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51. 发明申请

US20110122901A1 HIGH POWER HIGH PULSE REPETITION RATE GAS DISCHARGE LASER SYSTEM 审中-公开
标题翻译：高功率高脉冲重复率气体放电激光系统
公开(公告)号：US20110122901A1
公开(公告)日：2011-05-26
申请号：US13020330
申请日：2011-02-03
申请人： Richard L. Sandstrom , William N. Partlo , Daniel J.W. Brown
发明人： Richard L. Sandstrom , William N. Partlo , Daniel J.W. Brown
IPC分类号： H01S3/10
CPC分类号： H01S3/08009 , H01S3/08031 , H01S3/08059 , H01S3/097 , H01S3/1055
摘要： A method of line narrowing for a narrow band DUV high power high repetition rate gas discharge laser producing output laser light pulse beam pulses in bursts of pulses includes selecting at least one center wavelength for each pulse determined at least in part by the angle of incidence of the laser light pulse beam containing the respective pulse on a dispersive surface of a dispersive wavelength selection optic; changing the curvature of the dispersive surface in a first manner that includes imparting a catenary curvature to the dispersive surface; and changing the curvature of the dispersive surface in a second manner that includes imparting a cylindrical curvature to the dispersive surface.
摘要翻译：窄带DUV高功率高重复率气体放电激光器产生输出激光脉冲束脉冲的脉冲串的方法包括为至少部分地由入射角确定的每个脉冲选择至少一个中心波长，所述激光束在所述分散波长选择光学器件的分散表面上包含相应的脉冲; 以第一种方式改变分散表面的曲率，包括向分散表面施加悬链曲率; 并且以第二种方式改变分散表面的曲率，包括向分散表面施加圆柱形曲率。

52. 发明授权

US07079556B2 Bandwidth control technique for a laser 失效
标题翻译：激光带宽控制技术
公开(公告)号：US07079556B2
公开(公告)日：2006-07-18
申请号：US10670406
申请日：2003-09-24
申请人： Igor V. Fomenkov , Armen Kroyan , Jesse D. Buck , Palash P. Das , Richard L. Sandstrom , Frederick G. Erie , John Martin Algots , Gamaralalage G. Padmabandu
发明人： Igor V. Fomenkov , Armen Kroyan , Jesse D. Buck , Palash P. Das , Richard L. Sandstrom , Frederick G. Erie , John Martin Algots , Gamaralalage G. Padmabandu
IPC分类号： H01S3/09 , H01S3/10
CPC分类号： G03F7/70575 , G03F7/70025 , G03F7/70041 , G03F7/70333 , G03F7/70933 , H01S3/036 , H01S3/0385 , H01S3/0404 , H01S3/041 , H01S3/097 , H01S3/0975 , H01S3/104 , H01S3/105 , H01S3/1055 , H01S3/13 , H01S3/134 , H01S3/22 , H01S3/2207 , H01S3/225
摘要： A technique for bandwidth control of an electric discharge laser. Line narrowing equipment is provided having at least one piezoelectric drive and a fast bandwidth detection means and a bandwidth control having a time response of less than about 1.0 millisecond. In a preferred embodiment wavelength tuning mirror is dithered at dither rates of more than 500 dithers per second within a very narrow range of pivot angles to cause a dither in nominal wavelength values to produce a desired effective bandwidth of series of laser pulses.
摘要翻译：一种用于放电激光器带宽控制的技术。提供线窄设备具有至少一个压电驱动器和快速带宽检测装置以及具有小于约1.0毫秒的时间响应的带宽控制。在优选实施例中，波长调谐镜在非常窄的转角范围内以每秒超过500次抖动的抖动速率抖动，以使标称波长值的抖动产生期望的一系列激光脉冲的有效带宽。

53. 发明授权

US06005879A Pulse energy control for excimer laser 失效
标题翻译：准分子激光脉冲能量控制
公开(公告)号：US06005879A
公开(公告)日：1999-12-21
申请号：US34870
申请日：1998-03-04
申请人： Richard L. Sandstrom , Herve Andre Besaucele , Igor V. Fomenkov , Palash P. Das
发明人： Richard L. Sandstrom , Herve Andre Besaucele , Igor V. Fomenkov , Palash P. Das
IPC分类号： H01S3/038 , G03F7/20 , H01S3/03 , H01S3/034 , H01S3/036 , H01S3/08 , H01S3/081 , H01S3/0971 , H01S3/134 , H01S3/225 , H01S3/00
CPC分类号： G03F7/70025 , G03F7/70041 , G03F7/70216 , G03F7/70558 , G03F7/70575 , H01S3/03 , H01S3/134 , H01S3/225 , H01S3/036 , H01S3/08009 , H01S3/0812 , H01S3/09713 , H01S3/2251 , H01S3/2256
摘要： A process for controlling pulse energy and integrated energy dose in bursts of pulses produced by an excimer laser. The energy of each pulse in each burst is measured. The rate of change of pulse energy with charging voltage is determined. A pulse energy error is determined for a previous pulse of the present burst. An integrated dose error is also determined for all previous pulses in the current burst. A charging voltage for the next pulse is determined using the pulse energy error, the integrated dose error, the rate of change of energy with charging voltage and a reference voltage. In a preferred embodiment, the rate of change of energy with voltage is determined by dithering the voltage during two pulses of each burst, once lower and once higher. The reference voltage is a voltage calculated using prior energy and voltage data. In this embodiment, the method of determining the reference voltage during a first portion of the pulse is different from the method used during a latter portion of the burst. During the first set of pulses (40 in this embodiment), for each pulse, a specified voltage calculated using voltage and energy data from a corresponding pulse in a previous burst is utilized as a prediction of the voltage needed to produce a pulse energy converging on a target pulse energy. For pulses 41 and thereafter the reference voltage for each pulse is the specified voltage for the previous pulse.
摘要翻译：用于在由准分子激光器产生的脉冲脉冲中控制脉冲能量和积分能量剂量的过程。测量每个脉冲中每个脉冲的能量。确定脉冲能量随充电电压的变化率。针对当前脉冲串的先前脉冲确定脉冲能量误差。还针对当前突发中的所有先前脉冲确定积分剂量误差。使用脉冲能量误差，积分剂量误差，带充电电压的能量变化率和参考电压确定下一个脉冲的充电电压。在优选实施例中，通过在每个脉冲串的两个脉冲期间抖动电压来确定能量与电压的变化率，一旦较低和一次较高。参考电压是使用先前的能量和电压数据计算的电压。在本实施例中，在脉冲的第一部分期间确定参考电压的方法与在脉冲串的后一部分期间使用的方法不同。在第一组脉冲（在本实施例中为40）中，对于每个脉冲，使用从先前脉冲串中的对应脉冲的电压和能量数据计算的指定电压作为产生脉冲能量收敛所需的电压的预测目标脉冲能量。对于脉冲41，此后每个脉冲的参考电压是先前脉冲的指定电压。

54. 发明授权

US07139301B2 Laser spectral engineering for lithographic process 有权
公开(公告)号：US07139301B2
公开(公告)日：2006-11-21
申请号：US10701280
申请日：2003-11-03
申请人： Armen Kroyan , Ivan Lalovic , Igor V. Fomenkov , Palash P. Das , Richard L. Sandstrom , John M. Algots , Khurshid Ahmed
发明人： Armen Kroyan , Ivan Lalovic , Igor V. Fomenkov , Palash P. Das , Richard L. Sandstrom , John M. Algots , Khurshid Ahmed
IPC分类号： H01S3/22
CPC分类号： G03F7/70025 , G03F7/70041 , G03F7/70333 , G03F7/70575 , G03F7/70933 , H01S3/02 , H01S3/036 , H01S3/038 , H01S3/0385 , H01S3/0404 , H01S3/041 , H01S3/08009 , H01S3/08036 , H01S3/097 , H01S3/0971 , H01S3/0975 , H01S3/1024 , H01S3/104 , H01S3/105 , H01S3/1055 , H01S3/13 , H01S3/1305 , H01S3/134 , H01S3/139 , H01S3/22 , H01S3/2207 , H01S3/223 , H01S3/225 , H01S3/2251 , H01S3/2256 , H01S3/2258 , H01S3/2308
摘要： An integrated circuit lithography technique called spectral engineering by Applicants, for bandwidth control of an electric discharge laser. In a preferred process, a computer model is used to model lithographic parameters to determine a desired laser spectrum needed to produce a desired lithographic result. A fast responding tuning mechanism is then used to adjust center wavelength of laser pulses in a burst of pulses to achieve an integrated spectrum for the burst of pulses approximating the desired laser spectrum. The laser beam bandwidth is controlled to produce an effective beam spectrum having at least two spectral peaks in order to produce improved pattern resolution in photo resist film. Line narrowing equipment is provided having at least one piezoelectric drive and a fast bandwidth detection control system having a time response of less than about 2.0 millisecond. In a preferred embodiment, a wavelength tuning mirror is dithered at dither rates of more than 500 dithers per second in phase with the repetition rate of the laser. In one case, the piezoelectric drive was driven with a square wave signal and in a second case it was driven with a sine wave signal. In another embodiment, the maximum displacement was matched on a one-to-one basis with the laser pulses in order to produce a desired average spectrum with two peaks for a series of laser pulses. Other preferred embodiments utilize three separate wavelength tuning positions producing a spectrum with three separate peaks.

55. 发明授权

US06650666B2 Laser wavelength control unit with piezoelectric driver 有权
公开(公告)号：US06650666B2
公开(公告)日：2003-11-18
申请号：US10027210
申请日：2001-12-21
申请人： Ronald L. Spangler , Robert N. Jacques , John A. Rule , Frederick A. Palenschat , Igor V. Fomenkov , John M. Algots , Jacob P. Lipcon , Richard L. Sandstrom
发明人： Ronald L. Spangler , Robert N. Jacques , John A. Rule , Frederick A. Palenschat , Igor V. Fomenkov , John M. Algots , Jacob P. Lipcon , Richard L. Sandstrom
IPC分类号： H01S310
CPC分类号： G03F7/70575 , G03F7/70025 , G03F7/70041 , G03F7/70333 , G03F7/70933 , H01S3/02 , H01S3/036 , H01S3/038 , H01S3/0385 , H01S3/0404 , H01S3/041 , H01S3/08036 , H01S3/097 , H01S3/0971 , H01S3/0975 , H01S3/104 , H01S3/105 , H01S3/1055 , H01S3/1305 , H01S3/1312 , H01S3/134 , H01S3/137 , H01S3/22 , H01S3/2207 , H01S3/225
摘要： An electric discharge laser with fast wavelength correction. Fast wavelength correction equipment includes at least one piezoelectric drive and a fast wavelength measurement system and fast feedback response times. In a preferred embodiment, equipment is provided to control wavelength on a slow time frame of several milliseconds, on a intermediate time from of about one to five milliseconds and on a very fast time frame of a few microseconds. Preferred techniques include a combination of a relatively slow stepper motor and a very fast piezoelectric driver for tuning the laser wavelength using a tuning mirror. A preferred control technique is described (utilizing a very fast wavelength monitor) to provide the slow and intermediate wavelength control with the combination of a stepper motor and a piezoelectric driver. Very fast wavelength control is provided with a piezoelectric load cell in combination with the piezoelectric driver. Preferred embodiments provide (1) fast feedback control based on wavelength measurements, (2) fast vibration control, (3) active damping using the load cell and an active damping module, (4) transient inversion using feed forward algorithms based on historical burst data. A preferred embodiment adapts the feed forward algorithms to current conditions. Another preferred embodiment measures tuning mirror position to permit wavelength pretuning and active wavelength tuning.

56. 发明授权

US6078599A Wavelength shift correction technique for a laser 失效
标题翻译：激光波长漂移校正技术
公开(公告)号：US6078599A
公开(公告)日：2000-06-20
申请号：US898630
申请日：1997-07-22
申请人： George J. Everage , Igor V. Fomenkov , Palash P. Das , Richard L. Sandstrom
发明人： George J. Everage , Igor V. Fomenkov , Palash P. Das , Richard L. Sandstrom
IPC分类号： H01S3/104 , G03F7/20 , H01S3/00 , H01S3/13 , H01S3/131 , H01S3/137 , H01S3/225 , H01S3/10
CPC分类号： G03F7/70575 , G03F7/70333 , H01S3/13 , H01S3/225
摘要： A wavelength shift correction system for a laser system is provided for correcting wavelength chirps. This wavelength shift correction system includes a learning algorithm that learns characteristics of a wavelength chirp from a laser and a computer system that executes the learning algorithm and provides wavelength correction control signals based on the learned characteristics to reduce the magnitude of the wavelength shift of the present wavelength chirp and subsequent wavelength chirps.
摘要翻译：提供用于激光系统的波长偏移校正系统用于校正波长线性调频脉冲。该波长偏移校正系统包括学习算法，其学习来自激光器的波长啁啾特性和执行学习算法的计算机系统，并且基于所学习的特征提供波长校正控制信号，以减小本发明的波长偏移的幅度波长啁啾和随后的波长啁啾。

57. 发明授权

US6067306A Laser-illuminated stepper or scanner with energy sensor feedback 失效
标题翻译：具有能量传感器反馈的激光照明步进或扫描仪
公开(公告)号：US6067306A
公开(公告)日：2000-05-23
申请号：US81374
申请日：1998-05-19
申请人： Richard L. Sandstrom , Palash P. Das , Igor V. Fomenkov , Herve A. Besaucele , Robert G. Ozarski
发明人： Richard L. Sandstrom , Palash P. Das , Igor V. Fomenkov , Herve A. Besaucele , Robert G. Ozarski
IPC分类号： G03F7/20 , H01S3/03 , H01S3/036 , H01S3/08 , H01S3/134 , H01S3/225 , H01S3/00
CPC分类号： G03F7/70025 , G03F7/70041 , G03F7/70358 , G03F7/70558 , G03F7/70575 , H01S3/03 , H01S3/134 , H01S3/225 , H01S3/036 , H01S3/08009 , H01S3/2251 , H01S3/2256
摘要： A laser-illuminated wafer-exposing system such as a stepper or scanner having a first light intensity detector located within the exposing system near a mask and second light intensity detector located near the output of the laser. A feedback control system controls the output of the laser based on signals detected by at least one of the detectors. The feedback control system includes a processor programmed with an algorithm which is used to control the laser discharge voltage in order to provide light pulses having desired intensity at the mask with the laser operating in a burst mode. The algorithm utilizes at least the following parameters; a previously measured pulse energy, a calculated energy error, a calculated dose error, a value for the rate of change of pulse energy with voltage, and at least one reference voltage. In a preferred embodiment the algorithm uses the pulse energy measured with the light intensity detector located near the mark to provide the feedback control and uses the light intensity detector at the output of the laser to assure that the output of the laser is maintained within a predetermined range.
摘要翻译：激光照射的晶片曝光系统，例如步进器或扫描仪，其具有位于掩模附近的曝光系统内的第一光强度检测器和位于激光器输出附近的第二光强度检测器。反馈控制系统基于由至少一个检测器检测到的信号来控制激光器的输出。反馈控制系统包括用算法编程的处理器，该算法用于控制激光放电电压，以在激光器以突发模式工作的情况下在掩模处提供具有期望强度的光脉冲。该算法至少使用以下参数; 先前测量的脉冲能量，计算的能量误差，计算的剂量误差，脉冲能量随电压的变化率的值和至少一个参考电压。在优选实施例中，算法使用位于标记附近的光强度检测器测量的脉冲能量来提供反馈控制，并且在激光器的输出处使用光强度检测器，以确保激光器的输出保持在预定的范围。

58. 发明授权

US06721340B1 Bandwidth control technique for a laser 有权
公开(公告)号：US06721340B1
公开(公告)日：2004-04-13
申请号：US09608543
申请日：2000-06-30
申请人： Igor V. Fomenkov , Armen Kroyan , Jesse D. Buck , Palash P. Das , Richard L. Sandstrom , Frederick G. Erie , John M. Algots , Gamaralalage G. Padmabandu
发明人： Igor V. Fomenkov , Armen Kroyan , Jesse D. Buck , Palash P. Das , Richard L. Sandstrom , Frederick G. Erie , John M. Algots , Gamaralalage G. Padmabandu
IPC分类号： H01S310
CPC分类号： G03F7/70575 , G03F7/70025 , G03F7/70041 , G03F7/70333 , G03F7/70933 , H01S3/036 , H01S3/0385 , H01S3/0404 , H01S3/041 , H01S3/097 , H01S3/0975 , H01S3/104 , H01S3/105 , H01S3/1055 , H01S3/13 , H01S3/134 , H01S3/22 , H01S3/2207 , H01S3/225
摘要： A technique for bandwidth control of an electric discharge laser. Line narrowing equipment is provided having at least one piezoelectric drive and a fast bandwidth detection means and a bandwidth control having a time response of less than about 1.0 millisecond. In a preferred embodiment wavelength tuning mirror is dithered at dither rates of more than 500 dithers per second within a very narrow range of pivot angles to cause a dither in nominal wavelength values to produce a desired effective bandwidth of series of laser pulses.

59. 发明授权

US06671294B2 Laser spectral engineering for lithographic process 有权
公开(公告)号：US06671294B2
公开(公告)日：2003-12-30
申请号：US09918773
申请日：2001-07-27
申请人： Armen Kroyan , Ivan Lalovic , Igor V. Fomenkov , Palash P. Das , Richard L. Sandstrom , John M. Algots , Khurshid Ahmed
发明人： Armen Kroyan , Ivan Lalovic , Igor V. Fomenkov , Palash P. Das , Richard L. Sandstrom , John M. Algots , Khurshid Ahmed
IPC分类号： H01S310
CPC分类号： G03F7/70025 , G03F7/70041 , G03F7/70333 , G03F7/70575 , G03F7/70933 , H01S3/02 , H01S3/036 , H01S3/038 , H01S3/0385 , H01S3/0404 , H01S3/041 , H01S3/08009 , H01S3/08036 , H01S3/097 , H01S3/0971 , H01S3/0975 , H01S3/1024 , H01S3/104 , H01S3/105 , H01S3/1055 , H01S3/13 , H01S3/1305 , H01S3/134 , H01S3/139 , H01S3/22 , H01S3/2207 , H01S3/223 , H01S3/225 , H01S3/2251 , H01S3/2256 , H01S3/2258 , H01S3/2308
摘要： An integrated circuit lithography technique called spectral engineering by Applicants, for bandwidth control of an electric discharge laser. In a preferred process, a computer model is used to model lithographic parameters to determine a desired laser spectrum needed to produce a desired lithographic result. A fast responding tuning mechanism is then used to adjust center wavelength of laser pulses in a burst of pulses to achieve an integrated spectrum for the burst of pulses approximating the desired laser spectrum. The laser beam bandwidth is controlled to produce an effective beam spectrum having at least two spectral peaks in order to produce improved pattern resolution in photo resist film. Line narrowing equipment is provided having at least one piezoelectric drive and a fast bandwidth detection control system having a time response of less than about 2.0 millisecond. In a preferred embodiment, a wavelength tuning mirror is dithered at dither rates of more than 500 dithers per second in phase with the repetition rate of the laser. In one case, the piezoelectric drive was driven with a square wave signal and in a second case it was driven with a sine wave signal. In another embodiment, the maximum displacement was matched on a one-to-one basis with the laser pulses in order to produce a desired average spectrum with two peaks for a series of laser pulses. Other preferred embodiments utilize three separate wavelength tuning positions producing a spectrum with three separate peaks.

60. 发明授权

US06529531B1 Fast wavelength correction technique for a laser 有权
标题翻译：用于激光的快速波长校正技术
公开(公告)号：US06529531B1
公开(公告)日：2003-03-04
申请号：US09597812
申请日：2000-06-19
申请人： George J. Everage , Igor V. Fomenkov , Palash P. Das , Richard L. Sandstrom , Frederick G. Erie , John M. Algots
发明人： George J. Everage , Igor V. Fomenkov , Palash P. Das , Richard L. Sandstrom , Frederick G. Erie , John M. Algots
IPC分类号： H01S310
CPC分类号： G03F7/70333 , G03F7/70575 , G03F7/70933 , H01S3/036 , H01S3/104 , H01S3/105 , H01S3/1055 , H01S3/13 , H01S3/134 , H01S3/139 , H01S3/225
摘要： Electric discharge laser with fast chirp correction. Fast wavelength chirp correction equipment includes at least one piezoelectric drive and a fast wavelength detection means and has a feedback response time of less than 1.0 millisecond. In a preferred embodiment a simple learning algorithm is described to allow advance tuning mirror adjustment in anticipation of the learned chirp pattern. Techniques include a combination of a relatively slow stepper motor and a very fast piezoelectric driver. In another preferred embodiment chirp correction is made on a pulse-to-pulse basis where the wavelength of one pulse is measured and the wavelength of the next pulse is corrected based on the measurement. This correction technique is able to function at repetition rates as rapid as 2000 Hz and greater.
摘要翻译：具有快速啁啾校正的放电激光器。快速波长啁啾校正装置包括至少一个压电驱动器和快速波长检测装置，并具有小于1.0毫秒的反馈响应时间。在优选实施例中，描述了一种简单的学习算法，以便在预期学习的啁啾模式中允许预调谐镜调节。技术包括相对较慢的步进电机和非常快的压电驱动器的组合。在另一个优选实施例中，在脉冲对脉冲基础上进行啁啾校正，其中测量一个脉冲的波长，并且基于测量校正下一个脉冲的波长。该校正技术能够以2000Hz及更高的重复速率工作。

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