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    • 53. 发明授权
    • Manufacturing apparatus and method for semiconductor device
    • 半导体器件的制造装置和方法
    • US08597429B2
    • 2013-12-03
    • US13350102
    • 2012-01-13
    • Kunihiko SuzukiHironobu Hirata
    • Kunihiko SuzukiHironobu Hirata
    • C23C16/00H01L21/31
    • C23C16/4401C23C16/24C23C16/4412
    • Provided is a semiconductor manufacturing apparatus including: a reaction chamber including a gas supply inlet and a gas exhaust outlet, and into which a wafer is to be introduced; a process gas supply mechanism that supplies process gas into the reaction chamber from the gas supply inlet of the reaction chamber; a wafer retaining member that is arranged in the reaction chamber and that retains the wafer; a heater that heats the wafer retained by the wafer retaining member to a predetermined temperature; a rotation drive control mechanism that rotates the wafer retaining member together with the wafer; a gas exhaustion mechanism that exhausts gas in the reaction chamber from the gas exhaust outlet of the reaction chamber; and a drain that is disposed at a bottom portion near a wall surface in the reaction chamber and that collects and discharges oily silane that drips from the wall surface.
    • 提供一种半导体制造装置,包括:反应室,包括气体供给入口和排气出口,并且其中将引入晶片; 处理气体供给机构,其从所述反应室的气体供给口向所述反应室供给处理气体; 晶片保持构件,其布置在所述反应室中并保持所述晶片; 将由晶片保持构件保持的晶片加热到预定温度的加热器; 旋转驱动控制机构,其使晶片保持构件与晶片一起旋转; 气体排出机构,其从反应室的排气口排出反应室中的气体; 以及设置在反应室内的壁面附近的底部并排出从壁面滴下的油性硅烷的排水管。
    • 54. 发明申请
    • MANUFACTURING APPARATUS AND METHOD FOR SEMICONDUCTOR DEVICE
    • 制造设备和半导体器件的方法
    • US20130084690A1
    • 2013-04-04
    • US13685870
    • 2012-11-27
    • Kunihiko SuzukiShinichi Mitani
    • Kunihiko SuzukiShinichi Mitani
    • H01L21/02
    • H01L21/02639C23C16/4584C23C16/4586C30B25/10H01L21/67109H01L21/68792
    • A semiconductor device manufacturing apparatus includes a chamber in which a wafer is loaded; a first gas supply unit for supplying a process gas into the chamber; a gas exhaust unit for exhausting a gas from the chamber; a wafer support member on which the wafer is placed; a ring on which the wafer support member is placed; a rotation drive control unit connected to the ring to rotate the wafer; a heater disposed in the ring and comprising a heater element for heating the wafer to a predetermined temperature and including an SiC layer on at least a surface, and a heater electrode portion molded integrally with a heater element and including an SiC layer on at least a surface; and a second gas supply unit for supplying an SiC source gas into the ring.
    • 半导体器件制造装置包括其中装载晶片的腔室; 用于将处理气体供应到所述室中的第一气体供应单元; 用于从所述室排出气体的排气单元; 其上放置晶片的晶片支撑构件; 其上放置有晶片支撑构件的环; 旋转驱动控制单元,连接到所述环以旋转晶片; 设置在所述环中并且包括用于将晶片加热到预定温度并且在至少一个表面上包括SiC层的加热器元件的加热器和与加热器元件整体模制并且包括至少一个SiC层的SiC层的加热器电极部分 表面; 以及用于将SiC源气体供给到所述环中的第二气体供给单元。
    • 55. 发明申请
    • FILM-FORMING APPARATUS AND METHOD
    • 成膜装置和方法
    • US20130036968A1
    • 2013-02-14
    • US13568872
    • 2012-08-07
    • Kunihiko SuzukiShinichi MitaniYuusuke Sato
    • Kunihiko SuzukiShinichi MitaniYuusuke Sato
    • C30B25/12C30B25/14C30B25/16C23C16/44C30B25/10
    • C30B29/06C23C16/4411C23C16/45565C23C16/45589C30B25/12
    • A film-forming apparatus and method comprising a film-forming chamber for supplying a reaction gas, a cylindrical shaped liner provided in the film-forming chamber, a straightening vane provided above the liner for the reaction gas to pass through, wherein the outside of the film-forming chamber connects the inside of the liner via a substrate transfer portion provided at the wall of the film-forming chamber by moving the straightening vane from the position that the straightening vane closes the upper opening of the liner. A substrate supporting portion provided in the liner, for supporting the substrate before the film-forming to move the substrate in a vertical direction, a substrate transfer unit capable of moving inside the film-forming chamber through the substrate transfer portion, wherein the substrate is transferred between the substrate supporting portion and the substrate transfer unit.
    • 一种成膜装置和方法,包括:用于提供反应气体的成膜室,设置在成膜室中的圆柱形衬垫,设置在衬套上方的用于反应气体通过的矫直叶片,其中外部 成膜室通过从整形叶片封闭衬垫的上部开口的位置移动矫直叶片,通过设置在成膜室的壁处的衬底转移部分来连接衬里的内部。 一种基板支撑部分,其设置在所述衬垫中,用于在成膜之前支撑所述基板以在垂直方向上移动所述基板;基板转移单元,其能够通过所述基板转移部分在所述成膜室内移动,其中所述基板为 在衬底支撑部分和衬底转移单元之间转移。
    • 57. 发明授权
    • Manufacturing apparatus and method for semiconductor device
    • 半导体器件的制造装置和方法
    • US08337622B2
    • 2012-12-25
    • US12903384
    • 2010-10-13
    • Kunihiko SuzukiShinichi Mitani
    • Kunihiko SuzukiShinichi Mitani
    • C23C16/50C23C16/00C23F1/00H01L21/301
    • H01L21/02639C23C16/4584C23C16/4586C30B25/10H01L21/67109H01L21/68792
    • A semiconductor device manufacturing apparatus includes a chamber in which a wafer is loaded; a first gas supply unit for supplying a process gas into the chamber; a gas exhaust unit for exhausting a gas from the chamber; a wafer support member on which the wafer is placed; a ring on which the wafer support member is placed; a rotation drive control unit connected to the ring to rotate the wafer; a heater disposed in the ring and comprising a heater element for heating the wafer to a predetermined temperature and including an SiC layer on at least a surface, and a heater electrode portion molded integrally with a heater element and including an SiC layer on at least a surface; and a second gas supply unit for supplying an SiC source gas into the ring.
    • 半导体器件制造装置包括其中装载晶片的腔室; 用于将处理气体供应到所述室中的第一气体供应单元; 用于从所述室排出气体的排气单元; 其上放置晶片的晶片支撑构件; 其上放置有晶片支撑构件的环; 旋转驱动控制单元,连接到所述环以旋转晶片; 设置在所述环中并且包括用于将晶片加热到预定温度并且在至少一个表面上包括SiC层的加热器元件的加热器和与加热器元件整体模制并且包括至少一个SiC层的SiC层的加热器电极部分 表面; 以及用于将SiC源气体供给到所述环中的第二气体供给单元。