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1. 发明授权

US10403469B2 Method of performing tomographic imaging in a charged-particle microscope 有权
公开(公告)号：US10403469B2
公开(公告)日：2019-09-03
申请号：US15099302
申请日：2016-04-14
申请人： FEI Company
发明人： Ivan Lazic , Eric Gerardus Theodoor Bosch
IPC分类号： H01J37/22 , H01J37/28 , H01J37/20
摘要： A method is presented for sub-surface imaging of a specimen in a charged particle microscope. A series of images, with individual members In is collected, with a value of a beam parameter P varied for each image, thereby compiling a measurement set M={(In, Pn)}, with P being the focus position along the charged particle axis. The data for the images are recorded using signals from a segmented detector. The signals from segments combined and compiled to yield a vector field. Mathematical processing then deconvolves the vector field, resulting in depth-resolved imagery of the specimen.

2. 发明授权

US09959639B2 Method of ptychographic imaging 有权
公开(公告)号：US09959639B2
公开(公告)日：2018-05-01
申请号：US15186267
申请日：2016-06-17
申请人： FEI Company
发明人： Eric Gerardus Theodoor Bosch , Ivan Lazic
IPC分类号： G06T11/00 , G01N23/04 , G01T1/17 , G02B21/00 , H01J37/22
CPC分类号： G06T11/003 , G01N23/04 , G01N2223/419 , G01T1/17 , G02B21/008 , G06T11/00 , H01J37/222
摘要： A method and apparatus for ptychographic imaging is described. Typically a high number of pixels (after binning) is needed to obtain a high quality reconstruction of an object. By using calculation planes with more nodes (for example 512×512 nodes) than the number of pixels of the detector, a high quality reconstruction of an object can be made, even when using for example a 16 segment detector, or a 32×32 pixel detector. Although the reconstructed object shows less resolution (“sharpness”), all features are there.

3. 发明申请

US20140061464A1 Method of Investigating and Correcting Aberrations in a Charged-Particle Lens System 审中-公开
标题翻译：调查和纠正带电粒子透镜系统中的畸变的方法
公开(公告)号：US20140061464A1
公开(公告)日：2014-03-06
申请号：US14016997
申请日：2013-09-03
申请人： FEI Company
发明人： Ivan Lazic , Gijs van Duinen , Peter Christiaan Tiemeijer
IPC分类号： H01J37/153
CPC分类号： H01J37/153 , H01J2237/1534
摘要： A system of investigating aberrations in a charged-particle lens system, which lens system has an object space comprising an object plane and an image space comprising an image plane, includes: Selecting a fixed pivot point on said object plane; Directing a charged-particle beam through said pivot point, entrance pupil and lens system and onto said image plane, said beam having a relatively small cross-sectional area relative to the area of the entrance pupil; Changing the orientation of said beam through said pivot point, so as to trace out an entrance figure on said entrance pupil and a corresponding image figure on said image plane; Registering said image figure; Repeating this procedure at a series of different focus settings of the lens system, thus acquiring a set of registered image figures at different focus settings; Analyzing said set so as to derive lens aberrations therefrom.
摘要翻译：一种调查带电粒子透镜系统中的像差的系统，该透镜系统具有包括物平面的对象空间和包括图像平面的图像空间，包括：在所述物平面上选择固定的枢转点; 使带电粒子束通过所述枢转点，入射光瞳和透镜系统并引导到所述图像平面上，所述光束相对于入射光瞳的面积具有相对小的横截面积; 通过所述枢转点改变所述光束的方向，以便在所述图像平面上绘制所述入射光瞳上的入射图和对应的图像图; 注册图像图; 在镜头系统的一系列不同焦点设置下重复此过程，从而以不同的焦点设置获取一组注册的图像数字; 分析所述集合以从中导出透镜像差。

4. 发明申请

US20140007307A1 METHOD OF PREPARING AND IMAGING A LAMELLA IN A PARTICLE-OPTICAL APPARATUS 有权
标题翻译：在光学设备中制备和形成LAMELLA的方法
公开(公告)号：US20140007307A1
公开(公告)日：2014-01-02
申请号：US13919656
申请日：2013-06-17
申请人： FEI Company
发明人： Brian Roberts Routh, JR. , Peter Christiaan Tiemeijer , Bart Jozef Janssen , Thomas G. Miller , David Foord , Ivan Lazic
IPC分类号： G01Q10/04
CPC分类号： H01J37/28 , B82Y35/00 , G01Q10/04 , H01J37/26 , H01J37/295 , H01J37/3056 , H01J2237/2067 , H01J2237/208 , H01J2237/226 , H01J2237/2442 , H01J2237/24455 , H01J2237/2447 , H01J2237/2611 , H01J2237/2614 , H01J2237/31749
摘要： The invention relates to a method of preparing and imaging a sample using a particle-optical apparatus, equipped with an electron column and an ion beam column, a camera system, a manipulator.The method comprising comprises the steps of deriving a first ptychographic image of the sample from a first electron image, thinning the sample, and forming a second ptychographic image of the sample. In an embodiment of the invention the seed image used for the second image is the first ptychografic image. In another embodiment the second ptychographic image is the image of the layer removed during the thinning. In another embodiment the inner potential of the sample is determined and dopant concentrations are determined.
摘要翻译：本发明涉及使用装备有电子柱和离子束柱的粒子光学装置，相机系统，机械手来制备和成像样品的方法。该方法包括以下步骤：从第一电子图像导出样本的第一ptychographic图像，使样本变薄，并形成样本的第二ptychographic图像。在本发明的一个实施例中，用于第二图像的种子图像是第一个ptychografic图像。在另一个实施例中，第二ptychographic图像是在稀化期间去除的层的图像。在另一个实施方案中，确定样品的内部电位并确定掺杂剂浓度。

5. 发明授权

US10699872B2 Discriminative imaging technique in scanning transmission charged particle microscopy 有权
公开(公告)号：US10699872B2
公开(公告)日：2020-06-30
申请号：US16288305
申请日：2019-02-28
申请人： FEI Company
发明人： Eric Gerardus Bosch , Ivan Lazic , Robert Imlau
IPC分类号： H01J37/24 , H01J37/244 , H01J37/22 , H01J37/28 , G01N23/04
摘要： A method of imaging a specimen in a Scanning Transmission Charged Particle Microscope, comprising the following steps: Providing the specimen on a specimen holder; Providing a beam of charged particles that is directed from a source through an illuminator so as to irradiate the specimen; Providing a segmented detector for detecting a flux of charged particles traversing the specimen, which flux forms a beam footprint on said detector; Causing said beam to scan across a surface of the specimen, combining signals from different segments of the detector so as to produce a vector output from the detector at each scan position, and compiling this data to yield an imaging vector field; Mathematically processing said imaging vector field by subjecting it to a two-dimensional integration operation, thereby producing an integrated vector field image of the specimen, specifically comprising: Using a confined sub-region of said beam footprint to produce said vector output, and the attendant imaging vector field and integrated vector field image.

6. 发明授权

US10665419B2 Intelligent pre-scan in scanning transmission charged particle microscopy 有权
公开(公告)号：US10665419B2
公开(公告)日：2020-05-26
申请号：US16282021
申请日：2019-02-21
申请人： FEI Company
发明人： Erik Michiel Franken , Ivan Lazic , Bart Jozef Janssen
IPC分类号： H01J37/22 , H01J37/244 , H01J37/28 , H01J37/304 , H01J37/302
摘要： A method of imaging a specimen in a Scanning Transmission Charged Particle Microscope, comprising the following steps: Providing the specimen on a specimen holder; Providing a beam of charged particles that is directed from a source through an illuminator so as to irradiate the specimen; Providing a segmented detector for detecting a flux of charged particles traversing the specimen; Causing said beam to scan across a surface of the specimen, and combining signals from different segments of the detector so as to produce a vector output from the detector at each scan position, said vector output having components Dx, Dy along respective X, Y coordinate axes, specifically comprising: Performing a relatively coarse pre-scan of the specimen, along a pre-scan trajectory; At selected positions pi on said pre-scan trajectory, analyzing said components Dx, Dy and also a scalar intensity sensor value Ds; Using said analysis of Dx, Dy and Ds to classify a specimen composition at each position pi into one of a group of composition classes; For a selected composition class, performing a relatively fine scan at positions pi assigned to that class.

7. 发明授权

US09312098B2 Method of examining a sample in a charged-particle microscope 有权
标题翻译：在带电粒子显微镜中检查样品的方法
公开(公告)号：US09312098B2
公开(公告)日：2016-04-12
申请号：US14629387
申请日：2015-02-23
申请人： FEI Company
发明人： Ivan Lazic , Eric Gerardus Theodoor Bosch , Faysal Boughorbel , Bart Buijsse , Kasim Sader , Sorin Lazar
IPC分类号： H01J37/26 , H01J37/244 , H01J37/28
CPC分类号： H01J37/244 , H01J37/26 , H01J37/265 , H01J37/28 , H01J2237/2446 , H01J2237/24465 , H01J2237/2802
摘要： Examining a sample in a charged-particle microscope of a scanning transmission type includes: Providing a beam of charged particles that is directed from a source through an illuminator so as to irradiate the sample; Providing a detector for detecting a flux of charged particles traversing the sample; Causing said beam to scan across a surface of the sample, and recording an output of the detector as a function of scan position, resulting in accumulation of a charged-particle image of the sample, Embodying the detector to comprise a plurality of detection segments; Combining signals from different segments of the detector so as to produce a vector output from the detector at each scan position, and compiling this data to yield a vector field; and Mathematically processing said vector field by subjecting it to a two-dimensional integration operation, thereby producing an integrated vector field image.
摘要翻译：在扫描透射型的带电粒子显微镜中检查样品包括：提供从源通过照射器引导以便照射样品的带电粒子束; 提供检测器，用于检测穿过样品的带电粒子的通量; 使所述光束扫描穿过样品的表面，并记录检测器的输出作为扫描位置的函数，导致样品的带电粒子图像的累积，使检测器包含多个检测段; 组合来自检测器的不同段的信号，以便在每个扫描位置产生从检测器输出的矢量，并且编译该数据以产生矢量场; 并通过使其进行二维积分操作来数字处理所述矢量场，由此产生积分矢量场图像。

8. 发明授权

US10446366B1 Imaging technique in scanning transmission charged particle microscopy 有权
公开(公告)号：US10446366B1
公开(公告)日：2019-10-15
申请号：US15895076
申请日：2018-02-13
申请人： FEI Company
发明人： Ivan Lazic , Eric Gerardus Theodoor Bosch
IPC分类号： H01J37/26 , H01J37/28 , H01J37/22 , H01J37/20 , H01J37/244
摘要： An example method of imaging a specimen in a Scanning Transmission Charged Particle Microscope may include scanning a beam of charged particles across a specimen, detecting, by a segmented detector, a flux of charged particles traversing through the specimen at each scan location, for each scan location, combining detection data from different segments of the detector to produce a respective vector output, forming, based on the respective vector output data for each scan location, an imaging vector field, forming, based on the imaging vector field, an integrated vector field image, and reducing error in either the imaging vector field prior to forming the integrated vector field image or correcting the integrated vector field image, wherein the error is due to pointwise variations in beam incidence angle on the specimen.

9. 发明申请

US20160307729A1 METHOD OF PERFORMING TOMOGRAPHIC IMAGING IN A CHARGED-PARTICLE MICROSCOPE 审中-公开
标题翻译：在电荷显微镜中进行图像成像的方法
公开(公告)号：US20160307729A1
公开(公告)日：2016-10-20
申请号：US15099302
申请日：2016-04-14
申请人： FEI Company
发明人： Ivan Lazic , Eric Gerardus Theodoor Bosch
IPC分类号： H01J37/22 , H01J37/20 , H01J37/28
CPC分类号： H01J37/222 , H01J37/28 , H01J2237/2446 , H01J2237/24495 , H01J2237/2802 , H01J2237/2815
摘要： A method is presented for sub-surface imaging of a specimen in a charged particle microscope. A series of images, with individual members In is collected, with a value of a beam parameter P varied for each image, thereby compiling a measurement set M={(In, Pn)}, with P being the focus position along the charged particle axis. The data for the images are recorded using signals from a segmented detector. The signals from segments combined and compiled to yield a vector field. Mathematical processing then deconvolves the vector field, resulting in depth-resolved imagery of the specimen.
摘要翻译：提出了一种用于带电粒子显微镜中样品的亚表面成像的方法。收集具有各个成员In的一系列图像，其中对于每个图像改变波束参数P的值，从而编译测量集M = {（In，Pn）}，其中P是沿着带电粒子的聚焦位置轴。使用来自分段检测器的信号记录图像的数据。来自段的信号组合并编译以产生矢量场。数学处理然后解卷积矢量场，得到样品的深度分辨图像。

10. 发明申请

US20150243474A1 METHOD OF EXAMINING A SAMPLE IN A CHARGED-PARTICLE MICROSCOPE 有权
标题翻译：在充电颗粒显微镜中检测样品的方法
公开(公告)号：US20150243474A1
公开(公告)日：2015-08-27
申请号：US14629387
申请日：2015-02-23
申请人： FEI Company
发明人： Ivan Lazic , Eric Gerardus Theodoor Bosch , Faysal Boughorbel , Bart Buijsse , Kasim Sader , Sorin Lazar
IPC分类号： H01J37/244 , H01J37/26 , H01J37/28
CPC分类号： H01J37/244 , H01J37/26 , H01J37/265 , H01J37/28 , H01J2237/2446 , H01J2237/24465 , H01J2237/2802
摘要： Examining a sample in a charged-particle microscope of a scanning transmission type includes: Providing a beam of charged particles that is directed from a source through an illuminator so as to irradiate the sample; Providing a detector for detecting a flux of charged particles traversing the sample; Causing said beam to scan across a surface of the sample, and recording an output of the detector as a function of scan position, resulting in accumulation of a charged-particle image of the sample, Embodying the detector to comprise a plurality of detection segments; Combining signals from different segments of the detector so as to produce a vector output from the detector at each scan position, and compiling this data to yield a vector field; and Mathematically processing said vector field by subjecting it to a two-dimensional integration operation, thereby producing an integrated vector field image.
摘要翻译：在扫描透射型的带电粒子显微镜中检查样品包括：提供从源通过照射器引导以便照射样品的带电粒子束; 提供检测器，用于检测穿过样品的带电粒子的通量; 使所述光束扫描穿过样品的表面，并记录检测器的输出作为扫描位置的函数，导致样品的带电粒子图像的累积，使检测器包含多个检测段; 组合来自检测器的不同段的信号，以便在每个扫描位置产生从检测器输出的矢量，并且编译该数据以产生矢量场; 并通过使其进行二维积分操作来数字处理所述矢量场，由此产生积分矢量场图像。

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