会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 54. 发明授权
    • Cathode for coating a substrate
    • 用于涂覆基材的阴极
    • US5482610A
    • 1996-01-09
    • US20361
    • 1993-02-22
    • Bernd WolfJuergen MuellerHans Neudert
    • Bernd WolfJuergen MuellerHans Neudert
    • C23C14/34H01J37/34
    • H01J37/3497C23C14/3407H01J37/3408H01J37/3455H01J37/3458
    • In a cathode system for coating a substrate (46), having a cathode which is connected to a direct-current and/or alternating-current source (high-frequency source) and is disposed in an evacuable coating chamber (2), and is electrically connected to a target (29) which is sputtered and whose sputtered particles deposit themselves on the substrate, a process gas is brought into the coating chamber. The cathode is formed from a substantially pot-like housing (3) whose solid bottom (39) is fixedly joined to the target (29) and whose open end facing away from the target (29) is sealingly held in an opening (49) in the outer wall (30) of the coating chamber such that the interior (49) of the housing (3) is exposed to atmospheric pressure, while the target (29) and the outer surface of the shell-like part of the housing (3) joined thereto are affected by the pressure prevailing in the coating chamber.
    • 在用于涂覆基板(46)的阴极系统中,具有连接到直流和/或交流电源(高频源)的阴极并设置在可抽真空的涂覆室(2)中,并且是 电连接到溅射的靶(29),并且其溅射的颗粒自身沉积在基板上,处理气体被引入涂覆室。 阴极由基本上为盆状的外壳(3)形成,其实体底部(39)固定地连接到靶(29),并且其开口端远离靶(29)被密封地保持在开口(49)中, 在涂覆室的外壁(30)中,使得壳体(3)的内部(49)暴露于大气压力的同时,靶(29)和壳体的壳状部分的外表面( 3)受涂层室压力的影响。
    • 58. 发明授权
    • Magnetron type sputtering cathode
    • 磁控溅射阴极
    • US4810346A
    • 1989-03-07
    • US111207
    • 1987-10-21
    • Bernd WolfPeter Wirz
    • Bernd WolfPeter Wirz
    • H01J37/34C23C14/34
    • H01J37/3405
    • Sputtering cathode (1) according to the magnetron principle, having a target (11) of the material to be sputtered, which consists of at least one piece. Behind the target (11) there is a magnet system with a plurality of endless magnet units (14, 15, 16) of alternately different polarity, one inside the other. An endless magnetic tunnel (20) of arcuately curved lines of force is thereby formed. Those poles of the magnet units (14, 15, 16) which are turned away from the target (11) are connected together through a magnet yoke (19) of soft magnetic material. To achieve an especially good target utilization, the geometry and the amount of the magnetic field forming a magnetic tunnel (20) are variable relative to the magnetic field strength of another magnetic field through an electromagnetic (17), the current for the electromagnet (17) being variable in frequency, amplitude and pulse shape.
    • 溅射阴极(1)根据磁控管原理,具有由至少一块构成的要溅射的材料的靶(11)。 在目标(11)的后方,存在具有交替不同极性的多个无限磁体单元(14,15,16)的磁体系统,一个在另一个内部。 由此形成弓形弯曲线的无尽磁通(20)。 离开靶(11)转动的磁体单元(14,15,16)的极通过软磁材料的磁轭(19)连接在一起。 为了实现特别好的目标利用,形成磁通道(20)的磁场的几何形状和量相对于通过电磁(17)的另一磁场的磁场强度是可变的,电磁体(17)的电流 )在频率,幅度和脉冲形状上是可变的。