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41. 发明授权

US09502212B2 Charged particle beam apparatus 有权
标题翻译：带电粒子束装置
公开(公告)号：US09502212B2
公开(公告)日：2016-11-22
申请号：US14760259
申请日：2014-01-22
申请人： Hitachi High-Technologies Corporation
发明人： Yuzuru Mizuhara , Miki Isawa , Minoru Yamazaki , Hitoshi Tamura , Hideyuki Kazumi
IPC分类号： H01J37/26 , H01J37/147 , H01J37/244 , H01J37/28
CPC分类号： H01J37/268 , H01J37/1472 , H01J37/244 , H01J37/265 , H01J37/266 , H01J37/28 , H01J37/3178 , H01J2237/24564 , H01J2237/28 , H01J2237/2809
摘要： An object of the present invention is to provide a method and an apparatus capable of measuring a potential of a sample surface by using a charged particle beam, or of detecting a compensation value of a variation in an apparatus condition which changes due to sample charging, by measuring a sample potential caused by irradiation with the charged particle beam. In order to achieve the object, a method and an apparatus are provided in which charged particle beams (2(a), 2(b)) emitted from a sample (23) are deflected by a charged particle deflector (33) in a state in which the sample (23) is irradiated with a charged particle beam (1), and information regarding a sample potential is detected by using a signal obtained at that time.
摘要翻译：本发明的目的是提供一种能够通过使用带电粒子束来测量样品表面的电位或检测由于样品充电而发生变化的装置状态的变化的补偿值的方法和装置，通过测量由带电粒子束的照射引起的样品电位。为了实现该目的，提供了一种方法和装置，其中从样品（23）发射的带电粒子束（2（a），2（b））由带电粒子偏转器（33）在某种状态下偏转其中样品（23）被带电粒子束（1）照射，并且通过使用当时获得的信号来检测关于样品电位的信息。

42. 发明授权

US09478389B2 Scanning electron microscope 有权
标题翻译：扫描电子显微镜
公开(公告)号：US09478389B2
公开(公告)日：2016-10-25
申请号：US14422374
申请日：2013-07-01
申请人： Hitachi High-Technologies Corporation
发明人： Tsunenori Nomaguchi , Toshihide Agemura
IPC分类号： H01J37/10 , H01J37/28 , H01J37/147 , H01J37/22 , H01J37/305 , H01J37/317 , H01J37/26 , H01J37/141 , H01J37/16 , H01J37/30
CPC分类号： H01J37/10 , H01J37/1413 , H01J37/1471 , H01J37/16 , H01J37/222 , H01J37/261 , H01J37/265 , H01J37/28 , H01J37/3005 , H01J37/305 , H01J37/3056 , H01J37/3178 , H01J2237/0245 , H01J2237/032 , H01J2237/12 , H01J2237/31745
摘要： The present invention provides a composite charged particle beam device which is provided with two or more charged particle beam columns and enables high-resolution observation while a sample is placed at the position of a cross point. The present invention has the following configuration. A composite charged particle beam device is provided with a plurality of charged particle beam columns (101a, 102a), and is characterized in that a sample (103) is disposed at the position of an intersection point (171) where the optical axes of the plurality of columns intersect, a component (408a, 408b) that forms the tip of an objective lens of the charged particle beam column (102a) is detachable, and by replacing the component (408a, 408b), the distance between the intersection point (171) and the tip of the charge particle beam column can be changed.
摘要翻译：本发明提供了一种复合带电粒子束装置，其具有两个或更多个带电粒子束柱，并且当将样品放置在交叉点的位置时能够进行高分辨率观察。本发明具有以下结构。复合带电粒子束装置设置有多个带电粒子束柱（101a，102a），其特征在于，样品（103）设置在交叉点（171）的位置，多个列相交，形成带电粒子束列（102a）的物镜的尖端的部件（408a，408b）是可拆卸的，并且通过更换部件（408a，408b），交点 171），并且可以改变电荷粒子束柱的尖端。

43. 发明授权

US09466463B1 Charged particle beam substrate inspection using both vector and raster scanning 有权
标题翻译：使用矢量和光栅扫描的带电粒子束基板检查
公开(公告)号：US09466463B1
公开(公告)日：2016-10-11
申请号：US14085768
申请日：2013-11-20
申请人： Mutibeam Corporation
发明人： David K. Lam , Kevin M. Monahan , Enden David Liu , Cong Tran , Theodore A. Prescop
IPC分类号： H01J49/00 , H01J37/28 , H01J37/317
CPC分类号： H01J37/292 , H01J37/20 , H01J37/222 , H01J37/265 , H01J37/28 , H01J37/3045 , H01J37/3177 , H01J2237/30494 , H01J2237/31761
摘要： The present application discloses methods, systems and devices for using charged particle beam tools to inspect and perform lithography on a substrate using a combination of vectoring to move a beam to features to be imaged, and raster scanning to obtain an image of the feature(s). The inventors have discovered that it is highly advantageous to use an extra step, a fast raster scan to image the substrate at a lower resolution, to determine which features receive priority for inspection; this extra step can reduce total inspection time, enhance inspection results, and improve beam alignment and manufacturing yield. Using multiple beam-producing columns, with multiple control computers local to the columns, provides various synergies. Preferably, miniature, non-magnetic, electrostatically-driven columns are used.
摘要翻译：本申请公开了使用带电粒子束工具来使用矢量化的组合来检测和执行光刻的方法，系统和装置，以将光束移动到要成像的特征，以及光栅扫描以获得特征的图像）。本发明人已经发现，使用额外的步骤是非常有利的，快速光栅扫描以较低的分辨率对衬底进行成像，以确定哪些特征接受检查的优先级; 这个额外的步骤可以减少总检查时间，增强检测结果，并提高光束对准和制造产量。使用多个光束产生色谱柱，多个控制计算机在本地列，提供了各种协同作用。优选地，使用微型，非磁性，静电驱动的列。

44. 发明申请

US20160189923A1 APPARATUS AND METHOD 审中-公开
标题翻译：装置和方法
公开(公告)号：US20160189923A1
公开(公告)日：2016-06-30
申请号：US14911570
申请日：2014-08-08
申请人： SWINBURNE UNIVERSITY OF TECHNOLOGY
发明人： Saulius JUODKAZIS , Gediminas GERVINSKAS , Gediminas SENIUTINAS
IPC分类号： H01J37/26 , H01J37/30 , H01J37/28
CPC分类号： H01J37/265 , B82Y40/00 , G01N23/225 , G01N2223/073 , G01N2223/351 , G01N2223/611 , H01J37/026 , H01J37/263 , H01J37/28 , H01J37/3002 , H01J2237/004 , H01J2237/0047 , H01J2237/28
摘要： An apparatus for imaging or fabrication using charged particles, the apparatus including: a charged particle source configured to generate a charged particle beam of ions or electrons; a sample holder mounted relative to the charged particle source to hold a sample in the charged particle beam for the imaging or fabrication; and an optical source system configured to generate an optical beam, wherein the optical source system is mounted relative to the sample holder to direct the optical beam onto the sample to modify an electric charge of the sample during the imaging or fabrication to improve spatial resolution of the imaging or fabrication.
摘要翻译：一种用于使用带电粒子进行成像或制造的装置，所述装置包括：被配置为产生离子或电子的带电粒子束的带电粒子源; 相对于带电粒子源安装的样品保持器，以将样品保持在带电粒子束中用于成像或制造; 以及被配置为产生光束的光源系统，其中所述光源系统相对于所述样品保持器安装以将所述光束引导到所述样品上，以在成像或制造期间修改所述样品的电荷，以改善所述样品的空间分辨率成像或制作。

45. 发明申请

US20160133437A1 CHARGED PARTICLE MICROSCOPE WITH BAROMETRIC PRESSURE CORRECTION 有权
标题翻译：带有压力校正的充电颗粒显微镜
公开(公告)号：US20160133437A1
公开(公告)日：2016-05-12
申请号：US14938689
申请日：2015-11-11
申请人： FEI Company
发明人： Marco Hugo Petrus Moers , Albert Visscher
IPC分类号： H01J37/26
CPC分类号： H01J37/265 , H01J37/02 , H01J2237/0216 , H01J2237/16
摘要： A method of mitigating the effects of environmental pressure variation while using a charged particle microscope is described. The charged particle microscope equipped with a barometric pressure sensor and an automatic controller configured to use the signal from the barometric sensor as an input to a control procedure to compensate for a relative positional error between the charged particle beam and the specimen holder.
摘要翻译：描述了在使用带电粒子显微镜时减轻环境压力变化的影响的方法。装有大气压力传感器和自动控制器的带电粒子显微镜被配置为使用来自气压传感器的信号作为控制过程的输入，以补偿带电粒子束和样品架之间的相对位置误差。

46. 发明授权

US09324178B2 Three-dimensional semiconductor image reconstruction apparatus and method 有权
标题翻译：三维半导体图像重建装置及方法
公开(公告)号：US09324178B2
公开(公告)日：2016-04-26
申请号：US14536313
申请日：2014-11-07
申请人： Taiwan Semiconductor Manufacturing Company, Ltd.
发明人： Wen-Hao Cheng , Chih-Chiang Tu , Chung-Min Fu , Ajay Nandoriya
IPC分类号： H01J37/28 , G06T15/10 , G01N23/203 , H01J37/26
CPC分类号： G06T15/10 , G01N23/203 , G06T2215/16 , H01J37/265 , H01J37/28 , H01J2237/24578 , H01J2237/2611 , H01J2237/2815 , H01J2237/2818
摘要： A system comprises an electron beam directed toward a three-dimensional object with one tilting angle and at least two azimuth angles, a detector configured to receive a plurality of scanning electron microscope (SEM) images from the three-dimensional object and a processor configured to calculate a height and a sidewall edge of the three-dimensional object.
摘要翻译：一种系统包括一个朝向一个倾斜角度和至少两个方位角的三维物体的电子束，被配置为从三维物体接收多个扫描电子显微镜（SEM）图像的检测器，以及被配置为计算三维物体的高度和侧壁边缘。

47. 发明授权

US09312098B2 Method of examining a sample in a charged-particle microscope 有权
标题翻译：在带电粒子显微镜中检查样品的方法
公开(公告)号：US09312098B2
公开(公告)日：2016-04-12
申请号：US14629387
申请日：2015-02-23
申请人： FEI Company
发明人： Ivan Lazic , Eric Gerardus Theodoor Bosch , Faysal Boughorbel , Bart Buijsse , Kasim Sader , Sorin Lazar
IPC分类号： H01J37/26 , H01J37/244 , H01J37/28
CPC分类号： H01J37/244 , H01J37/26 , H01J37/265 , H01J37/28 , H01J2237/2446 , H01J2237/24465 , H01J2237/2802
摘要： Examining a sample in a charged-particle microscope of a scanning transmission type includes: Providing a beam of charged particles that is directed from a source through an illuminator so as to irradiate the sample; Providing a detector for detecting a flux of charged particles traversing the sample; Causing said beam to scan across a surface of the sample, and recording an output of the detector as a function of scan position, resulting in accumulation of a charged-particle image of the sample, Embodying the detector to comprise a plurality of detection segments; Combining signals from different segments of the detector so as to produce a vector output from the detector at each scan position, and compiling this data to yield a vector field; and Mathematically processing said vector field by subjecting it to a two-dimensional integration operation, thereby producing an integrated vector field image.
摘要翻译：在扫描透射型的带电粒子显微镜中检查样品包括：提供从源通过照射器引导以便照射样品的带电粒子束; 提供检测器，用于检测穿过样品的带电粒子的通量; 使所述光束扫描穿过样品的表面，并记录检测器的输出作为扫描位置的函数，导致样品的带电粒子图像的累积，使检测器包含多个检测段; 组合来自检测器的不同段的信号，以便在每个扫描位置产生从检测器输出的矢量，并且编译该数据以产生矢量场; 并通过使其进行二维积分操作来数字处理所述矢量场，由此产生积分矢量场图像。

48. 发明授权

US09287082B2 Charged particle beam apparatus 有权
标题翻译：带电粒子束装置
公开(公告)号：US09287082B2
公开(公告)日：2016-03-15
申请号：US14616658
申请日：2015-02-07
申请人： Hitachi High-Technologies Corporation
发明人： Kenichi Morita , Sayaka Tanimoto , Makoto Sakakibara , Muneyuki Fukuda , Naomasa Suzuki , Kenji Obara
IPC分类号： H01J37/141 , H01J37/28 , H01J37/26 , H01J37/22
CPC分类号： H01J37/141 , H01J37/222 , H01J37/243 , H01J37/261 , H01J37/265 , H01J2237/04922 , H01J2237/221 , H01J2237/2801 , H01J2237/2806 , H01J2237/2809 , H01J2237/2817
摘要： A charged particle beam apparatus includes a charged particle beam source which irradiates a sample with a charged particle beam, an electromagnetic lens, a lens control electric source for controlling strength of a convergence effect of the electromagnetic lens; and a phase compensation circuit which is connected to the lens control electric source in parallel with the electromagnetic lens, and controls a lens current at the time of switching the strength of the convergence effect of the electromagnetic lens such that the lens current monotonically increases or monotonically decreases.
摘要翻译：带电粒子束装置包括用带电粒子束照射样本的带电粒子束源，电磁透镜，用于控制电磁透镜的会聚效应的强度的透镜控制电源; 以及相位补偿电路，其与电磁透镜并联连接到透镜控制电源，并且在切换电磁透镜的会聚效果的强度时控制透镜电流，使得透镜电流单调增加或单调减少

49. 发明申请

US20160005567A1 HIGH-SPEED MULTIFRAME DYNAMIC TRANSMISSION ELECTRON MICROSCOPE IMAGE ACQUISITION SYSTEM WITH ARBITRARY TIMING 有权
标题翻译：具有仲裁时间的高速多媒体动态传输电子显微镜图像采集系统
公开(公告)号：US20160005567A1
公开(公告)日：2016-01-07
申请号：US14851692
申请日：2015-09-11
申请人： Lawrence Livermore National Security, LLC
发明人： Bryan W. REED , William J. DEHOPE , Glenn HUETE , Thomas B. LAGRANGE , Richard M. SHUTTLESWORTH
IPC分类号： H01J37/075 , H01J37/26 , H01J37/147
CPC分类号： H01J37/075 , H01J37/1472 , H01J37/22 , H01J37/244 , H01J37/26 , H01J37/265 , H01J2237/0432 , H01J2237/06333 , H01J2237/15 , H01J2237/151 , H01J2237/24455 , H01J2237/2447 , H01J2237/2449 , H01J2237/24495
摘要： An electron microscope is disclosed which has a laser-driven photocathode and an arbitrary waveform generator (AWG) laser system (“laser”). The laser produces a train of temporally-shaped laser pulses of a predefined pulse duration and waveform, and directs the laser pulses to the laser-driven photocathode to produce a train of electron pulses. An image sensor is used along with a deflector subsystem. The deflector subsystem is arranged downstream of the target but upstream of the image sensor, and has two pairs of plates arranged perpendicular to one another. A control system controls the laser and a plurality of switching components synchronized with the laser, to independently control excitation of each one of the deflector plates. This allows each electron pulse to be directed to a different portion of the image sensor, as well as to be provided with an independently set duration and independently set inter-pulse spacings.
摘要翻译：公开了一种具有激光驱动光电阴极和任意波形发生器（AWG）激光系统（“激光”）的电子显微镜。激光器产生预定脉冲持续时间和波形的时间上形状的激光脉冲串，并将激光脉冲引导到激光驱动的光电阴极以产生一系列电子脉冲。图像传感器与偏转器子系统一起使用。偏转器子系统布置在目标的下游，但是在图像传感器的上游，并且具有彼此垂直布置的两对板。控制系统控制激光器和与激光器同步的多个切换部件，以独立地控制每个偏转板的激励。这允许每个电子脉冲被引导到图像传感器的不同部分，并且被提供有独立设置的持续时间并且独立设置脉冲间隔。

50. 发明授权

US09218940B1 Method and apparatus for slice and view sample imaging 有权
标题翻译：用于切片和查看样本成像的方法和装置
公开(公告)号：US09218940B1
公开(公告)日：2015-12-22
申请号：US14292606
申请日：2014-05-30
申请人： FEI Company
发明人： Valerie Brogden
IPC分类号： H01J37/305 , H01J37/26
CPC分类号： H01J37/3056 , G01N23/2208 , G01N23/2251 , G01N23/2255 , H01J37/26 , H01J37/265 , H01J37/3023 , H01J2237/2611 , H01J2237/2814 , H01J2237/31745 , H01J2237/31749
摘要： Methods, apparatuses, and systems for slice and view processing of samples with dual beam systems. The slice and view processing includes exposing a vertical wall of a trench formed in a sample surface; capturing a first image of the wall by interrogating the wall with an interrogating beam while the wall is at a first orientation relative to the beam; capturing a second image of the wall by interrogating the wall with the beam while the wall is at a second orientation relative to the beam, wherein first distances in the first image between a reference point and surface points on the wall are different than second distances in the second image between the reference point and the surface points; determining elevations of the surface points using the first distances and the second distances; and fitting a curve to topography of the wall using the elevations.
摘要翻译：用于双光束系统的样品的切片和视图处理的方法，设备和系统。切片和视图处理包括暴露在样品表面中形成的沟槽的垂直壁; 当所述壁相对于所述梁处于第一取向时，用询问梁询问所述壁，捕获所述壁的第一图像; 通过在所述壁相对于所述光束处于第二取向的情况下通过用所述光束询问所述壁来捕获所述壁的第二图像，其中所述第一图像中的参考点和所述壁上的表面点之间的第一距离不同于所述壁上的第二距离参考点和表面点之间的第二个图像; 使用所述第一距离和所述第二距离确定所述表面点的高度; 并使用高程将曲线拟合到墙的地形。

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