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    • 1. 发明申请
    • POLARIZATION-SENSITIVE OPTICAL MEASUREMENT INSTRUMENT
    • 偏振灵敏度测量仪器
    • US20140152996A1
    • 2014-06-05
    • US14083599
    • 2013-11-19
    • Hitachi Media Electronics Co., Ltd.
    • Kentaro OSAWATatsuro IDEMasaki MUKOH
    • G01B9/02
    • G01B9/02091G01B9/02081G01B2290/45G01B2290/70
    • A beam emitted from a light source is split into a probe beam that irradiates a measurement object and a reference beam that does not irradiate the measurement object. A signal beam obtained by the reflection of the probe beam is split into first and second split signal beams, which are mutually orthogonal polarized components. The first split signal beam and the reference beam are inputted to a first coherence optical system to cause the beams to interfere with each other to generate at least three coherence beams differing in phasic relationship. The second split signal beam and the reference beam are inputted to a second coherence optical system to cause the beams to interfere with each other to generate at least three coherence beams differing in phasic relationship. The coherence beams are then detected.
    • 从光源发射的光束被分割成照射测量对象的探测光束和不照射测量对象的参考光束。 通过探测光束的反射而获得的信号光束被分割为相互正交的偏振分量的第一和第二分割信号光束。 第一分割信号光束和参考光束被输入到第一相干光学系统,以使光束彼此干涉以产生不同相位关系的至少三个相干光束。 第二分割信号光束和参考光束被输入到第二相干光学系统,以使光束相互干扰以产生不同阶段关系的至少三个相干光束。 然后检测相干光束。
    • 2. 发明申请
    • OPTICAL TOMOGRAPH AND OPTICAL TOMOGRAPHIC METHOD
    • 光学图像和光学方法
    • US20140204389A1
    • 2014-07-24
    • US14083636
    • 2013-11-19
    • HITACHI MEDIA ELECTRONICS CO., LTD.
    • Masaki MUKOHKentaro OSAWATatsuro IDE
    • G01B9/02
    • G01B9/02091A61B3/102G01B9/02007G01B9/02081G01B2290/70
    • A luminous flux including laser light of different wavelengths outgoing from a light source unit is split into two luminous fluxes, the first luminous flux is focused on a sample with an objective lens, and the second luminous flux functions as reference light without radiating it onto the sample. Signal light reflected from the sample and the reference light are multiplexed by a polarized beam splitter and are made to interfere on four photodetectors out of phase in a photodetection unit. A signal processing unit acquires the optical axis distribution of an object of examination in the sample by operating using the outputs of the plural photodetectors for input every wavelength, acquiring a detection signal and calculating the ratio of detection signals of different wavelengths every position in the sample.
    • 将包含从光源单元出射的不同波长的激光的光通量分成两个光束,第一光束聚焦在具有物镜的样品上,第二光束用作参考光,而不将其照射到 样品。 从采样和参考光反射的信号光被偏振光束分离器多路复用,并使其在光检测单元中相互干涉四个光电探测器。 信号处理单元通过使用多个光电检测器的输出进行各波长的输入来获取样本中的检查对象的光轴分布,获取检测信号并计算样本中每个位置的不同波长的检测信号的比率 。