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    • 55. 发明授权
    • Method of manufacturing magnetic recording medium
    • 磁记录介质的制造方法
    • US08029682B2
    • 2011-10-04
    • US12705456
    • 2010-02-12
    • Yousuke IsowakiKaori KimuraYoshiyuki KamataMasatoshi Sakurai
    • Yousuke IsowakiKaori KimuraYoshiyuki KamataMasatoshi Sakurai
    • B44C1/22
    • G11B5/865B82Y10/00G11B5/743G11B5/746G11B5/855
    • According to one embodiment, a method of manufacturing a magnetic recording medium includes forming a first hard mask, a second hard mask and a resist on a magnetic recording layer, imprinting a stamper to the resist to transfer patterns of protrusions and recesses to the resist, removing residues remaining in the recesses of the patterned resist, etching the second hard mask by using the patterned resist as a mask to transfer the patterns of protrusions and recesses to the second hard mask, etching the first hard mask by using the second hard mask as a mask to transfer the patterns of protrusions and recesses to the first hard mask, subjecting the magnetic recording layer exposed in the recesses to modifying treatment to change an etching rate, and deactivating the magnetic recording layer exposed in the recesses.
    • 根据一个实施例,一种制造磁记录介质的方法包括在磁记录层上形成第一硬掩模,第二硬掩模和抗蚀剂,将压模压印到抗蚀剂上,以将凹凸图案转印到抗蚀剂上, 去除残留在图案化抗蚀剂的凹部中的残留物,通过使用图案化抗蚀剂作为掩模蚀刻第二硬掩模以将突起和凹陷的图案转移到第二硬掩模,通过使用第二硬掩模蚀刻第一硬掩模 用于将突起和凹陷的图案转移到第一硬掩模的掩模,对暴露于凹部中的磁记录层进行修改处理以改变蚀刻速率,以及使在凹部中暴露的磁记录层失活。
    • 57. 发明授权
    • Method of manufacturing magnetic recording medium
    • 磁记录介质的制造方法
    • US07972523B2
    • 2011-07-05
    • US12509261
    • 2009-07-24
    • Kaori KimuraYousuke IsowakiYoshiyuki KamataMasatoshi Sakurai
    • Kaori KimuraYousuke IsowakiYoshiyuki KamataMasatoshi Sakurai
    • B44C1/22
    • G11B5/855G11B5/72
    • According to one embodiment, a method of manufacturing a magnetic recording medium includes forming a magnetic recording layer, an oxidation inhibiting layer, a hard mask layer includes carbon on a substrate, coating the hard mask layer with a resist, transferring patterns of protrusions and recesses to the resist by imprinting to form resist patterns, sequentially performing etching of the hard mask layer using the resist patterns as masks, etching of the oxidation inhibiting layer, and etching and/or magnetism deactivation of the magnetic recording layer to form patterns of the magnetic recording layer, and sequentially performing stripping of the resist patterns, stripping of the hard mask layer and stripping of the oxidation inhibiting layer, in which ion beam etching is used for stripping the oxidation inhibiting layer.
    • 根据一个实施例,制造磁记录介质的方法包括形成磁记录层,氧化抑制层,硬掩模层包括在基板上的碳,用抗蚀剂涂覆硬掩模层,转移凸起和凹槽的图案 通过压印形成抗蚀剂以形成抗蚀剂图案,使用抗蚀剂图案作为掩模,蚀刻氧化抑制层顺序地进行硬掩模层的蚀刻,以及磁记录层的蚀刻和/或磁性失活以形成磁性图案 记录层,顺序地进行剥离抗蚀剂图案,汽提硬掩模层和剥离氧化抑制层,其中使用离子束蚀刻来剥离氧化抑制层。
    • 59. 发明授权
    • Magnetic recording medium and manufacturing method thereof
    • 磁记录介质及其制造方法
    • US08507116B2
    • 2013-08-13
    • US13175485
    • 2011-07-01
    • Takeshi IwasakiKaori KimuraYoshiyuki KamataMasatoshi Sakurai
    • Takeshi IwasakiKaori KimuraYoshiyuki KamataMasatoshi Sakurai
    • G11B5/127
    • G11B5/8404G11B5/746G11B5/82G11B5/855Y10T428/11
    • According to one embodiment, a magnetic recording medium includes a substrate, a soft magnetic layer, an underlayer, a magnetic recording layer, and a protective layer, wherein the magnetic recording layer is provided with a pattern including recording portions and non-recording portions, the non-recording portions have a composition that is equal to a composition obtained by demagnetizing the recording portions, the non-recording portions contain at least one metal element selected from the group consisting of vanadium and zirconium and at least one element selected from the group consisting of nitrogen, carbon, boron and oxygen, and the at least one element selected from the group consisting of nitrogen, carbon, boron and oxygen is contained in the non-recording portions at a higher content than the content of the at least one element selected from the group consisting of nitrogen, carbon, boron and oxygen in the recording portions.
    • 根据一个实施例,磁记录介质包括衬底,软磁层,底层,磁记录层和保护层,其中磁记录层设置有包括记录部分和非记录部分的图案, 非记录部分的组成等于通过使记录部分退磁获得的组合物,非记录部分含有至少一种选自钒和锆的金属元素和至少一种选自组中的元素 由氮,碳,硼和氧组成,并且所述至少一种选自氮,碳,硼和氧的元素以比所述至少一种元素的含量更高的含量包含在非记录部分中 在记录部分中选自氮,碳,硼和氧。