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51. 发明申请

US20160054112A1 SYSTEMS AND METHODS FOR 3-DIMENSIONAL INTERFEROMETRIC MICROSCOPY 有权
标题翻译：三维干涉显微镜的系统和方法
公开(公告)号：US20160054112A1
公开(公告)日：2016-02-25
申请号：US14820676
申请日：2015-08-07
申请人： Howard Hughes Medical Institute
发明人： Harald F. Hess
IPC分类号： G01B9/02 , G02B21/36 , H04N13/02 , G02B21/00 , G01B9/04 , G01N21/64
CPC分类号： G01B9/02041 , G01B9/02007 , G01B9/02081 , G01B9/02097 , G01B9/04 , G01B2290/45 , G01B2290/55 , G01N21/6456 , G01N21/6458 , G02B21/0056 , G02B21/0076 , G02B21/008 , G02B21/14 , G02B21/367 , H04N13/214
摘要： A method includes sequentially acquiring phase-shifted images of an optical source in a plurality of predetermined positions in the z plane to form a plurality of image frame sequences; determining from the plurality of image frame sequences at least one phase-related characteristic associated with each predetermined position of the optical source in the z plane; and storing the at least one phase-related characteristic and the predetermined positions of the optical source in the z plane.
摘要翻译：一种方法包括在z平面中顺序获取多个预定位置中的光源的相移图像以形成多个图像帧序列; 从多个图像帧序列确定与z平面中的光源的每个预定位置相关联的至少一个相位相关特性; 并将光源的至少一个相位特性和预定位置存储在z平面中。

52. 发明授权

US09019368B2 Spatial phase shifting interferometer using multi wavelength 有权
标题翻译：空间相移干涉仪采用多波长
公开(公告)号：US09019368B2
公开(公告)日：2015-04-28
申请号：US13667467
申请日：2012-11-02
申请人： Korea Research Institute of Standards and Science , Micro Motion Technology Co., Ltd.
发明人： Jae Wan Kim , Jong Ahn Kim , Dong-Won Lee
IPC分类号： H04N7/18 , G01B9/02
CPC分类号： G01B9/02007 , G01B9/02027 , G01B9/02057 , G01B9/02081 , G01B2290/45 , G01B2290/70
摘要： Provided is a spatial phase shifting interferometer using a multi wavelength. More particularly, provided is a spatial phase shifting interferometer using a multi wavelength capable of more rapidly measuring a precise shape of a measurement object by simultaneously oscillating laser having different wavelengths and passing the oscillated laser through a beam splitter and a lens to analyze an interference fringe of the measurement object.
摘要翻译：提供了使用多波长的空间相移干涉仪。更具体地，提供了一种使用多波长的空间相移干涉仪，其能够通过同时振荡不同波长的激光并且使振荡的激光通过分束器和透镜来分析干涉条纹，来更快速地测量测量对象的精确形状的测量对象。

53. 发明申请

US20150092196A1 OPTICAL MEASUREMENT APPARATUS 有权
标题翻译：光学测量装置
公开(公告)号：US20150092196A1
公开(公告)日：2015-04-02
申请号：US14503560
申请日：2014-10-01
申请人： Hitachi-LG Data Storage, Inc.
发明人： Kentaro OSAWA
IPC分类号： G01B9/02
CPC分类号： G01B9/02091 , A61B5/0066 , G01B9/02025 , G01B9/02059 , G01B9/02081 , G01B2290/70
摘要： A clear image of a target to be measured is obtained by suppressing influence of a reflected beam from the surface of the target or a measurement target holding unit. A laser beam emitted from a light source is split into a signal beam, reference beam, and control beam. The signal beam is focused onto the target with an objective lens, so the target is irradiated with the signal beam. The amount of defocus of the control beam is controlled with a defocus control unit, and the phase of the control beam is controlled with a phase control unit. A signal beam reflected or scattered by the target is combined with the control beam to generate a controlled signal beam, and the controlled signal beam is combined with the reference beam. A plurality of interference beams with different phases are generated with interference optics, and phase diversity detection is performed.
摘要翻译：通过抑制来自目标或测量对象保持单元的表面的反射光束的影响来获得要测量的目标的清晰图像。从光源发射的激光束被分成信号光束，参考光束和控制光束。信号光束用物镜聚焦在目标上，所以目标被信号光束照射。用散焦控制单元控制控制光束的散焦量，并且通过相位控制单元控制控制光束的相位。由目标反射或散射的信号光束与控制光束组合以产生受控信号光束，受控信号光束与参考光束组合。利用干涉光学器件生成具有不同相位的多个干涉光束，并执行相位分集检测。

54. 发明申请

US20140368832A1 INTERFEROMETRIC DETERMINATION OF DISTANCE CHANGE WITH LASER DIODE, HIGH BANDWIDTH DETECTION AND FAST SIGNAL PROCESSING 有权
标题翻译：用激光二极管进行距离变化的干涉测量，高带宽检测和快速信号处理
公开(公告)号：US20140368832A1
公开(公告)日：2014-12-18
申请号：US14307246
申请日：2014-06-17
申请人： HEXAGON TECHNOLOGY CENTER GMBH
发明人： Yves SALVADÉ , Frank PRZYGODDA , Marcel ROHNER
IPC分类号： G01B9/02 , G01B5/008
CPC分类号： G01B5/008 , G01B9/02002 , G01B9/02048 , G01B9/0207 , G01B9/02081 , G01B9/02083 , G01B11/026 , G01S7/4812 , G01S7/4915 , G01S17/32 , G01S17/50
摘要： Method and systems for determining a change of distance to an object by interferometry with emitting measurement laser light from a laser diode are disclosed. The method may include receiving at least a part of the measurement laser light, superimposing the reflected measurement laser light with a reference laser light and thereby providing at an interferometric phase and determining the change of distance to the object depending on the superimposition. In some embodiments, the measurement laser light may be emitted with low coherence and broad spectral bandwidth. An emitting wavelength of the measurement laser light may be fluctuating hop-freely within the spectral bandwidth causing interferometric phase fluctuations.
摘要翻译：公开了一种用于通过发射来自激光二极管的测量激光的干涉测量来确定到物体的距离变化的方法和系统。该方法可以包括接收至少一部分测量激光，将反射的测量激光与参考激光重叠，从而提供干涉相位，并根据叠加来确定与物体的距离变化。在一些实施例中，可以以低相干性和宽谱带宽发射测量激光。测量激光的发射波长可能在光谱带宽内跳跃地波动，导致干涉相位波动。

55. 发明授权

US08773666B2 Device and method for acquiring position with a confocal Fabry-Perot interferometer 有权
标题翻译：用共焦法布里 - 珀罗干涉仪获取位置的装置和方法
公开(公告)号：US08773666B2
公开(公告)日：2014-07-08
申请号：US13022901
申请日：2011-02-08
申请人： Khaled Karrai , Pierre-Francois Braun
发明人： Khaled Karrai , Pierre-Francois Braun
IPC分类号： G01B11/02 , G01B9/02
CPC分类号： G01B9/02042 , G01B9/02061 , G01B9/02081 , G01B11/002 , G01B2290/25 , G01B2290/45
摘要： Device and method for acquiring position with a confocal Fabry-Perot interferometer. In a general aspect, the device for acquiring position may include an arrangement for acquiring position where the acquiring arrangement has a confocal Fabry-Perot interferometer. In another general aspect, a method for acquiring position may include generating an interference pattern dependent on a position of an object by a confocal Fabry-Perot interferometer; detecting the interference pattern to obtain a measuring signal; and evaluating the measuring signal.
摘要翻译：用共焦法布里 - 珀罗干涉仪获取位置的装置和方法。在一般方面，用于获取位置的装置可以包括用于获取位置的装置，其中采集装置具有共焦法布里 - 珀罗干涉仪。在另一个一般方面，用于获取位置的方法可以包括通过共焦法布里 - 珀罗干涉仪产生取决于对象位置的干涉图案; 检测干涉图案以获得测量信号; 并评估测量信号。

56. 发明申请

US20140152996A1 POLARIZATION-SENSITIVE OPTICAL MEASUREMENT INSTRUMENT 有权
标题翻译：偏振灵敏度测量仪器
公开(公告)号：US20140152996A1
公开(公告)日：2014-06-05
申请号：US14083599
申请日：2013-11-19
申请人： Hitachi Media Electronics Co., Ltd.
发明人： Kentaro OSAWA , Tatsuro IDE , Masaki MUKOH
IPC分类号： G01B9/02
CPC分类号： G01B9/02091 , G01B9/02081 , G01B2290/45 , G01B2290/70
摘要： A beam emitted from a light source is split into a probe beam that irradiates a measurement object and a reference beam that does not irradiate the measurement object. A signal beam obtained by the reflection of the probe beam is split into first and second split signal beams, which are mutually orthogonal polarized components. The first split signal beam and the reference beam are inputted to a first coherence optical system to cause the beams to interfere with each other to generate at least three coherence beams differing in phasic relationship. The second split signal beam and the reference beam are inputted to a second coherence optical system to cause the beams to interfere with each other to generate at least three coherence beams differing in phasic relationship. The coherence beams are then detected.
摘要翻译：从光源发射的光束被分割成照射测量对象的探测光束和不照射测量对象的参考光束。通过探测光束的反射而获得的信号光束被分割为相互正交的偏振分量的第一和第二分割信号光束。第一分割信号光束和参考光束被输入到第一相干光学系统，以使光束彼此干涉以产生不同相位关系的至少三个相干光束。第二分割信号光束和参考光束被输入到第二相干光学系统，以使光束相互干扰以产生不同阶段关系的至少三个相干光束。然后检测相干光束。

57. 发明授权

US08717576B2 Short coherence interferometer 有权
标题翻译：短相干干涉仪
公开(公告)号：US08717576B2
公开(公告)日：2014-05-06
申请号：US12680722
申请日：2008-09-26
申请人： Martin Hacker
发明人： Martin Hacker
IPC分类号： G01B9/02
CPC分类号： G01B9/02028 , A61B3/1005 , A61B3/102 , A61B3/113 , G01B9/02021 , G01B9/02035 , G01B9/02081 , G01B9/02091 , G01B2290/45 , G01B2290/70 , G01N21/4795 , G01N2021/1787
摘要： A short coherence interferometer apparatus for measuring multiple axially spaced regions of a specimen, in particular the eye, which has at least one measuring beam path, through which multiple individual measuring beams are incident on the specimen, and one reference beam path, through which a reference beam runs, with which the individual measuring beams are superimposed and brought into interference. The individual measuring beams are axially offset to one another upon incidence on the specimen by an amount which is adapted to the axial spacing. The interferometer apparatus superimposes each individual measuring beam with the reference beam in an interfering manner and conducts it to a detector associated with the particular individual measuring beam. The individual measuring beams are combined into a mixture in which they have varying phasing in the superposition with the reference beam.
摘要翻译：一种用于测量样本，特别是眼睛的多个轴向间隔的区域的短相干干涉仪装置，其具有至少一个测量光束路径，多个单独的测量光束通过该光束路径入射在样本上，以及一个参考光束路径，参考光束运行，各个测量光束通过它们叠加并引起干扰。当在试样上入射适当于轴向间距的量时，各个测量光轴彼此轴向偏移。干涉仪装置以干扰的方式将每个单独的测量光束与参考光束重叠，并将其传导到与特定的各个测量光束相关联的检测器。单独的测量光束被组合成混合物，在该混合物中它们与参考光束叠加时具有变化的相位。

58. 发明申请

US20130128274A1 METHOD AND APPARATUS FOR PERFORMING OPTICAL IMAGING USING FREQUENCY-DOMAIN INTERFEROMETRY 有权
公开(公告)号：US20130128274A1
公开(公告)日：2013-05-23
申请号：US13720507
申请日：2012-12-19
申请人： THE GENERAL HOSPITAL CORPORATION
发明人： Seok-Hyun Yun , Brett Eugene Bouma , Guillermo J. Tearney , Johannes Fitzgerald De Boer
IPC分类号： G01B9/02
CPC分类号： H01S5/5045 , A61B5/0059 , A61B5/0066 , A61B5/7257 , G01B9/02002 , G01B9/02004 , G01B9/02043 , G01B9/02075 , G01B9/02081 , G01B9/02083 , G01B9/02084 , G01B9/0209 , G01B9/02091 , G01B2290/45 , G01B2290/70 , G01J3/02 , G01J3/0208 , G01J3/021 , G01J3/0218 , G01J3/0264 , G01J3/453 , G01J9/0215 , G01N21/4795 , G02B6/3604 , G02B26/12 , G02B27/48 , G02F1/093 , G02F1/11 , H01S3/0071 , H01S3/0078 , H01S3/08009 , H01S3/08063 , H01S3/105 , H01S3/1068 , H01S5/0071 , H01S5/0078 , H01S5/1025 , H01S5/14 , H01S5/141 , H01S5/146
摘要： An apparatus and method are provided. In particular, at least one first electro-magnetic radiation may be provided to a sample and at least one second electro-magnetic radiation can be provided to a non-reflective reference. A frequency of the first and/or second radiations varies over time. An interference is detected between at least one third radiation associated with the first radiation and at least one fourth radiation associated with the second radiation. Alternatively, the first electro-magnetic radiation and/or second electro-magnetic radiation have a spectrum which changes over time. The spectrum may contain multiple frequencies at a particular time. In addition, it is possible to detect the interference signal between the third radiation and the fourth radiation in a first polarization state. Further, it may be preferable to detect a further interference signal between the third and fourth radiations in a second polarization state which is different from the first polarization state. The first and/or second electro-magnetic radiations may have a spectrum whose mean frequency changes substantially continuously over time at a tuning speed that is greater than 100 Tera Hertz per millisecond.

59. 发明授权

US08405835B2 Scanning microscope using heterodyne interferometer 有权
标题翻译：扫描显微镜使用外差干涉仪
公开(公告)号：US08405835B2
公开(公告)日：2013-03-26
申请号：US12696883
申请日：2010-01-29
申请人： Kyuman Cho , Kang-Hyuk Kwon
发明人： Kyuman Cho , Kang-Hyuk Kwon
IPC分类号： G01B9/02
CPC分类号： G01B9/0207 , G01B9/02003 , G01B9/02081 , G01B2290/70
摘要： The present invention relates to a scanning microscope using a heterodyne interferometer, which can be used for mapping or imaging complex optical parameters such as physical structures and material properties of a sample under test. The heterodyne interferometer is designed to provide in- and quadrature-phase interference signal which can be used for extracting the phase and amplitude change induced on the probe beam. The phase and the amplitude of the probe beam, which is reflected from or transmitted through the sample, are modified by the physical structures and material properties of the sample. Therefore, by scanning the probe beam, local variations of the phase and amplitude can be mapped, and, thereby, three-dimensional microscopic physical structures and material properties can be imaged by processing the phase and amplitude values.
摘要翻译：本发明涉及一种使用外差干涉仪的扫描显微镜，其可用于映射或成像复杂光学参数，例如被测样品的物理结构和材料性质。外差干涉仪设计用于提供正相和正交相干扰信号，可用于提取在探针上引起的相位和幅度变化。通过样品反射或透过样品的探针光束的相位和幅度被样品的物理结构和材料特性所改变。因此，通过扫描探测光束，可以映射相位和幅度的局部变化，从而可以通过处理相位和振幅值来成像三维微观物理结构和材料特性。

60. 发明申请

US20120140239A1 METHOD FOR MONITORING THIN FILM DEPOSITION USING DYNAMIC INTERFEROMETER 审中-公开
标题翻译：使用动态干涉仪监测薄膜沉积的方法
公开(公告)号：US20120140239A1
公开(公告)日：2012-06-07
申请号：US13152979
申请日：2011-06-03
申请人： Cheng-Chung LEE , Kai Wu
发明人： Cheng-Chung LEE , Kai Wu
IPC分类号： G01B9/02
CPC分类号： G01B11/0675 , G01B9/02021 , G01B9/02065 , G01B9/02081 , G01B9/0209 , G01B2290/70 , G01N21/45
摘要： A method for real-time monitoring thin film deposition using a dynamic interferometer is revealed. An optical monitoring extracting the temporal phase change of the reflection coefficient of the deposition film stacks. The dynamic interferometer, which gets rid of the influence of vibration and air turbulence, was used in the method to directly detect fluctuating phase of a deposition film stack. Combing with the reflectance or transmittance measurements, the real-time reflection coefficient under normal incidence of monitoring light can be found as well as optical admittance for enhancing the error compensation of the thin film deposition.
摘要翻译：揭示了使用动态干涉仪实时监测薄膜沉积的方法。提取沉积膜堆叠的反射系数的时间相位变化的光学监测。用于直接检测沉积膜叠层波动相位的方法中，摆脱了振动和空气湍流影响的动态干涉仪。配合反射率或透射率测量，可以发现在监控光的正常入射下的实时反射系数以及用于增强薄膜沉积的误差补偿的光学导纳。

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