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    • 57. 发明授权
    • Method for providing an ordered layer of self-assemblable polymer for use in lithography
    • 提供用于光刻的自组装聚合物的有序层的方法
    • US08822139B2
    • 2014-09-02
    • US13640293
    • 2011-01-19
    • Emiel PeetersSander Frederik WuisterRoelof Koole
    • Emiel PeetersSander Frederik WuisterRoelof Koole
    • G03F7/26B29C59/00C08G83/00B82Y40/00B82Y10/00G03F7/00
    • G03F7/0002B82Y10/00B82Y40/00
    • A method for providing an ordered polymer layer at a surface of a substrate includes depositing a self-assemblable polymer layer directly onto a primer layer on a substrate to provide an interface between the self-assemblable polymer layer and the primer layer, and treating the self-assemblable polymer layer to provide self-assembly into an ordered polymer layer, such as a block copolymer, having first and second domain types at the interface. The primer layer is adapted to improve its chemical affinity to each domain type at the interface, in response to the presence of the respective domain type in the self-assembled polymer at the interface during the self-assembly of the self-assemblable polymer layer into the ordered polymer layer. This may lead to reduction in defect levels and/or improved persistence length for the ordered polymer layer. The method may be useful for forming resist layers for use in device lithography.
    • 在衬底的表面提供有序聚合物层的方法包括将可自组装的聚合物层直接沉积在基底上的底漆层上,以提供可自组装的聚合物层和底漆层之间的界面,以及处理自身 可以将聚合物层自组装成有序聚合物层,例如在界面处具有第一和第二域类型的嵌段共聚物。 响应于在自组装聚合物层的自组装期间在界面处的自组装聚合物中存在相应的畴型,引物层适于改善其在界面处对每种畴型的化学亲和力 有序聚合物层。 这可能导致有序聚合物层的缺陷水平和/或改善的持续长度的降低。 该方法可用于形成用于器件光刻的抗蚀剂层。
    • 60. 发明授权
    • Biosensor with one-dimensional sub-diffraction-limited apertures composed of a grid and a polarizer
    • 具有由栅格和偏振器组成的一维亚衍射限制孔的生物传感器
    • US08075841B2
    • 2011-12-13
    • US12158347
    • 2006-12-11
    • Maarten Van HerpenDirk J. BroerEmiel PeetersDerk J. W KlunderHendrik R. Stapert
    • Maarten Van HerpenDirk J. BroerEmiel PeetersDerk J. W KlunderHendrik R. Stapert
    • G01N21/64G01N21/00G01J3/00G01N21/76
    • G01N21/648Y10T436/11
    • A method and sensor for the detection of luminescence radiation generated by at least one luminophore is disclosed. In the context of the present invention the biosensor comprises a grid (120) defined as arrays of apertures with the apertures having a first dimension below and a second dimension above the diffraction limit of the excitation light (102) in a medium, a polarizer (115), and luminophores (117) positioned in a volume selected from the group consisting of: the volume inside the apertures of the grid (120), the volume in between the array of slits (120) and the polarizer (115) and a volume that extends into the polarizer (115), wherein the grid (120) providing a transmission axis extending in a first direction and the polarizer (115) providing a transmission axis extending in a second direction, the first direction and the second direction being substantially perpendicular with respect to each other, wherein the excitation radiation (102) is polarized such that it is substantially suppressed by one of the at least one grid (120) and polarizer (115) and substantially not suppressed by the other of the at least one grid (120) and polarizer (115).
    • 公开了一种用于检测由至少一个发光体产生的发光辐射的方法和传感器。 在本发明的上下文中,生物传感器包括定义为孔阵列的格栅(120),孔格具有第一尺寸,第二维度高于介质中的激发光(102)的衍射极限,偏振器( 115)和位于选自以下的体积中的发光体(117):栅格(120)的孔内的体积,狭缝阵列(120)和偏振器(115)之间的体积和 延伸到偏振器(115)的体积,其中提供沿第一方向延伸的透射轴的格栅(120)和提供沿第二方向延伸的透射轴的偏振器(115),第一方向和第二方向基本上 垂直于彼此垂直,其中所述激发辐射(102)被极化,使得其基本上被所述至少一个格栅(120)和偏振器(115)中的一个所抑制,并且基本上不被所述o 该至少一个格栅(120)和偏振器(115)。