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    • 1. 发明授权
    • Scanning microscope using heterodyne interferometer
    • 扫描显微镜使用外差干涉仪
    • US08405835B2
    • 2013-03-26
    • US12696883
    • 2010-01-29
    • Kyuman ChoKang-Hyuk Kwon
    • Kyuman ChoKang-Hyuk Kwon
    • G01B9/02
    • G01B9/0207G01B9/02003G01B9/02081G01B2290/70
    • The present invention relates to a scanning microscope using a heterodyne interferometer, which can be used for mapping or imaging complex optical parameters such as physical structures and material properties of a sample under test. The heterodyne interferometer is designed to provide in- and quadrature-phase interference signal which can be used for extracting the phase and amplitude change induced on the probe beam. The phase and the amplitude of the probe beam, which is reflected from or transmitted through the sample, are modified by the physical structures and material properties of the sample. Therefore, by scanning the probe beam, local variations of the phase and amplitude can be mapped, and, thereby, three-dimensional microscopic physical structures and material properties can be imaged by processing the phase and amplitude values.
    • 本发明涉及一种使用外差干涉仪的扫描显微镜,其可用于映射或成像复杂光学参数,例如被测样品的物理结构和材料性质。 外差干涉仪设计用于提供正相和正交相干扰信号,可用于提取在探针上引起的相位和幅度变化。 通过样品反射或透过样品的探针光束的相位和幅度被样品的物理结构和材料特性所改变。 因此,通过扫描探测光束,可以映射相位和幅度的局部变化,从而可以通过处理相位和振幅值来成像三维微观物理结构和材料特性。