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    • 55. 发明授权
    • Surface analysis spectroscopy apparatus
    • 表面分析光谱仪
    • US4860224A
    • 1989-08-22
    • US866062
    • 1986-05-21
    • Edmund M. CashellLiam McDonnell
    • Edmund M. CashellLiam McDonnell
    • G01N23/225G01N23/22G01N23/227G01N25/72G01Q30/10G01Q30/16G01Q30/20H01J37/252H01J49/06H01J49/48
    • G01N23/2206G01N25/72H01J37/252H01J49/06H01J49/482G01N21/1702
    • In an apparatus for surface analysis microscopy, a number of analysis device are mounted on an ultra-high vacuum chamber. The devices include a beam source of locally heating a selected region of a specimen and a temperature-detector for monitoring the heating of the selected region, as well as an electron gun and an analyzer for detecting emission from a specimen region subjected to electron bombardment. An ion gun may also be provided. The apparatus enables thermal microscopy of a specimen to be carried out in conjunction with other surface analysis techniques including, inter alia, scanning electron microscopy and Auger electron microscopy, within a single apparatus and during a single experimental operation. A novel configuration of cylindrical mirror analyser facilitates mounting a multiplicity of analysis devices on the chamber in a compact manner for studying a specimen at a single position.
    • 在用于表面分析显微镜的装置中,多个分析装置安装在超高真空室上。 这些装置包括局部加热试样的选定区域的束源和用于监测所选区域的加热的温度检测器,以及用于检测经受电子轰击的样本区域的发射的电子枪和分析器。 也可以提供离子枪。 该装置能够在单个装置内和在单个实验操作期间结合其它表面分析技术(包括扫描电子显微镜和俄歇电子显微镜)进行样品的热显微镜检查。 圆柱形镜面分析仪的新颖结构便于以紧凑的方式在腔室上安装多个分析装置,以便在单个位置上研究样本。
    • 58. 发明授权
    • Hot sub-stage for a scanning electron microscope
    • 扫描电子显微镜的热次级
    • US3919558A
    • 1975-11-11
    • US52060974
    • 1974-11-04
    • GEN ELECTRIC
    • BROUILLETTE JOSEPH WLEYSHON WILLIAM E
    • G01Q30/10H01J37/20
    • H01J37/20
    • The present invention relates to a hot sub-stage for a scanning electron microscope characterized by a minimum heated mass, easy outgassing and capable of operation at temperatures in the vicinity of 2500*K. The hot sub-stage employs a boat for holding the sample, formed of a flexible, reflective, refractory conductive foil, through which heating current passes. The sample is enfolded in the boat and disposed so that image forming secondary electrons may pursue both rectilinear and curved paths from the sample through a thermionic electron suppression grid to the secondary electron collection means. This geometry provides excellent discrimination against unwanted thermionic electrons and yet minimizes velocity selection of the more energetic secondary electrons. Heater magnetic field neutralization for avoiding beam offset is also provided.
    • 本发明涉及一种用于扫描电子显微镜的热次级,其特征在于最小加热质量,容易脱气,并且能够在2500°K附近的温度下运行。热次级采用一个用于容纳样品的船 由柔性的反射性难熔导电箔形成,加热电流通过该箔。 样品被包裹在船中并且被设置成使得形成二次电子的图像可以追求从样品通过热离子电子抑制栅格到二次电子收集装置的直线和弯曲路径。 这种几何形状提供了对不需要的热离子电子的极好的区分,并且使得能量更高的二次电子的速度选择最小化。 还提供了用于避免光束偏移的加热器磁场中和。