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    • 62. 发明授权
    • Microelectromechanical pump utilizing porous silicon
    • 利用多孔硅的微机电泵
    • US07980828B1
    • 2011-07-19
    • US11739716
    • 2007-04-25
    • Jeffrey W. LantzHarold L. Stalford
    • Jeffrey W. LantzHarold L. Stalford
    • F04B19/24F01D23/00
    • F04B19/006F04B19/24
    • A microelectromechanical (MEM) pump is disclosed which includes a porous silicon region sandwiched between an inlet chamber and an outlet chamber. The porous silicon region is formed in a silicon substrate and contains a number of pores extending between the inlet and outlet chambers, with each pore having a cross-section dimension about equal to or smaller than a mean free path of a gas being pumped. A thermal gradient is provided along the length of each pore by a heat source which can be an electrical resistance heater or an integrated circuit (IC). A channel can be formed through the silicon substrate so that inlet and outlet ports can be formed on the same side of the substrate, or so that multiple MEM pumps can be connected in series to form a multi-stage MEM pump. The MEM pump has applications for use in gas-phase MEM chemical analysis systems, and can also be used for passive cooling of ICs.
    • 公开了一种微机电(MEM)泵,其包括夹在入口室和出口室之间的多孔硅区域。 多孔硅区形成在硅衬底中并且包含在入口和出口室之间延伸的多个孔,每个孔的横截面尺寸大致等于或小于被泵送气体的平均自由程。 通过可以是电阻加热器或集成电路(IC)的热源沿着每个孔的长度提供热梯度。 可以通过硅衬底形成通道,使得入口和出口可以形成在衬底的相同侧上,或者使得多个MEM泵可以串联连接以形成多级MEM泵。 MEM泵具有用于气相MEM化学分析系统的应用,也可用于IC的被动冷却。
    • 66. 发明申请
    • Diaphragm pump
    • 隔膜泵
    • US20090060760A1
    • 2009-03-05
    • US12230006
    • 2008-08-21
    • Hiroaki ItoHiroshi IsobeTadashi IshiguroKazunobu HashimotoTetsuyoshi ShibataHirotomi Nemoto
    • Hiroaki ItoHiroshi IsobeTadashi IshiguroKazunobu HashimotoTetsuyoshi ShibataHirotomi Nemoto
    • F04B17/00F04B35/04
    • F04B43/02F04B19/24F04B43/04
    • A diaphragm pump includes: a volume changing member which changes the volume of a fluid chamber; a diaphragm member fixed in a stretched state and arranged separate from the fluid chamber, the diaphragm member having a pair of electrodes and a stretch film formed of dielectric elastomer, and the diaphragm member driving the volume changing member in a forward movement direction; a return bias member which drives the volume changing member in a backward movement direction; and a connection member which connects the diaphragm member and the volume changing member. In a low voltage state, the diaphragm member and the return bias member have driving force with respect to the volume changing member. The diaphragm member is arranged so as to be elastically protruded in the backward movement direction compared to the stretched state, and an inclination angle of the diaphragm member in the low voltage state with respect to that in the stretched state is set to 45° or greater in a cross section along a reciprocal movement direction.
    • 隔膜泵包括:体积变化构件,其改变流体室的体积; 隔膜构件,其被固定在拉伸状态并与所述流体室分离设置,所述隔膜构件具有一对电极和由介电弹性体形成的拉伸膜,所述隔膜构件沿向前移动方向驱动所述容积改变构件; 返回偏压构件,其沿向后移动方向驱动所述体积改变构件; 以及连接构件,其连接所述隔膜构件和所述容积变更构件。 在低电压状态下,隔膜构件和返回偏压构件相对于体积变化构件具有驱动力。 隔膜构件被布置成与拉伸状态相比沿向后移动方向弹性地突出,并且在低电压状态下的隔膜构件相对于拉伸状态的倾斜角度被设定为45°或更大 沿着往复移动方向的横截面。
    • 67. 发明授权
    • Device of micro loop thermosyphon for ferrofluid power generator
    • 铁磁流体发电机微循环热虹吸装置
    • US07455101B2
    • 2008-11-25
    • US11041949
    • 2005-01-26
    • Li-Chieh Hsu
    • Li-Chieh Hsu
    • F01K15/00
    • H02K44/08F04B19/24F28D15/0266Y10S62/22
    • The present invention provides a micro loop thermosyphon cooler, having a thermal absorption unit and a condenser sequentially arranged therein, wherein the condenser is arranged at a position higher than that of the thermal absorption unit by a height. The thermal absorption unit further comprises a microchannel system formed by superimposing a cover on a substrate having a plurality of micro-grooves arranged thereon, so that the microchannel system is capable of allowing a fluid with a plurality of magnetic particles to flow in and through. In this regard the thermal absorption unit is used for absorbing thermal energy and thus enabling the fluid to vaporize and generate bubbles accordingly for elevating and driving the remaining fluid to flow into the condenser for discharging heat. Moreover, the condenser is positioned over the thermal absorption unit by a height while coupled to the outlet of the thermal absorption unit by an inlet thereof via a conduit, and coupled to an inlet of the thermal absorption unit by an outlet thereof via another conduit. In this regard, the condenser is capable of condensing the vaporized fluid and remixing the same with unvaporized fluid passing so as to enable the remixed fluid to flow back to the thermal absorption unit by the action of gravity.
    • 本发明提供一种微循环热虹吸冷却器,其具有依次排列的热吸收单元和冷凝器,其中冷凝器布置在高于热吸收单元的位置高度的位置。 热吸收单元还包括通过将盖叠置在其上布置有多个微槽的基板上而形成的微通道系统,使得微通道系统能够允许具有多个磁性颗粒的流体流入并通过。 在这方面,热吸收单元用于吸收热能,因此使得流体能够相应地蒸发并产生气泡,用于升高和驱动剩余的流体流入冷凝器以放出热量。 此外,冷凝器通过其通过导管的入口耦合到热吸收单元的出口而定位在热吸收单元上方一个高度,并且通过其另一管道通过其出口耦合到热吸收单元的入口。 在这方面,冷凝器能够冷凝汽化的流体并将其与未蒸发的流体混合,以使再混合的流体能够通过重力的作用流回热吸收单元。