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    • 63. 再颁专利
    • Projection exposure system having a reflective reticle
    • 具有反射型掩模版的投影曝光系统
    • USRE40743E1
    • 2009-06-16
    • US10916650
    • 2004-08-11
    • Gerhard FuerterChristian WagnerUwe GoedeckeHenriette Mueller
    • Gerhard FuerterChristian WagnerUwe GoedeckeHenriette Mueller
    • G02B17/00
    • G03F7/70066G03F7/70225G03F7/70283
    • A projection exposure system for microlithography includes an illuminating system (2), a reflective reticle (5) and reduction objectives (71, 72). In the reduction objective (71, 72), a first beam splitter cube (3) is provided which superposes the illuminating beam path (100) and the imaging beam path (200). In order to obtain an almost telecentric entry at the reticle, optical elements (71) are provided between beam splitter cube (3) and the reflective reticle (5). Advantageously, the reduction objective is a catadioptric objective having a beam splitter cube (3) whose fourth unused side can be used for coupling in light. The illuminating beam path (100) can also be coupled in with a non-parallel beam splitter plate. The illuminating beam path is refractively corrected in passthrough to compensate for aberrations via the special configuration of the rear side of the beam splitter plate. Advantageously, a beam splitter plate of this kind is used within a reduction objective in lieu of a deflecting mirror and only refractive components are introduced between the beam splitter plate and the reflective reticle.
    • 用于微光刻的投影曝光系统包括照明系统(2),反射掩模版(5)和还原物镜(71,72)。 在还原物镜(71,72)中,设有使照明光束路径(100)和成像光束路径(200)叠置的第一分束器立方体(3)。 为了在掩模版处获得几乎远心的入射,在分束器立方体(3)和反射标线片(5)之间提供光学元件(71)。 有利地,还原目标是具有分束器立方体(3)的反射折射物镜,其中第四未使用侧可以用于光耦合。 照明光束路径(100)也可以与非平行光束分离板耦合。 通过透射度折射校正照明光束路径,以通过分束板后侧的特殊配置补偿像差。 有利地,这种分束板在减速目标下用于偏转反射镜,并且只有折射分量被引入分束板和反射光罩之间。
    • 69. 发明申请
    • Method of providing a joint between a plate member and a frame profile, and a frame structure comprising such a joint
    • 提供板构件和框架型材之间的接头的方法,以及包括这种接头的框架结构
    • US20050126093A1
    • 2005-06-16
    • US10507900
    • 2003-03-19
    • Christian WagnerPer Gregersen
    • Christian WagnerPer Gregersen
    • E04D13/03E04D13/04E04D13/15E06B3/30E04G21/00
    • E04D13/15E04D13/0305E04D2013/0468
    • The invention relates to a method of providing a joint between a plate member (1) and a frame profile (2) with a free edge (8) at the surface of the plate member. The joint is provided by applying two adhesives (9, 10). A first adhesive which, only after a curing time, obtains sufficient bearing capacity to support the plate member, is arranged on one of the surfaces to be connected by the joint, such that the adhesive (9) in the assembled condition will be placed close to said free edge. A second adhesive (10) which, immediately or shortly after, compared to the curing time of the first adhesive, obtains sufficient bearing capacity to keep the plate member in place, is arranged between said first adhesive and the free edge of the profile. The second adhesive (10) fits so tightly to plate member and profile that it prevents the first adhesive (9) from forcing its way past the free edge (8) of the profile. Further, the invention relates to a frame structure comprising such a joint.
    • 本发明涉及一种在板构件(1)和框架轮廓(2)之间提供在板构件的表面处具有自由边缘(8)的接头的方法。 通过施加两个粘合剂(9,10)来提供接头。 第一粘合剂,其仅在固化时间之后获得足够的承载能力以支撑板构件,布置在要由接头连接的一个表面上,使得在组装状态下的粘合剂(9)将被放置在靠近 到自由边。 与第一粘合剂的固化时间相比,立即或不久之后,第二粘合剂(10)获得足够的承载能力以将板构件保持在适当位置,布置在所述第一粘合剂和型材的自由边缘之间。 第二粘合剂(10)与板构件和轮廓紧密地配合,以防止第一粘合剂(9)迫使其穿过型材的自由边缘(8)。 此外,本发明涉及包括这种接头的框架结构。