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1. 发明授权

US08475949B2 Method for manufacturing magnetic recording medium and magnetic recording medium 失效
标题翻译：磁记录介质和磁记录介质的制造方法
公开(公告)号：US08475949B2
公开(公告)日：2013-07-02
申请号：US13236726
申请日：2011-09-20
申请人： Kaori Kimura , Yoshiyuki Kamata , Satoshi Shirotori , Masatoshi Sakurai
发明人： Kaori Kimura , Yoshiyuki Kamata , Satoshi Shirotori , Masatoshi Sakurai
IPC分类号： G11B5/66
CPC分类号： G11B5/855 , G11B5/65
摘要： A magnetic recording medium is presented that includes protruded magnetic patterns formed on a substrate, and a nonmagnetic material filled in recesses between the magnetic patterns in which an oxygen concentration thereof is higher at a surface side than at a substrate side. The nonmagnetic material is at least one selected from the group consisting of Si, SiC, SiC—C, SiOC, SiON, Si3N4, Al, AlxOy, Ti and TiOx.
摘要翻译：提出了一种磁记录介质，其包括形成在基板上的突出的磁图案，以及填充在表面侧的氧浓度高于基板侧的磁性图案之间的凹部中的非磁性材料。非磁性材料是选自Si，SiC，SiC-C，SiOC，SiON，Si 3 N 4，Al，Al x O y，Ti和TiO x中的至少一种。

2. 发明申请

US20120028076A1 MAGNETIC RECORDING MEDIUM AND MANUFACTURING METHOD THEREOF 有权
标题翻译：磁记录介质及其制造方法
公开(公告)号：US20120028076A1
公开(公告)日：2012-02-02
申请号：US13175485
申请日：2011-07-01
申请人： Takeshi Iwasaki , Kaori Kimura , Yoshiyuki Kamata , Masatoshi Sakurai
发明人： Takeshi Iwasaki , Kaori Kimura , Yoshiyuki Kamata , Masatoshi Sakurai
IPC分类号： G11B5/33 , G11B5/706 , B05D5/12
CPC分类号： G11B5/8404 , G11B5/746 , G11B5/82 , G11B5/855 , Y10T428/11
摘要： According to one embodiment, a magnetic recording medium includes a substrate, a soft magnetic layer, an underlayer, a magnetic recording layer, and a protective layer, wherein the magnetic recording layer is provided with a pattern including recording portions and non-recording portions, the non-recording portions have a composition that is equal to a composition obtained by demagnetizing the recording portions, the non-recording portions contain at least one metal element selected from the group consisting of vanadium and zirconium and at least one element selected from the group consisting of nitrogen, carbon, boron and oxygen, and the at least one element selected from the group consisting of nitrogen, carbon, boron and oxygen is contained in the non-recording portions at a higher content than the content of the at least one element selected from the group consisting of nitrogen, carbon, boron and oxygen in the recording portions.
摘要翻译：根据一个实施例，磁记录介质包括衬底，软磁层，底层，磁记录层和保护层，其中磁记录层设置有包括记录部分和非记录部分的图案，非记录部分的组成等于通过使记录部分退磁获得的组合物，非记录部分含有至少一种选自钒和锆的金属元素和至少一种选自组中的元素由氮，碳，硼和氧组成，并且所述至少一种选自氮，碳，硼和氧的元素以比所述至少一种元素的含量更高的含量包含在非记录部分中在记录部分中选自氮，碳，硼和氧。

3. 发明授权

US08012361B2 Method of manufacturing magnetic recording medium 有权
标题翻译：磁记录介质的制造方法
公开(公告)号：US08012361B2
公开(公告)日：2011-09-06
申请号：US12705421
申请日：2010-02-12
申请人： Kaori Kimura , Yousuke Isowaki , Yoshiyuki Kamata , Masatoshi Sakurai
发明人： Kaori Kimura , Yousuke Isowaki , Yoshiyuki Kamata , Masatoshi Sakurai
IPC分类号： B44C1/22
CPC分类号： C23F4/00 , B82Y10/00 , G11B5/743 , G11B5/746 , G11B5/855 , G11B5/865
摘要： According to one embodiment, a method of manufacturing a magnetic recording medium includes forming a first hard mask, a second hard mask and a resist on a magnetic recording layer, imprinting a stamper to the resist to transfer patterns of protrusions and recesses to the resist, removing residues remaining in the recesses of the patterned resist, etching the second hard mask by using the patterned resist as a mask to transfer the patterns of protrusions and recesses to the second hard mask, etching the first hard mask by using the second hard mask as a mask to transfer the patterns of protrusions and recesses to the first hard mask, removing the second hard mask remaining on the protrusions of the first hard mask, and deactivating the magnetic recording layer exposed in the recesses by means of ion beam irradiation.
摘要翻译：根据一个实施例，一种制造磁记录介质的方法包括在磁记录层上形成第一硬掩模，第二硬掩模和抗蚀剂，将压模压印到抗蚀剂上，以将凹凸图案转印到抗蚀剂上，去除残留在图案化抗蚀剂的凹部中的残留物，通过使用图案化抗蚀剂作为掩模蚀刻第二硬掩模以将突起和凹陷的图案转移到第二硬掩模，通过使用第二硬掩模蚀刻第一硬掩模用于将突起和凹陷的图案转移到第一硬掩模的掩模，去除残留在第一硬掩模的突起上的第二硬掩模，以及通过离子束照射去除在凹部中暴露的磁记录层。

4. 发明授权

US08002997B2 Method of manufacturing magnetic recording medium and magnetic recording medium 有权
公开(公告)号：US08002997B2
公开(公告)日：2011-08-23
申请号：US12544606
申请日：2009-08-20
申请人： Yoshiyuki Kamata , Kaori Kimura , Yousuke Isowaki , Masatoshi Sakurai
发明人： Yoshiyuki Kamata , Kaori Kimura , Yousuke Isowaki , Masatoshi Sakurai
IPC分类号： B44C1/22
CPC分类号： G11B5/855 , B82Y10/00 , G11B5/743
摘要： According to one embodiment, a method of manufacturing a magnetic recording medium includes forming a resist on a magnetic recording layer, imprinting a stamper to the resist to transfer patterns of protrusions and recesses, and partially etching the magnetic recording layer in areas not covered with patterns of the resist used as masks by ion beam etching using a mixed gas of He and N2 as well as modifying a remainder of the magnetic recording layer to leave behind a nonmagnetic layer having a reduced thickness.

5. 发明申请

US20100302679A1 Patterned media and method of manufacturing the same, and magnetic recording apparatus 有权
标题翻译：图案化介质及其制造方法，以及磁记录装置
公开(公告)号：US20100302679A1
公开(公告)日：2010-12-02
申请号：US12805471
申请日：2010-08-02
申请人： Yoshiyuki Kamata , Masatoshi Sakurai , Satoshi Shirotori , Kaori Kimura
发明人： Yoshiyuki Kamata , Masatoshi Sakurai , Satoshi Shirotori , Kaori Kimura
IPC分类号： G11B5/74 , G11B5/127
CPC分类号： G11B5/82 , B82Y10/00 , G11B5/59655 , G11B5/743 , G11B5/855
摘要： A patterned media has a substrate, and a magnetic recording layer on the substrate including protruded magnetic patterns and a nonmagnetic material filled in between the protruded magnetic patterns. In the patterned media, a depth Db and a depth Da, which are defined that Db is a depth from a surface of the magnetic patterns to a surface of the nonmagnetic material filled in a first central part between the magnetic patterns adjacent to each other in a cross-track direction or a down-track direction, and Da is a depth from a surface of the magnetic patterns to a surface of the nonmagnetic material filled in a second central part in a portion surrounded by the magnetic patterns, have a relationship that the depth Da is greater than the depth Db.
摘要翻译：图案化介质具有基板，并且在基板上的磁记录层包括突出的磁图案和填充在突出磁图案之间的非磁性材料。在图案化介质中，深度Db和深度Da被定义为Db是从磁图案的表面到填充在彼此相邻的磁图案之间的第一中心部分的非磁性材料的表面的深度交叉轨道方向或向下轨道方向，并且Da是从磁图案的表面到填充在由磁图案包围的部分中的第二中心部分中的非磁性材料的表面的深度，具有如下关系：深度Da大于深度Db。

6. 发明申请

US20100214695A1 METHOD OF MANUFACTURING MAGNETIC RECORDING MEDIUM 有权
标题翻译：制造磁记录介质的方法
公开(公告)号：US20100214695A1
公开(公告)日：2010-08-26
申请号：US12705490
申请日：2010-02-12
申请人： Yousuke Isowaki , Kaori Kimura , Yoshiyuki Kamata , Masatoshi Sakurai
发明人： Yousuke Isowaki , Kaori Kimura , Yoshiyuki Kamata , Masatoshi Sakurai
IPC分类号： B44C1/22 , G11B5/82
CPC分类号： G11B5/865 , B82Y10/00 , G11B5/743 , G11B5/746 , G11B5/855
摘要： According to one embodiment, a method of manufacturing a magnetic recording medium includes forming a first hard mask, a second hard mask and a resist on a magnetic recording layer, imprinting a stamper to the resist to transfer patterns of protrusions and recesses to the resist, removing residues remaining in the recesses of the patterned resist by means of a first etching gas, etching the second hard mask by means of the first etching gas using the patterned resist as a mask to transfer the patterns to the second hard mask, etching the first hard mask by means of a second etching gas different from the first etching gas using the second hard mask as a mask to transfer the patterns to the first hard mask, and performing ion beam etching in order to deactivate the magnetic recording layer exposed in the recesses and to remove the second hard mask.
摘要翻译：根据一个实施例，一种制造磁记录介质的方法包括在磁记录层上形成第一硬掩模，第二硬掩模和抗蚀剂，将压模压印到抗蚀剂上，以将凹凸图案转印到抗蚀剂上，通过第一蚀刻气体去除残留在图案化抗蚀剂的凹部中的残留物，利用第一蚀刻气体，使用图案化抗蚀剂作为掩模蚀刻第二硬掩模，以将图案转移到第二硬掩模，蚀刻第一通过不同于使用第二硬掩模的第一蚀刻气体作为掩模的第二蚀刻气体将硬掩模转印到第一硬掩模，并且执行离子束蚀刻以使暴露在凹部中的磁记录层失活并移除第二个硬掩模。

7. 发明申请

US20090202865A1 MAGNETIC RECORDING MEDIUM AND METHOD OF MANUFACTURING THE SAME 有权
标题翻译：磁记录介质及其制造方法
公开(公告)号：US20090202865A1
公开(公告)日：2009-08-13
申请号：US12431671
申请日：2009-04-28
申请人： Kaori Kimura , Yoshiyuki Kamata , Satoshi Shirotori , Masatoshi Sakurai
发明人： Kaori Kimura , Yoshiyuki Kamata , Satoshi Shirotori , Masatoshi Sakurai
IPC分类号： G11B5/66 , G11B5/33 , B44C1/22
CPC分类号： G11B5/855
摘要： According to one embodiment, a magnetic recording medium includes magnetic patterns made of a ferromagnetic recording layer containing Co, and a nonmagnetic layer which separates the magnetic patterns and has a lower Co concentration than the magnetic patterns.
摘要翻译：根据一个实施例，磁记录介质包括由包含Co的铁磁记录层制成的磁图案和分离磁图案并且具有比磁图案低的Co浓度的非磁性层。

8. 发明申请

US20090166323A1 METHOD OF MANUFACTURING MAGNETIC RECORDING MEDIUM 审中-公开
标题翻译：制造磁记录介质的方法
公开(公告)号：US20090166323A1
公开(公告)日：2009-07-02
申请号：US12400288
申请日：2009-03-09
申请人： Satoshi Shirotori , Yoshiyuki Kamata , Kaori Kimura , Masatoshi Sakurai
发明人： Satoshi Shirotori , Yoshiyuki Kamata , Kaori Kimura , Masatoshi Sakurai
IPC分类号： B44C1/22
CPC分类号： G11B5/855 , G11B5/72 , G11B5/82
摘要： According to one embodiment, a method of manufacturing a magnetic recording medium includes depositing a magnetic recording layer and a sacrifice layer on a substrate, patterning the sacrifice layer and magnetic recording layer to form protruded magnetic patterns and sacrifice patterns, depositing a nonmagnetic material in recesses between the magnetic patterns and sacrifice patterns and on the sacrifice patterns, and etching back the nonmagnetic material.
摘要翻译：根据一个实施例，制造磁记录介质的方法包括在基片上沉积磁记录层和牺牲层，图案化牺牲层和磁记录层以形成突出的磁图并牺牲图案，将非磁性材料沉积在凹陷中在磁图案和牺牲图案之间以及牺牲图案上，并且蚀刻非磁性材料。

9. 发明申请

US20090162704A1 METHOD OF MANUFACTURING MAGNETIC RECORDING MEDIUM AND MAGNETIC RECORDING MEDIUM 有权
标题翻译：制造磁记录介质和磁记录介质的方法
公开(公告)号：US20090162704A1
公开(公告)日：2009-06-25
申请号：US12400224
申请日：2009-03-09
申请人： Kaori Kimura , Yoshiyuki Kamata , Satoshi Shirotori , Masatoshi Sakurai
发明人： Kaori Kimura , Yoshiyuki Kamata , Satoshi Shirotori , Masatoshi Sakurai
IPC分类号： G11B5/706 , G11B5/84
CPC分类号： G11B5/855 , G11B5/65
摘要： According to one embodiment, a method of manufacturing a magnetic recording medium includes forming protruded magnetic patterns on a substrate, depositing a nonmagnetic material in recesses between the magnetic patterns and on the magnetic patterns, and etching back the nonmagnetic material using an oxygen-containing etching gas while reforming a surface of the nonmagnetic material.
摘要翻译：根据一个实施例，一种制造磁记录介质的方法包括在基片上形成突出的磁图案，在非磁性材料之间的磁性图案之间的凹槽中和非磁性材料上沉积非磁性材料，并使用含氧蚀刻气体同时重整非磁性材料的表面。

10. 发明申请

US20090161257A1 MAGNETIC RECORDING MEDIUM, METHOD OF MANUFACTURING THE SAME, AND MAGNETIC RECORDING APPARATUS 审中-公开
标题翻译：磁记录介质，其制造方法和磁记录装置
公开(公告)号：US20090161257A1
公开(公告)日：2009-06-25
申请号：US12400341
申请日：2009-03-09
申请人： Akiko Yuzawa , Masatoshi Sakurai , Yoshiyuki Kamata , Satoshi Shirotori , Kaori Kimura , Tsuyoshi Onitsuka
发明人： Akiko Yuzawa , Masatoshi Sakurai , Yoshiyuki Kamata , Satoshi Shirotori , Kaori Kimura , Tsuyoshi Onitsuka
IPC分类号： G11B5/60 , G11B5/33 , B44C1/22
CPC分类号： G11B5/855 , G11B5/65
摘要： According to one embodiment, a magnetic recording medium includes protruded magnetic patterns formed on a substrate, and a non-magnetic material filled in recesses between the magnetic patterns and made of a multi-element amorphous alloy containing Ni or Cu, and two or more metals selected from the group consisting of Ta, Nb, Ti, Zr, Hf, Cr, Mo and Ag.
摘要翻译：根据一个实施例，磁记录介质包括形成在基板上的突出的磁图案和填充在磁图案之间的凹部中的非磁性材料，并且由含有Ni或Cu的多元非晶合金和两种或更多种金属制成选自Ta，Nb，Ti，Zr，Hf，Cr，Mo和Ag组成的组。

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