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41. 发明授权

US4551625A Spectrometer objective for particle beam measurement technique 失效
标题翻译：粒子束测量技术的光谱仪物镜
公开(公告)号：US4551625A
公开(公告)日：1985-11-05
申请号：US513605
申请日：1983-07-14
申请人： Burkhard Lischke , Erich Plies
发明人： Burkhard Lischke , Erich Plies
IPC分类号： G01N23/22 , G01R19/155 , G01R31/302 , H01J37/05 , H01J37/10 , H01J37/244 , H01J37/26 , H01J37/28 , H01J49/48
CPC分类号： H01J37/244 , H01J37/05 , H01J37/10 , H01J37/266 , H01J49/488 , H01J2237/2443
摘要： An arrangement for particle beam measurement utilizes, an objective for the imaging of primary probe particles on a specimen and a spectrometer for the detection of secondary particles. The arrangement also utilizes the superposition of the electric field of the spectrometer with the electric field of the objective lens to render possible an effective increase of the probe current and/or an improved potential resolution. A portion of the field of the objective is provided for the focusing of the secondary particles onto an electrode for determining energy selection.
摘要翻译：用于粒子束测量的布置利用了用于在样本上成像初级探针颗粒的目标和用于检测次级颗粒的光谱仪。该装置还利用光谱仪的电场与物镜的电场的叠加使得探针电流的有效增加和/或改进的电位分辨率成为可能。目标场的一部分用于将二次粒子聚焦到用于确定能量选择的电极上。

42. 发明申请

US20190115186A1 Light Guide, Detector Having Light Guide, and Charged Particle Beam Device 审中-公开
公开(公告)号：US20190115186A1
公开(公告)日：2019-04-18
申请号：US16082745
申请日：2017-02-03
申请人： Hitachi High-Technologies Corporation
发明人： Yoshifumi SEKIGUCHI , Shin IMAMURA , Hajime KAWANO , Shahedul HOQUE
IPC分类号： H01J37/244 , H01J37/28
CPC分类号： H01J37/244 , H01J37/28 , H01J2237/2443 , H01J2237/2445
摘要： The present invention provides a light guide capable of guiding light generated by a scintillator at high efficiency to a photoreceiving element, a detector, and a charged particle beam device. For attaining the purpose, the present invention proposes a light guide that guides light generated by a scintillator to a photoreceiving element, provided with a scintillator containment portion formed of a first surface facing a surface opposite to a charged particle incident surface of the scintillator and a second surface facing a surface different from the surface opposite to the charged particle incident surface of the scintillator, and a tilted surface reflecting light incident from the second surface to the inside of the light guide.

43. 发明申请

US20180130634A1 Electron Microscope and Image Acquisition Method 审中-公开
公开(公告)号：US20180130634A1
公开(公告)日：2018-05-10
申请号：US15620144
申请日：2017-06-12
申请人： JEOL Ltd.
发明人： Yukihito Kondo , Ryusuke Sagawa
IPC分类号： H01J37/22 , H01J37/147 , H01J37/28 , H01J37/09 , H01J37/04
CPC分类号： H01J37/22 , H01J37/045 , H01J37/09 , H01J37/1474 , H01J37/244 , H01J37/28 , H01J2237/024 , H01J2237/0435 , H01J2237/0453 , H01J2237/2443 , H01J2237/2446 , H01J2237/24475 , H01J2237/2449 , H01J2237/28 , H01J2237/2802 , H01J2237/2803
摘要： There is provided an electron microscope capable of recording images in a shorter time. The electron microscope (100) includes: an illumination system (4) for illuminating a sample (S) with an electron beam; an imaging system (6) for focusing electrons transmitted through the sample (S); an electron deflector (24) for deflecting the electrons transmitted through the sample (S); an imager (28) having a photosensitive surface (29) for detecting the electrons transmitted through the sample (S), the imager (28) being operative to record focused images formed by the electrons transmitted through the sample (S); and a controller (30) for controlling the electron deflector (24) such that an active electron incident region (2) of the photosensitive surface (29) currently hit by the beam is varied in response to variations in illumination conditions of the illumination system (4).

44. 发明授权

US09696435B2 Hybrid energy conversion and processing detector 有权
公开(公告)号：US09696435B2
公开(公告)日：2017-07-04
申请号：US14688081
申请日：2015-04-16
申请人： Gatan, Inc.
发明人： Alexander Jozef Gubbens , Paul Mooney , Matthew Lent
IPC分类号： G01T1/20 , H01J37/244
CPC分类号： G01T1/2018 , H01J37/244 , H01J2237/2441 , H01J2237/2443 , H01J2237/2446 , H01J2237/24485
摘要： There is disclosed a hybrid arrangement of more than one electron energy conversion mechanism in a detector arranged physically such that the electron image can be acquired from both energy converters in such a manner that selected high-illumination parts of the image can be imaged with an indirectly coupled scintillator detector and the remainder of the image acquired with the high-sensitivity/direct electron portion of the detector without readjustments in the beam position or mechanical positioning of the detector parts.Further, a mechanism to allow dynamically switchable or simultaneous linear and counted signal processing from each pixel of the image so that high-illumination areas can be acquired linearly without the severe dose rate limitation of counting and low-illumination regions can be acquired with counting, the switchover point determined by the dose rate at which signal quality breaks even between linear and counting modes.

45. 发明申请

US20170133198A1 Apparatus and method for inspecting a sample using a plurality of charged particle beams 审中-公开
公开(公告)号：US20170133198A1
公开(公告)日：2017-05-11
申请号：US15309748
申请日：2015-04-23
申请人： Technische Universiteit Delft
发明人： Pieter KRUIT , Aernout Christiaan ZONNEVYLLE , Yan REN
IPC分类号： H01J37/28 , H01J37/22 , H01J37/244 , H01J37/141 , H01J37/20
CPC分类号： H01J37/244 , H01J37/141 , H01J37/20 , H01J37/222 , H01J37/224 , H01J37/28 , H01J2237/2443 , H01J2237/24455 , H01J2237/24495 , H01J2237/2802 , H01J2237/2808
摘要： An apparatus for inspecting a sample includes a sample holder for holding the sample; a multi beam charged particle generator for generating an array of primary charged particle beams; an electro-magnetic lens system for directing the array of primary charged particle beams into an array of separate focused primary charged particle beams on the sample; a multi-pixel photon detector arranged for detecting photons created by the focused primary charged particle beams when the primary charged particle beams impinge on the sample or after transmission of said primary charged particle beams through the sample; and an optical assembly for conveying photons created by at least two adjacent focused primary charged particle beams of the array of separate focused primary charged particle beams to distinct and/or separate pixels or to distinct and/or separate groups of pixels of the multi-pixel photon detector.

46. 发明授权

US09341585B2 X-ray detector including integrated electron detector 有权
标题翻译： X射线检测器包括集成电子检测器
公开(公告)号：US09341585B2
公开(公告)日：2016-05-17
申请号：US14053714
申请日：2013-10-15
申请人： PULSETOR, LLC
发明人： Nicholas C. Barbi , Richard B. Mott
IPC分类号： G01T1/20 , H01J37/28 , G01N23/225 , H01J37/244
CPC分类号： G01N23/2257 , G01T1/2018 , H01J37/244 , H01J37/28 , H01J2237/24415 , H01J2237/2443
摘要： An X-ray detector includes a housing and an X-ray sensing device provided within the housing along the axis of the housing, wherein the housing is structured to be coupled to the electron column or sample chamber of a charged particle beam device. The X-ray detector also includes an electron detector structured to detect a plurality of electrons ejected from a sample in response to an electron beam impinging on the sample, the electron detector being coupled to the housing on or near the axis such that a first line of sight to the electron detector from a point at which the electron beam impinges on the sample is similar to a second line of sight to the X-ray sensing device from the point at which the electron beam impinges on the sample such that X-ray and Backscattered electron images will show similar parallax and shadowing effects.
摘要翻译： X射线检测器包括壳体和沿着壳体的轴线设置在壳体内的X射线感测装置，其中壳体构造成耦合到带电粒子束装置的电子柱或样品室。 X射线检测器还包括电子检测器，其被构造为响应于照射在样品上的电子束来检测从样品喷出的多个电子，电子检测器在轴上或附近耦合到壳体，使得第一线从电子束撞击样品的点到电子检测器的视线类似于从电子束照射在样品上的点到X射线感测装置的第二视线，使得X射线背散射电子图像将显示相似的视差和阴影效应。

47. 发明申请

US20160126058A1 Charged-Particle-Beam Device and Specimen Observation Method 有权
标题翻译：带电粒子束装置和样品观察方法
公开(公告)号：US20160126058A1
公开(公告)日：2016-05-05
申请号：US14891494
申请日：2014-03-12
申请人： HITACHI HIGH-TECHNOLOGIES CORPORATION
发明人： Yusuke OMINAMI , Taku SAKAZUME , Sukehiro ITO
IPC分类号： H01J37/22 , H01J37/26 , H01J37/20 , H01J37/10
CPC分类号： H01J37/22 , G01N23/046 , G01N2223/3307 , G01N2223/418 , H01J37/10 , H01J37/20 , H01J37/222 , H01J37/244 , H01J37/26 , H01J37/261 , H01J37/28 , H01J2237/047 , H01J2237/10 , H01J2237/221 , H01J2237/226 , H01J2237/2443 , H01J2237/2445 , H01J2237/24578 , H01J2237/2611 , H01J2237/2802
摘要： An electron microscope has a large depth of focus in comparison with an optical microscope. Thus, information is superimposed on one image in the direction of depth. Therefore, it is necessary to accurately specify the three-dimensional position and density of a structure in a specimen so as to observe the three-dimensional structure of the interior of the specimen by using the electron microscope. Furthermore, a specimen that is observed with the optical microscope on a slide glass is not put into a TEM device of the related art. Thus, performing three-dimensional internal structure observation with the electron microscope on a location that is observed with the optical microscope requires very cumbersome preparation of the specimen. By controlling a vector parameter that defines the interrelationship between a primary charged particle beam and the specimen and by irradiation with the primary charged particle beam with a plurality of different vector parameters, images of transmitted charged particles of the specimen that correspond to each of the vector parameters are obtained. Irradiation with the primary charged particle beam is performed on the specimen that is arranged either directly or through a predetermined member on a detector which detects charged particles transmitted through or scattered by the interior of the specimen.
摘要翻译：与光学显微镜相比，电子显微镜具有较大的聚焦深度。因此，信息在深度方向上叠加在一个图像上。因此，必须准确地确定试样中的结构的三维位置和密度，以便通过电子显微镜观察试样内部的三维结构。此外，用幻灯片玻璃上的光学显微镜观察的样品没有放入现有技术的TEM器件中。因此，在用光学显微镜观察的位置上用电子显微镜进行三维内部结构观察需要非常繁琐的样品制备。通过控制限定初级带电粒子束和样本之间的相互关系的矢量参数以及通过用多个不同矢量参数照射初级带电粒子束的样本的透射带电粒子对应于每个矢量的图像获得参数。对于直接或通过检测器上的预定部件布置的试样进行照射，该检测器检测通过样本内部传播或散射的带电粒子。

48. 发明申请

US20160011110A1 System for Electron Beam Detection 有权
标题翻译：电子束检测系统
公开(公告)号：US20160011110A1
公开(公告)日：2016-01-14
申请号：US14686308
申请日：2015-04-14
申请人： KLA-Tencor Corporation
发明人： Shinichi Kojima , Hamada Wahba , Michael R. Gluszczak , Joseph A. DiRegolo
IPC分类号： G01N21/64 , H01J37/22 , H01J37/244
CPC分类号： G01N21/64 , H01J37/226 , H01J37/244 , H01J2237/043 , H01J2237/2443 , H01J2237/2446 , H01J2237/24578
摘要： An electron beam detection apparatus includes a first aperture element including a first set of apertures. The apparatus includes a second aperture element including a second set of apertures. The second set of apertures is arranged in a pattern corresponding with the pattern of the first plurality of apertures. The detection apparatus includes an electron-photon conversion element configured to receive electrons of the electron beam transmitted through the first and second aperture elements. The electron-photon conversion element is configured to generate photons in response to the received electrons. The detection apparatus includes an optical assembly including one or more optical elements. The detection apparatus includes a detector assembly. The optical elements of the optical assembly are configured to direct the generated photons from the electron-photon conversion system to the detector assembly.
摘要翻译：电子束检测装置包括包括第一组孔的第一孔元件。该装置包括第二孔元件，其包括第二组孔。第二组孔被布置成与第一多个孔的图案对应的图案。检测装置包括电子 - 光子转换元件，其被配置为接收通过第一和第二孔元件传输的电子束的电子。电子 - 光子转换元件被配置为响应于所接收的电子产生光子。检测装置包括包括一个或多个光学元件的光学组件。检测装置包括检测器组件。光学组件的光学元件被配置为将所产生的光子从电子 - 光子转换系统引导到检测器组件。

49. 发明申请

US20150153223A1 LIGHT SIGNAL DETECTING CIRCUIT, LIGHT AMOUNT DETECTING DEVICE, AND CHARGED PARTICLE BEAM DEVICE 有权
标题翻译：光信号检测电路，光量检测装置和充电颗粒光束装置
公开(公告)号：US20150153223A1
公开(公告)日：2015-06-04
申请号：US14407768
申请日：2013-06-14
申请人： HITACHI HIGH-TECHNOLOGIES CORPORATION
发明人： Fujio Onishi , Hiroshi Touda , Tetsuji Osawa , Yuki Sugawara
IPC分类号： G01J1/44 , H03F3/08
CPC分类号： G01J1/44 , G01J1/42 , G01N21/64 , G01N23/2251 , H01J37/244 , H01J2237/2443 , H01J2237/2445 , H01J2237/24495 , H03F3/08 , H03F2201/3215
摘要： A light signal detecting circuit, a light amount detecting device, and a charged-particle-beam device capable of discriminating the signal component of a small amount of light from the signal component of noise due to dark current. A data-processing-unit detects pulses from digital voltage signal corresponding to an amount of light obtained by an amplifier and an A-D converter, calculates a crest value as the maximum voltage value of each pulse, and stores the occurrence frequency of each calculated crest value in a frequency occurrence storage area. A data analysis unit compares a previously-determined frequency lower limit with the occurrence frequency of each crest value in ascending order of the crest values and sets a pulse determination threshold to the first crest value whose occurrence frequency is equal to or smaller than the frequency lower limit. The threshold processing unit thus outputs the digital signal higher than the pulse determination threshold.
摘要翻译：光信号检测电路，光量检测装置和带电粒子束装置，其能够鉴别由暗电流引起的噪声的信号分量的少量光的信号分量。数据处理单元检测与由放大器和AD转换器获得的光量相对应的数字电压信号的脉冲，计算峰值作为每个脉冲的最大电压值，并存储每个计算的峰值的出现频率在频率发生存储区域中。数据分析单元将先前确定的频率下限与峰值的升序的出现频率进行比较，并将脉冲判定阈值设定为出现频率等于或小于频率下降的第一波峰值限制。因此，阈值处理单元输出高于脉冲判定阈值的数字信号。

50. 发明授权

US09040909B2 System and method for simultaneous detection of secondary electrons and light in a charged particle beam system 有权
标题翻译：在带电粒子束系统中同时检测二次电子和光的系统和方法
公开(公告)号：US09040909B2
公开(公告)日：2015-05-26
申请号：US13681746
申请日：2012-11-20
申请人： FEI Company
发明人： N. William Parker , Mark W. Utlaut
IPC分类号： G01N23/00 , G01N23/225 , G01N21/64 , H01J37/22 , H01J37/28
CPC分类号： G01N21/6428 , G01N21/6458 , G01N21/6486 , G01N23/225 , H01J37/228 , H01J37/28 , H01J37/285 , H01J2237/206 , H01J2237/2443 , H01J2237/24455 , H01J2237/2448 , H01J2237/2803 , H01J2237/2857
摘要： A method and system for the imaging and localization of fluorescent markers such as fluorescent proteins or quantum dots within biological samples is disclosed. The use of recombinant genetics technology to insert “reporter” genes into many species is well established. In particular, green fluorescent proteins (GFPs) and their genetically-modified variants ranging from blue to yellow, are easily spliced into many genomes at the sites of genes of interest (GoIs), where the GFPs are expressed with no apparent effect on the functioning of the proteins of interest (PoIs) coded for by the GoIs. One goal of biologists is more precise localization of PoIs within cells. The invention is a method and system for enabling more rapid and precise PoI localization using charged particle beam-induced damage to GFPs. Multiple embodiments of systems for implementing the method are presented, along with an image processing method relatively immune to high statistical noise levels.
摘要翻译：公开了用于生物样品中荧光标记如荧光蛋白或量子点的成像和定位的方法和系统。使用重组遗传学技术将“记者”基因插入许多物种已经很成熟。特别地，绿色荧光蛋白（GFP）及其从蓝色到黄色的遗传修饰的变体易于在感兴趣的基因（GoI）的位点处接合到许多基因组中，其中GFP表达对功能没有明显的影响的由GoI编码的感兴趣的蛋白质（PoI）。生物学家的一个目标是更精确地定位细胞内的PoI。本发明是一种方法和系统，用于使得能够使用带电粒子束对GFP的损伤进行更快速和精确的PoI定位。提出了用于实现该方法的系统的多个实施例，以及相对不受高统计噪声水平影响的图像处理方法。

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