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51. 发明授权

US6086778A Muffle etch injector assembly 失效
标题翻译：马弗蚀刻喷射器组件
公开(公告)号：US6086778A
公开(公告)日：2000-07-11
申请号：US906572
申请日：1997-08-04
申请人： Maynard Martin
发明人： Maynard Martin
IPC分类号： C23C16/44 , C23C16/54 , C23F1/08 , B05D1/00 , B05B13/00
CPC分类号： C23F1/08 , C23C16/4407 , C23C16/54
摘要： A novel modular muffle etch injector assembly for use in a gas blanketed down-flow chemical vapor deposition apparatus of the type having a muffle and a modular gas injector assembly for introducing chemical vapors into a deposition chamber, the muffle being adapted for receiving and supporting the gas injector assembly, wherein deposition material residue collects on a lower surface of the muffle. The etch injector assembly of the present invention comprises an etch chamber having vertical sidewalls, a closed top end and an open bottom end, a supply mechanism for introducing a liquid etchant into the etch chamber, and a sealing device disposed along the open end of the etch chamber for providing a seal between the etch chamber and the lower surface of the muffle to confine the etchant to the etch chamber. The etch injector assembly preferably also includes an exhaust means for removing chemical vapors from the etch chamber. The etch injector assembly is adapted to replace the gas injector assembly within the deposition chamber during maintenance operations for removing the residue from the lower surface of the muffle by introducing the liquid etchant into the etch chamber and on to the lower surface of the muffle.
摘要翻译：一种用于气体封闭的下流化学气相沉积装置的新型模块化马弗炉蚀刻喷射器组件，其具有用于将化学蒸气引入沉积室的马弗管和模块式气体喷射器组件，马弗管适于接收和支撑气体注射器组件，其中沉积材料残留物收集在马弗管的下表面上。本发明的蚀刻喷射器组件包括具有垂直侧壁，封闭顶端和开口底端的蚀刻室，用于将液体蚀刻剂引入蚀刻室的供应机构，以及沿着开口端设置的密封装置蚀刻室，用于在蚀刻室和马弗管的下表面之间提供密封，以将蚀刻剂限制在蚀刻室中。蚀刻喷射器组件优选地还包括用于从蚀刻室去除化学蒸汽的排气装置。蚀刻喷射器组件适于在维护操作期间更换沉积室内的气体喷射器组件，以通过将液体蚀刻剂引入蚀刻室中并在马弗管的下表面上从马弗炉的下表面移除残留物。

52. 发明授权

US5904773A Fluid delivery apparatus 失效
标题翻译：流体输送装置
公开(公告)号：US5904773A
公开(公告)日：1999-05-18
申请号：US786029
申请日：1997-01-21
申请人： Ricky A. Himes
发明人： Ricky A. Himes
IPC分类号： B05D1/02 , B05B9/00 , B05C5/00 , B05C11/00 , B05D1/26 , B08B3/02 , B08B5/02 , C23F1/08 , C25D5/08 , F26B21/00 , H05K3/00 , H05K3/06 , H05K3/18 , H05K3/22 , H05K3/26 , B05D7/00
CPC分类号： H05K3/0085 , B08B3/022 , B08B5/026 , C23F1/08 , F26B21/004 , H05K3/0088 , C25D5/08 , H05K3/227
摘要： A fluid delivery apparatus and method is provided wherein either liquid or gaseous fluid is provided from fluid dispenser manifolds, via nozzle plates associated therewith, on each side of a path of travel of articles being treated by the fluid, and wherein nozzle openings in a nozzle plates cooperate with transverse groove(s) to provide a screen flow of fluid extending transversely of the path of travel of articles, and directed toward the articles. In the case of liquid flow, the openings are generally cylindrical, and in the case of gas flow the openings are generally spaced-apart slotted holes. In the cases of both liquid and gas fluids, one of the grooves and/or nozzles are directed upstream relative to the path of article flow. Various adjustments are provided for adjusting the positions of the nozzle plates relative to the path of flow. The nozzle plate has a removable portion, for ease of cleaning and the like, that contains the nozzle orifices, sealingly connected to the nozzle base section. The transverse groove that connects the line of orifices can have its center line varied from the center line of the orifices, in the direction of the longitudinal path, and/or the groove can have its angular orientation varied such that the path of flow of fluid discharged can be at an angle other than 90.degree. to the discharge surface of the nozzle plate.
摘要翻译：提供了一种流体输送装置和方法，其中液体或气体流体由流体分配器歧管通过与其相关联的喷嘴板在由流体处理的制品的行进路径的每一侧上提供，并且其中喷嘴中的喷嘴开口板与横向槽配合以提供横向于物品行进路径延伸且朝向物品的流体的筛网流。在液体流动的情况下，开口通常是圆柱形的，并且在气流的情况下，开口通常是间隔开的开槽孔。在液体和气体流体的情况下，凹槽和/或喷嘴之一相对于制品流动的路径被引向上游。提供了各种调整以调节喷嘴板相对于流动路径的位置。喷嘴板具有可拆卸部分，便于清洁等，其包含密封地连接到喷嘴基部的喷嘴孔。连接孔线的横向槽可以使其中心线从孔的中心线沿着纵向路径的方向变化，和/或者槽可以具有其角度取向变化，使得流体的流动路径排出口可以与喷嘴板排放面90度以外的角度排出。

53. 发明授权

US5837067A Precision fluid head transport 失效
标题翻译：精密液压头运输
公开(公告)号：US5837067A
公开(公告)日：1998-11-17
申请号：US483581
申请日：1995-06-07
申请人： Michael James Canestaro
发明人： Michael James Canestaro
IPC分类号： B05C3/109 , B05D1/26 , B08B3/04 , C23F1/08 , H01L21/304 , H05K3/00 , H05K3/06 , H05K3/26 , B08B1/02
CPC分类号： C23F1/08 , B08B3/041 , H05K3/0085 , Y10S134/902 , Y10T29/4984
摘要： A method of treating a substrate including providing a fluid treatment apparatus including a first sheet of material having a plurality of spaced apart drive rod receiving passages extending therethrough and through an upper surface thereof. An inside surface of each drive rod passage provides a bearing surface for a drive rod. At least one fluid passage is provided between the drive rod passages. A drive rod is inserted into each drive rod passage. The drive rods at least partially extend above the upper surface of the first sheet. A second sheet of material has a plurality of spaced apart drive rod receiving passages extending therethrough and through a lower surface thereof. An inside surface of each drive rod passage provides a bearing surface for a drive rod. At least one fluid passage is provided between the drive rod passages. A drive rod is inserted into each drive rod passage. The drive rods at least partially extend below the upper surface of the second sheet. The second sheet is arranged over the first sheet, such that the drive rods of the first and second sheets face each other. A drive mechanism rotates a plurality of the drive rods. A fluid supply apparatus supplies fluid to the fluid injector passages. The apparatus also includes a fluid source. A substrate to be treated is caused to pass between the upper and lower substrate transportation and fluid heads. A fluid is caused to flow through the fluid injector passages to treat the substrate.
摘要翻译：一种处理基板的方法，包括提供流体处理设备，该流体处理设备包括具有多个间隔开的驱动杆接收通道的第一材料片，并且通过其上表面。每个驱动杆通道的内表面提供用于驱动杆的支承表面。至少一个流体通道设置在驱动杆通道之间。驱动杆插入每个驱动杆通道。驱动杆至少部分地延伸到第一片的上表面之上。第二片材料具有多个间隔开的驱动杆接收通道，该通道延伸穿过其并通过其下表面。每个驱动杆通道的内表面提供用于驱动杆的支承表面。至少一个流体通道设置在驱动杆通道之间。驱动杆插入每个驱动杆通道。驱动杆至少部分地延伸到第二片的上表面下方。第二片布置在第一片上，使得第一片和第二片的驱动杆彼此面对。驱动机构使多个驱动杆旋转。流体供应装置向流体注射器通道供应流体。该装置还包括流体源。使待处理的基板在上下基板输送和流体头之间通过。使流体流过流体注射器通道以处理基底。

54. 发明授权

US5444925A Fluid treatment apparatus and method 失效
标题翻译：流体处理装置及方法
公开(公告)号：US5444925A
公开(公告)日：1995-08-29
申请号：US164502
申请日：1993-12-09
申请人： Steven L. Bard , Jeffrey D. Jones , Robert H. Katyl , Ronald J. Moore , Oscar A. Moreno
发明人： Steven L. Bard , Jeffrey D. Jones , Robert H. Katyl , Ronald J. Moore , Oscar A. Moreno
IPC分类号： B05C5/02 , B05D1/36 , B08B3/02 , C23F1/08 , F26B21/00 , H01L21/304 , H05K3/00 , H05K3/22 , H05K3/26 , F26B9/00
CPC分类号： B05D1/36 , B05C5/02 , B08B3/022 , C23F1/08 , F26B21/004 , H05K3/0085 , H05K3/227
摘要： A new apparatus for treating substrates with fluids, as well as a corresponding fluid treatment method, is disclosed. The new apparatus includes a new configuration of fluid jet injectors which substantially overcomes the problem of dragout, in which fluid impinged upon an area of a substrate is retained on that area, preventing fresh fluid from reaching the impinged area. This new configuration also avoids imposing torques on substrates, and substantially reduces the need for rollers and guides for transporting substrates.
摘要翻译：公开了一种用于用流体处理基底的新设备，以及相应的流体处理方法。新设备包括流体喷射喷射器的新构造，其基本上克服了拖曳问题，其中冲击在基底区域上的流体保留在该区域上，防止新鲜流体到达冲击区域。这种新的结构也避免了对基片施加扭矩，并且基本上减少了用于输送基片的滚子和引导件的需要。

55. 发明授权

US5022949A Variable volume etching machine 失效
标题翻译：可变容积刻蚀机
公开(公告)号：US5022949A
公开(公告)日：1991-06-11
申请号：US592858
申请日：1990-10-04
申请人： James Jengo
发明人： James Jengo
IPC分类号： C23F1/08
CPC分类号： C23F1/08
摘要： An etching machine having an upper frame member with side members connected together to define an etching chamber therein. The upper frame member having open top and bottom sections, wherein the top section is covered by a movable cover plate which moves between a first closed position in which the top section is closed to a second open position in which the top section is opened to expose the etching chamber. Within the etching chamber, rotatable cylinders, with cupped portions on their outermost surface, engage mordant within the etching machine to splash mordant on a rotating etching plate. Positioned underneath the upper frame member and the rotatable cylinder is a lower tank member for holding a supply of mordant. The lower tank section has an open top portion so that the mordant contained within the lower tank section is in fluid communication with the etching chamber and can contact the cupped portions of the rotatable cylinders. To vary the mordant capacity of the etching machine according to the mordant requirements for a particular etching, the positioning of the lower tank member, with respect to the upper frame member and the rotatable cylinders, is adjusted along an upright axis.
摘要翻译：一种蚀刻机，具有上框架构件，侧构件连接在一起以在其中限定蚀刻室。所述上框架构件具有敞开的顶部和底部部分，其中所述顶部部分被可移动盖板覆盖，所述可移动盖板在所述顶部部分闭合的第一关闭位置与所述顶部部分打开以露出的第二打开位置之间移动蚀刻室。在蚀刻室内，在其最外表面上具有杯状部分的可旋转圆筒与蚀刻机内的媒染剂啮合，以使旋转蚀刻板上的媒染剂飞溅。定位在上框架构件下方，可旋转气缸是用于保持媒染剂供应的下槽构件。下部罐部分具有敞开的顶部部分，使得容纳在下部罐部分内的媒染剂与蚀刻室流体连通并且可以接触可旋转圆柱体的杯状部分。为了根据对特定蚀刻的媒染要求改变蚀刻机的媒染能力，相对于上框架构件和可旋转气缸，下罐构件的定位沿直立轴线调节。

56. 发明授权

US5021120A Process for etching patterned substrates 失效
标题翻译：蚀刻图案化基板的工艺
公开(公告)号：US5021120A
公开(公告)日：1991-06-04
申请号：US480598
申请日：1990-02-15
申请人： Roy V. Buck , Darrell P. Adams
发明人： Roy V. Buck , Darrell P. Adams
IPC分类号： C23F1/08 , H01L21/00 , H05K3/06
CPC分类号： H01L21/67086 , C23F1/08 , H05K3/068
摘要： A wet etching process wherein the etchant bath is ultrasonically vibrated, preferably while a carrier member holding the workpiece to be etched is slightly agitated. An apparatus for practicing the process includes a first vessel for holding a coupling fluid; a second vessel for holding an etchant solution; means for suspending the second vessel in the coupling fluid of the first vessel; and an ultrasonic generator means coupled to the first vessel to impart ultrasonic vibrations to the coupling fluid and, via the coupling fluid and second vessel, to the etchant solution.
摘要翻译：优选在保持要蚀刻的工件的载体构件稍微搅动的情况下，蚀刻剂浴被超声波振动的湿蚀刻工艺。用于实施该方法的装置包括用于保持耦合流体的第一容器; 用于容纳蚀刻剂溶液的第二容器; 用于将第二容器悬挂在第一容器的耦合流体中的装置; 以及耦合到第一容器的超声波发生器装置，以向耦合流体提供超声波振动，并且经由耦合流体和第二容器施加到蚀刻剂溶液。

57. 发明授权

US4964365A Immersion process machine 失效
标题翻译：浸入式加工机
公开(公告)号：US4964365A
公开(公告)日：1990-10-23
申请号：US357974
申请日：1989-05-26
申请人： Mark D'Amato
发明人： Mark D'Amato
IPC分类号： C23F1/08 , H05K3/00 , H05K3/06
CPC分类号： C23F1/08 , H05K3/0085 , H05K3/068
摘要： An apparatus for immersing circuit boards in a liquid. The apparatus of the invention generally comprises (a) a conveyor for moving circuit boards along a predetermined path and (b) an immersion pan positionable about at least a portion of said conveyor and operative to hold a quantity of liquid therein such that circuit boards passing along the conveyor will become immersed in said liquid. The conveyor portion of the apparatus may comprise a "roller conveyor" having a series of vertically opposed roller pairs. The immersion pan portion of the apparatus will preferably fit beneath the conveyor and will be provided with an infusion of liquid such that liquid will rise within the pan, thereby submerging at least a portion of the conveyor. Circuit boards moving along the conveyor path will thus become immersed in and pass through the liquid. The liquid may be allowed to cascade over one or more edges of the immersion pan. Cascading or over-running liquid will be collected in an underlying sump and recirculated into the immersion pan. Such recirculation is effected in a manner that provides for complete turnover of solution within the pan, avoiding dead zones or stagnant areas of solution therewithin.
摘要翻译：一种用于将电路板浸入液体中的装置。本发明的装置通常包括：（a）沿着预定路径移动电路板的输送机，和（b）可围绕所述输送机的至少一部分定位的浸液盘，并且用于将一定量的液体保持在其中，使得电路板通过沿输送机将浸入所述液体中。设备的输送部分可以包括具有一系列垂直相对的辊对的“辊式输送机”。设备的浸盘部分将优选地配合在输送机下方并且将设置有液体的输液，使得液体将在盘内上升，从而浸没至少一部分输送机。因此沿着传送路径移动的电路板将被浸入并通过液体。可以使液体在浸入盘的一个或多个边缘上级联。级联或过度运行的液体将被收集在潜在的贮槽中并再循环到浸入盘中。这种再循环以提供在锅内的溶液的完全更换的方式进行，从而避免了其中的死区或溶液的停滞区域。

58. 发明授权

US4724856A Dynamic flood conveyor 失效
标题翻译：动力防洪输送机
公开(公告)号：US4724856A
公开(公告)日：1988-02-16
申请号：US840069
申请日：1986-03-17
申请人： Don P. Pender
发明人： Don P. Pender
IPC分类号： C23F1/08 , H05K3/00 , B08B3/00 , B05C3/02
CPC分类号： C23F1/08 , H05K3/0085 , Y10S134/902
摘要： Dynamic flood conveyor. The conveyor permits a chemical solution to be applied to the surface of a material such that the solution interacts with the material at a generally uniform rate at each point on the surface of the material. The apparatus promotes laminar flow of the chemical solution over the surface of the material.
摘要翻译：动力防洪输送机输送机允许化学溶液施加到材料的表面，使得溶液在材料表面上的每个点处以大致均匀的速率与材料相互作用。该装置促进化学溶液在材料表面上的层流。

59. 发明授权

US4675067A Solar cell coverslide extraction apparatus 失效
标题翻译：太阳能电池盖玻片提取装置
公开(公告)号：US4675067A
公开(公告)日：1987-06-23
申请号：US788308
申请日：1985-10-17
申请人： Charles R. Valley
发明人： Charles R. Valley
IPC分类号： C23F1/08 , H01L31/18 , B05C3/04 , B08B13/00 , B32B35/00
CPC分类号： H01L31/18 , C23F1/08 , Y10T156/1939
摘要： Apparatus for extracting a coverslide from a solar cell includes a receptacle defining a cavity in which a rack is disposed which mounts a plurality of partitions in spaced, side-by-side relationship. The partitions define a plurality of extraction chambers therebetween which are open at their opposite ends. A screen is disposed below and underlies the rack for retaining solar cell modules received within the chambers in upright standing positions therein. The cavity is almost filled with a liquid solvent capable of detaching the coverslide of each module from its solar cell. A stirring device disposed below the rack on the bottom of the cavity can be actuated to create flow of the solvent along a circulatory path upwardly through some of the chambers and downwardly through other of the chambers and generally parallel to a plane of attachment of the coverslide to the solar cell of each module in the chambers. Also, air is bubbled through the chambers so as to assist the solvent in detaching the coverslides from the solar cells.
摘要翻译：用于从太阳能电池提取盖玻片的装置包括限定空腔的容器，其中布置有齿条，其以间隔开的并排关系安装多个隔板。分隔件在其间限定多个在其相对端开放的提取室。屏幕布置在机架的下面和下方，用于将容纳在腔室内的太阳能电池组件保持在其中的直立站立位置。空腔几乎充满了能够从其太阳能电池分离每个模块的盖玻片的液体溶剂。可以致动设置在空腔底部的齿条下方的搅拌装置，以使溶剂沿着循环路径向上流过某些室，并向下通过其它室，并且大致平行于盖玻片的连接平面到室中每个模块的太阳能电池。此外，空气鼓泡通过室，以帮助溶剂从太阳能电池中分离盖玻片。

60. 发明授权

US4595451A Process and apparatus for etching printed circuit boards 失效
标题翻译：用于蚀刻印刷电路板的工艺和设备
公开(公告)号：US4595451A
公开(公告)日：1986-06-17
申请号：US681382
申请日：1984-12-13
申请人： Walter Holzer
发明人： Walter Holzer
IPC分类号： C23F1/02 , C23F1/08 , C23F1/46 , C23F1/00 , B44C1/22 , C03C15/00 , C03C25/06
CPC分类号： C23F1/02 , C23F1/08 , C23F1/46
摘要： There is disclosed a process and apparatus for etching printed board circuits wherein etching of a printed circuit board is effected in turbulent flow of the etching solution and wherein concentration of the etching solution is maintained at effective levels by electrolysis.
摘要翻译：公开了一种用于蚀刻印刷电路板电路的工艺和设备，其中印刷电路板的蚀刻在蚀刻溶液的湍流中进行，并且其中蚀刻溶液的浓度通过电解保持在有效水平。

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