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    • 61. 发明授权
    • Field effect transistor having c-axis channel layer
    • 具有c轴沟道层的场效应晶体管
    • US5413982A
    • 1995-05-09
    • US990836
    • 1992-12-14
    • Hiroshi InadaSo TanakaMichitomo Iiyama
    • Hiroshi InadaSo TanakaMichitomo Iiyama
    • H01L39/22H01L39/14H01L39/24H01B12/00B05D5/12
    • H01L39/2467H01L39/146Y10S505/728
    • A superconducting device comprising a substrate having a principal surface, a non-superconducting oxide layer having a similar crystal structure to that of the oxide superconductor, an extremely thin superconducting channel formed of a c-axis oriented oxide superconductor thin film on the non-superconducting oxide layer, a superconducting source region and a superconducting drain region formed of an a-axis oriented oxide superconductor thin film at the both sides of the superconducting channel separated from each other, which are electrically connected each other by the superconducting channel, so that superconducting current can flow through the superconducting channel between the superconducting source region and the superconducting drain region, and a gate electrode of a material which includes silicon through a gate insulator on the superconducting channel for controlling the superconducting current flowing through the superconducting channel, in which the gate electrode is embedded between the superconducting source region and the superconducting drain region and is isolated from the superconducting source region and the superconducting drain region by an insulating region formed by diffused silicon from the gate electrode.
    • 一种超导装置,包括具有主表面的衬底,具有与氧化物超导体相似的晶体结构的非超导氧化物层,在非超导体上由c轴取向的氧化物超导体薄膜形成的极薄超导通道 氧化物层,超导源极区域和由超导通道两侧的a轴取向的氧化物超导体薄膜形成的超导漏极区域,由超导通道彼此电连接,使得超导 电流可以流过超导源极区域和超导漏极区域之间的超导通道,以及通过超导通道上的栅极绝缘体包括硅的材料的栅电极,用于控制流过超导通道的超导电流,其中 栅电极被嵌入 d,并且通过由栅极电极扩散的硅形成的绝缘区域与超导源极区域和超导漏极区域隔离。
    • 63. 发明授权
    • Process for patterning layered thin films including a superconductor
    • 用于图案化包括超导体的层状薄膜的工艺
    • US5326747A
    • 1994-07-05
    • US865498
    • 1992-04-09
    • Hiroshi InadaMichitomo Iiyama
    • Hiroshi InadaMichitomo Iiyama
    • H01L39/24H01L21/00
    • H01L39/2464Y10S505/725Y10S505/728Y10S505/73
    • A process for patterning layered thin films comprising a bottom oxide superconductor (1) layer deposited on a substrate (3) and another thin film (2) deposited on the bottom superconductor layer and consisting of insulator, ordinary conductor or oxide superconductor having a different crystal orientation from the bottom superconductor layer. The bottom superconductor layer (1) is subjecting to heat-treatment before another thin film (2) is deposited thereon. The heat-treatment can be carried out under a first condition in ultra high-vacuum at a temperature which is lower than the oxygen-trap temperature (T.sub.trap) at which oxygen can enter into the oxide superconductor but is higher than a temperature which is lower by 100.degree. C. than the oxygen-trap temperature (T.sub.trap -100.degree. C.) or under a second condition in an atmosphere containing oxygen of high purity at a temperature which is higher than the oxygen-trap temperature (T.sub.trap) but is lower than a film forming temperature of the first thin film of oxide superconductor.
    • 一种用于图案化层叠薄膜的工艺,其包括沉积在基板(3)上的底部氧化物超导体(1)层和沉积在底部超导体层上的另一薄膜(2),并由绝缘体,具有不同晶体的普通导体或氧化物超导体 从底部超导体层取向。 在其上沉积另一薄膜(2)之前,对底部超导体层(1)进行热处理。 热处理可以在超高真空中的第一条件下进行,其温度低于氧气可以进入氧化物超导体的氧捕获温度(Ttrap),但高于低于 或在第二条件下,在高于氧气捕获温度(Ttrap)的温度下,在含有高纯度氧的气氛中,低于氧捕获温度(Ttrap-100℃) 比第一薄膜氧化物超导体的成膜温度高。
    • 65. 发明授权
    • Zirconia base ceramics
    • 氧化锆基陶瓷
    • US4820666A
    • 1989-04-11
    • US842496
    • 1986-03-21
    • Masanori HiranoHiroshi Inada
    • Masanori HiranoHiroshi Inada
    • C04B35/119C04B35/488C04B35/48
    • C04B35/4885C04B35/119
    • The invention consists of zirconia base with high hydrothermal stability which:(a) consists essentially of at least 40 weight % of partially stabilized zirconia of the ZrO.sub.2 -Y.sub.2 O.sub.3 -CeO.sub.2 system wherein the proportion of ZrO.sub.2, Y.sub.2 O.sub.3, and CeO.sub.2 is within the range defined by the line connecting points F, G, L, M, N and K in a ternary diagram (ZrO.sub.2, YO.sub.1.5, CeO.sub.2), the vertices of said points being given by the following molar % of ZrO.sub.2, YO.sub.1.5, and CeO.sub.2, respectively:F (88, 10, 2),G (89, 10, 1),L (93.5, 4, 2.5),M (93, 2, 5),N (88, 1, 11), andK (86, 1,13),and 3 to 60 weight % of at least one of Al.sub.2 O.sub.3, MgO.Al.sub.2 O.sub.3, spinel and mullite, and(b) has a mean crystal grain size not exceeding 2 micrometers and a bending strength of at least 100 kgf/mm.sup.2, said ZrO.sub.2 containing a minimum of 50 volume % tetragonal crystal structure and a maximum of 5 volume % monoclinic crystal structure when tested in steam of 180.degree. C. and 10 atm for 10 hours. The monoclinic crystal structure does not exceed 5 volume % when tested in an atmosphere of 300.degree. C. for 3000 hours. These zirconia base ceramics are stable in the presence of moisture under low temperatures of approximately 200.degree.-400.degree. C.
    • 本发明由具有高水热稳定性的氧化锆碱组成,其中:(a)基本上由至少40重量%的ZrO 2 -Y 2 O 3 -TeO 2体系的部分稳定的氧化锆组成,其中ZrO 2,Y 2 O 3和CeO 2的比例在所限定的范围内 通过在三元图(ZrO 2,YO 1.5,CeO 2)中连接点F,G,L,M,N和K的线,所述点的顶点由以下摩尔%的ZrO 2,YO 1.5和 CeO 2分别为:​​F(88,10,2),G(89,10,1),L(93.5,4,2.5),M(93,2,5),N(88,1,11)和 K(86,1.13)和3〜60重量%的Al 2 O 3,MgO·Al 2 O 3,尖晶石和莫来石中的至少一种,(b)的平均结晶粒径不超过2微米, 至少100kgf / mm2,当在180℃和10atm的蒸汽中测试10小时时,所述ZrO 2含有至少50体积%的四方晶体结构和最多5体积%的单斜晶体结构。 当在300℃的气氛中测试3000小时时,单斜晶体结构不超过5体积%。 这些氧化锆基陶瓷在约200-400℃的低温下在水分存在下是稳定的。
    • 66. 发明授权
    • Servo control system operable on digital basis
    • 伺服控制系统可以数字化操作
    • US4313074A
    • 1982-01-26
    • US144131
    • 1980-04-28
    • Tadashi NomuraHiroshi InadaKeizo MoritaAkio WatanabeKiyoaki Nishikawa
    • Tadashi NomuraHiroshi InadaKeizo MoritaAkio WatanabeKiyoaki Nishikawa
    • G05B19/23G05B19/35G05B1/01
    • G05B19/353G05B19/232
    • A digital servo control system is responsive to a command signal indicative of a command position of a moveable element and to a phase modulated signal corresponding to the angle of rotation of a motor controlling said moveable element to develop a motor drive signal to position the motor. The system provides control during a velocity control mode and a position control mode, the latter occurring after the moveable element is moved to a predetermined small incremental distance from the commanded position. During the velocity control mode the motor is driven in accordance with a reference velocity selected in dependence upon the position error signal. Following a prescribed time after entry into the position control mode, the position error has added thereto an integration signal which increases in the same sense as the position error.
    • 数字伺服控制系统响应于指示可移动元件的指令位置的指令信号和对应于控制所述可移动元件的电动机的旋转角度的相位调制信号,以形成电动机驱动信号以定位电动机。 该系统在速度控制模式和位置​​控制模式期间提供控制,后者发生在可移动元件移动到距命令位置的预定的小增量距离之后。 在速度控制模式期间,根据位置误差信号选择的参考速度来驱动电动机。 在进入位置控制模式之后的规定时间之后,位置误差增加了与位置误差相同的积分信号。