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    • 9. 发明申请
    • Method for conductivity calculation in a treatment fluid upstream and downstream a filtration unit in apparatuses for the blood treatment
    • 用于血液处理的装置中的过滤单元的上游和下游处理流体的导电率计算方法
    • US20070131595A1
    • 2007-06-14
    • US11299840
    • 2005-12-13
    • Olof JanssonRoland PerssonJan Sternby
    • Olof JanssonRoland PerssonJan Sternby
    • B01D61/00
    • B01D61/32A61M1/16A61M1/1607A61M1/1609A61M1/1613A61M1/1617B01D2311/243Y10T137/034
    • A method for conductivity calculation in a treatment fluid upstream and downstream a filtration unit in apparatuses for the blood treatment has been provided. The method comprises the steps of: creating a flow of treatment fluid in the filtration unit, imposing a change in the conductivity of the treatment fluid at the inlet of the filtration unit in order thereby to cause an induced conductivity change in the fluid at the outlet of said filtration unit and measuring a predetermined number of conductivity values Cdo downstream from the filtration unit belonging to a conductivity curve. It further comprises the steps of defining one interpolating mathematical function for the purpose of estimating the pattern of the conductivity curve Cdo in an interval of time after the occurrence of the induced conductivity change and determining a characteristic measuring time tcalcclr; finally the value of the interpolating mathematical function at said characteristic measuring time tcalcclr is evaluated and represents the conductivity value Cdo2 of the process fluid downstream from the filtration unit after the induced conductivity change.
    • 已经提供了用于血液处理的装置中的过滤单元的上游和下游的处理流体中的电导率计算方法。 该方法包括以下步骤:在过滤单元中产生处理流体流,使过滤单元入口处的处理流体的导电性发生变化,从而导致出口处的流体中的诱导电导率变化 并测量属于电导率曲线的过滤单元下游的预定数量的电导率值Cdo。 它还包括以下步骤:为了估计在感应电导率变化发生之后的时间间隔内的电导率曲线Cdo的模式,确定一个内插数学函数,并且确定特征测量时间tcalc >; 最后评估所述特征测量时间tcalc CLr 处内插数学函数的值,并且表示在感应电导率变化之后从过滤单元下游的工艺流体的电导率值Cdo 2。
    • 10. 发明授权
    • Water reclamation rate in semiconductor fabrication wet benches
    • 半导体制造湿床中的水回收率
    • US06875287B2
    • 2005-04-05
    • US10093226
    • 2002-03-05
    • Cheng-Tsung Chiu
    • Cheng-Tsung Chiu
    • B08B3/00C02F1/00G01N33/18H01L21/00C23G1/36
    • H01L21/67276B08B3/00C02F1/008C02F2209/05G01N33/18H01L21/67253Y10T137/0324Y10T137/034
    • Embodiments of the present invention are directed to improving the reclamation rate of the waste water of wet benches in semiconductor fabrication. In accordance with an aspect of the invention, a method for improvement of water reclamation rate comprises choosing a rinse recipe for a wet bench. The wet bench is activated, and waste water quality of waste water produced by the rinse recipe from the wet bench is detected to generate water quality data for a plurality of reclamation switch time levels. The waste water is directed to a water reclamation system during a reclamation time period after each of the plurality of reclamation switch time levels. The water quality data of the waste water is analyzed for the plurality of reclamation switch time levels. The method further comprises determining from analyzing the water quality data the best reclamation switch time for the chosen rinse recipe for the wet bench.
    • 本发明的实施例涉及在半导体制造中改善湿式长凳的废水的回收率。 根据本发明的一个方面,一种改善水回收率的方法包括选择湿式工作台的冲洗配方。 湿式工作台被激活,检测来自湿式工作台的冲洗配方产生的废水的废水质量,以产生多个回收切换时间水平的水质数据。 在多个回收切换时间级别中的每一个之后的回收期间,废水被引导到回水系统。 对多个填海切换时间水平分析废水的水质数据。 该方法还包括通过分析水质数据确定用于湿式工作台的所选冲洗配方的最佳回收切换时间。