IPC分类号： H01L29/84 , H01L21/00
CPC分类号： B81C1/00333 , B81C2203/0145
摘要： Thin film encapsulation devices and methods for MEMS devices and packaging are provided. For a MEMS device encapsulated by a sacrificial layer, a lid layer can be deposited over the MEMS device without touching the MEMS device. The lid layer can be patterned and etched with a distribution of release etch holes, which provide access to the sacrificial layer encapsulating the MEMS device. The sacrificial material can be removed through the release etch holes, and the release etch holes can be filled with a seal layer. The seal layer can be removed from the substrate except where it seals the etch holes, leaving a series of plugs that can prevent other materials from entering the MEMS device cavity. In addition, a seal metal layer can be deposited and patterned so that it covers and encloses the plugged etch holes, and a barrier layer can cover the entire encapsulation structure.
摘要翻译：提供了用于MEMS器件和封装的薄膜封装装置和方法。对于由牺牲层封装的MEMS器件，盖层可以沉积在MEMS器件上而不接触MEMS器件。可以利用释放蚀刻孔的分布对盖层进行图案化和蚀刻，释放蚀刻孔提供对封装MEMS器件的牺牲层的访问。可以通过释放蚀刻孔去除牺牲材料，并且可以用密封层填充释放蚀刻孔。密封层可以从衬底除去，除非它密封蚀刻孔，留下一系列可防止其他材料进入MEMS器件腔的插头。此外，密封金属层可以沉积和图案化，使得其覆盖并封闭堵塞的蚀刻孔，并且阻挡层可以覆盖整个封装结构。

2. 发明授权

US06807331B2 Structures that correct for thermal distortion in an optical device formed of thermally dissimilar materials 失效
公开(公告)号：US06807331B2
公开(公告)日：2004-10-19
申请号：US10072629
申请日：2002-02-08
申请人： Ying Wen Hsu , Norlito Baytan , Shauhwa Cuan
发明人： Ying Wen Hsu , Norlito Baytan , Shauhwa Cuan
IPC分类号： G02B626
CPC分类号： G02B6/3508 , G02B6/10 , G02B6/12 , G02B6/32 , G02B6/3502 , G02B6/3504 , G02B6/3506 , G02B6/3548 , G02B6/3552 , G02B6/357 , G02B6/3582 , G02B6/3584 , G02B6/3594 , G02B6/3596 , G02B6/3652 , G02B26/001 , G02B26/02 , G02B2006/12097
摘要： Numerous novel structures and methods are presented for their ability to correct angular and offset alignment errors caused by thermal distortion of a device formed out of dissimilar materials, such as a movable platform and waveguide coupled to a fixed platform and another waveguide. A flexure connected between two platforms corrects offset alignment errors along the centerline axis of the flexure. Thermal distortion is corrected also by varying the relative size of the two platforms and the addition of slots and/or extraneous waveguides. A waveguide may be sandwiched between two matching materials, with or without an extra thermal compensation layer portion. A method uses simple processes to build a substrate with matching waveguides on each side of the substrate. Another simple method creates a suspended structure by using simple semiconductor processes.

3. 发明申请

US20050100283A1 Structures that correct for thermal distortion in an optical device formed of thermally dissimilar materials 审中-公开
公开(公告)号：US20050100283A1
公开(公告)日：2005-05-12
申请号：US10988336
申请日：2004-11-12
申请人： Ying Hsu , Norlito Baytan , Shauhwa Cuan
发明人： Ying Hsu , Norlito Baytan , Shauhwa Cuan
IPC分类号： G02B6/10 , G02B6/12 , G02B6/32 , G02B6/35 , G02B6/36 , G02B6/38 , G02B26/00 , G02B26/02 , G02B6/26
CPC分类号： G02B6/3508 , G02B6/10 , G02B6/12 , G02B6/32 , G02B6/3502 , G02B6/3504 , G02B6/3506 , G02B6/3548 , G02B6/3552 , G02B6/357 , G02B6/3582 , G02B6/3584 , G02B6/3594 , G02B6/3596 , G02B6/3652 , G02B26/001 , G02B26/02 , G02B2006/12097
摘要： Numerous novel structures and methods are presented for their ability to correct angular and offset alignment errors caused by thermal distortion of a device formed out of dissimilar materials, such as a movable platform and waveguide coupled to a fixed platform and another waveguide. A flexure connected between two platforms corrects offset alignment errors along the centerline axis of the flexure. Thermal distortion is corrected also by varying the relative size of the two platforms and the addition of slots and/or extraneous waveguides. A waveguide may be sandwiched between two matching materials, with or without an extra thermal compensation layer portion. A method uses simple processes to build a substrate with matching waveguides on each side of the substrate. Another simple method creates a suspended structure by using simple semiconductor processes.

4. 发明申请

US20050063639A1 Structures that correct for thermal distortion in an optical device formed of thermally dissimilar materials 审中-公开
标题翻译：在由热不同材料形成的光学装置中校正热变形的结构
公开(公告)号：US20050063639A1
公开(公告)日：2005-03-24
申请号：US10965609
申请日：2004-10-13
申请人： Ying Hsu , Norlito Baytan , Shauhwa Cuan
发明人： Ying Hsu , Norlito Baytan , Shauhwa Cuan
IPC分类号： G02B6/10 , G02B6/12 , G02B6/32 , G02B6/35 , G02B6/36 , G02B6/38 , G02B26/00 , G02B26/02 , G02B6/26
CPC分类号： G02B6/3508 , G02B6/10 , G02B6/12 , G02B6/32 , G02B6/3502 , G02B6/3504 , G02B6/3506 , G02B6/3548 , G02B6/3552 , G02B6/357 , G02B6/3582 , G02B6/3584 , G02B6/3594 , G02B6/3596 , G02B6/3652 , G02B26/001 , G02B26/02 , G02B2006/12097
摘要： Numerous novel structures and methods are presented for their ability to correct angular and offset alignment errors caused by thermal distortion of a device formed out of dissimilar materials, such as a movable platform and waveguide coupled to a fixed platform and another waveguide. A flexure connected between two platforms corrects offset alignment errors along the centerline axis of the flexure. Thermal distortion is corrected also by varying the relative size of the two platforms and the addition of slots and/or extraneous waveguides. A waveguide may be sandwiched between two matching materials, with or without an extra thermal compensation layer portion. A method uses simple processes to build a substrate with matching waveguides on each side of the substrate. Another simple method creates a suspended structure by using simple semiconductor processes.
摘要翻译：提出了许多新颖的结构和方法，其能够校正由不同材料（例如耦合到固定平台和另一个波导的可移动平台和波导）形成的器件的热变形引起的角度和偏移对准误差。连接在两个平台之间的挠曲件沿着挠曲件的中心线轴校正偏移对准误差。通过改变两个平台的相对尺寸以及添加槽和/或外来波导来校正热失真。波导可以夹在两个匹配材料之间，具有或不具有额外的热补偿层部分。一种方法使用简单的工艺来在衬底的每一侧上构建具有匹配波导的衬底。另一种简单的方法通过使用简单的半导体工艺创建一个悬挂的结构。

5. 发明授权

US06836583B2 Structures that correct for thermal distortion in an optical device formed of thermally dissimilar materials 失效
标题翻译：在由热不同材料形成的光学装置中校正热变形的结构
公开(公告)号：US06836583B2
公开(公告)日：2004-12-28
申请号：US10815148
申请日：2004-03-30
申请人： Ying Wen Hsu , Norlito Baytan , Shauhwa Cuan
发明人： Ying Wen Hsu , Norlito Baytan , Shauhwa Cuan
IPC分类号： G02B626
CPC分类号： G02B6/3508 , G02B6/10 , G02B6/12 , G02B6/32 , G02B6/3502 , G02B6/3504 , G02B6/3506 , G02B6/3548 , G02B6/3552 , G02B6/357 , G02B6/3582 , G02B6/3584 , G02B6/3594 , G02B6/3596 , G02B6/3652 , G02B26/001 , G02B26/02 , G02B2006/12097
摘要： Numerous novel structures and methods are presented for their ability to correct angular and offset alignment errors caused by thermal distortion of a device formed out of dissimilar materials, such as a movable platform and waveguide coupled to a fixed platform and another waveguide. A flexure connected between two platforms corrects offset alignment errors along the centerline axis of the flexure. Thermal distortion is corrected also by varying the relative size of the two platforms and the addition of slots and/or extraneous waveguides. A waveguide may be sandwiched between two matching materials, with or without an extra thermal compensation layer portion. A method uses simple processes to build a substrate with matching waveguides on each side of the substrate. Another simple method creates a suspended structure by using simple semiconductor processes.
摘要翻译：提出了许多新颖的结构和方法，其能够校正由不同材料（例如耦合到固定平台和另一个波导的可移动平台和波导）形成的器件的热变形引起的角度和偏移对准误差。连接在两个平台之间的挠曲件沿着挠曲件的中心线轴校正偏移对准误差。通过改变两个平台的相对尺寸以及添加槽和/或外来波导来校正热失真。波导可以夹在两个匹配材料之间，具有或不具有额外的热补偿层部分。一种方法使用简单的工艺来在衬底的每一侧上构建具有匹配波导的衬底。另一种简单的方法通过使用简单的半导体工艺创建一个悬挂的结构。

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