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    • 62. 发明授权
    • Method for manufacturing an energy storage device and structure therefor
    • 储能装置的制造方法及其结构
    • US08629488B2
    • 2014-01-14
    • US12108361
    • 2008-04-23
    • Sallie HoseDerryl AllmanPeter A. BurkePonce Saopraseuth
    • Sallie HoseDerryl AllmanPeter A. BurkePonce Saopraseuth
    • G11C11/00
    • H01L28/75
    • An energy storage device such as a metal-insulator-metal capacitor and a method for manufacturing the energy storage device. The metal-insulator-metal capacitor includes an insulating material positioned between a bottom electrode or bottom plate and a top electrode or top plate. The surface area of the bottom electrode is greater than the surface area of the insulating material and the surface area of the insulating material is greater than the surface area of the top electrode. The top electrode and the insulating layer have edges that are laterally within and spaced apart from edges of the bottom electrode. A protective layer covers the top electrode, the edges of the top electrode, and the portions of the insulating layer that are uncovered by the top electrode. The protective layer serves as an etch mask during the formation of the bottom electrode.
    • 诸如金属 - 绝缘体 - 金属电容器的能量存储装置和用于制造储能装置的方法。 金属 - 绝缘体 - 金属电容器包括位于底部电极或底板与顶部电极或顶板之间的绝缘材料。 底部电极的表面积大于绝缘材料的表面积,并且绝缘材料的表面积大于顶部电极的表面积。 顶部电极和绝缘层具有横向在底部电极的边缘内并与其间隔开的边缘。 保护层覆盖顶部电极,顶部电极的边缘和绝缘层的未被顶部电极覆盖的部分。 在形成底部电极期间,保护层用作蚀刻掩模。
    • 65. 发明授权
    • Non-tensioned carbon nanotube switch design and process for making same
    • 非张力碳纳米管开关的设计与制造过程
    • US07928521B1
    • 2011-04-19
    • US11142725
    • 2005-05-31
    • Peter A. BurkeThomas RueckesClaude L. Bertin
    • Peter A. BurkeThomas RueckesClaude L. Bertin
    • H01L29/82
    • H01H1/0094B82Y10/00H01H59/0009H01H2001/0042H01H2059/0045H01L51/0048H01L51/0591Y10S977/932
    • The invention comprises a carbon nanotube switch suitable for use in an integrated circuit structure and capable of being moved from a first position in a first plane in the switch to a second position in a second plane in the switch using approximately the same energy as required to move the switch from the second position back to the first position. The switch comprises a flexible carbon nanotube strip secured clamped at one end in a first plane in a switching chamber, and secured or clamped, at the opposite end of the carbon nanotube, in a second plane in the switching chamber, which is parallel to the first plane but spaced therefrom, to permit the central portion of the carbon nanotube strip to move in the chamber between a first position in the first plane and in electrical contact with one or more first electrodes and a second position in the second plane and in electrical contact with one or more second electrodes.
    • 本发明包括一种适用于集成电路结构的碳纳米管开关,其能够使用开关中的第一平面中的第一位置移动到开关中的第二平面中的第二位置,使用大约相同的能量 将开关从第二个位置移回到第一个位置。 开关包括柔性碳纳米管条,其固定在切换室中的第一平面中的一端处夹持,并且在碳纳米管的相对端处固定或夹紧在开关室中的平行于第二平面的第二平面中 第一平面但与其间隔开,以允许碳纳米管条的中心部分在室中在第一平面中的第一位置和与一个或多个第一电极电连接并且在第二平面中的第二位置和电气 与一个或多个第二电极接触。